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公开(公告)号：US20100213069A1
公开(公告)日：2010-08-26
申请号：US12712045
申请日：2010-02-24
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G11B5/855 , Y10T428/24612
摘要： According to one embodiment, a master plate for producing a stamper includes a substrate, and patterns of protrusions and recesses formed on the substrate and corresponding to patterns of recording tracks or recording bits in data areas and to information in servo areas, in which the protrusion has a structure in which a first metal layer, a silicon layer and a second metal layer are stacked on the substrate and a metal oxide film is formed on a surface of the protrusion.
摘要翻译： 根据一个实施例，用于制造压模的主板包括基板，并且形成在基板上并对应于数据区域中的记录轨迹或记录位的图案以及伺服区域中的信息的突起和凹陷的图案，其中突起 具有在基板上层叠第一金属层，硅层和第二金属层的结构，在突起的表面上形成金属氧化物膜。
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公开(公告)号：US07738203B2
公开(公告)日：2010-06-15
申请号：US11092682
申请日：2005-03-30
摘要： A magnetic recording medium has a RAM region and a ROM region. The RAM region includes a plurality of first tracks each having a first magnetic portion. The first magnetic portions in adjacent tracks are separated from each other. The ROM region includes a plurality of second tracks each having a second magnetic portion. A width of the second magnetic portions in a direction perpendicular to a track direction of the first tracks is larger than that of the first magnetic portions in the perpendicular direction.
摘要翻译： 磁记录介质具有RAM区域和ROM区域。 RAM区域包括多个具有第一磁性部分的第一轨道。 相邻轨道中的第一磁性部分彼此分离。 ROM区域包括多个具有第二磁性部分的第二磁道。 第二磁性部分在与第一磁道的轨道方向垂直的方向上的宽度大于垂直方向上的第一磁性部分的宽度。
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133.发明授权Stamper for magnetic recording media, method of manufacturing magnetic recording media using the same, and method of manufacturing stamper for magnetic recording media 失效用于磁记录介质的压模，使用该磁记录介质的磁记录介质的制造方法以及制造用于磁记录介质的压模的方法公开(公告)号：US07708543B2
公开(公告)日：2010-05-04
申请号：US11527467
申请日：2006-09-27
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/855 , Y10S425/81
摘要： According to one embodiment, a stamper for a magnetic recording media has patterns of protrusions and recesses to manufacture a discrete track recording type magnetic recording media having servo areas including an address portion, a preamble portion and a burst portion, and data areas including a recording track portion, the patterns of protrusions and recesses being formed at a pitch of 400 nm or less, in which a magnitude relation of depths of recesses corresponding to the address portion, the preamble portion, the burst portion and the recording track portion is inverted to a magnitude relation of area ratios of the protrusions to the recesses in the address portion, the preamble portion, the burst portion and the recording track portion.
摘要翻译： 根据一个实施例，用于磁记录介质的压模具有突起和凹槽的图案，以制造具有包括地址部分，前导码部分和突发部分的伺服区域的离散轨道记录型磁记录介质，以及包括记录 轨道部分，以400nm或更小的间距形成的突起和凹陷的图案，其中对应于地址部分，前导码部分，突发部分和记录轨道部分的凹部的深度的大小关系被反转到 在地址部分，前导码部分，突发部分和记录轨道部分中的突起与凹部的面积比的大小关系。
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公开(公告)号：US20100084374A1
公开(公告)日：2010-04-08
申请号：US12638841
申请日：2009-12-15
IPC分类号： G11B5/84
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium comprises forming a protective film on a ferromagnetic recording layer containing Cobalt (Co) on a substrate and forming a recess in both the protective film and the ferromagnetic recording layer at a part where a nonmagnetic layer is to be formed. The method further comprises removing Co from a part of the recess of the ferromagnetic recording layer to form the nonmagnetic layer that separates magnetic patterns made of the ferromagnetic recording layer containing Co. The nonmagnetic layer has an identical chemical composition as the ferromagnetic recording layer, except for the nonmagnetic layer having a lower Co concentration than the magnetic patterns.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在包含钴（Co）的铁磁记录层上形成保护膜，并在保护膜和铁磁记录层中形成凹部， 将形成非磁性层。 该方法还包括从铁磁记录层的凹部的一部分去除Co以形成分离由含有Co的铁磁记录层制成的磁图案的非磁性层。非磁性层具有与铁磁记录层相同的化学成分， 对于具有比磁图案低的Co浓度的非磁性层。
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公开(公告)号：US20100072069A1
公开(公告)日：2010-03-25
申请号：US12585756
申请日：2009-09-24
IPC分类号： C25D1/10
摘要： A method for manufacturing an imprint stamper includes the steps of forming a first electroformed layer on a concavo-convex pattern of an original disk with the pattern, peeling off the first electroformed layer to provide a first stamper, forming a second electroformed layer on a concavo-convex pattern of the first stamper, peeling off the second electroformed layer to provide a second stamper, forming a third electroformed layer on a concavo-convex pattern of the second stamper, and peeling off the third electroformed layer to provide a third stamper. In addition, a conductive film is formed at least on one of a bottom of the concave portion and a top surface of the convex portion of the concavo-convex pattern at least in one of the first stamper and the second stamper.
