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公开(公告)号:US20190301912A1
公开(公告)日:2019-10-03
申请号:US16361410
申请日:2019-03-22
Applicant: TOKYO ELECTRON LIMITED
Inventor: Risako MIYOSHI , Norihiko AMIKURA , Kazuyuki MIURA , Hiroshi YAZAKI , Yasuhiro SHOJI
Abstract: A substrate processing system according to an exemplary embodiment includes a substrate processing apparatus and a measurement apparatus. The substrate processing apparatus includes a gas supply unit. The gas supply unit includes a flow rate controller and a secondary valve. The secondary valve is connected to a secondary side of the flow rate controller. The secondary valve is opened when a voltage is output from a first controller of the substrate processing system through a wiring. The measurement apparatus measures the flow rate of the gas output from the flow rate controller according to the instruction from the first controller. The measurement apparatus includes a second controller. The measurement apparatus includes a relay provided on the wiring. The second controller is configured to control the relay.
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公开(公告)号:US10401207B2
公开(公告)日:2019-09-03
申请号:US15265575
申请日:2016-09-14
Applicant: GENERAL ELECTRIC COMPANY
Inventor: Carlos Alberto Cavichioli Gonzaga , Luiz Felipe Willcox de Souza , Luiz Ricardo Douat , Rafael Horschutz Nemoto
Abstract: The present approach relates to establishing metrics for the computation of uncertainty boundaries for mean values for pressure and temperature drop error and mean values for mass flow error. Using such metric, sensor inaccuracies may be accounted for in the calibration and/or estimation processes of a virtual flow meter. For example, these values may be employed in the assessment of improvement in a calibration process of virtual flow meters, which will facilitate maintaining the accuracy of such virtual flow meters.
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公开(公告)号:US10401205B2
公开(公告)日:2019-09-03
申请号:US15567135
申请日:2016-04-20
Applicant: YZATEC
Inventor: Mathieu Poque , Alain Ramond
Abstract: Disclosed is a valve including: a body; a closure member; and a closure member control rod, the control rod extending inside the body at least partially within a fluid flow area. The control rod includes, in the fluid flow area, at least one flowmeter including: a tubular body having two axial ends; a flow measuring device supported by the tubular body and associated with the tubular body so as to enable a flow of fluid flowing outside the tubular body to be measured, and the electrical connection; and an electrical connection extending outside of the tubular body and passing through the tubular body by at least one fluid-tight passage.
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公开(公告)号:US10365143B2
公开(公告)日:2019-07-30
申请号:US15259150
申请日:2016-09-08
Applicant: Canada Pipeline Accessories, Co. Ltd.
Inventor: Blaine Sawchuk , Reginald Selirio , Raphael Selirio , Daniel Sawchuk
Abstract: A measurement ring for a pipeline includes a body having a central hole extending along a longitudinal axis of the body and at least one tap for measuring fluid flow parameters in the pipeline. The at least one tap includes a threaded portion on a circumferential surface of the body extending through the body towards the central hole, and a first channel extending from the threaded portion to the central hole.
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公开(公告)号:US10365135B2
公开(公告)日:2019-07-30
申请号:US15865211
申请日:2018-01-08
Abstract: A flexible magnetic assembly based flow rate measurement device or flow meter, and method of sensing flow rate of a fluid using a flow rate measurement device are disclosed. The device comprises three separable chambers such as, a basal chamber, a mid-chamber and a top chamber. The basal chamber with an inlet and an outlet, is incorporated with a main sensitive component i.e. flexible magnetic assembly along flow path of a fluid that enter from the inlet and exit from the outlet of the basal chamber. The mid-chamber comprises a magnetic sensor, placed over the flexible magnetic assembly is configured to sense the changes in magnetization value. The top chamber comprises a processor and a display unit, is configured to process, convert and display the magnetization value. Further, a method of fabricating flexible magnetic assembly for a flow rate measurement device is also disclosed.
