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公开(公告)号:US20200056887A1
公开(公告)日:2020-02-20
申请号:US16540852
申请日:2019-08-14
Applicant: INVENSENSE, INC.
Inventor: Joseph Seeger
IPC: G01C19/5776
Abstract: Reducing, at a common sense electrode of a group of sensors of a system, a common charge flow due to a common motion of the group of sensors is presented herein. The group of electromechanical sensors generates a common charge flow as a result of a common motion of the group of electromechanical sensors and a differential charge flow as a result of a differential motion of the group of electromechanical sensors—respective sense elements of the group of electromechanical sensors being electrically connected at the common sense electrode. The system further comprises a voltage-to-voltage converter component that generates, via an output of the voltage-to-voltage converter component, a positive feedback voltage, and minimizes the common charge flow by coupling, via a defined feedback capacitance, the positive feedback voltage to the common sense electrode—the common sense electrode being electrically coupled to an input of the voltage-to-voltage converter component.
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公开(公告)号:US10564778B2
公开(公告)日:2020-02-18
申请号:US16392161
申请日:2019-04-23
Applicant: InvenSense, Inc.
Inventor: Eitan Medina , Behrooz Abdi , Sam Massih , Romain Fayolle , Hao-Yen Tang
Abstract: In a method for determining force applied to an ultrasonic sensor, ultrasonic signals are emitted from an ultrasonic sensor. A plurality of reflected ultrasonic signals from a finger interacting with the ultrasonic sensor is captured. A first data based at least in part on a first reflected ultrasonic signal of the plurality of reflected ultrasonic signals is compared with a second data based at least in part on a second reflected ultrasonic signal of the plurality of reflected ultrasonic signals. A deformation of the finger during interaction with the ultrasonic sensor is determined based on differences between the first data based at least in part on the first reflected ultrasonic signal and the second data based at least in part on the second reflected ultrasonic signal. A force applied by the finger to the ultrasonic sensor is determined based at least in part on the deformation.
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公开(公告)号:US10562070B2
公开(公告)日:2020-02-18
申请号:US15589930
申请日:2017-05-08
Applicant: InvenSense, Inc.
Inventor: Bruno W. Garlepp , James Christian Salvia , Michael H. Perrott
IPC: B06B1/06
Abstract: An ultrasonic sensor includes a two-dimensional array of ultrasonic transducers including a plurality of sub-arrays of ultrasonic transducers, wherein a sub-array of ultrasonic transducers of the plurality of sub-arrays of ultrasonic transducers is independently controllable, and wherein a sub-array of ultrasonic transducers has an associated receive channel. A plurality of shift registers is configured to select a receive pattern of ultrasonic transducers of the two-dimensional array of ultrasonic transducers to activate during a receive operation. An array controller is configured to control selection of the ultrasonic transducers during the receive operation according to the receive pattern and configured to shift a position of the receive pattern within the plurality of shift registers such that the ultrasonic transducers activated during the receive operation moves relative to and within the two-dimensional array of ultrasonic transducers.
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公开(公告)号:US20200031661A1
公开(公告)日:2020-01-30
申请号:US16520228
申请日:2019-07-23
Applicant: InvenSense, Inc.
Inventor: Calin MICLAUS , Matthias SCHMIDT , Vijay WAKHARKAR , Milena VUJOSEVIC , Manish SHARMA-KULAMARVA
Abstract: A device includes a sensor die, an electrical coupling, a substrate, and a housing unit. The sensor die is coupled to the substrate via the electrical coupling. The housing unit and the substrate are configured to house the sensor die and the electrical coupling. The housing unit comprises an opening that exposes the sensor die to an environment external to the housing unit. The housing unit may include a drainage configured to drain liquid, e.g., water, oil, etc., out from an interior environment of the housing unit to the environment external to the housing unit. In some embodiments the housing unit comprises a membrane barrier exposing the sensor die to an environment external to the housing unit while preventing liquid from the environment external to enter an interior environment of the housing unit. It is appreciated that in some embodiments, the membrane barrier may be porous and may be ePTFE.
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公开(公告)号:US20200030850A1
公开(公告)日:2020-01-30
申请号:US16592618
申请日:2019-10-03
Applicant: InvenSense, Inc.
