公开(公告)号：US5425067A

公开(公告)日：1995-06-13

申请号：US227215

申请日：1994-04-13

Applicant: Richard R. Sano ,  George Antonsen ,  Gregory C. Andrews

Inventor： Richard R. Sano ,  George Antonsen ,  Gregory C. Andrews

IPC: H05G1/02 ,  F16F7/01 ,  H01J35/00 ,  H01J35/10 ,  H05G1/54

CPC classification number: H01J35/101 ,  F16F7/01 ,  H05G1/54 ,  H01J2235/1093

Abstract: An X-ray tube construction of the rotating anode type for reducing acoustic noise and vibration by using granules which are placed loosely within an anode cavity formed between the outer surface of an anode shank and a wall of an anode sleeve in proximity to a bearing journaled to a rotor shaft for rotation of an anode structure.

Abstract translation: 一种旋转阳极型X射线管结构，用于通过使用松散地放置在形成在阳极柄的外表面和阳极套筒的壁之间的阳极腔内的颗粒来减小声音噪声和振动，该阳极腔靠近轴承 到用于阳极结构旋转的转子轴。

公开(公告)号：US5313512A

公开(公告)日：1994-05-17

申请号：US37667

申请日：1993-03-24

Applicant: Shigeru Tanaka

Inventor： Shigeru Tanaka

IPC: H01J35/00 ,  H05G1/04 ,  H01J35/10

CPC classification number: H05G1/04 ,  H05G1/025

Abstract: An X-ray tube device capable of reducing an amount of work required in the operation of its replacement, and of eliminating a wasteful replacement of a still operational part of the device. The device includes an X-ray tube; at least one heat exchanger for cooling the X-ray tube by using a circulation of insulating oil; a plurality of oil hoses for transmitting the insulating oil between the X-ray tube and the heat exchanger; and at least one coupler for connecting the X-ray tube and the heat exchanger through the oil hoses by being in a coupled state, and for disconnecting the X-ray tube and the heat exchanger through the oil hoses by being in a decoupled state.

Abstract translation: 一种X射线管装置，其能够减少其更换操作所需的工作量，并且消除了设备的静止操作部分的浪费更换。 该装置包括X射线管; 至少一个热交换器，用于通过使用绝缘油的循环来冷却X射线管; 用于在X射线管和热交换器之间传输绝缘油的多个油软管; 以及至少一个联接器，用于通过处于耦合状态的油软管连接X射线管和热交换器，并且通过处于解耦状态的油管将X射线管和热交换器断开。

公开(公告)号：US4995069A

公开(公告)日：1991-02-19

申请号：US337821

申请日：1989-04-13

Applicant: Shigeru Tanaka

Inventor： Shigeru Tanaka

IPC: H05G1/54 ,  A61B6/00 ,  A61B6/03 ,  H01J35/00 ,  H01J35/04 ,  H02M3/28 ,  H02M7/10 ,  H05G1/06 ,  H05G1/10

CPC classification number: A61B6/035 ,  A61B6/4488 ,  A61B6/56 ,  H02M3/285 ,  H02M7/103 ,  H05G1/06 ,  H05G1/10

Abstract: An alternating-current voltage of a commercial power supply is converted to a direct-current voltage by a rectifier and the output direct-current voltage of the rectifier is converted to an alternating-current voltage again by a DC/AC inverter. The alternating-current voltage is boosted by a transformer up to an intermediate voltage (e.g., 1-20 KV). The output voltage of the transformer is supplied through the slip-ring provided between a frame stationary section and a frame rotating section of a voltage multiplier provided within the rotating section to be multiplied to a high voltage (e.g., .+-.60-.+-.70 KV). Outputs of the voltage multiplier are supplied to the anode and cathode of an X-ray tube. A voltage multiplier for producing an anode supply voltage and a voltage multiplier for producing a cathode supply voltage are constructed in separate units. The two voltage multiplier units and the X-ray tube unit are disposed within a housing of the rotating section shaped like a ring at equal angular intervals of 120.degree.. The X-ray tube unit contains a protective resistor. The protective resistor is connected in at least one of positions between the anode of the X-ray tube and an anode voltage supply terminal, between a center metal of the X-ray tube and a center metal terminal and between the cathode of the X-ray tube and a cathode voltage supply terminal.

