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91.发明授权Method of manufacturing discrete track recording medium and discrete track recording medium 失效离散轨道记录介质和离散轨道记录介质的制造方法公开(公告)号：US07927467B2
公开(公告)日：2011-04-19
申请号：US12400446
申请日：2009-03-09
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a discrete track recording medium includes forming protruded magnetic patterns on a substrate, and repeating processes of depositing a nonmagnetic material so as to be filled in recesses between the magnetic patterns and etching back the nonmagnetic material two or more times with rotating the substrate in a plane thereof by an angle less than one revolution.
摘要翻译： 根据一个实施例，制造离散轨道记录介质的方法包括在基板上形成突出的磁图案，并且重复沉积非磁性材料以便填充在磁性图案之间的凹部中并且蚀刻非磁性材料2或 更多次，使基板在其平面内以小于一转的角度旋转。
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公开(公告)号：US07898768B2
公开(公告)日：2011-03-01
申请号：US11724328
申请日：2007-03-15
IPC分类号： G11B5/82
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/59655 , G11B5/743 , G11B5/855
摘要： A patterned media has a substrate, and a magnetic recording layer on the substrate including protruded magnetic patterns and a nonmagnetic material filled in between the protruded magnetic patterns. In the patterned media, a depth Db and a depth Da, which are defined that Db is a depth from a surface of the magnetic patterns to a surface of the nonmagnetic material filled in a first central part between the magnetic patterns adjacent to each other in a cross-track direction or a down-track direction, and Da is a depth from a surface of the magnetic patterns to a surface of the nonmagnetic material filled in a second central part in a portion surrounded by the magnetic patterns, have a relationship that the depth Da is greater than the depth Db.
摘要翻译： 图案化介质具有基板，并且在基板上的磁记录层包括突出的磁图案和填充在突出磁图案之间的非磁性材料。 在图案化介质中，深度Db和深度Da被定义为Db是从磁图案的表面到填充在彼此相邻的磁图案之间的第一中心部分的非磁性材料的表面的深度 交叉轨道方向或向下轨道方向，并且Da是从磁图案的表面到填充在由磁图案包围的部分中的第二中心部分中的非磁性材料的表面的深度，具有如下关系： 深度Da大于深度Db。
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93.发明申请公开(公告)号：US20110000880A1
公开(公告)日：2011-01-06
申请号：US12882113
申请日：2010-09-14
IPC分类号： B29C59/02
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses, and partially etching the magnetic recording layer in areas not covered with patterns of the resist used as masks by ion beam etching using a mixed gas of He and N2 as well as modifying a remainder of the magnetic recording layer to leave behind a nonmagnetic layer having a reduced thickness.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在磁记录层上形成抗蚀剂，将压模压印到抗蚀剂上以转印突起和凹陷的图案，以及在不覆盖图案的区域中部分蚀刻磁记录层 通过使用He和N2的混合气体的离子束蚀刻用作掩模的抗蚀剂以及修改磁记录层的剩余部分留下厚度减小的非磁性层。
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公开(公告)号：US20100018947A1
公开(公告)日：2010-01-28
申请号：US12509261
申请日：2009-07-24
IPC分类号： G11B5/84
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a magnetic recording layer, an oxidation inhibiting layer, a hard mask layer includes carbon on a substrate, coating the hard mask layer with a resist, transferring patterns of protrusions and recesses to the resist by imprinting to form resist patterns, sequentially performing etching of the hard mask layer using the resist patterns as masks, etching of the oxidation inhibiting layer, and etching and/or magnetism deactivation of the magnetic recording layer to form patterns of the magnetic recording layer, and sequentially performing stripping of the resist patterns, stripping of the hard mask layer and stripping of the oxidation inhibiting layer, in which ion beam etching is used for stripping the oxidation inhibiting layer.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括形成磁记录层，氧化抑制层，硬掩模层包括在基板上的碳，用抗蚀剂涂覆硬掩模层，转移凸起和凹槽的图案 通过压印形成抗蚀剂以形成抗蚀剂图案，使用抗蚀剂图案作为掩模，蚀刻氧化抑制层顺序地进行硬掩模层的蚀刻，以及磁记录层的蚀刻和/或磁性失活以形成磁性图案 记录层，顺序地进行剥离抗蚀剂图案，汽提硬掩模层和剥离氧化抑制层，其中使用离子束蚀刻来剥离氧化抑制层。
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公开(公告)号：US20100018946A1
公开(公告)日：2010-01-28
申请号：US12508269
申请日：2009-07-23
IPC分类号： G11B3/70
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a hard mask and a resist on a magnetic recording layer, imprinting a stamper on the resist to transfer patterns of protrusions and recesses, removing resist residues left in the recesses of the patterned resist, etching the hard mask using the patterned resist as a mask to transfer the patterns of protrusions and recesses, stripping the resist, and performing ion beam etching to remove the remaining hard mask and to modify a surface of the magnetic recording layer uncovered with the remaining hard mask.
