公开(公告)号：US20090306519A1

公开(公告)日：2009-12-10

申请号：US12375047

申请日：2007-07-16

申请人： Levinus Pieter Bakker

发明人： Levinus Pieter Bakker

IPC分类号： A61B6/00

CPC分类号： A61B5/4312 ,  A61B5/0073 ,  A61B5/0091

摘要： The invention relates to a device (1) for imaging an interior of a turbid medium (45) comprising: a) a measurement volume (15) for receiving the turbid medium (45); b) a light source (5) for irradiating the turbid medium (45); c) a photodetector unit (10) for detecting light emanating from exit positions (60) located on a boundary of the measurement volume (15) as a result of >irradiating the turbid medium (45). The device (1) is adapted to collect light from spatially distinct beams of light emanating from a single exit position (60). The single exit position (60) may, for instance, come in the form of an optical channel (25b) or it may simply be an area of skin tissue from which light emanates. In one embodiment of the device (1) according to the invention multiple optical light guides (55) are optically coupled to the single exit position (60).

摘要翻译： 本发明涉及一种用于对浑浊介质（45）内部进行成像的装置（1），包括：a）用于接收混浊介质的测量体积（15）; b）用于照射混浊介质（45）的光源（5）; c）用于检测从位于测量体积（15）的边界上的出口位置（60）发出的光的光电检测器单元（10），作为>照射混浊介质（45）的结果。 装置（1）适于收集从单个出口位置（60）发出的空间上不同的光束的光。 单个出口位置（60）可以例如以光学通道（25b）的形式，或者它可以简单地是光发出的皮肤组织的区域。 在根据本发明的装置（1）的一个实施例中，多个光学光导（55）光耦合到单个出口位置（60）。

公开(公告)号：US20080316595A1

公开(公告)日：2008-12-25

申请号：US12230384

申请日：2008-08-28

申请人： Maarten Marinus Johannes Wilhelmus Van Herpen ,  Levinus Pieter Bakker ,  Vadim Yevgenyevich Banine ,  Derk Jan Wilfred Klunder

发明人： Maarten Marinus Johannes Wilhelmus Van Herpen ,  Levinus Pieter Bakker ,  Vadim Yevgenyevich Banine ,  Derk Jan Wilfred Klunder

IPC分类号： G02B5/28 ,  G02B5/26 ,  G02B5/22

CPC分类号： G02B1/10 ,  B82Y10/00 ,  B82Y40/00 ,  G02B5/0816 ,  G02B5/0891 ,  G02B5/283 ,  G03F1/24 ,  G03F7/70575 ,  G03F7/70958 ,  G21K1/062 ,  G21K2201/067

摘要： A multi-layer mirror includes a multi-layer stack. The multi-layer stack includes a plurality of alternating layers with a multi-layer stack top layer and a spectral filter top layer arranged on the multi-layer stack. The spectral filter top layer includes a first spectral purity enhancement layer that includes a first material m1 and has a first layer thickness d1, an intermediate layer that includes a second material m2 and has a second layer thickness d2. The intermediate layer is arranged on the multi-layer stack top layer. The first material is selected from SiN, Si3N4, SiO2, ZnS, Te, diamond, CsI, Se, SiC, amorphous carbon, MgF2, CaF2, TiO2, Ge, PbF2, ZrO2, BaTiO3, LiF or NaF. The second material includes a material different from the first material, and d1+d2 has a thickness between 1.5 and 40 nm.

摘要翻译： 多层反射镜包括多层堆叠。 多层堆叠包括多层交叠层，多层叠层顶层和布置在多层堆叠上的光谱过滤器顶层。 光谱过滤器顶层包括第一光谱纯度增强层，其包括第一材料m1并且具有第一层厚度d1，包括第二材料m2并具有第二层厚度d2的中间层。 中间层布置在多层堆叠顶层上。 第一种材料选自SiN，Si3N4，SiO2，ZnS，Te，金刚石，CsI，Se，SiC，无定形碳，MgF2，CaF2，TiO2，Ge，PbF2，ZrO2，BaTiO3，LiF或NaF。 第二材料包括与第一材料不同的材料，并且d1 + d2具有在1.5和40nm之间的厚度。

公开(公告)号：US20080300472A1

公开(公告)日：2008-12-04

申请号：US12094670

申请日：2006-11-17

申请人： Martinus Bernardus Van Der Mark ,  Michael Cornelis Van Beek ,  Levinus Pieter Bakker