Abstract translation: 商用电源的交流电压由整流器转换为直流电压，整流器的输出直流电压再次由DC / AC逆变器转换成交流电压。 交流电压由变压器升压至中间电压（例如，1-20KV）。 变压器的输出电压通过设置在旋转部分内的电压倍增器的框架固定部分和框架旋转部分之间的滑环提供，以便与高电压相乘（例如，+/- 60 - + / -70KV）。 电压倍增器的输出被提供给X射线管的阳极和阴极。 用于产生阳极电源电压的电压倍增器和用于产生阴极电源电压的电压倍增器分别构成。 两个电压倍增器单元和X射线管单元设置在旋转部分的壳体内，以120度的相等角度间隔形成为环形。 X射线管单元包含一个保护电阻。 保护电阻器连接在X射线管的阳极和阳极电压端子之间的位置之间，X射线管的中心金属和中心金属端子之间以及X射线管的阴极之间的至少一个位置处， 射线管和阴极电压端子。

公开(公告)号：US4995065A

公开(公告)日：1991-02-19

申请号：US416298

申请日：1989-10-03

Applicant: Serge Janouin ,  Philippe Masse ,  Bernard Pouzergues

Inventor： Serge Janouin ,  Philippe Masse ,  Bernard Pouzergues

IPC: H01J35/10 ,  H01J7/28 ,  H01J35/00 ,  H05G1/04

CPC classification number: H05G1/04 ,  H01J7/28 ,  H05G1/025

Abstract: The disclosure concerns X-ray tubes. To obtain greater temperature stability of an X-ray tube, a substance is placed in the circulation space of the cooling fluid of the tube. The latent heat of fusion of this substance is used so that it melts during the examination stage in absorbing heat, and gets solidified during the resting stage. The disclosure is applicable to X-ray tubes.

Abstract translation: 本公开涉及X射线管。 为了获得更高的X射线管的温度稳定性，物质被放置在管的冷却流体的循环空间中。 使用该物质的熔解潜热，使其在吸收热量的检查阶段期间熔化，并在静止阶段期间固化。 本公开适用于X射线管。

公开(公告)号：US4845732A

公开(公告)日：1989-07-04

申请号：US13058

申请日：1987-02-10

Applicant: Roche Michel

Inventor： Roche Michel

IPC: H05H7/10 ,  H01J35/00 ,  H05H11/00

CPC classification number: H05H11/00 ,  H01J35/00

Abstract: The invention relates to an apparatus and to a process for producing bremsstrahlung. This apparatus comprises in a ferromagnetic member a circular cavity containing electrons rotated on a circular path under the action of a magnetic field induced by the ferromagnetic member and by means for inducing a magnetic field. The apparatus also comprises a circular target partly located outside the cavity and rotating in a plane perpendicular to that of the path of the electrons. The end of the target periodically traverses said path in order to interact periodically with the electrons on their path, so as to produce bremsstrahlung. Means are provided for varying the magnetic field in the cavity and are synchronized with the interaction period of the target on the electrons and are connected to the induction means.Application to all fields requiring the production bremsstrahlung.

Abstract translation: 本发明涉及一种用于生产bre致辐射的装置和方法。 该装置在铁磁构件中包括在由铁磁构件感应的磁场的作用下包含在圆形路径上旋转的电子的圆形腔以及用于引起磁场的装置。 该装置还包括部分位于空腔外部并在垂直于电子路径的平面中旋转的圆形靶。 目标的终点周期性地穿过所述路径，以便在其路径上与电子周期性地相互作用，以便产生bre致辐射。 提供了用于改变空腔中的磁场并且与目标在电子上的相互作用周期同步并且连接到感应装置的装置。 适用于所有需要生产bre致辐射的领域。

