公开(公告)号：US4918033A

公开(公告)日：1990-04-17

申请号：US239569

申请日：1988-09-01

申请人： Johann W. Bartha ,  Thomas Bayer ,  Johann Greschner ,  Georg Kraus ,  Gerhard Schmid

发明人： Johann W. Bartha ,  Thomas Bayer ,  Johann Greschner ,  Georg Kraus ,  Gerhard Schmid

IPC分类号： C23C16/08 ,  C23C16/30 ,  C23C16/448 ,  C23C16/50 ,  H01L21/28 ,  H01L21/285

CPC分类号： C23C16/4488 ,  C23C16/08 ,  H01L21/28556 ,  Y10S148/147

摘要： The invention comprises a PECVD method for the deposition of refractory metal layers or layers containing refractory metal by the in situ formation of refractory metal fluorides. For this purpose, an etch gas, such as CF.sub.4, NF.sub.3, SF.sub.6 etc., is introduced into a plasma deposition chamber which comprises a cathode, with a refractory metal sheet electrically connected thereto, and an anode carrying wafers.In a preferred example, CF.sub.6 is introduced into the chamber and, via a gas shower, into a cathode region. After ignition of a plasma, the ionized etch gas acts on a tungsten sheet, generating WF.sub.x ions that diffuse towards a target with wafers. The WF.sub.x ions thus produced are suitable for the deposition of a tungsten layer or a layer containing tungsten on silicon wafers.

公开(公告)号：US4843315A

公开(公告)日：1989-06-27

申请号：US167676

申请日：1988-03-14

申请人： Thomas Bayer ,  Michael Elsasser ,  Johann Greschner ,  Heinrich Schmid ,  Roland Stohr ,  Olaf Wolter ,  Jurgen Wittlinger

发明人： Thomas Bayer ,  Michael Elsasser ,  Johann Greschner ,  Heinrich Schmid ,  Roland Stohr ,  Olaf Wolter ,  Jurgen Wittlinger

IPC分类号： G01R31/26 ,  G01R1/073 ,  G01R31/28

CPC分类号： G01R1/07357

摘要： The contact probe arrangement includes a stack of perforated plates (1, 1a) through which extend a plurality contact probes. The stack of perforated plates consists of two kinds of plates. The first kind forms the lowermost plates (1a). They have circular or square holes permitting a vertical placing of the contact probes onto the contact pads (4) of the device (5) to be tested. The plates (1) of the second kind have oblong, rectangular, square, circular, elliptical or trapezoidal holes (3). With respect to the stacked plates of the second kind, alternate ones are offset against the two other adjacent plates which are aligned relative to each other, in such a manner that each contact probe is surrounded by part of the lower edge of the upper of two adjacent perforated plates, and part of the upper edge of the lower of two adjacent perforated plates. If axial stress is applied, the contact probe can thus not buckle any farther than to a part of the perforation wall limiting its maximum buckling. This ensures a sufficiently low contact resistance between the contact probe and the contact pad of the device to be tested. By using a corresponding number of perforated plates of the second kind the contact probes can adapt to height differences of the contact pads caused by irregularities in the surface of the device to be tested.

摘要翻译： 接触探针装置包括多个多孔板（1,1a）的堆叠，通过该堆叠多个多孔板延伸多个接触探针。 多孔板堆叠由两种板组成。 第一种形成最下面的板（1a）。 它们具有允许将接触探针垂直放置在待测试装置（5）的接触垫（4）上的圆形或方形孔。 第二类的板（1）具有长方形，矩形，正方形，圆形，椭圆形或梯形孔（3）。 对于第二类的堆叠板，替代物相对于彼此对准的另外两个相邻的板偏移，使得每个接触探针被两个上部的下边缘的一部分包围 相邻的穿孔板和两个相邻多孔板的下部的上边缘的一部分。 如果施加轴向应力，则接触探针因此可能不会比限制其最大屈曲的穿孔壁的一部分更加弯曲。 这确保接触探针和待测试装置的接触垫之间的接触电阻足够低。 通过使用相应数量的第二种多孔板，接触探针可以适应由待测试装置的表面中的不规则引起的接触垫的高度差异。

公开(公告)号：US4598017A

公开(公告)日：1986-07-01

申请号：US612768

申请日：1984-05-22

申请人： Thomas Bayer ,  Holger Hinkel ,  Kurt Kleischmann ,  Ulrich Kuenzel ,  Rolf Schafer

发明人： Thomas Bayer ,  Holger Hinkel ,  Kurt Kleischmann ,  Ulrich Kuenzel ,  Rolf Schafer

IPC分类号： G11B5/70 ,  G11B5/66 ,  G11B5/73 ,  G11B5/733 ,  G11B5/82 ,  G11B5/64

CPC分类号： G11B5/82 ,  G11B5/7315 ,  Y10S428/90 ,  Y10T428/265 ,  Y10T428/2918 ,  Y10T428/30 ,  Y10T428/31511 ,  Y10T428/31522 ,  Y10T428/31529 ,  Y10T428/31533

摘要： The invention relates to a composite magnetic disk for magnetic recording, which consists of an annular core of polymeric material to which is bonded at least one disk of reaction-bonded silicon carbide with a magnetic recording layer on its outer surface. After its processing, the SiSiC disk surface shows optimum planarity and smoothness so that it can be used as a magnetic disk substrate. Furthermore, the material has a low density and an extremely high specific modulus of elasticity so that numbers of revolution higher than obtainable with formerly known AlMg5 disk substrates can be reached.

摘要翻译： 本发明涉及一种用于磁记录的复合磁盘，其由聚合物材料的环形芯组成，其中至少一个反应粘合的碳化硅盘与其外表面上的磁记录层结合。 在其处理之后，SiSiC盘表面显示最佳平面度和平滑度，从而可以用作磁盘基片。 此外，该材料具有低密度和非常高的比弹性模量，使得可以达到比先前已知的AlMg5盘基底可获得的转数高。