公开(公告)号：US4829822A

公开(公告)日：1989-05-16

申请号：US98050

申请日：1987-09-17

Applicant: Masahito Imai ,  Toshitaka Yamada ,  Tiaki Mizuno ,  Hirohito Shioya

Inventor： Masahito Imai ,  Toshitaka Yamada ,  Tiaki Mizuno ,  Hirohito Shioya

IPC: G01P1/00 ,  G01P15/08 ,  G01P15/12

CPC classification number: G01P15/0802 ,  G01P1/003 ,  G01P15/123 ,  G01P2015/0828

Abstract: A semiconductor accelerometer includes a package containing damping liquid. A base is fixedly disposed within the package. A semiconductor plate is disposed within the package and is supported on the base. The semiconductor plate has a movable free end and a deformable diaphragm. A semiconductor strain gauge is associated with the diaphragm and deforms in accordance with deformation of the diaphragm. The base has a first surface opposing the semiconductor plate free end. The first surface of the base has a recess for limiting movement of the semiconductor plate free end. The recess extends to and opens at a second surface of the base which differs from the first surface.

公开(公告)号：US4751849A

公开(公告)日：1988-06-21

申请号：US875327

申请日：1986-06-17

Applicant: Jerome M. Paros ,  Donald W. Busse ,  Martin D. Chinn ,  Walter P. Kistler ,  Richard B. Wearn, Jr.

Inventor： Jerome M. Paros ,  Donald W. Busse ,  Martin D. Chinn ,  Walter P. Kistler ,  Richard B. Wearn, Jr.

IPC: G01G3/16 ,  G01L1/16 ,  G01P15/097 ,  G01P15/10 ,  G01L1/10

CPC classification number: G01P15/097 ,  G01G3/16 ,  G01L1/162 ,  G01P2015/0828

Abstract: A load cell having single or multiple resonators arranged to receive a strain that is proportional to the strain in a beam to which the resonator(s) is attached. Arrangement of the multiple resonators with respect to a force-bearing beam of the cell determines whether the cell is a bending mode load cell or a shear mode load cell. Absolute and differential pressure sensors, accelerometers and weighing devices are disclosed which employ the multiple-resonators of the invention.

Abstract translation: 具有单个或多个谐振器的测力传感器被布置成接收与谐振器所附接的波束中的应变成比例的应变。 多个谐振器相对于电池的承力梁的布置确定电池是弯曲模式称重传感器还是剪切模式称重传感器。 公开了使用本发明的多谐振器的绝对压差传感器和差压传感器，加速度计和称重装置。

公开(公告)号：US4744249A

公开(公告)日：1988-05-17

申请号：US884115

申请日：1986-07-10

Applicant: Robert E. Stewart

Inventor： Robert E. Stewart

IPC: G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01P15/18 ,  G01P9/04

CPC classification number: G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  G01P15/18 ,  G01P2015/0828

Abstract: A vibrating multisensor, each using two accelerometers which are vibrated along straight lines perpendicular to their sensing axes. In one embodiment, the sensing axes are co-linear, and in another embodiment the sensing axes are perpendicular. The accelerometers preferably use a proof mass and flexure suspension made on a silicon wafer sandwiched between two other wafers that carry electrodes both for sensing displacement and forcing of the central accelerometer wafer.

Abstract translation: 振动多传感器，每个使用两个加速度计，它们沿着垂直于其感测轴的直线振动。 在一个实施例中，感测轴是共线的，在另一个实施例中，感测轴是垂直的。 加速度计优选地使用在夹在两个其它晶片之间的硅晶片上制成的检测质量和挠曲悬置，其中两个晶片携带用于感测中心加速度计晶片的位移和强制的电极。

公开(公告)号：US4744248A

公开(公告)日：1988-05-17

申请号：US66834

申请日：1987-06-25

Applicant: Robert E. Stewart

Inventor： Robert E. Stewart

IPC: G01P9/04 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01P15/18

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P15/131 ,  G01P15/18 ,  G01P2015/0828

Abstract: A vibrating multisensor, each using two accelerometers which are vibrated along straight lines perpendicular to their sensing axes. The sensing axes are co-linear, the accelerometers are vibrated in phase opposition along parallel axes. The accelerometers preferably use a proof mass and flexure suspension made on a silicon wafer sandwiched between two other wafers that carry electrodes both for sensing displacement and forcing of the central accelerometer wafer.

