Scanning device including an objective lens formed of two materials
    111.
    发明授权
    Scanning device including an objective lens formed of two materials 失效
    包括由两种材料形成的物镜的扫描装置

    公开(公告)号:US07149040B2

    公开(公告)日:2006-12-12

    申请号:US10523376

    申请日:2003-07-16

    IPC分类号: G02B3/02 G11B7/135

    摘要: An optical scanning device (1) for scanning an information layer (4) of an optical record carrier (2), the information layer (4) being covered by a transparent layer (3) of thickness td and refractive index nd. The device comprises a radiation source (11) for generating a radiation beam (12, 15, 20) and an objective system (18) for converging the radiation beam on the information layer. The objective system is characterised in comprising a lens comprising a synthetic resin on a substrate, the total thickness t of the lens satisfying the condition: Formula (I), where FWD+td/nd

    摘要翻译: 一种用于扫描光学记录载体(2)的信息层(4)的光学扫描装置(1),所述信息层(4)由厚度为t 1的透明层(3)覆盖, 和折射率n 。 该装置包括用于产生辐射束(12,15,20)的辐射源(11)和用于将辐射束会聚在信息层上的物镜系统(18)。 该目标系统的特征在于包括:在基板上包括合成树脂的透镜,满足以下条件的透镜的总厚度t:公式(I),其中FWD + t ,Phi和FWD以毫米表示。

    Compound objective lens with fold mirror
    112.
    发明授权
    Compound objective lens with fold mirror 失效
    带折叠镜的复合物镜

    公开(公告)号:US07123571B2

    公开(公告)日:2006-10-17

    申请号:US10510255

    申请日:2003-03-20

    IPC分类号: G11B7/00

    CPC分类号: G11B7/1362 G11B7/1374

    摘要: A compound objective lens includes a first lens element and a second lens element, the first element including a mirror surface for internally redirecting a radiation beam passing through the first element. The objective lens has a numerical aperture greater than 0.65, and the focal length F1 of the first element is related to the focal length F of the objective lens by the relation: F 1 F > 2.5 .

    摘要翻译: 复合物镜包括第一透镜元件和第二透镜元件,第一元件包括用于在通过第一元件的辐射束内部重定向的镜面。 物镜具有大于0.65的数值孔径,并且第一元件的焦距F 1 <1>与物镜的焦距F有关,其关系如下: F

      Diffraction device for reading and/or writing a record carrier
      113.
      发明授权
      Diffraction device for reading and/or writing a record carrier 失效
      用于读取和/或写入记录载体的衍射装置

      公开(公告)号:US07079470B2

      公开(公告)日:2006-07-18

      申请号:US10011990

      申请日:2001-12-04

      IPC分类号: G11B7/135

      摘要: A device for reading and/or writing a record carrier (13), the device comprising converging means (35, 45, 47, 106, 108) for focusing a radiation beam (27, 101) originating from a radiation source (25) on the record carrier (13). The converging means comprises polarization means (103) and a diffraction grating (107) of birefringent material. Dependent on the direction of polarization, the radiation beam (101) is focused on one of two possible surfaces corresponding to DVD and DVR, respectively. A diffraction grating (107) is present in a central area of the radiation beam (101) and causes diffraction of a first order for one direction of polarization of the radiation beam (101) and diffraction of a second, higher, order for a second direction of polarization of the radiation beam (101). The diffraction grating (107) is made of birefringent material.

      摘要翻译: 一种用于读取和/或写入记录载体(13)的装置,该装置包括用于将源自辐射源(25)的辐射束(27,101)聚焦在其上的会聚装置(35,45,77,106,108) 记录载体(13)。 会聚装置包括偏振装置(103)和双折射材料的衍射光栅(107)。 取决于偏振方向,辐射束(101)分别聚焦在对应于DVD和DVR的两个可能表面之一上。 衍射光栅(107)存在于辐射束(101)的中心区域中,并且对于辐射束(101)的一个偏振方向引起第一级的衍射,并产生第二级,第二级的衍射 辐射束(101)的偏振方向。 衍射光栅(107)由双折射材料制成。

      Scanning device including an objective system formed of a single material
      114.
      发明授权
      Scanning device including an objective system formed of a single material 失效
      扫描装置包括由单一材料形成的物镜系统

      公开(公告)号:US07009744B1

      公开(公告)日:2006-03-07

      申请号:US10523388

      申请日:2003-07-16

      IPC分类号: G02B26/08

      CPC分类号: G11B7/1374

      摘要: An optical scanning device (1) for scanning an information layer (4) of an optical record carrier (2), the device (1) comprising a radiation source (11) for generating a radiation beam (12, 15, 20) and an objective system (18) for converging the radiation beam on the information layer, the information layer being covered by a transparent layer (3) of thickness td and refractive index nd. The objective system comprises a lens formed of a single material. The lens satisfies the condition: Fomula (I), where t is the thickness of the lens, FWD is the free working distance between the lens (18) and the carrier (2), where t, td and FWD are expressed in millimeters, and where FWD+td/nd

      摘要翻译: 一种用于扫描光学记录载体(2)的信息层(4)的光学扫描装置(1),所述装置(1)包括用于产生辐射束(12,15,20)的辐射源(11)和 用于将辐射束会聚在信息层上的目标系统(18),该信息层由厚度为td的透明层(3)和折射率n 覆盖。 目标系统包括由单一材料形成的透镜。 透镜满足条件:Fomula(I),其中t是透镜的厚度,FWD是透镜(18)和载体(2)之间的自由工作距离,其中t,td和FWD以毫米表示, 并且其中FWD + t <0.51。

      Optical head for scanning a record carrier
      115.
      发明授权
      Optical head for scanning a record carrier 失效
      用于扫描记录载体的光头

