公开(公告)号：US20200309665A1

公开(公告)日：2020-10-01

申请号：US16807698

申请日：2020-03-03

Applicant: Infineon Technologies AG

Inventor： Michael Schneider ,  Alfons Dehe ,  Manuel Dorfmeister ,  Christoph Glacer ,  Ulrich Krumbein ,  Ulrich Schmid ,  David Tumpold

IPC: G01N15/06

Abstract: A sensor element includes a membrane structure suspended on a frame structure, wherein the membrane structure includes a membrane element and an actuator. The membrane structure is deflectable in a first stable deflection state and in a second stable deflection state and is operable in a resonance mode in at least one of the first and the second stable deflection states. The actuator is configured to deflect the membrane structure in a first actuation state into one of the first and the second stable deflection states, and to operate the membrane structure in a second actuation state in a resonance mode having an associated resonance frequency.

公开(公告)号：US10753858B2

公开(公告)日：2020-08-25

申请号：US16456361

申请日：2019-06-28

Applicant: Infineon Technologies AG ,  Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Inventor： Stefan Kolb ,  Alfons Dehe ,  Jochen Huber ,  Franz Jost ,  Horst Theuss ,  Wilhelm Wiedmeier ,  Juergen Woellenstein

IPC: G01N21/17 ,  G01N29/02 ,  G01N29/24 ,  G01N29/30

Abstract: Shown is a wafer arrangement for a gas sensor including a first substrate and a sescond substrate. The first substrate includes a MEMS membrane associated with a sensor element and an emitter element configured to emit electromagnetic radiation. The second substrate is arranged on top of the first substrate and defines at least a portion of a chamber disposed adjacent to the MEMS membrane.

公开(公告)号：US10589990B2

公开(公告)日：2020-03-17

申请号：US16134355

申请日：2018-09-18

Applicant: Infineon Technologies AG

Inventor： Alfons Dehe ,  Ulrich Krumbein ,  Gerhard Metzger-Brueckl ,  Johann Strasser ,  Juergen Wagner ,  Arnaud Walther

IPC: B81B7/02 ,  H04R19/00 ,  H04R19/04 ,  H04R1/28

Abstract: In accordance with an embodiment, a MEMS microphone includes a sound detection unit having a first membrane, a second membrane arranged at a distance from the first membrane, a low-pressure region arranged between the first membrane and the second membrane, a gas pressure that is reduced in relation to normal pressure being present in said low-pressure region, a counter electrode arranged in the low-pressure region, and a sound through-hole, which extends through the sound detection unit in a thickness direction of the sound detection unit; and a valve provided at the sound through-hole, said valve being configured to adopt a plurality of valve states, wherein a predetermined degree of transmission of the sound through-hole to sound is assigned to each valve state.

公开(公告)号：US10582304B2

公开(公告)日：2020-03-03

申请号：US16186971

申请日：2018-11-12

Applicant: Infineon Technologies AG

Inventor： Alfons Dehe ,  Manuel Dorfmeister ,  Ulrich Schmid ,  Michael Schneider

IPC: H04R17/10 ,  H04R23/00 ,  H04R3/04 ,  H04R7/06 ,  H04R17/00

Abstract: Diaphragm element arrangements including at least one bistable diaphragm element, which has a first stable state and a second stable state, and corresponding methods are provided. The bistable diaphragm element can be activated above a changeover threshold in order to change over between the first and the second stable state or below the changeover threshold.

公开(公告)号：US10516943B2

公开(公告)日：2019-12-24

申请号：US15145862

申请日：2016-05-04

Applicant: Infineon Technologies AG

Inventor： Manuel Dorfmeister ,  Michael Schneider ,  Manfred Kaltenbacher ,  Alfons Dehe ,  Ursula Hedenig ,  Thomas Grille ,  Ulrich Schmid

IPC: H04R3/00 ,  H04R3/06 ,  H04R3/12 ,  H04R17/00 ,  H04R29/00 ,  H04R31/00

Abstract: Aspects of a microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device, are discussed herein. The microelectromechanical device may include: a substrate; a diaphragm mechanically coupled to the substrate, the diaphragm comprising a stressed region to buckle the diaphragm into one of two geometrically stable positions; an actuator mechanically coupled to the diaphragm, the actuator comprising a piezoelectric layer over the diaphragm; a controller configured to provide an electrical control signal in response to a digital sound input; wherein the actuator is configured to receive the electrical control signal to exert a mechanical piezoelectric force on the diaphragm via the piezoelectric layer to move the diaphragm to create a sound wave.