Abstract translation: 振动多传感器，每个使用两个加速度计，它们沿着垂直于其感测轴的直线振动。 感测轴是共线的，加速度计沿着平行轴相位振动。 加速度计优选地使用在夹在两个其它晶片之间的硅晶片上制成的检测质量和挠曲悬置，其中两个晶片携带用于感测中心加速度计晶片的位移和强制的电极。

公开(公告)号：US4736629A

公开(公告)日：1988-04-12

申请号：US812137

申请日：1985-12-20

Applicant: John C. Cole

Inventor： John C. Cole

IPC: G01P15/08 ,  G01P15/125

CPC classification number: G01P15/0802 ,  G01P15/125 ,  G01P2015/0828 ,  G01P2015/0831

Abstract: The accelerometer comprises a substrate (52), a metallic movable plate (50), and a mounting system (54) for mounting the movable plate such that it is positioned above the substrate and can rotate about a flexure axis (64) that is above and is substantially parallel to the substrate. The flexure axis divides the sensing element into first (66) and second (68) sections. The total moments of the first and second sections about the flexure axis are different, such that acceleration normal to the substrate tends to rotate the sensing element about the flexure axis. A first electrode (74) is mounted by the substrate adjacent the first section to form a first capacitor (C.sub.A), and a second electrode (76) is mounted by the substrate adjacent the second section to form a second capacitor (C.sub.B). A detector for measuring the relative capacitances of the first and second capacitors is provided comprising an integrator (166), an inverting amplifier (168), and switches (160, 162, 164) for periodically charging and discharging the capacitors in response to a clock signal. In one embodiment, the sensing element includes an internal opening (16, 56, 126) and the mounting system is positioned within the opening and includes a pedestal mounted to the substrate, and torsion bars (20, 22, 118, 120) and/or a beam (60, 114) connecting the pedestal to the sensing element. The sensing element preferably comprises a metallic plate, and the substrate preferably comprises a semiconductor upon which the detector and electrodes are fabricated in a single step process requiring no final assembly of components. In an embodiment adapted for high g applications, a pedestal (146) divides a plate member into first (148) and second (150) cantilevered beams that flex in the same direction in response to a given acceleration.

Abstract translation: 加速度计包括基底（52），金属可动板（50）和用于安装可移动板的安装系统（54），使得其位于基底上方并且可围绕上方的挠曲轴线（64）旋转 并且基本上平行于衬底。 挠曲轴将感测元件分成第一（66）和第二（68）部分。 围绕挠曲轴线的第一和第二部分的总力矩是不同的，使得垂直于衬底的加速度倾向于使感测元件围绕挠曲轴线旋转。 第一电极（74）由邻近第一部分的衬底安装以形成第一电容器（CA），并且第二电极（76）由邻近第二部分的衬底安装以形成第二电容器（CB）。 提供了一种用于测量第一和第二电容器的相对电容的检测器，包括积分器（166），反相放大器（168）和用于响应于时钟周期性地对电容器进行充电和放电的开关（160,162,164） 信号。 在一个实施例中，感测元件包括内部开口（16,56,126），并且安装系统定位在开口内，并且包括安装到基板的基座和扭杆（20,22，118,120）和/ 或将基座连接到感测元件的梁（60,114）。 感测元件优选地包括金属板，并且衬底优选地包括半导体，在该半导体上，检测器和电极以不需要组件的最终组装的单步骤工艺制造。 在适于高应用的实施例中，基座（146）将板构件分隔成响应于给定加速度在相同方向上弯曲的第一（148）和第二（150）悬臂梁。

