公开(公告)号：US20120162737A1

公开(公告)日：2012-06-28

申请号：US13412514

申请日：2012-03-05

Applicant: Shingo Uchiyama ,  Shingo Uchiyama ,  Johji Yamaguchi ,  Makoto Sato ,  Kunihiko Sasakura ,  Hirofumi Morita ,  Shuichiro Inagaki ,  Katsuyuki Machida ,  Hiromu Ishii ,  Makoto Murakami

Inventor： Shingo Uchiyama ,  Shingo Uchiyama ,  Johji Yamaguchi ,  Makoto Sato ,  Kunihiko Sasakura ,  Hirofumi Morita ,  Shuichiro Inagaki ,  Katsuyuki Machida ,  Hiromu Ishii ,  Makoto Murakami

IPC: G02B26/08 ,  B23P17/00

CPC classification number: B81B3/004 ,  B81B3/0086 ,  B81B2201/045 ,  B81B2203/058 ,  G02B6/3518 ,  G02B6/3556 ,  G02B6/3584 ,  G02B26/0841 ,  Y10T29/49885 ,  Y10T156/10

Abstract: A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.

公开(公告)号：US08193550B2

公开(公告)日：2012-06-05

申请号：US12136722

申请日：2008-06-10

Applicant: Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

Inventor： Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

IPC: H01L31/0352 ,  G02B26/10

CPC classification number: H01L21/76898 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00484 ,  B81C1/00896 ,  B81C2201/019 ,  G02B6/357 ,  G02B6/3584

Abstract: A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.

Abstract translation: 一种具有支撑部件和操作部件的微电子机械装置的制造方法，包括提供具有第一层半导体材料的第一半导体晶片和布置在第一层顶部的第二半导体材料层，形成 在第二层中的装置的第一支撑部分和第一操作部分，在第一层中形成临时锚固件，以及将第一晶片结合到第二晶片，第二层面向第二晶片。 在将第一晶片和第二晶片接合在一起之后，所述器件的第二支撑部件和第二操作部分形成在第一层中。 将临时锚固件从第一层移除以释放其中形成的操作部件。

公开(公告)号：US08049944B2

公开(公告)日：2011-11-01

申请号：US12389399

申请日：2009-02-20

Applicant: Abdul Jaleel K. Moidu

Inventor： Abdul Jaleel K. Moidu

IPC: G02B26/08

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/058 ,  G02B6/2931 ,  G02B6/3518 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584

Abstract: A two-axis tiltable linear array of MEMS micromirrors is described. The individual micromirrors of the array are flexibly suspended over a common substrate by using two pairs of serpentine hinges coupled by a gimbal ring and are actuated by using tilt and roll electrodes. The tilt actuator regions of the micromirrors are disposed within the gimbal rings, the roll hinges connecting the tilt actuator regions to the micromirrors, which provides for decoupling of the tilt and the roll of the micromirror. The structure allows for considerable decoupling of the tilt and the roll and, or the pistoning effects observed upon micromirror actuation. The structure is suitable for application in a wavelength selective optical switch.

Abstract translation: 描述了MEMS微镜的两轴可倾斜线性阵列。 通过使用由万向环联接的两对蛇形铰链，阵列的各个微镜可以灵活地悬挂在共同的基板上，并通过使用倾斜和滚动电极来驱动。 微镜的倾斜致动器区域设置在万向环内，辊铰链将倾斜致动器区域连接到微镜，其提供微镜的倾斜和辊的解耦。 该结构允许倾斜和辊的显着解耦，或者在微镜驱动时观察到的活塞效应。 该结构适用于波长选择光开关。

公开(公告)号：US20110228440A1

公开(公告)日：2011-09-22

申请号：US13047644

申请日：2011-03-14

Applicant: Takahisa Kato ,  Shinichiro Watanabe

Inventor： Takahisa Kato ,  Shinichiro Watanabe

IPC: H01G5/011 ,  B23P11/00

CPC classification number: G02B26/0841 ,  B81B7/0048 ,  B81B2201/042 ,  B81B2201/045 ,  B81C2203/0118 ,  Y10T29/49837

Abstract: A microstructural body includes a substrate such as an electrode substrate, a support portion, one post that fixes the support portion to the substrate, a frame-shaped movable portion provided around outer periphery of the support portion, and an elastic support portion that elastically connects the movable portion and the support portion. The elastic support portion supports the frame-shaped movable portion such that the movable portion is movable relative to the support portion. The elastic support portion includes torsion springs and an elastically deformable connecting portion.

