SUBSTRATE PROCESSING SYSTEM AND METHOD OF DETERMINING FLOW RATE OF GAS

    公开(公告)号:US20190301912A1

    公开(公告)日:2019-10-03

    申请号:US16361410

    申请日:2019-03-22

    Abstract: A substrate processing system according to an exemplary embodiment includes a substrate processing apparatus and a measurement apparatus. The substrate processing apparatus includes a gas supply unit. The gas supply unit includes a flow rate controller and a secondary valve. The secondary valve is connected to a secondary side of the flow rate controller. The secondary valve is opened when a voltage is output from a first controller of the substrate processing system through a wiring. The measurement apparatus measures the flow rate of the gas output from the flow rate controller according to the instruction from the first controller. The measurement apparatus includes a second controller. The measurement apparatus includes a relay provided on the wiring. The second controller is configured to control the relay.

    Valve incorporating a flowmeter for measuring a flow of fluid inside same

    公开(公告)号:US10401205B2

    公开(公告)日:2019-09-03

    申请号:US15567135

    申请日:2016-04-20

    Applicant: YZATEC

    Abstract: Disclosed is a valve including: a body; a closure member; and a closure member control rod, the control rod extending inside the body at least partially within a fluid flow area. The control rod includes, in the fluid flow area, at least one flowmeter including: a tubular body having two axial ends; a flow measuring device supported by the tubular body and associated with the tubular body so as to enable a flow of fluid flowing outside the tubular body to be measured, and the electrical connection; and an electrical connection extending outside of the tubular body and passing through the tubular body by at least one fluid-tight passage.

    Flow sensor with heated air collar
    97.
    发明授权

    公开(公告)号:US10317266B2

    公开(公告)日:2019-06-11

    申请号:US15715764

    申请日:2017-09-26

    Abstract: A collar is provided for use with a fluid flow sensor to reduce condensation of a moist gas flowing through the fluid flow sensor. The collar comprises a body defining an interior that defines an airspace between the collar and the housing of the fluid flow sensor when the collar is positioned on the fluid flow sensor. The collar also includes a heat source secured to the body and adapted to heat air contained within the airspace to consequently heat the housing of the fluid flow sensor and the interior surfaces of the sensor to reduce condensation of the moist gas.

    Method for making resin hollow body and flow measuring device

    公开(公告)号:US10234313B2

    公开(公告)日:2019-03-19

    申请号:US15827374

    申请日:2017-11-30

    Inventor: Akiyuki Sudou

    Abstract: A metal mold includes a restraining part that is fitted in a recess provided at a part of surfaces of at least two resin parts that serves as an outer surface of a resin hollow body. A linear space is filled with high-pressure resin fluid injected at a predetermined injection pressure. The resin parts are joined together. The mold receives injection pressure of resin fluid, with which the space is filled, through the resin parts, and applies pressing force, which pushes back the resin parts toward the space, to the resin parts as reaction force against injection pressure. Stress is produced on a hollow wall surface in a direction in which the wall surface projects into a hollow portion due to injection pressure. The restraining part applies pressing force to the resin parts in a direction opposite from the stress projecting the wall surface into the hollow portion.

    Method for operating a flowmeter and respective flowmeter

    公开(公告)号:US10215607B2

    公开(公告)日:2019-02-26

    申请号:US15150854

    申请日:2016-05-10

    Abstract: Described and shown is a method for operating a flowmeter (1) having a measuring tube (2), wherein the flow (d) of a medium (4) through the measuring tube (2) is measured. A continuous dwell time of the measured flow (d) greater than or equal to a flow threshold (ds) is assigned to a flow interval (ΔtD,1, ΔtD,2) and a flow volume (V1, V2) is determined from the measured flow (d) in the flow interval (ΔtD,1, ΔtD,2). In each case, a continuous dwell time of the measured flow (d) less than the flow threshold (ds) is assigned to a zero flow interval (ΔtN,1). In each case, a deviation volume of the flow volume (V1, V2) in one of the flow intervals (ΔtD,1, ΔtD,2) from a reference flow volume is determined and the deviation volume is compared to a threshold deviation volume. If the deviation volume in one of the flow intervals (ΔtD,1, ΔtD,2) is less than the threshold deviation volume, a zero flow through the measuring tube (2) is determined and compensated using the measured flow (d) in the zero flow interval (ΔtN,1) directly preceding the flow interval (ΔtD,1, ΔtD,2).

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