Inventor: Nikhil APTE , Renata Melamud BERGER , Michael DANEMAN
Abstract: A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device is provided. The PMUT includes a substrate and an edge support structure connected to the substrate. A membrane is connected to the edge support structure such that a cavity is defined between the membrane and the substrate, where the membrane configured to allow movement at ultrasonic frequencies. The membrane comprises a piezoelectric layer and first and second electrodes coupled to opposing sides of the piezoelectric layer. For operation in a Capacitive Micromachined Ultrasonic Transducer (CMUT) mode, a third electrode is disposed on the substrate and separated by an air gap in the cavity from the second electrode. Also provided are an integrated MEMS array, a method for operating an array of PMUT/CMUT dual-mode devices, and a PMUT/CMUT dual-mode device.
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公开(公告)号:US20200029912A1
公开(公告)日:2020-01-30
申请号:US16589017
申请日:2019-09-30
Applicant: InvenSense, Inc.
Inventor: Jibran Ahmed , Karthik Katingari
Abstract: A portable device is provided having a motion sensor and an engagement sensor. A determination may be made whether the portable device is engaged with the platform. The data being output by the sensor may be used accordingly.
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公开(公告)号:US20190359479A1
公开(公告)日:2019-11-28
申请号:US16538166
申请日:2019-08-12
Applicant: INVENSENSE, INC.
Inventor: Ilya Gurin , Joseph Seeger , Matthew Thompson
Abstract: A microelectromechanical system (MEMS) sensor includes a MEMS layer that includes fixed and movable electrodes. In response to an in-plane linear acceleration, the movable electrodes move with respect to the fixed electrodes, and acceleration is determined based on the resulting change in capacitance. A plurality of auxiliary electrodes are located on a substrate of the MEMS sensor and below the MEMS layer, such that a capacitance between the MEMS layer and the auxiliary loads changes in response to an out-of-plane movement of the MEMS layer or a portion thereof. The MEMS sensor compensates for the acceleration value based on the capacitance sensed by the auxiliary electrodes.
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公开(公告)号:US20190341305A1
公开(公告)日:2019-11-07
申请号:US16387469
申请日:2019-04-17
Applicant: INVENSENSE, INC.
Inventor: Bongsang KIM , Joe SEEGER
IPC: H01L21/768 , H01L21/02 , H01L21/8238
Abstract: Selectively controlling application of a self-assembled monolayer (SAM) coating on a substrate of a device is presented herein. A method comprises: forming a material on a first substrate; removing a selected portion of the material from a defined contact area of the first substrate; forming a SAM coating on the material and the defined contact area—the SAM coating comprising a first adhesion force with respect to the material and a second adhesion force with respect to the defined contact area, and the first adhesion force being less than the second adhesion force; removing the SAM coating that has been formed on the material; and attaching the first substrate to the second substrate—the first substrate being positioned across from the second substrate, and the SAM coating that has been formed on the defined contact area being positioned across from a bump stop of the second substrate.
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公开(公告)号:US10469982B2
公开(公告)日:2019-11-05
申请号:US14917557
申请日:2014-09-09
Applicant: INVENSENSE, INC.
Inventor: Jacques Georgy , Husain Syed
Abstract: The present disclosure relates to a system and method for integrated navigation integrating wireless measurements including at least angle of arrival (AOA) measurements with a navigation solution. This integrated navigation system provides an enhanced integrated navigation solution of a device within a platform (such as for example person, vehicle, or vessel), wherein the device can be strapped or non-strapped within the platform, wherein the device is non-strapped the mobility of the device may be constrained or unconstrained within the platform, and wherein the device can be tilted to any orientation and still provide a seamless navigation solution without degradation in performance of said navigation solution. The device may include sensors such as for example, accelerometers, gyroscopes, magnetometers, barometer among others. The present system and method can work whether in the presence or in the absence of absolute navigational information such as, for example, Global Navigation Satellite System (GNSS).
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公开(公告)号:US10466053B2
公开(公告)日:2019-11-05
申请号:US15479079
申请日:2017-04-04
Applicant: InvenSense, Inc.
Inventor: Jaakko Ruohio , Luca Coronato , Giacomo Gafforelli
IPC: G01C19/5747
Abstract: A gyroscope includes drive portions, lever arms, and proof masses located in a device plane. The lever arms are caused to rotate about an anchoring point based on anti-phase movement of the drive portions along a first axis in the device plane, and are coupled to the proof masses to cause the proof masses to move in anti-phase along an axis perpendicular to the first axis in the device plane. In response to a Coriolis force applied to the proof masses, the lever arm rotates out of plane and the proof masses move relative to sense electrodes. The movement of the proof masses with respect to the sense electrodes is used to measure angular velocity.
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