摘要翻译： 根据一个实施例，一种制造磁记录介质的方法包括在磁记录层上形成硬掩模和抗蚀剂，在抗蚀剂上印刷压模以转移突起和凹槽的图案，去除留在凹槽中的抗蚀剂残留物 使用图案化的抗蚀剂作为掩模蚀刻硬掩模，以转移突起和凹陷的图案，剥离抗蚀剂，并执行离子束蚀刻以去除剩余的硬掩模并修改未覆盖的磁记录层的表面 剩下的硬面罩。
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公开(公告)号：US20090232928A1
公开(公告)日：2009-09-17
申请号：US12473071
申请日：2009-05-27
CPC分类号： G11B7/261 , B29C33/424 , B29C2033/426 , B82Y10/00 , B82Y40/00 , C25D1/10 , G03F7/0002 , G11B7/263 , H01F41/34
摘要： According to one embodiment, a method of manufacturing a stamper includes forming a conductive layer on a surface of a master having patterns of protrusions and recesses, forming an electroforming layer on the conductive layer, separating the electroforming layer and the conductive layer from the master to form a stamper to which the patterns of protrusions and recesses of the master are transferred, removing a resist left on the surface of the stamper, and etching the surface of the stamper with an acidic solution having a pH value of less than 3.
摘要翻译： 根据一个实施例，制造压模的方法包括在具有突起和凹槽图案的母版表面上形成导电层，在导电层上形成电铸层，将电铸层和导电层与母模分离成 形成压模，母模的突起和凹部的图案被转印到其上，去除压模表面上的抗蚀剂，并用pH值小于3的酸性溶液蚀刻压模的表面。
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97.发明授权公开(公告)号：US07572528B2
公开(公告)日：2009-08-11
申请号：US11135258
申请日：2005-05-24
CPC分类号： B82Y10/00 , G11B5/012 , G11B5/72 , G11B5/743 , G11B5/82 , G11B5/855 , G11B2005/0029 , Y10T428/1164
摘要： A magnetic recording medium is obtained by easily patterning a magnetic recording layer without deteriorating its electromagnetic conversion characteristics, by forming a silicon-based protective film between the magnetic recording layer and a photoresist, and performing dry etching and oxygen plasma processing.
摘要翻译： 通过在磁记录层和光致抗蚀剂之间形成硅基保护膜，进行干法蚀刻和氧等离子体处理，可以通过在不损害其电磁转换特性的情况下容易地构图磁记录层而获得磁记录介质。
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98.发明申请公开(公告)号：US20070211592A1
公开(公告)日：2007-09-13
申请号：US11691774
申请日：2007-03-27
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/746 , G11B5/865 , G11B2005/0002 , Y10S977/887 , Y10T29/49069
摘要： An imprint stamper for manufacturing a recording medium includes a first transfer region which corresponds to a servo region of a recording medium using a sector servo system and has a pattern with a plurality of quadrilateral recess or protrusion portions formed in a surface thereof, and a second transfer region which corresponds to a data region of the recording medium and has a pattern with a plurality of dots of recess or protrusion portions arrayed in a form of a hexagonal lattice in a surface thereof.
摘要翻译： 用于制造记录介质的压印模具包括对应于使用扇区伺服系统的记录介质的伺服区域的第一传送区域，并且具有形成在其表面中的多个四边形凹部或突出部分的图案，第二传送区域 转印区域对应于记录介质的数据区域，并且具有在其表面上排列成六角形格子形状的多个凹点或突起部分的图案。
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公开(公告)号：US20060280861A1
公开(公告)日：2006-12-14
申请号：US11406502
申请日：2006-04-19
CPC分类号： G11B5/855
摘要： A method for producing a magnetic recording medium, includes: forming an SOG film on a surface of a magnetic layer; forming a concavo-convex structure in the SOG film comprising one selected from a group consisting of silica glass, alkylsiloxane polymer, methyl silsesquioxane polymer, hydrogen silsesquioxane polymer and hydro alkylsiloxane polymer; etching the SOG film to expose the surface of the magnetic layer; etching the exposed surface of the magnetic layer by ion milling; and forming a filling layer on the surface of the magnetic layer while leaving a portion of the magnetic layer having been subjected to the ion milling.
摘要翻译： 一种制造磁记录介质的方法，包括：在磁性层的表面上形成SOG膜; 在SOG膜中形成凹凸结构，其包含选自二氧化硅玻璃，烷基硅氧烷聚合物，甲基倍半硅氧烷聚合物，氢倍半硅氧烷聚合物和氢烷基硅氧烷聚合物的一种; 蚀刻SOG膜以暴露磁性层的表面; 通过离子研磨蚀刻磁性层的暴露表面; 并且在磁性层的表面上形成填充层，同时留下已经进行离子铣削的磁性层的一部分。
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100.发明授权Method for manufacturing magnetic recording medium and magnetic recording medium 失效磁记录介质和磁记录介质的制造方法公开(公告)号：US08475949B2
公开(公告)日：2013-07-02
申请号：US13236726
申请日：2011-09-20
IPC分类号： G11B5/66
摘要： A magnetic recording medium is presented that includes protruded magnetic patterns formed on a substrate, and a nonmagnetic material filled in recesses between the magnetic patterns in which an oxygen concentration thereof is higher at a surface side than at a substrate side. The nonmagnetic material is at least one selected from the group consisting of Si, SiC, SiC—C, SiOC, SiON, Si3N4, Al, AlxOy, Ti and TiOx.
摘要翻译： 提出了一种磁记录介质，其包括形成在基板上的突出的磁图案，以及填充在表面侧的氧浓度高于基板侧的磁性图案之间的凹部中的非磁性材料。 非磁性材料是选自Si，SiC，SiC-C，SiOC，SiON，Si 3 N 4，Al，Al x O y，Ti和TiO x中的至少一种。
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