摘要:
An adhesive tape joining apparatus of this invention adopts an inverted “T”-shaped layout configured with a rectangular section that extends laterally when being viewed in a plane and a protrusion section that is coupled on a center of the rectangular section. An adhesive tape joining part is disposed in the protrusion section and joins an adhesive tape to a ring frame and a wafer. A transport mechanism is disposed in the rectangular section and transports the wafer, the ring frame, and the wafer held by the ring frame. An electronic substrate processing unit is disposed in at least one of two regions adjoining to the rectangular section with the protrusion section being interposed therebetween, and is coupled to the transport mechanism.
摘要:
A joint detector detects a joint in an adhesive tape supplied from a tape supply section, and a computing unit determines a suitable cutting position of the adhesive tape for removing the joint in accordance with the detected results. A controller controls each mechanism to operate so as to satisfy the determined results by the computing unit. Thereafter, the adhesive tape including the joint is cut and removed.
摘要:
An adhesive tape is supplied to a back face side of a ring frame, joined to the ring frame with a joining roller, and cut by pivoting a cutter blade along the ring frame. Subsequently, an inspection ring of an inspecting mechanism perform suction on the adhesive tape while contacting the adhesive tape adjacent an inner periphery of the ring frame. Separation of the adhesive tape from the ring frame is determined based on variations of the suction pressure. When the separation of the adhesive tape from the ring frame is detected, the adhesive tape is joined again with the joining roller provided in the cutter mechanism.
摘要:
During relative and horizontal movement of a mount frame, in which a semiconductor wafer with a protective tape is supported on a ring frame through a supporting adhesive tape, and a joining member, a position of an end edge of the protective tape is detected in a non-contact manner. Based on the detection result, a joining member is stopped in the position of the end edge of the protective tape and is moved close to the semiconductor wafer to press and bring a separation tape against and into contact with an end of the protective tape. In this state, the mount frame and the joining member are relatively and horizontally moved to join the separation tape onto the protective tape. Then, the mount frame and the joining member are relatively and horizontally moved to separate the separation tape together with the protective tape from a surface of the semiconductor wafer.
摘要:
A supporting substrate is laminated on a wafer in such a manner that the supporting substrate locked in peripheral edges with a plurality of locking claws is disposed in proximity to and facing to an adhering surface of a double-sided adhesive sheet on the workpiece, the supporting substrate is pressed by a pressing member made of an approximately hemispherical elastic body from an approximate center of a non-adhering surface of this supporting substrate, the supporting substrate is laminated by elastically deforming this pressing member on the wafer while making the supporting substrate surface contact in a flat condition.
摘要:
A peripheral edge of a protective tape joined to a front face of a semiconductor wafer is snagged on a needle having a sharp tip end so as to be partially separated from the front face of the semiconductor wafer; thus, a separated portion is formed. Next, an operation of joining a separating tape to a surface of the protective tape is started from the separated portion, and the protective tape is separated together with the separating tape from the front face of the semiconductor wafer with the separated portion as a starting end.
摘要:
There is provided an archive system that performs processing on arbitrary contents, the system including a grouping section that groups multiple archive nodes included in a cluster, a policy section that defines a requirement for performing processing on the arbitrary contents, and a control section that determines a group for performing processing on the arbitrary contents based on the group information about the definition of the grouping of the multiple archive nodes and the requirement and controls the determined group to perform the processing.
摘要:
In a container that retains a wash liquid, a cutter blade having a cutting edge is inserted into a slit formed on a cleaning member impregnated with the wash liquid from an opening side of the slit and is moved horizontally by a predetermined amount with two side faces thereof being brought into contact with the slit. Then, the cutter blade is pulled out upward, so that adherents on the two side faces of the cutter blade are removed from the cuter blade.
摘要:
It is made possible to update information registered in a database of iSNS, SLP and the like in response to a configurational change in a storage device, and for a host computer to discover a disk volume. In response to changes in contents of operation to alter a storage configuration such as in creating or deleting a volume or LUN, contents of the alteration are reflected in the database of iSNS or SLP. Also, in response to a change in setting of LUN masking, a discovery domain of iSNS or attribute values of SLP are updated so that the host computer can discover the disk volume. Also, objects and services are reregistered periodically according to a registration period of iSNS or lifetime of SLP to prevent registered contents from expiring.
摘要:
A computer system including a copy source volume and a copy target volume which may be selectably PAIRED or SPLIT. User management information stores: an entry indicating that a first user is permitted to effect a PAIR operation and a PATH operation; and, an entry indicating that a second user is permitted to effect a PATH operation. Operation management information indicates permitted PATH and PAIR operations in relation to each user and a volume's PAIR or SPLIT status, and stores: an entry indicating that the first user is permitted to effect the PAIR operation in which the PAIR status is PAIR, or is SPLIT WITH BACKUP DISABLED; and, an entry indicating that the second user is permitted to effect the PATH operations in which the PAIR status is SPLIT WITH BACKUP ENABLED. PAIR management information stores the PAIR status and the BACKUP ENABLED or DISABLED status.