摘要翻译： 压印模具的制造方法包括以下步骤：在具有图案的原盘的凹凸图案上形成第一电铸层，剥离第一电铸层以提供第一压模，在凹凸上形成第二电铸层 - 剥离第二电铸层以提供第二压模，在第二压模的凹凸图案上形成第三电铸层，以及剥离第三电铸层以提供第三压模。 此外，至少在第一压模和第二压模之一中，至少在凹部的底部和凹凸图案的凸部的顶表面中的至少一个上形成导电膜。
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公开(公告)号：US20100006537A1
公开(公告)日：2010-01-14
申请号：US12561151
申请日：2009-09-16
申请人： Yoshiyuki KAMATA , Akira KIKITSU , Yosuke ISOWAKI , Kaori KIMURA , Satoshi SHIROTORI , Masatoshi SAKURAI
发明人： Yoshiyuki KAMATA , Akira KIKITSU , Yosuke ISOWAKI , Kaori KIMURA , Satoshi SHIROTORI , Masatoshi SAKURAI
IPC分类号： B44C1/22
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes depositing a magnetic recording layer on a substrate, the magnetic recording layer having a multi-layered structure of two or more layers at least one layer of which has a granular structure including CoCrPt alloy and SiO2, TiO2, CrO2, CoO2 or Ta2O5, forming masks on areas corresponding to recording regions of the magnetic recording layer, partially etching the magnetic recording layer in areas not covered with the masks with an etching gas to expose the granular layer of the magnetic recording layer and to form protrusions and recesses on the magnetic recording layer, modifying the granular layer of the magnetic recording layer remaining in the recesses with modifying gas, promoting modification reaction to form non-recording regions, and forming a protective film on an entire surface.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在基片上沉积磁记录层，该磁记录层具有两层或更多层的多层结构，其至少一层具有包括CoCrPt 合金和SiO 2，TiO 2，CrO 2，CoO 2或Ta 2 O 5，在与磁记录层的记录区相对应的区域上形成掩模，用蚀刻气体部分蚀刻未被掩模覆盖的区域中的磁记录层，以暴露出 磁记录层，并在磁记录层上形成凸起和凹槽，用改性气体改性残留在凹槽中的磁记录层的颗粒层，促进改性反应形成非记录区，并在整体上形成保护膜 表面。
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137.发明授权Patterned magnetic recording media, stamper for manufacture of patterned magnetic recording media, method of manufacturing patterned magnetic recording media, and magnetic recording/reproduction apparatus 有权图案化磁记录介质，用于制造图案化磁记录介质的压模，图案化磁记录介质的制造方法和磁记录/再现装置公开(公告)号：US07625645B2
公开(公告)日：2009-12-01
申请号：US11341569
申请日：2006-01-30
IPC分类号： G11B5/66
CPC分类号： G11B5/855
摘要： According to one embodiment, a patterned magnetic recording media has a magnetic recording layer and a protective layer formed on a substrate, in which the magnetic recording layer including a magnetic material patterned in tracks and a nonmagnetic material filled in between the tracks in a data area, and has a recessed portion formed in an area within 1 mm from an outer media end and extending to the media end. The recessed portion being formed 1 to 50 nm deeper than the data area.
