公开(公告)号：US11688450B2

公开(公告)日：2023-06-27

申请号：US17186962

申请日：2021-02-26

Applicant: Micron Technology, Inc.

Inventor： Kamal M. Karda ,  Haitao Liu ,  Karthik Sarpatwari ,  Durai Vishak Nirmal Ramaswamy ,  Alessandro Calderoni ,  Richard E Fackenthal ,  Duane R. Mills

IPC: G11C11/404

CPC classification number: G11C11/404

Abstract: Some embodiments include apparatuses in which one of such apparatus includes a first memory cell including a first transistor having a first channel region coupled between a data line and a conductive region, and a first charge storage structure located between the first data line and the conductive region, and a second transistor having a second channel region coupled to and located between the first data line and the first charge storage structure; a second memory cell including a third transistor having a third channel region coupled between a second data line and the conductive region, and a second charge storage structure located between the second data line and the conductive region, and a fourth transistor having a fourth channel region coupled to and located between the second data line and the second charge storage structure; a conductive line forming a gate of each of the first, second, third, and fourth transistors; and a conductive structure located between the first and second charge storage structures and electrically separated from the conductive region.

公开(公告)号：US11665880B2

公开(公告)日：2023-05-30

申请号：US17003037

申请日：2020-08-26

Applicant: Micron Technology, Inc.

Inventor： Kamal M. Karda ,  Karthik Sarpatwari ,  Haitao Liu ,  Durai Vishak Nirmal Ramaswamy

IPC: H01L27/108 ,  G11C11/401

CPC classification number: H01L27/10802 ,  G11C11/401

Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a substrate, a conductive plate located over the substrate to couple a ground connection, a data line located between the substrate and the conductive plate, a memory cell, and a conductive line. The memory cell includes a first transistor and a second transistor. The first transistor includes a first region electrically coupled between the data line and the conductive plate, and a charge storage structure electrically separated from the first region. The second transistor includes a second region electrically coupled to the charge storage structure and the data line. The conductive line is electrically separated from the first and second regions and spans across part of the first region of the first transistor and part of the second region of the second transistor and forming a gate of the first and second transistors.

公开(公告)号：US11594644B2

公开(公告)日：2023-02-28

申请号：US16682617

申请日：2019-11-13

Applicant: Micron Technology, Inc.

Inventor： Kamal M. Karda ,  Haitao Liu

IPC: H01L29/786 ,  H01L29/66

Abstract: A microelectronic device comprises a conductive line and a transistor adjacent to the conductive line. The transistor comprises a channel material extending into the conductive line, the channel material contacting the conductive line in three dimensions, a dielectric material adjacent to the channel material, a conductive material adjacent to the dielectric material, and a passivation material adjacent to the channel material. The microelectronic device further comprises a conductive contact adjacent to the channel material, the conductive contact including a portion extending between opposing portions of the channel material. Related microelectronic devices, electronic devices, and related methods are also disclosed.

公开(公告)号：US11557592B2

公开(公告)日：2023-01-17

申请号：US17065711

申请日：2020-10-08

Applicant: Micron Technology, Inc.

Inventor： Fatma Arzum Simsek-Ege ,  Kamal M. Karda ,  Haitao Liu

IPC: H01L27/108 ,  H01L21/285 ,  H01L21/28

Abstract: An example apparatus includes a first source/drain region and a second source/drain region formed in a substrate. The first source/drain region and the second source/drain region are separated by a channel. The apparatus includes a gate opposing the channel. The gate includes noble metal nanoparticles. A sense line is coupled to the first source/drain region and a storage node is coupled to the second source/drain region.

公开(公告)号：US20220406941A1

公开(公告)日：2022-12-22

申请号：US17821414

申请日：2022-08-22

Applicant: Micron Technology, Inc.

Inventor： Kamal M. Karda ,  Guangyu Huang ,  Haitao Liu ,  Akira Goda

IPC: H01L29/786 ,  H01L27/11529 ,  H01L27/11573 ,  H01L29/66

Abstract: A transistor comprises a lower contact structure, a channel structure, a dielectric fill structure, and an upper contact structure. The lower contact structure comprises a first oxide semiconductive material. The channel structure contacts the lower contact structure and comprises a second oxide semiconductive material having a smaller atomic concentration of one or more metals than the first oxide semiconductive material. The dielectric fill structure contacts an inner side surface of the channel structure and has a recessed upper surface relative to the channel structure. The upper contact structure comprises a third oxide semiconductive material having a greater atomic concentration of the one or more metals than the channel structure. The upper contact structure comprises a first portion contacting the upper surface of the dielectric fill structure and the inner side surface of the channel structure, and a second portion contacting the upper surface of the channel structure.

公开(公告)号：US20220278112A1

公开(公告)日：2022-09-01

申请号：US17186962

申请日：2021-02-26

Applicant: Micron Technology, Inc.

