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    Piezoelectric/electrostrictive film element with a diaphram having at least one stress releasing end section
    102.
    发明授权
    Piezoelectric/electrostrictive film element with a diaphram having at least one stress releasing end section 失效
    具有至少一个应力释放端部分的膜的压电/电致伸缩膜元件

    公开(公告)号：US5889353A

    公开(公告)日：1999-03-30

    申请号：US965769

    申请日：1997-11-07

    申请人： Yukihisa Takeuchi ,  Tsutomu Nanataki

    发明人： Yukihisa Takeuchi ,  Tsutomu Nanataki

    IPC分类号： B41J2/14 ,  B41J2/16 ,  H01L41/09 ,  H01L41/08

    CPC分类号： B41J2/1637 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1646 ,  H01L41/0973 ,  B41J2002/14387 ,  Y10T29/42

    摘要： A piezoelectric and/or electrostrictive film element including a ceramic substrate, and a piezoelectric or electrostrictive unit formed on the substrate and including a piezoelectric or electrostrictive layer between lower and upper electrodes. The substrate has a window closed by a diaphragm portion. The unit is disposed on the diaphragm portion such that at least one of the opposite ends of the unit is spaced apart from the edge of the window in a direction toward the center of the diaphragm portion. The end part of the diaphragm portion spaced apart from the edge of the window is upwardly convexed or downwardly concaved to provide a stress releasing section for effectively converting stresses generated in the piezoelectric or electrostrictive unit into displacement of the diaphragm portion. Also disclosed are methods for forming the stress releasing section by firing the unfired piezoelectric/electrostrictive layer formed on the diaphragm portion of the fired ceramic substrate.

    摘要翻译： 一种包括陶瓷衬底的压电和/或电致伸缩膜元件，以及形成在衬底上并包括在下电极和上电极之间的压电或电致伸缩层的压电或电致伸缩单元。 基板具有由隔膜部分封闭的窗口。 单元设置在隔膜部分上，使得单元的相对端中的至少一个在朝向隔膜部分的中心的方向上与窗口的边缘间隔开。 与窗口边缘隔开的隔膜部分的端部向上凸起或向下凹入以提供应力释放部分，用于将压电或电致伸缩单元中产生的应力有效地转换成膜片部分的位移。 还公开了通过烧结形成在烧制的陶瓷衬底的隔膜部分上的未烧结的压电/电致伸缩层来形成应力释放部分的方法。

    Method of producing a piezoelectric/electrostrictive film element
    103.
    发明授权
    Method of producing a piezoelectric/electrostrictive film element 失效
    压电/电致伸缩薄膜元件的制造方法

    公开(公告)号：US5853514A

    公开(公告)日：1998-12-29

    申请号：US716876

    申请日：1996-09-20

    申请人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura ,  Nobuo Takahashi

    发明人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura ,  Nobuo Takahashi

    IPC分类号： G01L1/16 ,  C04B35/49 ,  C04B35/493 ,  H01L41/09 ,  H01L41/22 ,  H04R17/00 ,  H04R17/08 ,  C04B37/00 ,  H01L41/08

    CPC分类号： C04B35/486 ,  C04B35/4885 ,  C04B35/6264 ,  H01L41/0973 ,  H01L41/314 ,  C04B2235/3225 ,  C04B2235/6025 ,  H04R17/08 ,  Y10T428/24273 ,  Y10T428/24322 ,  Y10T428/24331

    摘要： A method of producing a piezoelectric/electrostrictive film element is disclosed. The film element includes a zirconia substrate having a window which is closed by a diaphragm portion, and a piezoelectric or electrostrictive unit formed on the substrate and including a piezoelectric or electrostrictive layer between upper and lower electrodes. The method comprises the steps of: (a) preparing the substrate which has been sintered and in which at least the diaphragm portion contains alumina in an amount of 1.1-5.0 parts by weight; (b) forming, by a film-forming process, the lower electrode on the diaphragm portion, and the piezoelectric/electrostrictive layer on the lower electrode by using a piezoelectric/electrostrictive material which contains magnesia or a component which gives magnesia, in an independent form or in a compound form; and (c) firing the piezoelectric/electrostrictive layer, so as to deposit particles consisting principally of a compound of alumina and magnesia at least on an interface between the diaphragm portion and the lower electrode, the interface being located right under the piezoelectric/electrostrictive layer.