发明人： Martinus Bernardus Van Der Mark ,  Michael Cornelis Van Beek ,  Levinus Pieter Bakker

IPC分类号： A61B5/1455

CPC分类号： A61B5/4312 ,  A61B5/0091 ,  A61B5/1455 ,  A61B5/14551

摘要： Disclosed is a method and a device for optical imaging of a turbid medium. This method comprises a reference measurement of reference intensities of light emanating from the turbid medium at a reference blood oxygen saturation (SaO2) in the turbid medium and a reference imaging step for reconstructing a reference image of the turbid medium from the measured reference intensities. Furthermore the method comprises a contrast measurement of the contrast intensity of the light emanating from the turbid medium at a contrast blood oxygen saturation (SaO2) level in the turbid medium and a contrast imaging step for reconstructing a contrast image of the turbid medium from the measured contrast intensities. A comparison is made between the contrast image to the reference image of the turbid medium.

摘要翻译： 公开了一种用于浑浊介质的光学成像的方法和装置。 该方法包括在混浊介质中以参考血氧饱和度（SaO2）从混浊介质发出的光的参考光强度的参考测量值，以及用于根据测量的参考光强度重建浊度介质的参考图像的参考成像步骤。 此外，该方法包括在浑浊培养基中以对比血氧饱和度（SaO2）水平从浑浊培养基发出的光的对比度强度的对比度测量，以及用于从所测量的重量中重建浑浊培养基的对比度图像的对比度成像步骤 对比强度。 对比图像与混浊介质的参考图像之间进行比较。

公开(公告)号：US20080290256A1

公开(公告)日：2008-11-27

申请号：US12094634

申请日：2006-11-21

申请人： Levinus Pieter Bakker ,  Gert T Hooft ,  Martinus Bernardus Van Der Mark ,  Michael Cornelis Van Beek

发明人： Levinus Pieter Bakker ,  Gert T Hooft ,  Martinus Bernardus Van Der Mark ,  Michael Cornelis Van Beek

IPC分类号： H03F3/08

CPC分类号： A61B5/4312 ,  A61B5/0091

摘要： The invention relates to a method and device (1) for imaging an interior of a turbid medium (55). A turbid medium (55) inside a measurement volume (15) is irradiated from a plurality of source positions (25a) with light from a light source (5), and light emanating from the measurement volume (15) is detected from a plurality of detection positions (25b). An image of the interior of the turbid medium (55) is reconstructed from the detected light. In both the method and the device (1), detector signals can be amplified for each source position-detection position pair by a multi-gain amplification unit comprising an amplifier circuit (60). The amplification factor is selected from a number of possible amplification factors based on detected signal strength in the prior art. According to the invention, however, the method and device are adapted such that the amplification factor is selected for at least one source position-detection position pair on the basis of an estimate of expected electrical signal strength.

摘要翻译： 本发明涉及一种用于对浑浊介质（55）的内部进行成像的方法和装置（1）。 从多个源位置（25a）利用来自光源（5）的光照射测量体积（15）内部的混浊介质（55），并且从测量体积（15）发出的光从多个 检测位置（25b）。 从检测到的光重建混浊介质（55）的内部的图像。 在方法和装置（1）中，通过包括放大器电路（60）的多增益放大单元，可以为每个源位置检测位置对放大检测器信号。 基于现有技术中检测到的信号强度，从多个可能的放大因子中选择放大因子。 然而，根据本发明，所述方法和装置被适配成使得根据预期的电信号强度的估计为至少一个源位置检测位置对选择放大系数。

公开(公告)号：US20080285823A1

公开(公告)日：2008-11-20

申请号：US12094641

申请日：2006-11-13

申请人： Levinus Pieter Bakker ,  Michael Cornelis Van Beek ,  Martinus Bernardus Van Der Mark

发明人： Levinus Pieter Bakker ,  Michael Cornelis Van Beek ,  Martinus Bernardus Van Der Mark

IPC分类号： G06K9/00

CPC分类号： G01N21/4795 ,  A61B5/0091 ,  G01N21/6456 ,  G01N2021/1787 ,  G01N2021/6421

摘要： The invention relates to a device (1) for imaging an interior of a turbid medium (25). The device (1) may be used to accommodate a turbid medium (25) inside a measurement volume (20) and irradiate the turbid medium (25) with light from a light source (5), after which light emanating from the measurement volume (20) is detected and used to determine an image of the interior of the turbid medium (25). The device (1) is adapted such that additional means are introduced for irradiating the turbid medium (25) with light causing fluorescent emission in a contrast agent present in the turbid medium (25), for detecting the fluorescent emission in at least two spectral regions, and for calculating an image reconstruction for the at least two spectral regions detected. By detecting the fluorescent emission spectroscopically, that is as a function of wavelength, information can be obtained from which the concentration of a predetermined component present inside the turbid medium can be determined.

