Process of realization on a plate of a plurality of chips, each with an individualization area

    公开(公告)号:US11631646B2

    公开(公告)日:2023-04-18

    申请号:US17216828

    申请日:2021-03-30

    IPC分类号: H01L23/00 H01L21/768

    摘要: A method for producing a plurality of chips each comprising an individualisation region, each chip comprising at least: a first and a second level of the electrical tracks, and an interconnections level comprising vias. The method includes producing on the dielectric layer covering the first level a mask having openings located in line with the electrical tracks and making the dielectric layer accessible. The method includes producing, in a region of the chip comprising the individualisation region, patterns conformed so that: first openings of the hard mask are not masked by the patterns, and second openings of the hard mask are masked by the patterns. The method includes producing via openings in the dielectric layer in line solely with the first openings. The method further includes filling in the via openings with an electrically conductive material, and producing the second level of the electrical tracks on the vias.

    Device for synthesising core/shell type nanoparticles by laser pyrolysis and associated method

    公开(公告)号:US11618001B2

    公开(公告)日:2023-04-04

    申请号:US16463907

    申请日:2017-11-30

    摘要: A device for synthesising core-shell nanoparticles by laser pyrolysis is provided. The device includes a reactor having a first chamber for the synthesis of the core, provided with an inlet for a core precursor, a second chamber for the synthesis of the shell, provided with an inlet for a shell precursor, and at least one communication channel between the two chambers to transmit the cores of the nanoparticles intended to be formed from the first chamber towards the second chamber. The device also includes an optical device to illuminate each of the two chambers, the device comprising at least one laser capable of emitting a laser beam intended to interact with the precursors to form the core and the shell. The device further includes at least a shell precursor inlet channel, one end of which is in the form of a distribution chamber surrounding the communication channel between the two chambers of the reactor, said distribution chamber being further provided, on its inner periphery, with at least one opening leading inside said communication channel.

    Method for the production of a bulk acoustic wave resonator with a reduced parasitic capacitance

    公开(公告)号:US11601107B2

    公开(公告)日:2023-03-07

    申请号:US16956375

    申请日:2018-12-21

    摘要: A method for producing an adjustable bulk acoustic wave resonator comprising a transducer stack (E1) and a tuning stack (E2). According to the invention, transducer stack (E1) includes two defined electrodes (4, 6) and piezoelectric material (2), and stack (E2) includes a layer of piezoelectric material (8) and two defined electrodes (10, 12). The method includes: a) production of the transducer stack; b) formation of an electrically insulating layer on an electrode (6) of the transducer stack; c) formation of a defined electrode (10) of the tuning stack on the electrically insulting layer such that it is aligned with the electrodes of the transducer stack; d) assembly, on the electrode (10), of a substrate of piezoelectric material; e) fracturing of the substrate of piezoelectric material; and f) formation of the other defined electrode (12) of the tuning stack, aligned with the defined electrode (10).

    Device for cooling locally
    110.
    发明授权

    公开(公告)号:US11600962B2

    公开(公告)日:2023-03-07

    申请号:US16774131

    申请日:2020-01-28

    摘要: A device for cooling locally, including a cooling member, a crystal having the capacity to cool via absorption of a near-infrared exciting light signal, an illuminating system intended to deliver an exciting light signal, the crystal having an elongate shape about a longitudinal axis between a near end and a far end and having a closed constant outside cross section and containing a central channel formed, from its far end, over at least some of its length, the cooling member including a rod embedded via a first end into the central channel of the crystal and including a protruding second end that forms a cooling finger.