Abstract:
With using one scanning stage 19 where a plurality of wafers 16A to 16E is mounted through wafer holders 20A to 20E and balancing stage 21 disposed below scanning stage 19, scanning stage 19 is scanned based on exposure data common to a plurality of charged particle beam exposure apparatus 10A to 10E, and balancing stage 21 is scanned so that barycenter G of scanning stage 19 and balancing stage 21 becomes a fixed point. The positions of reflecting mirrors 70L and 70R secured to stage 19 are measured and based on their values, the expansion/contraction ratio of stage 19 and the positions of samples 16A to 16E are calculated to obtain deviation of the positions from target positions. Stage 19 is modeled such that rigid areas 19A to 19E are loosely connected, and for each area, the positions of three points are measured to calculate deviation of the exposure target position due to rotation of each ridged area. These deviations are corrected by deflectors 18A to 18D.
Abstract:
A vehicle lamp comprises: a lamp body including a front opening and a plurality of lamp units which are juxtaposed; and a lens assembly formed by unifying the lenses of the lamp units, the lens assembly mounted on the front opening of the lamp body, wherein the lenses have joining legs at the boundaries thereof which are adapted to unify the lenses into the lens assembly such that the joining legs protrude towards the lamp body, and the lamp body has confronting surface portions which are confronted with the inner end portions of the joining legs and are able to reflect light.
Abstract:
An apparatus for growing a material at high temperature and employing a reaction gas. A reaction vessel is formed of a metal sidewall having outer and inner surfaces, the inner surface surrounding and defining a reaction chamber within the reaction vessel and which is generally vertically oriented. A cooling system maintains the metal sidewall of the reaction vessel at a temperature at which the metal does not produce contamination within the reaction chamber as a result of the high temperature operation, the reactant gases introduced into the reaction chamber or the product gases resultant from the reaction. A support mechanism includes a generally vertically oriented rod member which supports a susceptor, adapted to hold a wafer on which the material is to be grown, within the bottom part of the reaction chamber and, further, seals the reaction chamber. A sleeve is disposed closely adjacent to but spaced from the inner surface of the generally cylindrical metal sidewall portion and is of a material which remains stable at the high temperature of the reaction required for growing the material.
Abstract:
A lens accommodating method in a zoom compact camera having inner and outer lens barrels which are moved between a retracted position and an advanced position includes the steps of retracting the inner lens barrel into the outer lens barrel before the inner and outer lens barrels reach the retracted position when the inner and outer lens barrels are moved from the advanced position toward the retracted position to thereby eliminate a step between the front ends of the inner and outer lens barrels in the optical axis direction, and moving the inner and outer lens barrels which are substantially flush with each other at the front ends thereof to the retracted position together. A lens accommodating apparatus is also disclosed.
Abstract:
In a voltage converter which is disposed in a semiconductor integrated circuit so as to lower an external supply voltage and to feed the lowered voltage to a partial circuit of the integrated circuit; the voltage converter is constructed so as to produce an output voltage suited to an ordinary operation in the ordinary operation state of the semiconductor integrated circuit and an aging voltage in the aging test of the circuit.
Abstract:
A zoom lens barrel is provided including a cam ring which is threadedly engaged to a female helicoid formed in a stationary barrel, a linear movement guide member that is rotatable relative to the cam ring and movable in an optical axis direction together with the cam ring, and movable lens groups, including first, second and third lens groups that are guided in the optical axis direction by the linear movement guide member. The zoom lens barrel further includes a cut-away portion formed at one end of a linear movement guide groove and inclined at an angle identical to the helicoids between the cam ring and the annular member.
Abstract:
An apparatus for setting the rotational torque of a screw mechanism including a frictional member which is positioned between a lens frame and a lens frame holder. The frictional member can be made of natural fiber, sponge, rubber, or styrene foam.
Abstract:
An alkaline battery having excellent discharge characteristics and higher discharge capacity with an increase in its internal resistance being suppressed is disclosed. The alkaline battery has a positive electrode active material which comprises primarily manganese dioxide and electroconductive carbon material. The electroconductive carbon material comprises expanded graphite particles having an average particle size in the range from 0.5 to 15 .mu.m, and the content of the expanded graphite particles is in the range from 2 to 8% by weight based on the solids in the positive electrode active material.
Abstract:
A process for producing a columbite-type niobate and a process for producing a niobium-containing lead-type perovskite compound using the columbite-type niobate. A precursor slurry of a columbite compound composed of a fresh niobium hydroxide, a metal acetate and ammonium aqueous solution is spray-dried, and is calcined at 500.degree. C. or higher to obtain a crystalline columbite-type compound having grain sizes of 1 .mu.m or smaller to which was then mixed a lead component. The mixture is calcined, pulverized and is sintered at a temperature of 800.degree. to 1100.degree. C. to synthesize a highly dielectric material of a niobium-containing lead-type composite perovskite. The precursor of columbite is calcined at 500.degree. to 1100.degree. C. to obtain fine columbite-type niobate crystals of grain sizes of 1 .mu.m or smaller. A lead-type perovskite compound using the above crystals can be sintered at a temperature of as low as 950.degree. C. or lower, and the sintered product thereof has a homogeneous and fine texture and excellent dielectric properties that could not be obtained by the conventional solid-phase process.
Abstract translation:铌酸铌酸酯的制造方法以及使用该col骨型铌酸酯制造含铌的铅型钙钛矿化合物的方法。 将由新鲜的氢氧化铌,金属乙酸盐和铵水溶液组成的col骨化合物的前体浆料喷雾干燥,并在500℃或更高温度下煅烧,得到晶粒尺寸为1微米的结晶col石型化合物 m或更小,然后将铅组分混合。 将混合物煅烧,粉碎并在800℃至1100℃的温度下烧结以合成含铌的铅型复合钙钛矿的高介电材料。 col The的前体在500〜1100℃下煅烧,得到1μm以下的微细铌酸铌酸晶体晶体。 使用上述晶体的铅型钙钛矿化合物可以在低至950℃或更低的温度下烧结,并且其烧结产品具有均匀且细致的织构和优异的介电性能,这些常规 固相工艺。
Abstract:
A focusing torque control device for a lens barrel includes a rotating unit, rotatable in association with a lens included in the lens barrel, an engaging pin by which the rotating unit is engaged, and a frictional force unit. The lens is moved along an optical axis thereof when the rotating unit is rotated. The frictional force control unit controls a frictional force between the rotating unit and the engaging pin by controlling a pressure force pressing the engaging pin against the rotating unit.