公开(公告)号：US4768212A

公开(公告)日：1988-08-30

申请号：US37948

申请日：1987-04-13

Applicant: Guenther Appelt ,  Josef Schmitt

Inventor： Guenther Appelt ,  Josef Schmitt

IPC: F28D7/04 ,  H01J35/00 ,  H01J35/10 ,  H01J35/12 ,  H05G1/02 ,  H05G1/04

CPC classification number: H05G1/04 ,  H01J35/106 ,  H01J35/12 ,  H05G1/025

Abstract: An x-radiator has a housing in which an x-ray tube is disposed surrounded by an electrically insulating coolant and having a circulation system for the coolant. The housing is substantially filled with the coolant, and a heat exchanger is disposed outside of the housing through which the coolant is pumped. *) The direction of flow of the coolant is automatically reversible dependent on the three-dimensional position of the x-radiator. *) For aiding in dissipating heat from said coolant a cooling fluid is circulated through the heat exchanger isolated from the coolant.

Abstract translation: x-散热器具有壳体，其中x射线管被电绝缘冷却剂包围并且具有用于冷却剂的循环系统。 壳体基本上填充有冷却剂，并且热交换器设置在外壳的外部，冷却剂通过该换热器被泵送。 *）取决于x辐射体的三维位置，冷却液的流动方向可自动反转。 *）为了帮助散发来自所述冷却剂的热量，冷却流体循环通过与冷却剂隔离的热交换器。

公开(公告)号：US4723262A

公开(公告)日：1988-02-02

申请号：US813544

申请日：1985-12-26

Applicant: Etsuo Noda ,  Setsuo Suzuki ,  Osami Morimiya

Inventor： Etsuo Noda ,  Setsuo Suzuki ,  Osami Morimiya

IPC: H05G2/00 ,  H05H1/22 ,  H01J35/00

CPC classification number: H05G2/003 ,  G21B1/19 ,  H05G2/008 ,  Y02E30/16

Abstract: The soft X-ray apparatus of the present invention includes a vessel at low pressure or a vacuum in which a liquid target material, preferably mercury, is discharged in the form of a series of discontinuous droplets. The flow of the droplets of liquid target material is controlled by a control device, and synchronized with a high energy pulse beam, preferably a high energy laser pulse beam, provided by a laser device through a window in the vessel. In the preferred embodiment, this laser device also is controlled by the control device so that the laser pulse beam impinges a droplet of mercury inside the vessel to produce plasma to thereby generate soft X-rays. The droplets of mercury are sized to correspond to the size of the laser pulse beam at the point where the laser pulse beam impinges the droplet of mercury to maximize the strength of the soft X-rays and efficiently utilize the power of the high energy laser pulse beam. The soft X-rays exit the vessel through additional windows for subsequent use. A recovery mechanism is connected to the vessel to cover any unused liquid target material so that this material can be recirculated.

Abstract translation: 本发明的软X射线装置包括在低压下的容器或液体目标材料（优选汞）以一系列不连续液滴的形式排出的真空。 液体目标材料的液滴的流动由控制装置控制，并且由激光装置通过容器中的窗口提供的高能量脉冲光束（优选高能量激光脉冲光束）同步。 在优选实施例中，该激光装置也由控制装置控制，使得激光脉冲光束在容器内撞击汞滴以产生等离子体从而产生软X射线。 汞的液滴尺寸对应于激光脉冲光束撞击汞滴的点处的激光脉冲束的尺寸，以最大化软X射线的强度并有效利用高能量激光脉冲的功率 光束。 软X射线通过另外的窗户离开船只以供后续使用。 回收机构连接到容器以覆盖任何未使用的液体目标材料，使得该材料可以再循环。

公开(公告)号：US4713833A

公开(公告)日：1987-12-15

申请号：US797197

申请日：1985-11-14

Applicant: David W. Turner ,  Andrew J. Dixon ,  Karl A. Gehring ,  Michael Keenlyside

Inventor： David W. Turner ,  Andrew J. Dixon ,  Karl A. Gehring ,  Michael Keenlyside

IPC: H01J35/30 ,  G21G4/00 ,  H01J35/00

CPC classification number: H01J35/30

Abstract: An X-ray source apparatus contains an X-ray target which emits X-ray when bombarded with electrons from an electron source. A strong magnetic field, e.g. from a superconducting solenoid, having curved lines of magnetic flux interlinks the target and electron source. The magnetic field has sufficient strength over the entire electron path of travel to constrain the electrons emitted from the source with components at angles to the magnetic field to execute helical paths about the field lines to the target. An aperture means is positioned to block the straight line paths between the source and the target but permits the passage of substantially all electrons traveling along the lines of flux.

