Method for fabricating a tunneling sensor with linear force rebalance
    91.
    发明授权
    Method for fabricating a tunneling sensor with linear force rebalance 失效
    制造具有线性力重新平衡的隧道传感器的方法

    公开(公告)号:US5991990A

    公开(公告)日:1999-11-30

    申请号:US27234

    申请日:1998-02-20

    Abstract: A tunneling sensor has a pair of force rebalance capacitors that are used in a push-pull relationship so as to provide a rebalance force that is a linear function of applied rebalance voltages, which leads to an output voltage that is linearly related to input acceleration. The tunneling sensor comprises a plate electrode that is formed from and attached to a silicon substrate by a pair of torsional flexures, which provide an axis of rotation for the plate electrode. A pendulous mass is formed on a first end of the plate electrode, and a tunnel-effect contact is formed on a second end of the plate electrode. A pair of torque rebalance bridge electrodes are formed on the substrate so as to span the plate electrode. A tunnel-effect tip is formed on the substrate so as to be proximate the tunnel-effect contact and in line with the rotational path that the tunnel-effect contact takes when the plate electrode is rotated.

    Abstract translation: 隧道传感器具有一对力平衡电容器,其以推挽关系使用,以提供作为施加的重新平衡电压的线性函数的重新平衡力,这导致与输入加速度线性相关的输出电压。 隧道传感器包括通过一对扭转弯曲形成并附着到硅衬底的板电极,其提供用于板电极的旋转轴线。 在平板电极的第一端上形成有下摆质量,并且在平板电极的第二端上形成隧道效应接触。 在基板上形成一对扭矩重新平衡桥电极,以跨越板电极。 隧道效应尖端形成在基板上,以便靠近隧道效应接触,并且与板电极旋转时隧道效应接触所采用的旋转路径一致。

    Magnetically levitated force/weight measurement system
    92.
    发明授权
    Magnetically levitated force/weight measurement system 失效
    磁悬浮力/重量测量系统

    公开(公告)号:US5485748A

    公开(公告)日:1996-01-23

    申请号:US187626

    申请日:1994-01-26

    CPC classification number: G01G7/04 G01L1/086 G01P15/132

    Abstract: A magnetically levitated force/weight measurement apparatus includes a system core with a plurality of layered circular segments having apertures that define an internal chamber. The segments include, inter alia, upper and lower magnetic bearing segments, a coil segment and an optical detector segment, each of which cooperate to generate magnetic fields for levitating a mass disposed within the chamber. Levitation magnets, rigidly disposed within the mass along a center axis, are arranged such that similar poles are in facing relation. This novel arrangement generates a static magnetic field that radiates orthogonally and symmetrically from the mass and generates a force vector for levitating the mass along the center axis. Bearing magnets, disposed within the magnetic bearing segments, i.e., core bearing magnets, and the spool, i.e., spool bearing magnets, are also arranged such that the polar axes of the core bearing magnets are aligned in the same direction as the polar axes of their corresponding spool bearing magnets. A self-dampening optical and current feedback system ensures that, upon displacement of the spool along the center axis, the spool returns to a stable equilibrium position.

    Abstract translation: 磁悬浮力/重量测量装置包括具有多个具有限定内腔的孔的多层分层圆形段的系统芯。 这些段尤其包括上部和下部磁性轴承段,一个线圈段和一个光学检测器段,它们各自协作产生磁场,用于悬浮设置在腔室内的质量。 沿着中心轴刚性地设置在质量块内的悬浮磁体被布置成使得类似的磁极处于面对关系。 这种新颖的布置产生从质量正交和对称地辐射的静态磁场,并产生用于使质量沿着中心轴悬浮的力矢量。 设置在磁轴承部分内的轴承磁体,即磁芯轴承磁体和卷轴,即卷轴轴承磁体,也被布置成使得轴承磁体的极轴在与 它们相应的卷轴轴承磁铁。 自衰减光学和电流反馈系统确保在卷轴沿着中心轴线移动时,卷轴返回到稳定的平衡位置。

    Method and apparatus for measuring displacement having parallel grating
lines perpendicular to a displacement direction for diffracting a light
beam
    94.
    发明授权
    Method and apparatus for measuring displacement having parallel grating lines perpendicular to a displacement direction for diffracting a light beam 失效
    用于测量位移的方法和装置,其具有垂直于位移方向的平行光栅线,用于衍射光束

    公开(公告)号:US5165045A

    公开(公告)日:1992-11-17

    申请号:US774781

    申请日:1991-10-10

    Inventor: Steven A. Eselun

    CPC classification number: G01L1/086 G01D5/38

    Abstract: A method and apparatus for generating and detecting changes in interference patterns such as may be used to measure small displacements. A collimated beam is diffracted to produce a standing wavefront along a surface. The surface is coincident with the surface of a device which emits a signal in response to changes in the intensity of the wave front. In one embodiment, the diffracting means is a grating and the signal emitting means includes a beam splitter that generates an interference pattern responsive to the intensity of the wave front. In another embodiment, the signal emitting means is a membrane that emits a signal in response to changes in the wavefront. The apparatus and method can be used in applications which include measurement of displacement and measurement of force in which no displacement takes place.