Abstract translation: 微结构体包括诸如电极基板的基板，支撑部分，将支撑部分固定到基板的一个支柱，设置在支撑部分的外周周围的框架形可动部分和弹性连接的弹性支撑部分 可动部和支撑部。 弹性支撑部支撑框状可动部，使得可动部相对于支撑部移动。 弹性支撑部分包括扭转弹簧和可弹性变形的连接部分。

公开(公告)号：US20110228370A1

公开(公告)日：2011-09-22

申请号：US12877053

申请日：2010-09-07

Applicant: Chialun Tsai ,  Jeffrey F. DeNatale

Inventor： Chialun Tsai ,  Jeffrey F. DeNatale

IPC: G02B26/08 ,  H01L21/02

CPC classification number: G02B26/105 ,  B81B2201/045 ,  B81C1/00142 ,  B81C2201/019 ,  G02B26/0841 ,  Y10S359/90

Abstract: A wafer-level manufacturing method produces stress compensated x-y gimbaled comb-driven MEMS mirror arrays using two SOI wafers and a single carrier wafer. MEMS structures such as comb drives, springs, and optical surfaces are formed by processing front substrate layer surfaces of the SOI wafers, bonding together the processed surfaces, and removing the unprocessed SOI layers to expose second surfaces of the front substrate layers for further wafer-level processing. The bonded SOI wafers are mounted to a surface of the carrier wafer that has been separately processed. Processing wafer surfaces may include formation of a stress compensation layer to counteract physical effects of MEMS mirrors. The method may form multi-layered conductive spring structures for the mirrors, each spring having a first conducting layer for energizing a comb drive, a second conducting layer imparting a restoring force, and an insulating layer between the first and second conducting layers.

Abstract translation: 晶片级制造方法使用两个SOI晶片和单载体晶片产生应力补偿的x-y万向节梳状驱动的MEMS反射镜阵列。 MEMS结构如梳形驱动器，弹簧和光学表面是通过处理SOI晶片的前衬底层表面，将经处理的表面结合在一起并去除未加工的SOI层以暴露前衬底层的第二表面以形成另外的晶片 - 级处理。 结合的SOI晶片被安装到已经分开处理的载体晶片的表面上。 处理晶片表面可以包括形成应力补偿层以抵消MEMS反射镜的物理效应。 该方法可以形成用于反射镜的多层导电弹簧结构，每个弹簧具有用于激励梳状驱动器的第一导电层，赋予恢复力的第二导电层以及第一和第二导电层之间的绝缘层。

公开(公告)号：US07973373B2

公开(公告)日：2011-07-05

申请号：US12315363

申请日：2008-12-01

Applicant: Keiichi Mori ,  Yoshichika Kato ,  Satoshi Yoshida ,  Kenji Kondou ,  Yoshihiko Hamada ,  Osamu Imaki

Inventor： Keiichi Mori ,  Yoshichika Kato ,  Satoshi Yoshida ,  Kenji Kondou ,  Yoshihiko Hamada ,  Osamu Imaki

IPC: H01L27/14

CPC classification number: B81C1/00825 ,  B81B7/0029 ,  B81B2201/045 ,  B81B2203/033 ,  G02B26/0841 ,  Y10T29/49 ,  Y10T29/49002 ,  Y10T307/865

Abstract: A microminiature moving device has disposed on a single-crystal silicon substrate movable elements such as a movable rod and a movable comb electrode that are displaceable in parallel to the substrate surface and stationary parts that are fixedly secured to the single -crystal silicon substrate with an insulating layer sandwiched between. Depressions are formed in the surface regions of the single-crystal silicon substrate where no stationary parts are present and the movable parts are positioned above the depressions. The depressions form gaps large enough to prevent foreign bodies from causing shorts and malfunctioning of the movable parts.

Abstract translation: 微型移动装置设置在单晶硅衬底上，可移动元件如可移动杆和可移动梳状电极可平行移动到衬底表面，固定部分固定固定在单晶硅衬底上 绝缘层夹在中间。 在单晶硅衬底的不存在固定部分并且可移动部件位于凹部上方的表面区域中形成凹陷。 凹陷形成足够大的间隙，以防止异物引起可动部件的短路和故障。

公开(公告)号：US07911672B2

公开(公告)日：2011-03-22

申请号：US11950721

申请日：2007-12-05

Applicant: Tiansheng Zhou

Inventor： Tiansheng Zhou

IPC: G02B26/08

CPC classification number: B81B3/004 ,  B81B2201/045 ,  G02B26/0841

Abstract: A micro-electro-mechanical-system (MEMS) micromirror for use in high fill factor arrays which includes at least one stationary body and a movable body. The movable body has opposed ends and is secured to the stationary body at each of the opposed ends by a resilient primary axis pivot. A mirror support is supported by and movable with the movable body. The mirror support has a first unfettered side and a second unfettered side. A primary axis actuator is provided including a fixed portion connected to the stationary body, and a movable portion corrected to the movable body. The movable portion is adapted to move away from the fixed portion in response to an electrical potential difference between the fixed portion and the movable portion, such that the movable body rotates about the primary axis resilient pivot. A mirror is supported by the mirror support.