      公开(公告)号:US06956807B2

      公开(公告)日:2005-10-18

      申请号:US09968994

      申请日:2001-10-02

      IPC分类号: G02B5/18 G11B7/00 G11B7/135

      摘要: A device for scanning a first and second type of optical record carriers (2; 40) generates a first and a second radiation beam for scanning the first and second type of record carriers, respectively, the first radiation beam having a first numerical aperture larger than the second numerical aperture of the second radiation beam. The device includes a non-periodic phase structure that does not affect the first radiation beam. The phase structure introduces an amount of spherical aberration in the second radiation beam for scanning the second type of record carriers for compensating the difference in spherical aberration required for scanning through the different thickness of the transparent layer (3; 41) of the first and second type of record carriers (2, 40). To reduce the amount of stray light on the detection system (25) from rays in the second radiation beam having a numerical aperture larger than the second numerical aperture, the phase grating introduces a discontinuity in the gradient of the wavefront deviation it introduces in the second radiation beam. The discontinuity allows spatial filtering in the plane of the detection system (25) of the desired and undesired rays of the second radiation beam.

      摘要翻译: 用于扫描第一和第二类型的光学记录载体(2; 40)的装置分别产生用于扫描第一和第二类型的记录载体的第一和第二辐射束,第一辐射束具有大于 第二辐射束的第二数值孔径。 该装置包括不影响第一辐射束的非周期相位结构。 相位结构在第二辐射束中引入一定量的球面像差,用于扫描第二类型的记录载体,用于补偿扫描通过第一和第二透明层(3; 41)的不同厚度所需的球面像差差 记录载体的类型(2,40)。 为了从具有大于第二数值孔径的数值孔径的第二辐射束中的射线减少检测系统(25)上的杂散光的量,相位光栅在其引入的波前偏差的梯度中引入不连续性 辐射束。 不连续性允许在第二辐射束的期望和不期望的光线的检测系统(25)的平面中进行空间滤波。

      Optical element
      116.
      发明授权
      Optical element 失效
      光学元件

      公开(公告)号:US06930973B2

      公开(公告)日:2005-08-16

      申请号:US09914091

      申请日:2000-12-19

      摘要: An optical element (16) introduces a first wavefront deviation when a first radiation beam having a first wavelength passes through it and a second wavefront deviation when a second radiation beam having a second wavelength different from the first wavelength passes through it. One surface of the optical element comprises a phase structure in the form of annular areas (52, 53, 54, 55), the areas forming a non-periodic pattern of optical paths of different length. The optical paths for the first wavelength form the first wavefront deviation and the optical paths for the second wavelength form the second wavefront deviation, the difference between the two deviations being proportional to the difference between the first and second wavelength.

      摘要翻译: 当具有第一波长的第一辐射束通过它时,光学元件(16)引入第一波前偏移,当具有不同于第一波长的第二波长的第二辐射束通过时,第二波前偏移通过第二波前偏移。 光学元件的一个表面包括环形区域(52,53,54,55)形式的相位结构,该区域形成不同长度的光路的非周期性图案。 用于第一波长的光路形成第一波前偏移,并且用于第二波长的光路形成第二波前偏移,两个偏差之间的差与第一和第二波长之间的差成比例。

      Optical scanning device
      117.
      发明授权
      Optical scanning device 失效
      光学扫描装置

      公开(公告)号:US06707607B2

      公开(公告)日:2004-03-16

      申请号:US09966411

      申请日:2001-09-28

      IPC分类号: G02B2744

      摘要: An optical scanning device for scanning optical record carriers with radiation of a selected wavelength, the device including an objective lens, having an axial direction and a radial direction, and a phase structure which is non-periodic with respect to the radial direction, the non-periodic phase structure being arranged to compensate for comatic aberrations generated in the objective lens when an optical record carrier is read in a direction which is non-axial with respect to said objective lens, whereby an improved field of view is provided for said objective lens.

      摘要翻译: 一种用于扫描具有所选波长的辐射的光学记录载体的光学扫描装置,该装置包括具有轴向和径向方向的物镜,以及相对于径向非周期性的相位结构, 所述非周期相位结构被配置为当在相对于所述物镜不是轴向的方向读取光学记录载体时补偿在所述物镜中产生的彗形像差,从而为所述物镜提供改进的视场 。

      Particle optical apparatus
      119.
      发明授权
      Particle optical apparatus 有权
      粒子光学仪器

      公开(公告)号:US06462332B1

      公开(公告)日:2002-10-08

      申请号:US09689059

      申请日:2000-10-12

      IPC分类号: H01S100

      摘要: A particle optical apparatus, such as an ion implantation apparatus, an Auger electron spectrometer, an XPS analysis apparatus, and the like, is provided with a radiation source by means of which a wafer or substrate brought into the apparatus can be bombarded by radiation providing for at least a positively charged surface layer of the wafer or substrate. The apparatus further comprises a charge neutralization device with means for providing secondary electron emission and transport means for transporting secondary electrons. This transport means device is provided with a hollow insulating structure for controlled electron transport based on secondary electron emission, particularly in the form of an electron fibre with electrodes at the entrance and exit. The exit of the electron fibre forms a clean secondary electron source.

      摘要翻译: 诸如离子注入装置,俄歇电子能谱仪,XPS分析装置等的粒子光学装置设置有辐射源,通过该辐射源,被带入设备中的晶片或衬底可以被辐射提供 用于晶片或衬底的至少带正电的表面层。 该装置还包括具有用于提供用于传输二次电子的二次电子发射和传输装置的装置的电荷中和装置。 该输送装置具有中空绝缘结构,用于基于二次电子发射的受控电子传输,特别是具有在入口和出口处具有电极的电子束的形式。 电子束的出口形成清洁的二次电子源。