Abstract:
The invention provides a force detector in which power consumption is suppressed. Four electrodes E11 through E14 are formed on a substrate, and an elastic deformable body formed of a rubber film is disposed thereon. A conductive coating is applied on the lower surface of the elastic deformable body to provide a displacing conductive layer 26. Four capacitance elements C11 through C14 are comprised by the electrodes E11 through E14 and the displacing conductive layer 26 opposed to the electrodes. The capacitance values thereof are converted into voltage values V11 through V14 by C/V converter circuit 50, and based on operation by signal processing circuit 60, an external force applied to the elastic deformable body is detected. A pair of contacting electrodes E15 and E16 are formed on the substrate, and when an external force with a predetermined strength or more is applied, the elastic deformable body deforms, and the displacing conductive layer 26 comes into contact with both electrodes E15 and E16, simultaneously. The potential of the electrode E16 is taken-in from the terminal T5, and when said potential is Vcc, the C/V converter circuit 50 is operated in a standby mode with less power consumption, and when said potential is GND, the circuit is operated in a normal mode.
Abstract:
An acceleration sensor in a connecting portion connects a displacing section to a fixed section and a weight is connected to the displacing section from below. A pedestal is disposed adjacent to the weight and is connected to the fixed section by a pedestal joint layer so a displacement of the displacing section can be detected. The weight has a peripheral portion of its upper surface opposite a control surface on a lower surface of the fixed section to come into contact therewith upon a given magnitude of acceleration of the weight. A weight joint layer made of the same material as that of the pedestal joint layer joins the weight and the displacing section.
Abstract:
Forces and moments are detected in a distinguishing manner by a simple structure. A supporting member (20) is positioned below a force receiving member (10), which receives forces to be detected, and between these components, at least two columnar force transmitting members (11, 12) are connected. Connecting members having flexibility are interposed at the upper and lower ends of each of columnar force transmitting members (11, 12) so that columnar force transmitting members (11, 12) can become inclined when force receiving member (10) becomes displaced upon receiving a force. Sensors (21, 22) are positioned at the respective connection parts of columnar force transmitting members (11, 12) and supporting member (20) to detect forces that are transmitted from the respective columnar force transmitting members (11, 12) to supporting member (20). Based on the detection values of sensors (21, 22), detection processing unit 30 detects, in a distinguishing manner, forces and moments acting on force receiving member (10). When four columnar force transmitting members are used, all of forces Fx, Fy, and Fz and moments Mx, My, and Mz can be detected.
Abstract:
A sensor comprises a semiconductor pellet (10) including a working portion (11) adapted to undergo action of a force, a fixed portion (13) fixed on the sensor body, and a flexible portion (13) having flexibility formed therebetween, a working body (20) for transmitting an exterted force to the working portion, and detector means (60-63) for transforming a mechanical deformation produced in the semiconductor pellet to an electric signal to thereby detect a force exerted on the working body as an electric signal. A signal processing circuit is applied to the sensor. This circuit uses analog multipliers (101-109) and analog adders/subtracters (111-113), and has a function to cancel interference produced in different directions. Within the sensor, two portions (E3, E4-E8) located at positions opposite to each other and producing a displacement therebetween by action of a force are determined. By exerting a coulomb force between both the portions, the test of the sensor is carried out. Further, a pedestal (21, 22) is provided around the working body (20). The working body and the pedestal are located with a predetermined gap or spacing therebetween. A displacement of the working body is caused to limitatively fall within a predetermined range corresponding to the spacing. The working body and the pedestal are provided by cutting a same common substrate (350, 350).
Abstract:
An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is connected. Then, by cutting the second substrate, a working body and a pedestal are formed. On the other hand, a groove is formed on a third substrate. An electrode layer is formed on the bottom surface of the groove. The third substrate is connected to the first substrate so that both the electrodes face to each other with a predetermined spacing therebetween. Finally, the first, second and third substrates are cut off every respective unit regions to form independent sensors, respectively. When an acceleration is exerted on the working body, the first substrate bends. As a result, the distance between both the electrodes changes. Thus, an acceleration exerted is detected by changes in an electrostatic capacitance between both the electrodes.