公开(公告)号：US10466174B2

公开(公告)日：2019-11-05

申请号：US15376738

申请日：2016-12-13

Applicant: Infineon Technologies AG

Inventor： Christoph Glacer ,  Alfons Dehe ,  David Tumpold ,  Gueclue Onaran

IPC: G01N21/64 ,  G01N21/84 ,  G01N21/17 ,  G01N21/3504

Abstract: A gas analyzer may include: a gas chamber configured to receive a gas to be analyzed therein, a radiation source configured to emit electromagnetic radiation into the gas chamber, the electromagnetic radiation being adapted to selectively excite gas molecules of a specific type that is to be detected in the gas received in the gas chamber, a collimator configured to collimate the electromagnetic radiation emitted by the radiation source, and a sensor configured to detect a physical quantity indicative of a degree of interaction between the electromagnetic radiation emitted by the radiation source and the gas to be analyzed.

公开(公告)号：US20190331531A1

公开(公告)日：2019-10-31

申请号：US16385395

申请日：2019-04-16

Applicant: Infineon Technologies AG

Inventor： Christoph Glacer ,  Alfons Dehe ,  David Tumpold

IPC: G01J5/00 ,  G01J5/10

Abstract: A fluid sensor includes a housing and a thermal emitter in the housing to emit first thermal radiation into a detection volume of the housing at a first power level during a measurement interval and emit the first thermal radiation at a reduced first power level or not emit said first thermal radiation at all during an intermediate interval disposed outside of the measurement interval. The fluid sensor includes a measuring element in the detection volume to receive a radiation signal during the measurement interval. The fluid sensor includes a second thermal emitter in the housing to emit second thermal radiation at a second power level into the detection volume during the intermediate interval such that a thermal oscillation of thermal radiation in relation to an overall power level of the thermal radiation in the detection volume is at most ±50% during the measurement interval and the intermediate interval.

公开(公告)号：US20190330057A1

公开(公告)日：2019-10-31

申请号：US16509145

申请日：2019-07-11

Applicant: Infineon Technologies AG

Inventor： Alfons Dehe ,  Stephan Pindl ,  Bernhard Knott ,  Carsten Ahrens

IPC: B81C1/00 ,  H04R31/00 ,  H04R19/04 ,  H04R19/00

Abstract: A method for manufacturing a MEMS device is disclosed. Moreover a MEMS device and a module including a MEMS device are disclosed. An embodiment includes a method for manufacturing MEMS devices includes forming a MEMS stack over a first main surface of a substrate, forming a polymer layer over a second main surface of the substrate and forming a first opening in the polymer layer and the substrate such that the first opening abuts the MEMS stack.

公开(公告)号：US20190273993A1

公开(公告)日：2019-09-05

申请号：US15910390

申请日：2018-03-02

Applicant: Infineon Technologies AG

Inventor： Alfons Dehe ,  Abidin Güçlü Onaran

IPC: H04R19/04 ,  B81B3/00 ,  B81C1/00 ,  H04R19/00 ,  H04R7/04

Abstract: A MEMS device includes a membrane and a counter electrode structure spaced apart from the membrane. The counter electrode structure includes a non-planar conductive layer. The MEMS device includes an air gap between the membrane and the counter electrode structure. The air gap has a non-uniform thickness.

公开(公告)号：US20190270639A1

公开(公告)日：2019-09-05

申请号：US16270219

申请日：2019-02-07

Applicant: Infineon Technologies AG

Inventor： Gunar Lorenz ,  Alfons Dehe ,  Marc Fueldner ,  Bernd Goller ,  Ulrich Krumbein ,  Andreas Wiesbauer

IPC: B81B7/00 ,  B81B7/02 ,  B81B3/00 ,  H04R19/04

Abstract: A MEMS sensor includes a housing with an interior volume, wherein the housing has an access port to the interior volume, a MEMS component in the housing, and a protection structure, which reduces an introduction of electromagnetic disturbance radiation with a wavelength in the range between 10 nm and 20 μm into the interior volume through the access port and reduces a propagation of the electromagnetic disturbance radiation in the interior volume.