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公开(公告)号:US20190212179A1
公开(公告)日:2019-07-11
申请号:US16315364
申请日:2017-06-01
Applicant: F.Holzer GmbH
Inventor: Hyek Hee Lee , Ute Steinfeld , Markus Mahler , Frank Holzer
CPC classification number: G01F15/005 , B05B11/0067 , B05B11/007 , B05B11/047 , B05B11/048 , B05B11/3016 , G01F11/04 , G01F11/082
Abstract: The present invention relates to a pump head with a specially configured elastic valve which enables secure closure of the pump head. It is ensured by the valve that complete emptying and, at the same time, secure closing of the pump head is ensured so that no residues of fluid to be metered remain in the storage state of the pump head. In addition, the present invention relates to a metering device which can be configured for example as squeeze bottle, as non-airless system or as airless system, the metering device comprising a pump head according to the invention.
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公开(公告)号:US10317266B2
公开(公告)日:2019-06-11
申请号:US15715764
申请日:2017-09-26
Applicant: General Electric Company
Inventor: James N. Mashak , Russell J. Kuzelka
Abstract: A collar is provided for use with a fluid flow sensor to reduce condensation of a moist gas flowing through the fluid flow sensor. The collar comprises a body defining an interior that defines an airspace between the collar and the housing of the fluid flow sensor when the collar is positioned on the fluid flow sensor. The collar also includes a heat source secured to the body and adapted to heat air contained within the airspace to consequently heat the housing of the fluid flow sensor and the interior surfaces of the sensor to reduce condensation of the moist gas.
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公开(公告)号:US10260537B2
公开(公告)日:2019-04-16
申请号:US15120542
申请日:2015-03-18
Applicant: Canada Pipeline Accessories, Co. Ltd.
Inventor: Daniel A. Sawchuk
Abstract: A pipe assembly for flow measurement characterized by a fluid flow pipe and two or more flow conditioners each having a stepped configuration and disposed in series within the fluid flow pipe in an orientation substantially perpendicular to an axis of the fluid flow pipe.
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公开(公告)号:US10234313B2
公开(公告)日:2019-03-19
申请号:US15827374
申请日:2017-11-30
Applicant: DENSO CORPORATION
Inventor: Akiyuki Sudou
IPC: G01F15/00 , G01F1/684 , B29D22/00 , G01F15/14 , B29C65/54 , B29C65/00 , B29L31/00 , B29L22/00 , B29L31/34
Abstract: A metal mold includes a restraining part that is fitted in a recess provided at a part of surfaces of at least two resin parts that serves as an outer surface of a resin hollow body. A linear space is filled with high-pressure resin fluid injected at a predetermined injection pressure. The resin parts are joined together. The mold receives injection pressure of resin fluid, with which the space is filled, through the resin parts, and applies pressing force, which pushes back the resin parts toward the space, to the resin parts as reaction force against injection pressure. Stress is produced on a hollow wall surface in a direction in which the wall surface projects into a hollow portion due to injection pressure. The restraining part applies pressing force to the resin parts in a direction opposite from the stress projecting the wall surface into the hollow portion.
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公开(公告)号:US10215607B2
公开(公告)日:2019-02-26
申请号:US15150854
申请日:2016-05-10
Applicant: KROHNE Messtechnik GmbH
Inventor: Helmut Brockhaus , Markus Dabrowski , Wilhelm Florin
IPC: G01F15/00 , G01F25/00 , G01F1/72 , G01F15/07 , G01F1/58 , G01F1/00 , G01F11/00 , G01F13/00 , G01F15/075 , G01F22/00
Abstract: Described and shown is a method for operating a flowmeter (1) having a measuring tube (2), wherein the flow (d) of a medium (4) through the measuring tube (2) is measured. A continuous dwell time of the measured flow (d) greater than or equal to a flow threshold (ds) is assigned to a flow interval (ΔtD,1, ΔtD,2) and a flow volume (V1, V2) is determined from the measured flow (d) in the flow interval (ΔtD,1, ΔtD,2). In each case, a continuous dwell time of the measured flow (d) less than the flow threshold (ds) is assigned to a zero flow interval (ΔtN,1). In each case, a deviation volume of the flow volume (V1, V2) in one of the flow intervals (ΔtD,1, ΔtD,2) from a reference flow volume is determined and the deviation volume is compared to a threshold deviation volume. If the deviation volume in one of the flow intervals (ΔtD,1, ΔtD,2) is less than the threshold deviation volume, a zero flow through the measuring tube (2) is determined and compensated using the measured flow (d) in the zero flow interval (ΔtN,1) directly preceding the flow interval (ΔtD,1, ΔtD,2).
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