    摘要翻译： 公开了制造压电/电致伸缩薄膜元件的方法。 薄膜元件包括具有由隔膜部分封闭的窗口的氧化锆基板，以及形成在基板上并且在上部和下部电极之间包括压电或电致伸缩层的压电或电致伸缩单元。 该方法包括以下步骤：（a）制备已经烧结的衬底，其中至少隔膜部分含有1.1-5.0重量份的氧化铝; （b）通过使用含有氧化镁或氧化镁的成分的压电/电致伸缩材料，通过成膜工艺在隔膜部分上形成下电极和下电极上的压电/电致伸缩层，在独立的 形式或复合形式; 和（c）对压电/电致伸缩层进行烧制，至少在隔膜部分和下电极之间的界面上沉积主要由氧化铝和氧化镁组成的颗粒，界面位于压电/电致伸缩层的正下方 。

    Method of producing ceramic diaphragm structure having convex diaphragm portion and diaphragm structure produced by the same method
    104.
    发明授权
    Method of producing ceramic diaphragm structure having convex diaphragm portion and diaphragm structure produced by the same method 失效
    制造具有凸膜片部分和通过相同方法制造的膜片结构的陶瓷膜片结构的方法

    公开(公告)号：US5798168A

    公开(公告)日：1998-08-25

    申请号：US738322

    申请日：1996-10-25

    申请人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Hideo Masumori ,  Katsuyuki Takeuchi

    发明人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Hideo Masumori ,  Katsuyuki Takeuchi

    IPC分类号： G01L7/08 ,  H01L41/09 ,  H01L41/314 ,  H01L41/39 ,  B32B3/10

    CPC分类号： G01L9/008 ,  G01L9/0042 ,  H01L41/098 ,  H01L41/314 ,  Y10T428/166 ,  Y10T428/24331 ,  Y10T428/24628 ,  Y10T428/24942

    摘要： A method of producing a ceramic diaphragm structure, including a ceramic substrate having at least one window, and a ceramic diaphragm plate superposed on the ceramic substrate to close the window or windows. The method includes the steps of: firing the diaphragm plate with the ceramic substrate to form an integral sintered body, such that the diaphragm plate provides at least one diaphragm portion aligned with the window or windows; protruding each diaphragm portion outwards, in a direction away from the corresponding window, so that the diaphragm portion is formed into a convex shape; and controlling the amount of protrusion of the diaphragm portion, by pressing a jig having a flat surface or a concave surface, against a top part of the diaphragm portion having the convex shape, so that at least the top part has a flat surface or a curved surface having a predetermined radius of curvature.

    摘要翻译： 一种制造陶瓷膜结构的方法，包括具有至少一个窗口的陶瓷基板和重叠在陶瓷基板上的陶瓷隔膜板以封闭窗户或窗户。 该方法包括以下步骤：用陶瓷基板烧制隔膜板以形成整体烧结体，使得隔膜板提供至少一个与窗户或窗户对准的隔膜部分; 在远离相应窗口的方向向外突出每个隔膜部分，使得隔膜部分形成为凸形; 并且通过将具有平坦表面或凹形表面的夹具按压到具有凸形的隔膜部分的顶部来控制隔膜部分的突出量，使得至少顶部具有平坦表面或 具有预定曲率半径的曲面。

    Piezoelectric/electrostrictive film element and method of producing the same
    105.
    发明授权
    Piezoelectric/electrostrictive film element and method of producing the same 失效
    压电/电致伸缩膜元件及其制造方法

    公开(公告)号：US5600197A

    公开(公告)日：1997-02-04

    申请号：US365129

    申请日：1994-12-28

    申请人： Yukihisa Takeuchi ,  Tsutomu Nanataki

    发明人： Yukihisa Takeuchi ,  Tsutomu Nanataki

    IPC分类号： H01L29/84 ,  B41J2/16 ,  H01L41/08 ,  H01L41/09 ,  H01L41/22 ,  H04R17/00 ,  H04R17/08

    CPC分类号： B41J2/1637 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1646 ,  H01L41/098 ,  H01L41/314 ,  H01L41/43 ,  B41J2002/14387 ,  H04R17/08 ,  Y10T29/42

    摘要： A piezoelectric/electrostrictive film element which includes a ceramic substrate having at least one window and an integrally formed diaphragm portion for closing each window, and a piezoelectric/electrostrictive unit including a lower electrode, a piezoelectric/electrostrictive layer and an upper electrode, which are formed in this order on the diaphragm portion. The piezoelectric/electrostrictive layer consists of a dense body having a crystal grain size of not smaller than 0.7 .mu.m, and a porosity (x) of not greater than 15%, and the diaphragm portion has a deflection percentage (y) of 0-8%, which is a percentage of an amount of deflection of a central part of the diaphragm portion, with respect to a length of a shortest line which extends across the corresponding window and passes a center of the window. Further, the porosity (x) and the deflection percentage (y) satisfies the following formula: y.ltoreq.0.1167x.sup.2 -3.317x+25.5. Also disclosed are three methods for producing the piezoelectric/electrostrictive film element as described above.