    Abstract translation: 用于产生和检测诸如可用于测量小位移的干涉图案变化的方法和装置。 准直光束被衍射以沿着表面产生驻波。 该表面与响应于波前强度变化发出信号的装置的表面重合。 在一个实施例中,衍射装置是光栅,并且信号发射装置包括响应于波前的强度产生干涉图案的分束器。 在另一个实施例中,信号发射装置是响应于波前的变化而发出信号的膜。 该装置和方法可用于包括测量位移和不发生位移的力的测量的应用中。

    Ultra-sensitive force detector employing servo-stabilized tunneling
junction
    95.
    发明授权
    Ultra-sensitive force detector employing servo-stabilized tunneling junction 失效
    超敏感力检测器采用伺服稳定的隧道结

    公开(公告)号:US5103682A

    公开(公告)日:1992-04-14

    申请号:US608931

    申请日:1990-11-05

    CPC classification number: G01L11/008 G01G7/00 G01L1/086 Y10S505/842

    Abstract: A highly sensitive force detector using a tunneling junction as a strain gauge is disclosed. The tunneling junction is connected to a deflection member which receives the force to be measured. The junction is connected in a nulling circuit to a magnetic flux motor which generates a restoring force precisely equal to the force to be measured. The magnetic flux required by the flux motor to do so is measured by a SQUID, the output of which is directly proportional to the flux to be measured. The device has applications in pressure sensing, weighing, gravity measurements, detection of massive objects, and elsewhere.

    Abstract translation: 公开了一种使用隧道结作为应变计的高灵敏度力检测器。 隧道结连接到接收被测量力的偏转构件。 该结在零电路中连接到磁通电动机,该磁通电动机产生精确地等于被测量力的恢复力。 磁通电动机所需的磁通量通过SQUID测量,SQUID的输出与要测量的磁通成正比。 该设备在压力感应,称重,重力测量,大量物体的检测和其他地方都有应用。

    Apparatus for automatically monitoring a constant current source in a
measuring instrument
    96.
    发明授权
    Apparatus for automatically monitoring a constant current source in a measuring instrument 失效
    用于自动监测测量仪器中恒流源的装置

    公开(公告)号:US4549623A

    公开(公告)日:1985-10-29

    申请号:US639627

    申请日:1984-08-13

    Applicant: Arthur Baumann

    Inventor: Arthur Baumann

    CPC classification number: G01G23/01 G01G7/02 G01G7/045

    Abstract: An automatic monitoring system for the constant current source in a balance having electromagnetic load compensation includes circuitry which generates a first current varying in dependence on the constant current and furnishes a digital signal indicative of the value of that current. A microcomputer is provided to compare the digital value to a reference value. If the comparison indicates that the constant current is outside of a given range of values, the microcomputer energizes the display to indicate the presence of an error.

    Abstract translation: 用于具有电磁负载补偿的平衡中的恒定电流源的自动监测系统包括产生根据恒定电流而变化并提供指示该电流的值的数字信号的第一电流的电路。 提供微型计算机以将数字值与参考值进行比较。 如果比较表明恒定电流超出给定范围的值,则微机为显示器通电以指示出现错误。

    Optical measurement system with light-driven vibrating sensor element
    97.
    发明授权
    Optical measurement system with light-driven vibrating sensor element 失效
    具有光驱振动传感器元件的光学测量系统

    公开(公告)号:US4521684A

    公开(公告)日:1985-06-04

    申请号:US350687

    申请日:1982-02-22

    CPC classification number: G01L1/103 G01L1/08

    Abstract: An instrumentation system for use in measuring and processing industrial process variables, such as flow, pressure, or temperature, includes a resonant element sensor whose resonant frequency varies in accordance with changes in the desired process variable communicating through an optical fiber link to a distant control room. The sensor is activated into resonant physical motion by light energy from a source in the control room, while the motion of the wire is sensed optically and retransmitted to the control room to produce an output signal whose frequency is equal to that of the resonating element. A feedback network maintains the sensor in resonance by synchronizing the delivery of light energy to the motion of the resonant element. The powering and sensing aspect may be performed by individual fiber optic cables or alternatively this function may be combined by utilizing a single fiber optic strand.