Inventor： Kamal M. Karda ,  Haitao Liu ,  Karthik Sarpatwari ,  Durai Vishak Nirmal Ramaswamy ,  Alessandro Calderoni ,  Richard E. Fackenthal ,  Duane R. Mills

IPC: H01L27/1156 ,  H01L29/24 ,  H01L29/786

Abstract: Some embodiments include apparatuses in which one of such apparatus includes a first memory cell including a first transistor having a first channel region coupled between a data line and a conductive region, and a first charge storage structure located between the first data line and the conductive region, and a second transistor having a second channel region coupled to and located between the first data line and the first charge storage structure; a second memory cell including a third transistor having a third channel region coupled between a second data line and the conductive region, and a second charge storage structure located between the second data line and the conductive region, and a fourth transistor having a fourth channel region coupled to and located between the second data line and the second charge storage structure; a conductive line forming a gate of each of the first, second, third, and fourth transistors; and a conductive structure located between the first and second charge storage structures and electrically separated from the conductive region.

公开(公告)号：US20220262813A1

公开(公告)日：2022-08-18

申请号：US17734410

申请日：2022-05-02

Applicant: Micron Technology, Inc.

Inventor： Kamal M. Karda ,  Haitao Liu ,  Durai Vishak Nirmal Ramaswamy ,  Yunfei Gao ,  Sanh D. Tang ,  Deepak Chandra Pandey

IPC: H01L27/11556 ,  G11C5/06 ,  G11C5/02 ,  H01L27/11582

Abstract: Some embodiments include an integrated assembly having a carrier-sink-structure, and having digit lines over the carrier-sink-structure. Transistor body regions are over the digit lines. Extensions extend from the carrier-sink-structure to the transistor body regions. The extensions are configured to drain excess carriers from the transistor body regions. Lower source/drain regions are between the transistor body regions and the digit lines, and are coupled with the digit lines. Upper source/drain regions are over the transistor body regions, and are coupled with storage elements. Gates are adjacent the transistor body regions. The transistor body regions, lower source/drain regions and upper source/drain regions are together comprised a plurality of transistors. The transistors and the storage elements are together comprised by a plurality of memory cells of a memory array. Some embodiments include methods of forming integrated assemblies.

公开(公告)号：US11417730B2

公开(公告)日：2022-08-16

申请号：US16986436

申请日：2020-08-06

Applicant: Micron Technology, Inc.

Inventor： Manuj Nahar ,  Vassil N. Antonov ,  Kamal M. Karda ,  Michael Mutch ,  Hung-Wei Liu ,  Jeffery B. Hull

IPC: H01L29/08 ,  H01L29/66 ,  H01L29/06 ,  H01L29/78 ,  H01L29/04 ,  H01L21/02

Abstract: A transistor comprises a top source/drain region, a bottom source/drain region, a channel region vertically between the top and bottom source/drain regions, and a gate operatively laterally-adjacent the channel region. The channel region is crystalline and comprises a plurality of vertically-elongated crystal grains that individually are directly against both of the top source/drain region and the bottom source/drain region. Other embodiments, including methods, are disclosed.

公开(公告)号：US11348932B2

公开(公告)日：2022-05-31

申请号：US16810009

申请日：2020-03-05

Applicant: Micron Technology, Inc.

Inventor： Kamal M. Karda ,  Haitao Liu ,  Durai Vishak Nirmal Ramaswamy ,  Yunfei Gao ,  Sanh D. Tang ,  Deepak Chandra Pandey

IPC: H01L27/11556 ,  G11C5/06 ,  G11C5/02 ,  H01L27/11582

Abstract: Some embodiments include an integrated assembly having a carrier-sink-structure, and having digit lines over the carrier-sink-structure. Transistor body regions are over the digit lines. Extensions extend from the carrier-sink-structure to the transistor body regions. The extensions are configured to drain excess carriers from the transistor body regions. Lower source/drain regions are between the transistor body regions and the digit lines, and are coupled with the digit lines. Upper source/drain regions are over the transistor body regions, and are coupled with storage elements. Gates are adjacent the transistor body regions. The transistor body regions, lower source/drain regions and upper source/drain regions are together comprised a plurality of transistors. The transistors and the storage elements are together comprised by a plurality of memory cells of a memory array. Some embodiments include methods of forming integrated assemblies.

公开(公告)号：US20220122998A1

公开(公告)日：2022-04-21

申请号：US17561579

申请日：2021-12-23

Applicant: Micron Technology, Inc.

Inventor： Kamal M. Karda ,  Qian Tao ,  Durai Vishak Nirmal Ramaswamy ,  Haitao Liu ,  Kirk D. Prall ,  Ashonita Chavan

IPC: H01L27/11502 ,  H01L27/11507 ,  H01L49/02 ,  H01G4/33 ,  H01G4/40 ,  H01G4/008 ,  H01G4/08 ,  H01L27/108

Abstract: A memory cell includes a select device and a capacitor electrically coupled in series with the select device. The capacitor includes two conductive capacitor electrodes having ferroelectric material there-between. The capacitor has an intrinsic current leakage path from one of the capacitor electrodes to the other through the ferroelectric material. There is a parallel current leakage path from the one capacitor electrode to the other. The parallel current leakage path is circuit-parallel the intrinsic path and of lower total resistance than the intrinsic path. Other aspects are disclosed.