    摘要翻译： 一种压电/电致伸缩膜元件，包括具有至少一个窗口的陶瓷基板和用于封闭每个窗口的整体形成的隔膜部分，以及包括下电极，压电/电致伸缩层和上电极的压电/电致伸缩单元， 在隔膜部分上依次形成。 压电/电致伸缩层由具有不小于0.7μm的晶粒尺寸和孔隙率（x）不大于15％的致密体构成，并且隔膜部分的偏转百分比（y）为0- 相对于延伸穿过对应的窗口并通过窗口的中心的最短线的长度，其为膜片部分的中心部分的偏转量的百分比为8％。 此外，孔隙率（x）和偏转百分比（y）满足下式：y <= 0.1167x2-3.317x + 25.5。 还公开了如上所述的制造压电/电致伸缩膜元件的三种方法。

    Light source
    108.
    发明授权
    Light source 有权
    光源

    公开(公告)号：US07474060B2

    公开(公告)日：2009-01-06

    申请号：US10919747

    申请日：2004-08-16

    申请人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Iwao Ohwada ,  Takayoshi Akao

    发明人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Iwao Ohwada ,  Takayoshi Akao

    IPC分类号： G09G3/10

    CPC分类号： G09G3/22

    摘要： A light source has a light emission section comprising a two-dimensional array of electron emitters and a drive circuit for applying a drive voltage to each of the electron emitters of the light emission section. The drive circuit applies the drive voltage between upper and lower electrodes of each of the electron emitters based on a control signal representative of turn-on/turn-off from an external source (a turn-on/turn-off switch or the like), for thereby controlling each of the electron emitters. Each of the electron emitters has a plate-like emitter, an upper electrode disposed on a face side of the emitter, and a lower electrode disposed on a reverse side of the emitter.

    摘要翻译： 光源具有包括电子发射体的二维阵列的发光部和用于向发光部的各个电子发射体施加驱动电压的驱动电路。 驱动电路基于表示来自外部源（导通/关断开关等）的接通/断开的控制信号，在每个电子发射器的上下电极之间施加驱动电压， ，从而控制每个电子发射器。 每个电子发射器具有板状发射极，设置在发射极的正面侧的上部电极和设置在发射极背面的下部电极。

    Actuator device
    109.
    发明授权
    Actuator device 有权
    执行机构

    公开(公告)号：US07141915B2

    公开(公告)日：2006-11-28

    申请号：US10896769

    申请日：2004-07-22

    申请人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura ,  Natsumi Shimogawa ,  Takayoshi Akao

    发明人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura ,  Natsumi Shimogawa ,  Takayoshi Akao

    IPC分类号： H01L41/08

    CPC分类号： B81B3/0018 ,  B81B2201/032 ,  G02B26/0841 ,  G02B26/0858 ,  H01L41/0474 ,  H01L41/0973 ,  H04R17/005 ,  H04R2201/003

    摘要： An actuator device has a drive section including a plurality of actuators arranged in a plane on a substrate, and a single first plate member to which drive forces from the actuators of the drive section are transmitted. A plurality of spacers are disposed between the first plate member and the substrate, forming m cells. Each of the actuators has a cavity, a vibrating section and a fixed section formed on the substrate. The rigidity of the first plate member is greater than the rigidity of the vibrating section of the actuator.

    摘要翻译： 致动器装置具有驱动部，该驱动部具有布置在基板上的平面中的多个致动器，以及传递来自驱动部的致动器的驱动力的单个第一板部件。 多个间隔件设置在第一板构件和基板之间，形成m个单元。 每个致动器具有形成在基板上的空腔，振动部分和固定部分。 第一板构件的刚性大于致动器的振动部的刚性。

    Electron emitting method of electron emitter
    110.
    发明授权
    Electron emitting method of electron emitter 有权
    电子发射体的电子发射方法

    公开(公告)号：US07129642B2

    公开(公告)日：2006-10-31

    申请号：US10459386

    申请日：2003-06-11

    申请人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Iwao Ohwada

    发明人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Iwao Ohwada

    IPC分类号： H01J11/04

    CPC分类号： H01J1/30 ,  H01J1/32

    摘要： An electron emitter has an emitter section formed on a substrate, and a cathode electrode and an anode electrode formed on a same surface of the emitter section. A slit is formed between the cathode electrode and the anode electrode. A drive voltage from a pulse generation source is applied between the cathode electrode and the anode electrode, and the anode electrode is connected to the ground. A collector electrode is provided above the emitter section at a position facing the slit. The collector electrode is connected to a bias voltage source through a resistor. The emitter section is made of a piezoelectric material.

    摘要翻译： 电子发射体具有在基板上形成的发射极部分，以及形成在发射极部分的同一表面上的阴极电极和阳极电极。 在阴极电极和阳极电极之间形成狭缝。 来自脉冲发生源的驱动电压被施加在阴极电极和阳极电极之间，并且阳极电极连接到地面。 在与狭缝对置的位置处，在发射极部分的上方设置有集电极。 集电极通过电阻连接到偏置电压源。 发射极部分由压电材料制成。