公开(公告)号：US11725557B2

公开(公告)日：2023-08-15

申请号：US17655047

申请日：2022-03-16

Applicant: NGK Insulators, Ltd.

Inventor： Hirotaka Saito ,  Naoki Yoshida

IPC: F01N3/20 ,  F01N3/28

CPC classification number: F01N3/2026 ,  F01N3/281 ,  F01N2240/16 ,  F01N2330/02 ,  F01N2330/30

Abstract: An electric heating type carrier including a conductive honeycomb structure portion and a pair of electrode layers, wherein in a cross-section orthogonal to the direction in which the cells extend, the honeycomb structure portion is classified into following three regions: a first resistance region having a contact portion with a first electrode layer, a second resistance region having a contact portion with a second electrode layer, and a third resistance region that does not come into contact with either the first electrode layer or the second electrode layer, and traverses the cross-section so as to be sandwiched between the first resistance region and the second resistance region, and has a higher electrical resistance per unit volume (1 cm3) than an electrical resistance per unit volume (1 cm3) of the first resistance region and the second resistance region.

公开(公告)号：US20230243775A1

公开(公告)日：2023-08-03

申请号：US18102796

申请日：2023-01-30

Applicant: NGK Insulators, Ltd.

Inventor： Yusuke WATANABE ,  Shotaro NIIZUMA ,  Toshihiro HIRAKAWA

IPC: G01N27/407

CPC classification number: G01N27/4077 ,  G01N27/4071

Abstract: A gas sensor element capable of preventing a decrease in responsiveness despite a protective layer covering a gas introduction opening is provided. A gas sensor element according to an aspect of the present invention includes an element base having a surface in which a gas introduction opening is open, a protective layer, a buffer layer, and a gas introduction layer that is disposed between the element base and the buffer layer. The gas introduction layer covers the gas introduction opening, is in contact with the protective layer, and has a porosity that is 30% or more and is higher by 5% or more than the porosity of the buffer layer.

公开(公告)号：US20230238258A1

公开(公告)日：2023-07-27

申请号：US17929043

申请日：2022-09-01

Applicant: NGK Insulators, Ltd.

Inventor： Seiya INOUE ,  Tatsuya KUNO

IPC: H01L21/67 ,  H01L21/687 ,  H01J37/32

CPC classification number: H01L21/67109 ,  H01L21/68785 ,  H01J37/32642 ,  H01J37/32724 ,  H01J37/32532

Abstract: A wafer placement table includes a ceramic base having a wafer placement surface on its top surface and incorporating an electrode, a cooling base provided on a bottom surface side of the ceramic base, and a refrigerant flow channel groove provided in the cooling base so as to open at a bottom surface of the cooling base.

公开(公告)号：US20230228702A1

公开(公告)日：2023-07-20

申请号：US18154357

申请日：2023-01-13

Applicant: NGK Insulators, Ltd.

Inventor： Yusuke WATANABE ,  Yasumasa FUJIOKA ,  Yohei GORO ,  Akihiro NAKAJIMA ,  Shotaro NIIZUMA

IPC: G01N27/409 ,  G01N27/41 ,  G01N33/00 ,  G01N27/406

CPC classification number: G01N27/409 ,  G01N27/41 ,  G01N33/0037 ,  G01N27/4067

Abstract: Provided is a gas sensor element capable of realizing highly accurate concentration measurement in both environments where the concentration of a specific gas in a measurement target gas is high and where the concentration is low. A gas sensor according to one aspect of the present invention determines whether the concentration of a predetermined gas component in a measurement target gas is higher or lower than a predetermined concentration. If it is determined that the concentration is lower, a specific temperature that a sensor element is to reach as a result of being heated by a heater unit is set to be lower than the specific temperature set if it is determined that the concentration is higher.

公开(公告)号：US20230228701A1

公开(公告)日：2023-07-20

申请号：US18082461

申请日：2022-12-15

Applicant: NGK INSULATORS, LTD.

Inventor： Shintaro MAKI ,  Kota KATAGIRI ,  Kohei YAITA ,  Yuya SEIKE

IPC: G01N27/407 ,  G01M15/10 ,  G01N27/406

CPC classification number: G01N27/407 ,  G01M15/102 ,  G01N27/4062

Abstract: A gas sensor for sensing a predetermined gas component contained in a measurement gas includes: a sensor element including a sensing part on one end portion thereof; a casing in which the sensor element is contained and secured; and a connector disposed in the casing, wherein the casing includes: an outer tube including a main portion in which a reference gas is included and a sealing portion as an end portion with a diameter smaller than the main portion so that another end portion of the sensor element protrudes to the main portion, a rubber seal member fitted into the sealing portion to seal the outer tube, and a spacer intervening between the seal member and the connector, and the spacer includes: a resin first spacer contacting with the seal member and having higher heat resistance than the seal member and a ceramic second spacer contacting with the connector.

公开(公告)号：US20230223291A1

公开(公告)日：2023-07-13

申请号：US18048967

申请日：2022-10-24

Applicant: NGK Insulators, Ltd.

