摘要:
A method for plasma etching a semiconductor film stack. The film stack includes at least one layer comprising silicon oxynitride. The method includes etching the silicon oxynitride-comprising layer using an etchant gas mixture comprising chlorine and at least one compound containing fluorine and carbon. The atomic ratio of fluorine to chlorine in the etchant gas ranges between about 3:1 and about 0.01:1; preferably, between about 0.5:1 and about 0.01:1; most preferably, between about 0.25:1 and about 0.1:1. The etchant gas forms a fluorine-comprising polymer or species which deposits on exposed surfaces adjacent to the silicon oxynitride-comprising layer in an amount sufficient to reduce the etch rate of an adjacent material (such as a photoresist) while permitting the etching of the silicon oxynitride-comprising layer.
摘要:
The present disclosure pertains to a method for plasma etching a semiconductor patterning stack. The patterning stack includes at least one layer comprising either a dielectric-comprising antireflective material or an oxygen-comprising material. In many instances the dielectric-comprising antireflective material will be an oxygen-comprising material, but it need not be limited to such materials. In one preferred embodiment of the method, the chemistry enables the plasma etching of both a layer of the dielectric-comprising antireflective material or oxygen-comprising material and an adjacent or underlying layer of material. In another preferred embodiment of the method, the layer of dielectric-comprising antireflective material or oxygen-comprising material is etched using one chemistry, while the adjacent or underlying layer is etched using another chemistry, but in the same process chamber. Of particular interest is silicon oxynitride, an oxygen-comprising material which functions as an antireflective material. A preferred embodiment of the method provides for the use of a source of carbon and an appropriate halogen-comprising plasma, to achieve selective etch of one oxygen-containing material compared with another material which contains a more limited amount of oxygen.
摘要:
Disclosed is a cart-attachable mobile golf bag, in which the golf bag is configured such that a head cover is detachably attached to an upper portion of a bag body storing golf clubs therein, and the golf bag is attached to a cart in a docking manner by engagement between a docking recess of the golf bag and a docking block of the cart inserted into the docking recess in a one-touch manner, thus making it possible that the golf bag is simply and firmly attached to the cart without requiring any separate tying process. In particular, the golf bag has a hard-shell structure, thus being safe even without requiring a separate wrapping cover when transported by air while being excellent in durability, and further the golf bag provides various storage spaces for storing various equipment other than golf clubs, thus being excellent in use efficiency.
摘要:
A method for controlling display of information on a display device includes storing information corresponding to a broadcast program guide. When a signal is received based on activation of a specific key while the first broadcast program is displayed on a screen, information on the first broadcast program and information on a second program to be broadcast after the first broadcast program is detected. The first broadcast program is then displayed in a first region of the screen simultaneously with the information on the first broadcast program and the information on the second broadcast program in a second region of the screen.
摘要:
In one embodiment, a system includes a plurality of metal nanoparticles functionalized with a plurality of organic molecules tethered thereto, wherein the plurality of organic molecules preferentially interact with one or more analytes when placed in proximity therewith. According to another embodiment, a method for detecting analytes includes contacting a fluid having one or more analytes of interest therein with a plurality of metal nanoparticles, each metal nanoparticle having a plurality of organic molecules tethered thereto, and detecting Raman scattering from an analyte of interest from the fluid, the analyte interacting with one or more of the plurality of organic molecules. In another embodiment, a method includes chemically modifying a plurality of cyclodextrin molecules at a primary hydroxyl moiety to create a chemical handle, and tethering the plurality of cyclodextrin molecules to a metal nanoparticle using the chemical handle. Other systems and methods for detecting analytes are also described.
摘要:
A backlight unit and a display apparatus using the same are disclosed. The backlight unit includes a first reflector, a second reflector partially having an inclined surface, a plurality of light sources disposed between the first reflector and the second reflector, and a third reflector disposed between adjacent light sources.
摘要:
A backlight unit and a display apparatus using the same are disclosed. The backlight unit includes a first reflector, a second reflector, and at least one light source disposed between the first reflector and the second reflector. The second reflector include at least two inclined surface adjacent to each other about at least one inflection point, the first and second inclined surfaces having different radii of curvature.
摘要:
There is provided a method of processing an ultrasound spectrum image. According to such method, a spectrum image is formed based on ultrasound data and then the noise is removed from the spectrum image. The noise-removed spectrum image is matched with one or more spectrum models representing specific spectrum types. Then, whether or not the noise-removed spectrum image contains an aliasing is checked. If the noise-removed spectrum image contains the aliasing, then the aliasing is removed from the noise-removed spectrum image to provide a noise-removed spectrum image without the aliasing. Thereafter, contour tracing is performed on the noise-removed spectrum image without the aliasing to detect contour points. Further, peak tracing is performed on the noise-removed spectrum image without the aliasing to detect peaks.
摘要:
The present invention provides an LED driving circuit including: an inverter unit for switching an input power source; a plurality of transformers including a plurality of primary windings connected to the inverter unit and connected to each other in series and a plurality of secondary windings each of which is coupled with each of the primary windings; a plurality of rectification units each of which is connected to each of the secondary windings; and a plurality of LEDs each of which is connected to each of the rectification units.