摘要翻译： 本发明涉及一种用于对浑浊介质（25）的内部进行成像的装置（1）。 装置（1）可以用于容纳测量体积（20）内部的混浊介质（25），并用来自光源（5）的光照射混浊介质（25），之后从测量体积 20）被检测并用于确定混浊介质（25）内部的图像。 装置（1）适于使得附加装置被引入以用在浑浊介质（25）中存在的造影剂中引起荧光发射的光照射混浊介质，用于检测至少两个光谱区域中的荧光发射 并且用于计算所检测的所述至少两个光谱区域的图像重建。 通过检测荧光发射光谱，即作为波长的函数，可以获得可以确定存在于混浊介质内的预定成分的浓度的信息。

公开(公告)号：US20080212430A1

公开(公告)日：2008-09-04

申请号：US12089776

申请日：2006-10-11

申请人： Levinus Pieter Bakker ,  R.F.M. Hendriks

发明人： Levinus Pieter Bakker ,  R.F.M. Hendriks

IPC分类号： G11B7/00

CPC分类号： G11B7/14 ,  G11B7/0033 ,  G11B7/24085 ,  G11B7/24088

摘要： A system for reading an information carrier having a data layer (101) on which is stored a data set. A probe array generating means (104) generates an array of light spots (102) which is applied to the data layer (101). The resultant output light beams are representative of the binary value of data stored in the data layer (101). Macro-cell scanning is effected in a single dimension by moving the array of light spots (102) relative to the data layer (101) along a path (A,B) which is non-parallel to the axes of the matrix defining the probe array. One-dimensional scanning results in a less complex system.

摘要翻译： 一种用于读取具有数据层（101）的信息载体的系统，其上存储有数据集。 探针阵列产生装置（104）产生施加到数据层（101）的光点阵列（102）。 所得到的输出光束代表存储在数据层（101）中的数据的二进制值。 通过沿着不平行于限定探针的矩阵的轴的路径（A，B）相对于数据层（101）移动光点阵列（102），在单个维度中实现宏小区扫描 数组。 一维扫描导致较不复杂的系统。

公开(公告)号：US07251012B2

公开(公告)日：2007-07-31

申请号：US10748851

申请日：2003-12-31

申请人： Vadim Yevgenyevich Banine ,  Levinus Pieter Bakker ,  Vladimir Vitalevitch Ivanov ,  Johannes Hubertus Josephina Moors ,  Givi Georgievitch Zukavishvili ,  Abraham Veefkind

发明人： Vadim Yevgenyevich Banine ,  Levinus Pieter Bakker ,  Vladimir Vitalevitch Ivanov ,  Johannes Hubertus Josephina Moors ,  Givi Georgievitch Zukavishvili ,  Abraham Veefkind

IPC分类号： G03B27/52 ,  G03B27/54

CPC分类号： G03F7/70916 ,  G03F7/70983

摘要： A lithographic apparatus is disclosed. The apparatus includes an illumination system that provides a beam of radiation, and a support structure that supports a patterning structure. The patterning structure is configured to impart the beam of radiation with a pattern in its cross-section. The apparatus also includes a substrate support that supports a substrate, a projection system that projects the patterned beam onto a target portion of the substrate, and a debris-mitigation system that mitigates debris particles which are formed during use of at least a part of the lithographic apparatus. The debris-mitigation system is arranged to apply a magnetic field so that at least charged debris particles are mitigated.

摘要翻译： 公开了一种光刻设备。 该装置包括提供辐射束的照明系统和支撑图形结构的支撑结构。 图案形成结构被配置为在其横截面中赋予辐射束图案。 该装置还包括支撑基板的基板支撑件，将图案化的光束投影到基板的目标部分上的投影系统，以及减轻碎片颗粒的碎片减轻系统，该碎片减小系统在使用期间形成的碎屑颗粒的至少一部分 光刻设备 碎片减轻系统被布置成施加磁场，使得至少带电的碎屑颗粒被减轻。