公开(公告)号：US4718275A

公开(公告)日：1988-01-12

申请号：US879290

申请日：1986-06-27

Applicant: Brian L. Norling

Inventor： Brian L. Norling

IPC: G01P1/00 ,  G01P15/097 ,  G01P15/10

CPC classification number: G01P15/097 ,  G01P1/006 ,  G01P2015/0828

Abstract: An accelerometer with a pivoting beam to accommodate differential thermal effects. The accelerometer measures acceleration along a sensitive axis, and comprises a housing, a proof mass, support means and a coupling assembly. The support means mounts the proof mass with respect to the housing. The coupling assembly is connected to the proof mass and housing, and comprises a beam and first and second force sensing elements. The beam is mounted for pivotal movement about a compensation axis normal to the sensitive axis. The first and second force sensing elements are connected to the pivot member at spaced-apart connection points on opposite sides of the compensation axis from one another, such that an acceleration along the sensitive axis results in respective compression and tension forces on the force sensing elements, and such that differential thermal expansion results in rotation of the beam about the compensation axis.

Abstract translation: 具有枢转梁的加速度计，以适应不同的热效应。 加速度计测量沿着敏感轴的加速度，并且包括壳体，检测质量块，支撑装置和联接组件。 支撑装置相对于壳体安装证明物质。 联接组件连接到检验质量和壳体，并且包括梁和第一和第二力感测元件。 梁被安装成围绕垂直于敏感轴线的补偿轴线枢转运动。 第一和第二力感测元件在补偿轴线的相对侧上的间隔开的连接点处连接到枢转构件，使得沿着敏感轴的加速度导致力感测元件上的相应压缩和拉力 并且使得差分热膨胀导致光束绕补偿轴的旋转。

公开(公告)号：US4628735A

公开(公告)日：1986-12-16

申请号：US681564

申请日：1984-12-14

Applicant: Gordon S. Kirkpatrick

Inventor： Gordon S. Kirkpatrick

IPC: G01P15/097 ,  G01P15/10

CPC classification number: G01P15/097 ,  G01P2015/0828

Abstract: The elimination of activity dips in the output of vibrating beam accelerometers has often required an adjustment of parameters in conflict with other design criteria. This problem is overcome by the present accelerometer that comprises a pendulum (48) and a force transducer. The pendulum has first (49) and second (52) ends and a first axis (P) extending between the first and second ends. The pendulum is hingedly connected at its first end to a support (50) along a second axis (F) perpendicular to the first axis. The force transducer comprises an oscillator and a dual beam force sensing element (53) connected between the second end of the pendulum and the support. The point of connection of the force sensing element to the pendulum lies along the first axis. The force transducer is adapted for vibration over a predetermined operating range (44) of beam vibration frequencies. The second end of the pendulum is formed so as to cause the frequencies of pendulum vibration modes to lie outside the operating range, preferably by controlling the mass of the pendulum at the outer edges of the second end so as to cause the normal mode frequency of twisting vibration of the pendulum about the first axis to lie outside the operating range. In another aspect, the pendulum has a width dimension parallel to the second axis, and the width of the pendulum decreases from a point intermediate the ends of the pendulum to the second end.

Abstract translation: 消除振动束加速度计输出中的活动下降通常需要调整与其他设计标准相冲突的参数。 这个问题由包括摆锤（48）和力传感器的本加速度计克服。 钟摆具有第一（49）和第二（52）端部以及在第一和第二端之间延伸的第一轴线（P）。 钟摆在其第一端处沿着垂直于第一轴线的第二轴线（F）铰接地连接到支撑件（50）。 力传感器包括连接在摆锤的第二端和支撑件之间的振荡器和双梁力检测元件（53）。 力感测元件到摆的连接点位于第一轴上。 力传感器适于在光束振动频率的预定操作范围（44）上振动。 钟摆的第二端形成为使摆振动模式的频率位于工作范围之外，优选地通过在第二端的外边缘处控制摆锤的质量以使正常模式频率 钟摆绕第一轴的扭转振动超出工作范围。 在另一方面，钟摆具有平行于第二轴线的宽度尺寸，并且摆锤的宽度从摆锤的端部到第二端的点减小。