Abstract:
An intermediate displacement board (120) composed of a metal plate is arranged on a printed circuit board (110) having electrode patterns (E1-E7) and then a strain generative body (130) composed of silicon rubber is arranged on top thereof. Then, the arrangement is fixed to the printed circuit board (110) with attachments (140). Depressing a displacement portion (133) causes a connecting portion (132) to be deflected and an electrode (F0) to be brought into contact with the electrodes (E1, E2) to make them conductive, thereby allowing the pushbutton switch to be turned ON. Depressing further the displacement portion (133) causes an elastic deformation portion (134) to be elastically deformed and crushed and the intermediate displacement board (120) to be pushed downward. The capacitance of capacitors (C3-C7), which are constituted by the electrodes (E3-E7) and the intermediate displacement board (120), are varied according to the depression of the intermediate displacement board (120). By detecting the variation in capacitance, it becomes possible to detect three-dimensional components of an applied force.
Abstract:
An electrostatic capacitive touch sensor including a substrate having a group of fixed electrodes formed thereon; and a movable electrode plate that is integrally molded by using rubber or resin having an elastic property as a whole and that has at least a face which opposes the group of fixed electrodes and is made of a conductive rubber or a conductive resin. The group of fixed electrodes and the movable electrode plate form a plurality of variable electrostatic capacitive sections, and in response to the magnitude and the direction of a force applied onto the movable electrode plate, the electrostatic capacitances of the respective variable electrostatic capacitive sections are allowed to change.
Abstract:
An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is connected. Then, by cutting the second substrate, a working body and a pedestal are formed. On the other hand, a groove is formed on a third substrate. An electrode layer is formed on the bottom surface of the groove. The third substrate is connected to the first substrate so that both the electrodes face to each other with a predetermined spacing therebetween. Finally, the first, second and third substrates are cut off every respective unit regions to form independent sensors, respectively. When an acceleration is exerted on the, working body, the first substrate bends. As a result, the distance between both the electrodes changes. Thus, an acceleration exerted is detected by changes in an electrostatic capacitance between both the electrodes.
Abstract:
An angular velocity sensor for detecting angular velocity components about three axes with high response is provided. A weight body carries out a circular movement along a circular orbit within the XY-plane with the origin being as a center. The weight body is supported so that it can be moved with a predetermined degree of freedom within a sensor casing. A Coriolis force Fco exerted in the Z-axis direction to the weight body is detected when the weight body passes through the X-axis at the point Px and an angular velocity &ohgr;x about the X-axis is obtained based on the detected force. Further, a Coriolis force Fco exerted in the Z-axis direction to the weight body is detected when the weight body passes through the Y-axis at the point Py and an angular velocity &ohgr;y about the Y-axis is obtained based on the detected force. In addition, a force exerted in the X-axis direction to the weight body at the point Px is detected and an angular velocity &ohgr;z about the Z-axis is obtained based on the detected force by eliminating a centrifugal force.
Abstract:
A multi-axial angular velocity sensor for detecting angular velocity components about respective coordinate axes in a three-dimensional cooridnate system has a flexible substrate having flexibility. A fixed substrate is disposed so as to oppose the flexible substrate a predetermined distance above the flexible substrate. An oscillator is fixed on a lower surface of the flexible substrate. A sensor casing supports the flexible substrate and the fixed substrate and accommodates the oscillator therewithin. A plurality of lower electrodes is provided on an upper surface of the flexible substrate and a plurality of upper electrodes are provided on a lower surface of the fixed substrate and disposed at positions respectively opposite to the lower electrodes. A piezoelectric element is disposed between the lower electrodes and the upper electrodes. An a.c. signal is applied across a pair of the lower and upper electrodes that are opposite to each other thereby to oscillate the oscillator in respective coordinate axial directions for the detecting of a potential produced across a pair of the lower and upper electrodes that are opposite to each other, thereby to detect displacements in respective coordinate axial directions of the oscillator.