公开(公告)号：US09673053B2

公开(公告)日：2017-06-06

申请号：US14549529

申请日：2014-11-20

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Rung-Yuan Lee ,  Yu-Ting Li ,  Jing-Yin Jhang ,  Chen-Yi Weng ,  Jia-Feng Fang ,  Yi-Wei Chen ,  Wei-Jen Wu ,  Po-Cheng Huang ,  Fu-Shou Tsai ,  Kun-Ju Li ,  Wen-Chin Lin ,  Chih-Chien Liu ,  Chih-Hsun Lin ,  Chun-Yuan Wu

IPC: H01L21/306 ,  H01L21/28

CPC classification number: H01L21/30625 ,  H01L21/28123 ,  H01L21/32115 ,  H01L21/3212

Abstract: A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate; forming a first material layer on the substrate; forming a stop layer on the first material layer; forming a second material layer on the stop layer; and performing a planarizing process to remove the second material layer, the stop layer, and part of the first material layer for forming a gate layer.

公开(公告)号：US20160172496A1

公开(公告)日：2016-06-16

申请号：US14599556

申请日：2015-01-19

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chung-Fu Chang ,  Chun-Hsien Lin ,  Chen-Yi Weng

IPC: H01L29/78

CPC classification number: H01L29/7848 ,  H01L29/66795 ,  H01L29/785

Abstract: A field effect transistor with epitaxial structures includes a fin-shaped structure and a metal gate across the fin-shaped structure. The metal gate includes a pair of recess regions disposed on two sides of the bottom of the metal gate.

Abstract translation: 具有外延结构的场效应晶体管包括鳍状结构和横跨鳍状结构的金属栅极。 金属栅极包括设置在金属栅极底部两侧的一对凹陷区域。

公开(公告)号：US08853015B1

公开(公告)日：2014-10-07

申请号：US13863393

申请日：2013-04-16

Applicant: United Microelectronics Corp.

Inventor： Lung-En Kuo ,  Po-Wen Su ,  Chen-Yi Weng ,  Hsuan-Hsu Chen

IPC: H01L21/00 ,  H01L21/762 ,  H01L29/78

CPC classification number: H01L29/7851 ,  H01L21/76224 ,  H01L21/823431 ,  H01L27/0886 ,  H01L29/0649 ,  H01L29/66795 ,  H01L29/7853

Abstract: A method of forming a fin structure is provided. First, a substrate is provided, wherein a first region, a second region encompassing the first region, and a third region encompassing the second region are defined on the substrate. Then, a plurality of first trenches having a first depth are formed in the first region and the second region, wherein each two first trenches defines a first fin structure. The first fin structure in the second region is removed. Lastly, the first trenches are deepened to form a plurality of second trenches having a second depth, wherein each two second trenches define a second fin structure. The present invention further provides a structure of a non-planar transistor.

Abstract translation: 提供一种形成翅片结构的方法。 首先，提供衬底，其中第一区域，包围第一区域的第二区域和包围第二区域的第三区域被限定在衬底上。 然后，在第一区域和第二区域中形成具有第一深度的多个第一沟槽，其中每两个第一沟槽限定第一鳍结构。 第二区域中的第一鳍结构被去除。 最后，加深第一沟槽以形成具有第二深度的多个第二沟槽，其中每两个第二沟槽限定第二鳍结构。 本发明还提供了一种非平面晶体管的结构。