Abstract translation: 一种用于高填充因子阵列的微电子机械系统（MEMS）微镜，其包括至少一个固定体和可移动体。 可移动体具有相对的端部，并且通过弹性主轴枢轴在每个相对的端部处固定到固定体。 反射镜支撑件由可移动体支撑并可移动。 镜子支架具有第一个不受约束的侧面和第二个不受约束的一面。 主轴致动器设置有连接到固定体的固定部分和校正到可移动体的可动部分。 可移动部分适于响应于固定部分和可移动部分之间的电势差而远离固定部分移动，使得可移动体围绕主轴线弹性枢轴旋转。 镜像支持支持镜像。

公开(公告)号：US07863752B2

公开(公告)日：2011-01-04

申请号：US12392947

申请日：2009-02-25

Applicant: Robert Ostrom

Inventor： Robert Ostrom

IPC: H01L29/40 ,  H01L21/44

CPC classification number: G02B26/0841 ,  B81B2201/045 ,  B81B2203/058 ,  B81B2207/096 ,  B81C1/00095 ,  G02B26/0866 ,  Y10T29/49002

Abstract: A MEMS device and fabrication method are disclosed. A bottom substrate having an insulating layer sandwiched between an upper layer and a lower layer may be bonded to a device layer. One or more portions of the upper layer may be selectively removed to form one or more device cavities. Conductive vias may be formed through the lower layer at locations that underlie the one or more device cavities and electrically isolated from the lower layer. Devices may be formed from the device layer. Each device overlies a corresponding device cavity. Each device may be connected to the rest of the device layer by one or more corresponding hinges formed from the device layer. One or more electrical contacts may be formed on a back side of the lower layer. Each contact is electrically connected to a corresponding conductive via.

Abstract translation: 公开了MEMS器件和制造方法。 具有夹在上层和下层之间的绝缘层的底部基板可以结合到器件层。 可以选择性地去除上层的一个或多个部分以形成一个或多个器件腔。 导电通孔可以在位于一个或多个器件空腔下方并且与下层电隔离的位置处通过下层形成。 设备可以从设备层形成。 每个设备覆盖相应的设备腔。 每个设备可以通过由设备层形成的一个或多个相应铰链连接到设备层的其余部分。 一个或多个电触头可以形成在下层的背面上。 每个触点电连接到相应的导电通孔。

公开(公告)号：US07723810B2

公开(公告)日：2010-05-25

申请号：US12184288

申请日：2008-08-01

Applicant: John Michael Miller ,  Steven Harold Moffat

Inventor： John Michael Miller ,  Steven Harold Moffat

IPC: H01L29/72

CPC classification number: B81B3/0021 ,  B81B2201/045

Abstract: To reduce cross-talk between adjacent hot electrodes, the present invention provides a ground plane, which extends beneath each side of a MEMS mirror platform covering opposite edges of a hot electrode along each side thereof. The ground plane includes an overhang section extending between the mirror platform and the hot electrode forming a first gap between the hot electrode and the overhang section, and a second gap between the overhang section and the mirror platform. The method of the present invention enables highly accurate construction using lithographic patterning and deep reactive ion etching (DRIE).

Abstract translation: 为了减少相邻热电极之间的串扰，本发明提供了一个接地平面，该接地平面在MEMS反射镜平台的每一侧延伸，覆盖热电极的每一侧的相对边缘。 接地面包括在反射镜平台和热电极之间延伸的突出部分，其在热电极和突出部分之间形成第一间隙，并且在突出部分和反射镜平台之间形成第二间隙。 本发明的方法能够使用光刻图案和深反应离子蚀刻（DRIE）进行高精度的构造。

公开(公告)号：US07715076B2

公开(公告)日：2010-05-11

申请号：US11945307

申请日：2007-11-27

Applicant: AbdulJaleel K. Moidu

Inventor： AbdulJaleel K. Moidu

IPC: G02B26/08

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/058

Abstract: A hybrid electro-static actuator for rotating a two-dimensional micro-electro-mechanical micro-mirror device about two perpendicular axes includes a vertical comb drive for rotating the micro-mirror about a tilt axis, and a parallel plate drive for rotating the micro-mirror about a roll axis. The rotor comb fingers of the comb drive extend from a sub-frame of the micro-mirror, which is only rotatable about the tilt axis, while one of the parallel plate electrodes is mounted on the underside of a main platform, which generally surrounds the sub-frame. The vertical comb drive rotates both the sub-frame and the main platform about the tilt axis, while the parallel plate drive only rotates the main platform about the roll axis.

Abstract translation: 用于围绕两个垂直轴旋转二维微机电微反射镜装置的混合静电致动器包括用于围绕倾斜轴旋转微镜的垂直梳齿驱动器和用于旋转微型 - 关于卷轴的镜像。 梳状驱动器的转子梳齿从微镜的子框架延伸，该微镜仅能绕倾斜轴线旋转，而平行板电极中的一个安装在主平台的下侧，主平台通常围绕 子框架 垂直梳齿驱动器使副框架和主平台围绕倾斜轴线旋转，而平行板驱动器仅使主平台围绕辊轴线旋转。