摘要翻译： 根据一个实施例，图案化磁记录介质具有形成在基板上的磁记录层和保护层，其中磁记录层包括图案化在磁道中的磁性材料和填充在数据区域中的轨道之间的非磁性材料 并且具有形成在距离外部介质端1mm并且延伸到介质端的区域中的凹部。 凹陷部分比数据区域深1至50nm。
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138.发明授权Method of forming patterns and method of manufacturing magnetic recording media 失效形成图案的方法和制造磁记录介质的方法公开(公告)号：US07618549B2
公开(公告)日：2009-11-17
申请号：US11580862
申请日：2006-10-16
IPC分类号： B44C1/22
CPC分类号： C23F4/00 , B82Y10/00 , C23C2/02 , C23C2/26 , C23C4/02 , C23C4/18 , G03F7/0046 , G11B5/74 , G11B5/743 , G11B5/82 , G11B5/855 , H01F41/34
摘要： According to one embodiment, a method of forming patterns is provided, in which the method including forming a resist on an underlying material, pressing a stamper having patterns of protrusions and recesses, sidewalls of which protrusions are tapered, onto the resist to form a patterned resist having patterns of protrusions and recesses, sidewalls of which protrusions are tapered, forming a protective film on the patterned resist, performing anisotropic etching to leave the protective film on the tapered sidewalls of protrusions of the patterned resist, etching a resist residue remaining in recesses of the patterned resist using the protective film as a mask, and etching the underlying material using the protective film and the patterned resist as a mask.
摘要翻译： 根据一个实施例，提供了一种形成图案的方法，其中所述方法包括在下层材料上形成抗蚀剂，将具有突起和凹陷图案的压模（其突出部分的锥形的侧壁）按压到抗蚀剂上以形成图案化 抗蚀剂具有突起和凹陷的图案，其侧壁突起成锥形，在图案化的抗蚀剂上形成保护膜，进行各向异性蚀刻以将保护膜留在图案化抗蚀剂的突起的锥形侧壁上，蚀刻保留在凹槽中的抗蚀剂残渣 使用保护膜作为掩模的图案化抗蚀剂，并使用保护膜和图案化的抗蚀剂作为掩模蚀刻下面的材料。
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139.发明申请公开(公告)号：US20090195925A1
公开(公告)日：2009-08-06
申请号：US12419052
申请日：2009-04-06
CPC分类号： G11B5/855
摘要： According to one embodiment, a patterned magnetic recording media has a magnetic recording layer and a protective layer formed on a substrate, in which the magnetic recording layer including a magnetic material patterned in tracks and a nonmagnetic material filled in between the tracks in a data area, and has a recessed portion formed in an area within 1 mm from an outer media end and extending to the media end. The recessed portion being formed 1 to 50 nm deeper than the data area.
摘要翻译： 根据一个实施例，图案化磁记录介质具有形成在基板上的磁记录层和保护层，其中磁记录层包括图案化在磁道中的磁性材料和填充在数据区域中的轨道之间的非磁性材料 并且具有形成在距离外部介质端1mm并且延伸到介质端的区域中的凹部。 凹陷部分比数据区域深1至50nm。
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140.发明申请MAGNETIC RECORDING MEDIUM, METHOD OF MANUFACTURING THE SAME, AND MAGNETIC RECORDING/REPRODUCING APPARATUS 审中-公开磁记录介质，其制造方法和磁记录/再现装置公开(公告)号：US20090142620A1
公开(公告)日：2009-06-04
申请号：US12363078
申请日：2009-01-30
CPC分类号： B82Y10/00 , G11B5/012 , G11B5/72 , G11B5/743 , G11B5/82 , G11B5/855 , G11B2005/0029 , Y10T428/1164
摘要： A magnetic recording medium is obtained by easily patterning a magnetic recording layer without deteriorating its electromagnetic conversion characteristics, by forming a silicon-based protective film between the magnetic recording layer and a photoresist, and performing dry etching and oxygen plasma processing.
摘要翻译： 通过在磁记录层和光致抗蚀剂之间形成硅基保护膜，进行干法蚀刻和氧等离子体处理，可以通过在不损害其电磁转换特性的情况下容易地构图磁记录层而获得磁记录介质。
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