公开(公告)号：US07235801B2

公开(公告)日：2007-06-26

申请号：US10860656

申请日：2004-06-04

申请人： Levinus Pieter Bakker

发明人： Levinus Pieter Bakker

IPC分类号： G21K5/00 ,  G02B5/28

CPC分类号： G03F7/70958 ,  G21K1/06 ,  Y10T428/24355

摘要： A grazing incidence mirror includes a mirror substrate and a mirror surface layer, the mirror surface layer including a first layer and a second layer, the first layer being positioned between the mirror substrate and the second layer. The first layer includes a material selected from the group of Mo, Nb and combinations thereof, and the second layer includes a material selected from the group of B, C, B4C, SiC and combinations thereof. Such a grazing incidence mirror can be used in lithographic apparatus and in device manufacturing methods and provides a reflectivity that may be larger than state of the art grazing incidence mirrors based on Ru.

摘要翻译： 掠射入射镜包括镜面基板和镜面层，镜面层包括第一层和第二层，第一层位于镜面基板和第二层之间。 第一层包括选自Mo，Nb及其组合的材料，第二层包括选自B，C，B 4 C，SiC及其组合的材料。 这样的掠入射镜可以用于光刻设备和器件制造方法中，并提供可能比现有技术的基于Ru的掠入射镜更大的反射率。

公开(公告)号：US07106832B2

公开(公告)日：2006-09-12

申请号：US11031535

申请日：2005-01-10

申请人： Derk Jan Wilfred Klunder ,  Levinus Pieter Bakker ,  Vadim Yevgenyevich Banine ,  Maarten Marinus Johannes Wilhelmus Van Herpen

发明人： Derk Jan Wilfred Klunder ,  Levinus Pieter Bakker ,  Vadim Yevgenyevich Banine ,  Maarten Marinus Johannes Wilhelmus Van Herpen

IPC分类号： G21K3/00

CPC分类号： G03F7/70916

摘要： Particles emitted by a radiation source, and moving from the radiation source towards a processing system for processing the radiation from the radiation source, are filtered out of radiation propagating through a predetermined cross section of the radiation as emitted by the radiation source by a filter system. The filter system includes a plurality of foils and a transporter for transporting the foils along a trajectory which extends within the beam so that the foils intercept the particles within the beam. The transporter is arranged to transport the foils by a substantially translatory movement of the foils along at least a part of the trajectory.

摘要翻译： 由辐射源发射并从辐射源朝向用于处理来自辐射源的辐射的处理系统移动的颗粒被从辐射源通过辐射源发射的预定横截面传播的辐射滤出，该辐射源由过滤系统 。 过滤器系统包括多个箔片和运送器，用于沿着在光束内延伸的轨迹传送箔片，使得箔片截取光束内的颗粒。 输送器布置成通过沿着轨迹的至少一部分的箔片的基本上平移的运动来运输箔片。

公开(公告)号：US07061574B2

公开(公告)日：2006-06-13

申请号：US10985037

申请日：2004-11-10

申请人： Levinus Pieter Bakker ,  Vadim Yevgenyevich Banine ,  Vladimir Vitalevitch Ivanov ,  Konstantin Nikolaevitch Koshelev ,  Vladimir Mihailovitch Krivtsun

发明人： Levinus Pieter Bakker ,  Vadim Yevgenyevich Banine ,  Vladimir Vitalevitch Ivanov ,  Konstantin Nikolaevitch Koshelev ,  Vladimir Mihailovitch Krivtsun

IPC分类号： G03B27/52 ,  G03B27/42

CPC分类号： B82Y10/00 ,  G03F7/70166 ,  G03F7/70908 ,  G03F7/70916

摘要： A lithographic projection apparatus is provided. The apparatus includes a radiation system for providing a beam of radiation, and a support for supporting a patterning device. The patterning device serves to pattern the beam of radiation according to a desired pattern. The apparatus also includes a substrate table for holding a substrate, a projection system for projecting the patterned beam of radiation onto a target portion of the substrate, and a particle supply unit for supplying getter particles into the beam of radiation in order to act as a getter for contamination particles in the beam of radiation. The getter particles have a diameter of at least about 1 nm.

摘要翻译： 提供光刻投影装置。 该装置包括用于提供辐射束的辐射系统和用于支撑图案形成装置的支撑件。 图案形成装置用于根据期望的图案对辐射束进行图案化。 该装置还包括用于保持基板的基板台，用于将图案化的辐射束投射到基板的目标部分上的投影系统，以及用于将吸气剂颗粒供应到辐射束中的颗粒供应单元，以用作 吸收剂用于辐射束中的污染颗粒。 吸气剂颗粒具有至少约1nm的直径。