    Abstract translation: 用于测量和处理诸如流量,压力或温度的工业过程变量的仪表系统包括谐振元件传感器,其谐振频率根据通过光纤链路传输到远程控制器的期望过程变量的变化而变化 房间。 传感器通过来自控制室中的源的光能被激活成共振的物理运动,同时光线的运动被光学地感测并重新发送到控制室,以产生频率等于谐振元件的输出信号。 反馈网络通过将光能的传递与谐振元件的运动同步来使传感器保持谐振。 功率和感测方面可以由单独的光纤电缆执行,或者该功能可以通过利用单个光纤线组合。

    Measuring apparatus with electromagnetic force compensation and
capacitive position sensor
    98.
    发明授权
    Measuring apparatus with electromagnetic force compensation and capacitive position sensor 失效
    带电磁力补偿和电容式位置传感器的测量装置

    公开(公告)号:US4341275A

    公开(公告)日:1982-07-27

    申请号:US249420

    申请日:1981-03-31

    CPC classification number: G01G7/04 G01L1/086

    Abstract: An electromagnetically compensating measuring apparatus, as in force measuring or weighing devices, wherein a compensation coil is wound upon a coil form movable in the air gap of a stationary permanent magnet system having a pole plate, a capacitive position sensor is connected to detect the position of the compensation coil, and an automatic volume control amplifier is series-connected to the position sensor so as to follow it, with the output of the amplifier connected to feed the compensation coil to tend to hold it in a predetermined zero position, and wherein the coil form and the pole plate each form an electrode of the position sensor.

    Abstract translation: 一种电磁补偿测量装置,如在力测量或称重装置中,其中补偿线圈缠绕在可在具有极板的固定永磁体系统的气隙中移动的线圈形式,电容位置传感器被连接以检测位置 并且自动音量控制放大器串联连接到位置传感器以便跟随其,放大器的输出被连接以馈送补偿线圈以倾向于将其保持在预定的零位置,并且其中 线圈形式和极板各自形成位置传感器的电极。

    Force measuring system including combined electrostatic sensing and
torquing means
    99.
    发明授权
    Force measuring system including combined electrostatic sensing and torquing means 失效
    力测量系统,包括组合静电感应和扭矩装置

    公开(公告)号:US4009607A

    公开(公告)日:1977-03-01

    申请号:US644218

    申请日:1975-12-24

    CPC classification number: G01L1/086

    Abstract: A force measuring system includes a signal source for energizing a capacitance bridge arrangement. The bridge arrangement includes a pair of fixed capacitors and a pair of variable capacitors formed by a displaceable force sensitive element normally disposed in a null position between two fixed plates. A force applied to the system displaces the force sensitive element from the null position toward one or the other of the fixed plates to unbalance the bridge whereupon a signal is provided which is applied to a servo amplifier. The servo amplifier provides a signal which is applied to the displaceable force sensitive element, and which element is restored to the null position due to the electrostatic reaction occurring upon appropriate energization of the fixed plates. The signal provided by the servo amplifier is an accurate measure of the sensed force.

    Abstract translation: 力测量系统包括用于激励电容桥布置的信号源。 桥式装置包括一对固定电容器和一对可变电容器,该可变电容器通常位于两个固定板之间的零位置中的可移动的力敏元件形成。 施加到系统的力将力敏元件从零位置移向固定板中的一个或另一个,以使桥接不平衡,由此提供施加到伺服放大器的信号。 伺服放大器提供施加到可移动力敏感元件的信号,并且由于在固定板的适当通电时发生静电反应,哪个元件恢复到零位置。 由伺服放大器提供的信号是感测力的精确测量。

    Load-compensating weighing apparatus including signal modifying means
    100.
    发明授权
    Load-compensating weighing apparatus including signal modifying means 失效
    负载补偿称重装置,包括信号修正装置

    公开(公告)号:US3986571A

    公开(公告)日:1976-10-19

    申请号:US626198

    申请日:1975-10-28

    CPC classification number: G01G7/06 G01G23/10 G01G7/045

    Abstract: Weighing apparatus of the return-to-zero load compensation type is disclosed, characterized by the provision of voltage-responsive impedance means for modifying the pan position sensing signal to remove undesirable variations therein produced by interference or external vibrations or excessive swinging of the weighing pan by the load. In one embodiment, a dampening circuit is connected between the pan position sensing circuit and the control signal generating means for dampening sensing signals having an amplitude less than a given limit amplitude. In a second embodiment, the voltage-responsive means serves to render inoperable the differential section of a proportional-differential-integral controller when the pan position sensing signals are less than a given limit amplitude. In both embodiments, the voltage-responsive impedance means comprises a pair of diodes connected in polarity opposition in parallel in the corresponding signal-modifying circuit.

    Abstract translation: 公开了归零负载补偿类型的称重装置,其特征在于提供电压响应阻抗装置,用于修改摇摄位置感测信号以消除由干扰或外部振动引起的不期望的变化或称重盘的过度摆动 通过负载。 在一个实施例中,阻尼电路连接在摇摄位置感测电路和控制信号发生装置之间,用于衰减幅度小于给定极限幅度的感测信号。 在第二实施例中,当平移位置检测信号小于给定的限制幅度时,电压响应装置用于使比例差分积分控制器的差分部分不可操作。 在两个实施例中,电压响应阻抗装置包括在相应的信号修改电路中并联连接的极性对立的一对二极管。

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