Method and apparatus for measuring wafer thickness
    91.
    发明申请
    Method and apparatus for measuring wafer thickness 有权
    用于测量晶片厚度的方法和装置

    公开(公告)号:US20060181715A1

    公开(公告)日:2006-08-17

    申请号:US11388316

    申请日:2006-03-24

    IPC分类号: G01B11/28

    CPC分类号: G01B11/06

    摘要: A system for non-contact measurement of thickness of a test object. A laser beam is split into two identical directly opposed input beams. A calibration object of known thickness causes beams to be reflected from sides of the test object. Each reflected beam passes through sensing means including a pinhole aperture and a photodiode sensor. Maximum sensor output defines first and second focal points a known distance apart. The calibration object is removed, and the test object is inserted into the path of the input beams, creating focus position intensity curves for the reflected beams. By determining the deviation, at maximum photodiode output, of the positions of the test object reflecting surfaces from the positions of the calibration object surfaces, the test object thickness can be readily and accurately determined.

    摘要翻译: 用于非接触测量测试对象厚度的系统。 激光束被分成两个相同的直接相对的输入光束。 已知厚度的校准对象使得光束从测试对象的侧面反射。 每个反射光束通过包括针孔孔和光电二极管传感器的感测装置。 最大传感器输出定义了已知距离的第一和第二焦点。 移除校准对象,将测试对象插入到输入光束的路径中,为反射光束创建焦点位置强度曲线。 通过从校准物体表面的位置确定测试对象反射表面的位置的最大光电二极管输出的偏差,可以容易且准确地确定测试对象厚度。

    Method and apparatus for measuring wafer thickness
    92.
    发明申请
    Method and apparatus for measuring wafer thickness 有权
    用于测量晶片厚度的方法和装置

    公开(公告)号:US20060061775A1

    公开(公告)日:2006-03-23

    申请号:US10946450

    申请日:2004-09-21

    IPC分类号: G01B11/28

    CPC分类号: G01B11/06

    摘要: A system for non-contact measurement of thickness of an object. A laser beam is split into two identical input beams that are directly opposed. A calibration object of known thickness causes beams to be reflected from sides of the test object. Each reflected beam passes through auto-focus means including a quad sensor coupled to focussing means on the input beam, causing each input beam to be focussed on the calibration object, thereby defining first and second focal points a known distance apart. The focus is locked and focus error data are generated for each beam. The calibration object is removed, and the test object is inserted into the path of the focussed input beams, creating focus error signals for the reflected beams. By determining the deviation of the positions of the test object reflecting surfaces from the positions of the calibration object surfaces, the test object thickness can be readily and accurately determined.

    摘要翻译: 用于非接触式测量物体厚度的系统。 激光束被分成直接相对的两个相同的输入光束。 已知厚度的校准对象使得光束从测试对象的侧面反射。 每个反射光束通过自动聚焦装置,包括耦合到输入光束上的聚焦装置的四分之一传感器,使得每个输入光束聚焦在校准物体上,由此限定第一和第二焦点已知距离。 锁定焦点,并为每个光束生成聚焦误差数据。 去除校准对象,并将测试对象插入到聚焦输入光束的路径中,为反射光束产生聚焦误差信号。 通过确定测试对象反射表面的位置与校准物体表面的位置的偏差,可以容易且准确地确定测试对象厚度。

    OXIDIZED BACTERIAL CELLULOSE SEPARATOR FOR BATTERIES AND METHOD FOR PRODUCING THE SAME

    公开(公告)号:US20230223651A1

    公开(公告)日:2023-07-13

    申请号:US18154037

    申请日:2023-01-12

    摘要: A separator for a lithium-based battery, and method for fabricating the same is disclosed. The method includes oxidizing cellulose fibrils to form oxidized cellulose having carboxylic functional groups, decorating the oxidized cellulose with nanoparticles, and forming the nanoparticle-decorated oxidized cellulose into a film to become the separator for the lithium-based battery. The cellulose may be a bacterial cellulose. The cellulose fibrils may be oxidized through a TEMPO oxidation. Decorating the oxidized cellulose with nanoparticles may include introducing a precursor solution to the oxidized cellulose that reacts with hydroxyl groups of the oxidized cellulose while preserving the carboxylic functional groups, causing the nanoparticles to nucleate on the surface of the oxidized cellulose. The nanoparticles may be composed of an oxide material. The oxide material may be SiO2. The precursor solution may be tetraethyl orthosilicate (TEOS).

    Differential pressure valve based boost device inlet pressure optimization

    公开(公告)号:US11092093B2

    公开(公告)日:2021-08-17

    申请号:US16681354

    申请日:2019-11-12

    IPC分类号: F02D23/00 F02M26/04 F02D21/08

    摘要: Techniques for controlling a forced-induction engine having a low pressure cooled exhaust gas recirculation (LPCEGR) system comprise determining a target boost device inlet pressure for each of one or more systems that could require a boost device inlet pressure change as part of their operation and boost device inlet pressure hardware limits for a set of components in the induction system, determining a final target boost device inlet pressure based on the determined sets of target boost device inlet pressures and boost device inlet pressure hardware limits, and controlling a differential pressure (dP) valve based on the final target boost device inlet pressure to balance (i) competing boost device inlet pressure targets of the one or more systems and (ii) the set of boost device inlet pressure hardware limits in order to optimize engine performance and prevent component damage.

    PRE-COMPRESSOR VALVE EQUIPPED LOW PRESSURE COOLED EXHAUST GAS RECIRCULATION TRACKING ERROR MANAGEMENT

    公开(公告)号:US20200158038A1

    公开(公告)日:2020-05-21

    申请号:US16681344

    申请日:2019-11-12

    摘要: Engine low pressure cooled exhaust gas recirculation (LPCEGR) control techniques comprise receiving a measured position of an accelerator pedal and, based on this measurement, detecting a transient tip-out event or a transient tip-in event. In response to detecting the transient tip-out event, an EGR depletion rate is temporarily increased by at least one of (i) downstream throttle valve control to maintain at least a minimum engine airflow or to regulate a rate of decrease of the airflow into the engine, (ii) cylinder bank fuel shutoff, and (iii) pre-scheduled EGR valve control based on the measured accelerator pedal position. In response to detecting the transient tip-in event, an EGR delivery rate is temporarily increased by at least one of (i) the pre-scheduled EGR valve control and (ii) controlling intake/exhaust valves of cylinders of the engine to enable a scavenging mode.