Abstract translation: PCT No.PCT / GB83 / 00157 Sec。 371日期1984年2月17日 102（e）日期1984年2月17日PCT归档1983年6月16日PCT公布。 第WO84 / 00079号公报 日期1984年1月5日.X射线源装置包含当从电子源的电子轰击时发射X射线的X射线靶。 强磁场，例如 来自具有磁通量的曲线的超导螺线管将靶和电子源相互连接。 磁场在整个电子行进路径上具有足够的强度，以约束以与磁场成角度的分量从源发射的电子，以执行围绕目标的场线的螺旋路径。 定位孔径装置以阻挡源和靶之间的直线路径，但允许基本上所有沿着通量线行进的电子通过。

公开(公告)号：US4692934A

公开(公告)日：1987-09-08

申请号：US669442

申请日：1984-11-08

Applicant: James M. Forsyth

Inventor： James M. Forsyth

IPC: G03F7/20 ,  H01J5/18 ,  H01J35/00 ,  H01J35/22 ,  H01L21/027 ,  H01L21/30 ,  H05G1/00 ,  H05G2/00 ,  G21K5/10

CPC classification number: H05G2/001 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/70908 ,  G03F7/70916 ,  H01J5/18

Abstract: Disclosed herein is a X-ray lithography system in which X-rays are generated by a laser beam focused upon a target within an evacuated chamber to create a soft X-ray emitting plasma which also emits debris particles. A thin sheet of X-ray transparent gas is provided between the target and a mask used in the lithographic process to displace the particles away from the mask. The sheet of gas may also be used to maintain a pressure differential across an opening in the evacuated chamber through which the X-rays pass towards the target. In addition, the gas sheet may be used to cool the X-ray mask by placing the mask close to the sheet but at a sufficient distance so that the sheet does not interfere with the mask.

Abstract translation: 本文公开了一种X射线光刻系统，其中通过聚焦在真空室内的靶上的激光束产生X射线以产生也发射碎屑颗粒的软X射线发射等离子体。 在靶和与光刻工艺中使用的掩模之间提供薄片X射线透明气体，以使颗粒从掩模移开。 气体片也可用于保持穿过真空室中的开口的压差，X射线通过该开口通向靶。 此外，气片可以用于通过将掩模放置在片材附近但是足够的距离来冷却X射线掩模，使得片材不会妨碍掩模。

公开(公告)号：US4633492A

公开(公告)日：1986-12-30

申请号：US650903

申请日：1984-09-13

Applicant: Arnold Weiss ,  Herman P. Schutten ,  Louis Cartz ,  Gordon B. Spellman ,  Stanley V. Jaskolski ,  Peter H. Wackman, deceased

Inventor： Arnold Weiss ,  Herman P. Schutten ,  Louis Cartz ,  Gordon B. Spellman ,  Stanley V. Jaskolski ,  Peter H. Wackman, deceased

IPC: G03F7/20 ,  H05G2/00 ,  H05H1/04 ,  H01J35/00 ,  H05B31/22

CPC classification number: H05G2/003 ,  G03F7/70033 ,  H05H1/04

Abstract: A method is provided for producing plasma pinch X-rays usable in X-ray lithography. Ionized heated plasma is repeatably generated in a first area directly from solid material without exploding the latter. X-rays are generated in a second area by passing high current through the plasma causing radial inward magnetic field pinching. Accurate control and improved intensity performance, and greater flexibility in selection of X-ray emitting materials, are provided by the separation of the plasma generating and the X-ray pinch generating functions.

Abstract translation: 提供了用于产生可用于X射线光刻的等离子体夹持X射线的方法。 电离加热的等离子体可以直接从固体材料在第一区域中重复产生，而不会使后者爆炸。 通过使高电流通过等离子体产生径向向内的磁场夹紧，在第二区域中产生X射线。 通过分离等离子体产生和X射线捏合产生功能，提供精确的控制和改进的强度性能以及选择X射线发射材料的更大灵活性。