Method for etching silicon oxynitride and dielectric antireflection coatings
    92.
    发明授权
    Method for etching silicon oxynitride and dielectric antireflection coatings 失效
    蚀刻氮氧化硅和介电抗反射涂层的方法

    公开(公告)号:US06537918B2

    公开(公告)日:2003-03-25

    申请号:US09920251

    申请日:2001-07-31

    IPC分类号: H01L21302

    摘要: A method for plasma etching a semiconductor film stack. The film stack includes at least one layer comprising silicon oxynitride. The method includes etching the silicon oxynitride-comprising layer using an etchant gas mixture comprising chlorine and at least one compound containing fluorine and carbon. The atomic ratio of fluorine to chlorine in the etchant gas ranges between about 3:1 and about 0.01:1; preferably, between about 0.5:1 and about 0.01:1; most preferably, between about 0.25:1 and about 0.1:1. The etchant gas forms a fluorine-comprising polymer or species which deposits on exposed surfaces adjacent to the silicon oxynitride-comprising layer in an amount sufficient to reduce the etch rate of an adjacent material (such as a photoresist) while permitting the etching of the silicon oxynitride-comprising layer.

    摘要翻译: 一种用于等离子体蚀刻半导体膜堆叠的方法。 薄膜叠层包括至少一层包含氮氧化硅的层。 该方法包括使用包含氯和至少一种含氟和碳的化合物的蚀刻剂气体混合物来蚀刻含氧氮化硅层。 蚀刻剂气体中氟与氯的原子比范围为约3:1至约0.01:1; 优选约0.5:1至约0.01:1; 最优选在约0.25:1至约0.1:1之间。 蚀刻剂气体形成含氟聚合物或物质,它们以足以降低邻近材料(例如光致抗蚀剂)蚀刻速率的量沉积在与含氮氧化硅层相邻的暴露表面上,同时允许蚀刻硅 含氧氮化物的层。

    Method for etching silicon oxynitride and inorganic antireflection
coatings
    93.
    发明授权
    Method for etching silicon oxynitride and inorganic antireflection coatings 失效
    蚀刻氮氧化硅和无机抗反射涂层的方法

    公开(公告)号:US6013582A

    公开(公告)日:2000-01-11

    申请号:US986911

    申请日:1997-12-08

    CPC分类号: H01L21/32139 H01L21/0276

    摘要: The present disclosure pertains to a method for plasma etching a semiconductor patterning stack. The patterning stack includes at least one layer comprising either a dielectric-comprising antireflective material or an oxygen-comprising material. In many instances the dielectric-comprising antireflective material will be an oxygen-comprising material, but it need not be limited to such materials. In one preferred embodiment of the method, the chemistry enables the plasma etching of both a layer of the dielectric-comprising antireflective material or oxygen-comprising material and an adjacent or underlying layer of material. In another preferred embodiment of the method, the layer of dielectric-comprising antireflective material or oxygen-comprising material is etched using one chemistry, while the adjacent or underlying layer is etched using another chemistry, but in the same process chamber. Of particular interest is silicon oxynitride, an oxygen-comprising material which functions as an antireflective material. A preferred embodiment of the method provides for the use of a source of carbon and an appropriate halogen-comprising plasma, to achieve selective etch of one oxygen-containing material compared with another material which contains a more limited amount of oxygen.

    摘要翻译: 本公开涉及用于等离子体蚀刻半导体图案化叠层的方法。 图案化叠层包括至少一层,其包括含电介质的抗反射材料或含氧材料。 在许多情况下,包含电介质的抗反射材料将是含氧材料,但不限于此类材料。 在该方法的一个优选实施方案中,该化学物质能够对包含电介质的抗反射材料或含氧材料的层和相邻或下层材料进行等离子体蚀刻。 在该方法的另一个优选实施方案中,使用一种化学方法蚀刻包含电介质的抗反射材料层或含氧材料层,而使用另一种化学物质在相同的处理室中蚀刻相邻层或下层。 特别令人感兴趣的是氧氮化硅,其作为抗反射材料起作用的含氧材料。 该方法的优选实施方案提供了使用碳源和合适的含卤素等离子体,与含有更多有限量的氧气的另一种材料相比,可实现一种含氧材料的选择性蚀刻。

    Cart-attachable mobile golf bag
    94.
    发明授权

    公开(公告)号:US10722769B1

    公开(公告)日:2020-07-28

    申请号:US16535448

    申请日:2019-08-08

    申请人: Sung Ho Kim

    发明人: Sung Ho Kim

    摘要: Disclosed is a cart-attachable mobile golf bag, in which the golf bag is configured such that a head cover is detachably attached to an upper portion of a bag body storing golf clubs therein, and the golf bag is attached to a cart in a docking manner by engagement between a docking recess of the golf bag and a docking block of the cart inserted into the docking recess in a one-touch manner, thus making it possible that the golf bag is simply and firmly attached to the cart without requiring any separate tying process. In particular, the golf bag has a hard-shell structure, thus being safe even without requiring a separate wrapping cover when transported by air while being excellent in durability, and further the golf bag provides various storage spaces for storing various equipment other than golf clubs, thus being excellent in use efficiency.