Inventor： Seiya INOUE ,  Tatsuya KUNO ,  Natsuki HIRATA

IPC: H01L21/683 ,  H01J37/32

CPC classification number: H01L21/6833 ,  H01J37/32724 ,  H01J37/3244 ,  H01J2237/2007

Abstract: A member for semiconductor manufacturing apparatus includes a ceramic plate that has an upper surface including a wafer placement surface and resin porous plugs that have upper surfaces that are exposed from the wafer placement surface. The resin porous plugs are press-fitted and secured in plug insertion holes that extend through the ceramic plate in an up-down direction and allow gas to flow.

公开(公告)号：US20230215969A9

公开(公告)日：2023-07-06

申请号：US17691434

申请日：2022-03-10

Applicant: NGK INSULATORS, LTD.

Inventor： Masahiro SAKAI ,  Takayuki HIRAO ,  Hirokazu NAKANISHI ,  Mikiya ICHIMURA ,  Takanao SHIMODAIRA ,  Takashi YOSHINO ,  Katsuhiro IMAI ,  Yoshitaka KURAOKA

IPC: H01L33/00 ,  C30B29/38 ,  H01L33/32

CPC classification number: H01L33/0075 ,  C30B29/38 ,  H01L33/0095 ,  H01L33/32

Abstract: It is provided a seed crystal layer, composed of a group 13 nitride crystal selected from gallium nitride, aluminum nitride, indium nitride or the mixed crystals thereof, on an alumina layer on a single crystal substrate. By annealing under reducing atmosphere at a temperature of 950° C. or higher and 1200° C. or lower, convex-concave morphology is formed on a surface of the seed crystal layer so as to have an RMS value of 180 nm to 700 nm measured by an atomic force microscope. On the surface of the seed crystal layer, it is grown a group 13 nitride crystal layer composed of a group 13 nitride crystal selected from gallium nitride, aluminum nitride, indium nitride or the mixed crystals thereof.

公开(公告)号：US20230194462A1

公开(公告)日：2023-06-22

申请号：US18079035

申请日：2022-12-12

Applicant: NGK INSULATORS, LTD.

Inventor： Yusuke WATANABE ,  Daichi ICHIKAWA ,  Kodai ICHIKAWA ,  Takayuki SEKIYA

IPC: G01N27/409 ,  G01N33/00

CPC classification number: G01N27/409 ,  G01N33/0027

Abstract: A gas sensor includes a sensor element and a control unit for controlling the sensor element. The sensor element includes: an adjustment pump cell for adjusting an oxygen concentration in a measurement-object gas to a desired concentration; a current measurement pump cell for detecting a target gas to be measured in the measurement-object gas as a current value, the current measurement pump cell including: an inner measurement electrode and an outer measurement electrode; a reference electrode; and an electromotive force detection sensor cell for detecting an electromotive force value between the inner measurement electrode and the reference electrode. The control unit includes a switching unit for switching whether a current flows through the current measurement pump cell or not.

公开(公告)号：US11680926B2

公开(公告)日：2023-06-20

申请号：US17170940

申请日：2021-02-09

Applicant: NGK INSULATORS, LTD.

Inventor： Taku Okamoto ,  Yuichiro Kondo ,  Osamu Nakasone

IPC: G01N27/41 ,  G01N27/406

CPC classification number: G01N27/41 ,  G01N27/4062 ,  G01N27/4065 ,  G01N27/4067

Abstract: A gas sensor includes a sensor element including an element body, a first electrode, a second electrode, and a heater; a voltage acquisition section that acquires a voltage between the first electrode and the second electrode; a heater power supply; an external common lead that serves as both at least part of an electric circuit used to acquire the voltage by providing electrical continuity between the first electrode and the voltage acquisition section and at least part of an electric circuit used to supply an electric power from the heater power supply to the heater and that is disposed outside the sensor element; and a correction section that derives a value of a voltage drop in the external common lead in accordance with a heater current and that corrects the voltage acquired by the voltage acquisition section in accordance with the derived value of the voltage drop.

公开(公告)号：US11666890B2

公开(公告)日：2023-06-06

申请号：US16807397

申请日：2020-03-03

Applicant: NGK INSULATORS, LTD.

Inventor： Yunie Izumi ,  Kenichi Hidaka

IPC: B01J23/34 ,  B01J21/04 ,  B01J35/04 ,  B01J35/02 ,  B01J35/06 ,  B01D53/94

CPC classification number: B01J23/34 ,  B01J21/04 ,  B01J35/026 ,  B01J35/04 ,  B01J35/06 ,  B01D53/944 ,  B01D53/9431 ,  B01D2255/2073 ,  B01D2255/20776

Abstract: A porous ceramic structure with low pressure loss and high catalytic performance is provided. The porous ceramic structure includes a porous structure body (i.e., honeycomb structure) composed primarily of cordierite, and manganese (Mn) and tungsten (W) that are fixedly attached to the honeycomb structure. Thus, pressure loss in the porous ceramic structure can be reduced, and an NO combustion temperature in the porous ceramic structure can be lowered. In other words, the aforementioned structure of the porous ceramic structure allows the porous ceramic structure to have low pressure loss and high catalytic performance.