公开(公告)号：US4571661A

公开(公告)日：1986-02-18

申请号：US646166

申请日：1984-08-31

Applicant: Shigeo Hoshino

Inventor： Shigeo Hoshino

IPC: H01L27/04 ,  G01H1/00 ,  G01H11/00 ,  G01H11/06 ,  G01P15/08 ,  G01P15/125 ,  H01L21/306 ,  H01L21/822 ,  H01L29/84 ,  H04R19/00 ,  H01G7/00

CPC classification number: H01L29/84 ,  G01H11/06 ,  G01P15/0802 ,  G01P2015/0828 ,  H04R19/005

Abstract: A semiconductor vibration detection device according to the present invention includes a movable lever which is supported by the semiconductor base with at least one of its ends and includes a vibrating part that extends, with an incorporated electrode, approximately parallel to the semiconductor base, and a fixed electrode layer which is provided on the semiconductor base opposite to the movable lever. The movable lever has a triple layer structure in which the middle section is a polysilicon layer that is formed to be alkali-etching-proof and a top and a bottom layers that are sandwiching the middle layer are also of alkali-etching-proof.

Abstract translation: 根据本发明的半导体振动检测装置包括：活动杆，其由至少一个端部由半导体基座支撑，并且包括具有与内置电极大致平行于半导体基座的振动部，以及 固定电极层设置在与可动杆相对的半导体基座上。 可动杆具有三层结构，其中中间部分是形成为耐碱腐蚀的多晶硅层，并且夹在中间层的顶层和底层也具有耐碱腐蚀性。

公开(公告)号：US4517841A

公开(公告)日：1985-05-21

申请号：US456254

申请日：1983-01-06

Applicant: Rex B. Peters ,  Jeffrey F. Tonn ,  Arnold Malametz ,  Richard A. Hilliker ,  Victor B. Corey

Inventor： Rex B. Peters ,  Jeffrey F. Tonn ,  Arnold Malametz ,  Richard A. Hilliker ,  Victor B. Corey

IPC: G01P15/02 ,  G01P15/097 ,  G01P15/10

CPC classification number: G01P15/097 ,  G01P2015/0828 ,  Y10S73/01

Abstract: An accelerometer includes a hinged proof mass constrained from movement by a beam resonator force transducer. To afford greater movement of the proof mass and greater latitude in positioning mechanical stops, one end of the force transducer is connected with the accelerometer base through a compliant mount. The other end of the force transducer is connected with the proof mass at the center of percussion of the proof mass. Adjacent surfaces of the proof mass and base provide squeeze film viscous gas damping. A pair of proof mass-force transducer systems are mounted on a carrier in opposite positions with the sensitive axes of the proof masses aligned and the proof mass hinge axes parallel and opposed to each other.

Abstract translation: 一个加速度计包括一个由梁谐振器力传感器运动限制的铰接证明质量。 为了在定位机械止动件时提供更大的检测质量的运动和更大的纬度，力传感器的一端通过柔性支架与加速度计基座连接。 力传感器的另一端与检验质量的撞击中心的检测质量块相连。 证明质量和基体的相邻表面提供挤压膜粘性气体阻尼。 一对检测质量传感器系统以相对的位置安装在载体上，其中检测质量块的敏感轴对齐，并且检验质量铰链轴彼此平行和相对。

公开(公告)号：US4345474A

公开(公告)日：1982-08-24

申请号：US138731

申请日：1980-04-09

Applicant: Alain Deval

Inventor： Alain Deval

IPC: G01P15/13

CPC classification number: G01P15/131 ,  G01P2015/0828

Abstract: A pendulous accelerometer comprises a stator defining a cavity having two nfronting surfaces which constitute two electrodes.It also comprises a pendulum consisting of a disc connected to the stator by a hinge. A servo-circuit applies DC forces to the capacitors, each comprising a surface of the cavity and the confronting electrically conductor surface of the pendulum for creating an electrostatic torque which balances the acceleration torque.

Abstract translation: 下摆加速度计包括限定具有构成两个电极的两个相对表面的空腔的定子。 它还包括由通过铰链连接到定子的盘构成的摆。 伺服电路向电容器施加DC力，每个电容器包括空腔的表面和摆锤的面对的电导体表面，用于产生平衡加速扭矩的静电转矩。