MRAM having multilayered interconnect structures

    公开(公告)号:US11856867B2

    公开(公告)日:2023-12-26

    申请号:US17095752

    申请日:2020-11-12

    CPC classification number: H10N50/80 H10B61/20 H10B61/22 H10N50/01 H10N50/85

    Abstract: The present invention provides a semiconductor device and a method of forming the same, and the semiconductor device includes a substrate, a first interconnect layer and a second interconnect layer. The first interconnect layer is disposed on the substrate, and the first interconnect layer includes a first dielectric layer around a plurality of first magnetic tunneling junction (MTJ) structures. The second interconnect layer is disposed on the first interconnect layer, and the second interconnect layer includes a second dielectric layer around a plurality of second MTJ structures, wherein, the second MTJ structures and the first MTJ structures are alternately arranged along a direction. The semiconductor device may obtain a reduced size of each bit cell under a permissible process window, so as to improve the integration of components.

    SEMICONDUCTOR DEVICE
    116.
    发明公开

    公开(公告)号:US20230225221A1

    公开(公告)日:2023-07-13

    申请号:US18118669

    申请日:2023-03-07

    CPC classification number: H10N50/80 H10B61/00

    Abstract: A semiconductor device for internet of things (IoT) device includes a substrate having an array region defined thereon and a ring of dummy pattern surrounding the array region. Preferably, the ring of dummy pattern includes a plurality of magnetic tunneling junctions (MTJs) and a ring of metal interconnect pattern overlapping the MTJs and surrounding the array region. The semiconductor device further includes a gap between the array region and the ring of dummy pattern.

    Semiconductor device
    117.
    发明授权

    公开(公告)号:US11631803B2

    公开(公告)日:2023-04-18

    申请号:US17134485

    申请日:2020-12-27

    Abstract: A semiconductor device for internet of things (IoT) device includes a substrate having an array region defined thereon and a ring of dummy pattern surrounding the array region. Preferably, the ring of dummy pattern includes a plurality of magnetic tunneling junctions (MTJs) and a ring of metal interconnect pattern overlapping the MTJs and surrounding the array region. The semiconductor device further includes a gap between the array region and the ring of dummy pattern.

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