    Apparatus and method for controlling display of EPG information

    公开(公告)号:US10382715B2

    公开(公告)日:2019-08-13

    申请号:US12665982

    申请日:2008-06-23

    申请人: Sung Ho Kim

    发明人: Sung Ho Kim

    摘要: A method for controlling display of information on a display device includes storing information corresponding to a broadcast program guide. When a signal is received based on activation of a specific key while the first broadcast program is displayed on a screen, information on the first broadcast program and information on a second program to be broadcast after the first broadcast program is detected. The first broadcast program is then displayed in a first region of the screen simultaneously with the information on the first broadcast program and the information on the second broadcast program in a second region of the screen.

    Rapid detection and identification of energetic materials with surface enhanced raman spectrometry (SERS)
    96.
    发明授权
    Rapid detection and identification of energetic materials with surface enhanced raman spectrometry (SERS) 有权
    通过表面增强拉曼光谱法快速检测和鉴定高能材料(SERS)

    公开(公告)号:US09012241B2

    公开(公告)日:2015-04-21

    申请号:US12844778

    申请日:2010-07-27

    摘要: In one embodiment, a system includes a plurality of metal nanoparticles functionalized with a plurality of organic molecules tethered thereto, wherein the plurality of organic molecules preferentially interact with one or more analytes when placed in proximity therewith. According to another embodiment, a method for detecting analytes includes contacting a fluid having one or more analytes of interest therein with a plurality of metal nanoparticles, each metal nanoparticle having a plurality of organic molecules tethered thereto, and detecting Raman scattering from an analyte of interest from the fluid, the analyte interacting with one or more of the plurality of organic molecules. In another embodiment, a method includes chemically modifying a plurality of cyclodextrin molecules at a primary hydroxyl moiety to create a chemical handle, and tethering the plurality of cyclodextrin molecules to a metal nanoparticle using the chemical handle. Other systems and methods for detecting analytes are also described.

    摘要翻译: 在一个实施方案中,系统包括多个金属纳米颗粒,其被多个与其连接的有机分子官能化,其中当放置在其附近时,多个有机分子优先与一种或多种分析物相互作用。 根据另一个实施方案,用于检测分析物的方法包括使具有一种或多种感兴趣的分析物的流体与多种金属纳米颗粒接触,每种金属纳米颗粒具有连接到其上的多个有机分子,并且从感兴趣的分析物检测拉曼散射 来自流体的分析物与多个有机分子中的一个或多个相互作用。 在另一个实施方案中,一种方法包括在伯羟基部分化学修饰多个环糊精分子以产生化学手柄,并且使用化学手柄将多个环糊精分子束缚到金属纳米颗粒。 还描述了用于检测分析物的其它系统和方法。

    Backlight unit and display apparatus using the same
    98.
    发明授权
    Backlight unit and display apparatus using the same 有权
    背光单元和使用其的显示装置

    公开(公告)号:US08235540B2

    公开(公告)日:2012-08-07

    申请号:US13109071

    申请日:2011-05-17

    IPC分类号: G09F13/14

    摘要: A backlight unit and a display apparatus using the same are disclosed. The backlight unit includes a first reflector, a second reflector, and at least one light source disposed between the first reflector and the second reflector. The second reflector include at least two inclined surface adjacent to each other about at least one inflection point, the first and second inclined surfaces having different radii of curvature.

    摘要翻译: 公开了一种背光单元和使用其的显示装置。 背光单元包括第一反射器,第二反射器和设置在第一反射器和第二反射器之间的至少一个光源。 第二反射器包括至少两个相对于至少一个拐点相邻的倾斜表面,第一和第二倾斜表面具有不同的曲率半径。

    Apparatus and method for processing an ultrasound spectrum image
    99.
    发明授权
    Apparatus and method for processing an ultrasound spectrum image 有权
    用于处理超声波光谱图像的装置和方法

    公开(公告)号:US08204288B2

    公开(公告)日:2012-06-19

    申请号:US12948487

    申请日:2010-11-17

    IPC分类号: G06K9/00

    摘要: There is provided a method of processing an ultrasound spectrum image. According to such method, a spectrum image is formed based on ultrasound data and then the noise is removed from the spectrum image. The noise-removed spectrum image is matched with one or more spectrum models representing specific spectrum types. Then, whether or not the noise-removed spectrum image contains an aliasing is checked. If the noise-removed spectrum image contains the aliasing, then the aliasing is removed from the noise-removed spectrum image to provide a noise-removed spectrum image without the aliasing. Thereafter, contour tracing is performed on the noise-removed spectrum image without the aliasing to detect contour points. Further, peak tracing is performed on the noise-removed spectrum image without the aliasing to detect peaks.

    摘要翻译: 提供了一种处理超声波频谱图像的方法。 根据这种方法,基于超声数据形成频谱图像,然后从频谱图像中去除噪声。 噪声消除的光谱图像与表示特定光谱类型的一个或多个光谱模型相匹配。 然后,检查噪声去除的频谱图像是否包含混叠。 如果噪声去除的频谱图像包含混叠,则从去除噪声的频谱图像中去除混叠,以提供没有混叠的噪声去除的频谱图像。 此后,对噪声去除的频谱图像执行轮廓跟踪,而不需要混叠来检测轮廓点。 此外,在没有混叠的噪声去除的频谱图像上执行峰值跟踪以检测峰值。