摘要:
A semiconductor exposure device having excellent throughput using a mercury lamp as an exposure light source. The mercury lamp is capable of providing an efficient i-ray output, with a small i-ray half width value, allowing correction of chromatic aberration. The semiconductor exposure device is further provided with an illumination optical system for illuminating a target surface and a projection optical system for projecting the image on the target surface. The illumination optical system is provided with the mercury lamp, an optical integrator, an optical system for guiding a flux of light emitted from the mercury lamp to the optical integrator and a condenser lens for converging the light from the optical integrator. The semiconductor exposure device is provided with a power source and an associated control circuit for supplying an electric current to the mercury lamp. The power source is configured to allow the mercury lamp to have an average electric field E satisfying the following relational expression with respect to the lamp input power W.sub.L (W), provided that the value obtained by deducting 11 V from the lamp voltage V.sub.L (V) of the mercury lamp and dividing the difference by the electrode-to-electrode distance d (mm) is the average electric field E (=V.sub.L -11/d) (V/mm): E.sub.p (W.sub.L)-1.0 V/mm.ltoreq.E.ltoreq.E.sub.p (W.sub.L)+1.5 V/mm, wherein E.sub.p (W.sub.L)=a+bW.sub.L ; E.ltoreq.6 V/mm; a and b are constants (a=1.4 V/mm, b=0.71.times.10.sup.-3 V/mm.multidot.W).
摘要翻译:一种半导体曝光装置,其使用汞灯作为曝光光源具有优异的生产能力。 汞灯能够提供高效的i射线输出,具有小的i射线半值值,允许校正色差。 半导体曝光装置还设置有用于照射目标表面的照明光学系统和用于将图像投影在目标表面上的投影光学系统。 照明光学系统设置有水银灯,光学积分器,用于将从汞灯发射的光束的光束引导到光学积分器的光学系统和用于会聚来自光学积分器的光的聚光透镜。 半导体曝光装置设置有用于向汞灯供应电流的电源和相关联的控制电路。 电源被配置为允许汞灯具有相对于灯输入功率WL(W)满足以下关系式的平均电场E,条件是通过从灯电压VL(V)中减去11V获得的值 )的平均电场E(= VL-11 / d)(V / mm):Ep(WL)-1.0V / mm (WL)+1.5V / mm,其中Ep(WL)= a + bWL; E = 6 V / mm; a和b是常数(a = 1.4V / mm,b = 0.71×10-3V / mm×W)。
摘要:
An electroconductive zinc oxide sintered body composed of sintered particles fusion-bonded in the grain boundaries thereof; which has a sintered density of from 5 to 5.5 g/cm.sup.3 ; and which does not substantially contain closed cells isolated from the outside in the interior of the sintered body. The electroconductive zinc oxide sintered body is prepared by sintering a mixture of an oxide of an element having a positive valency of at least 3 and zinc oxide in the presence of water at a temperature of at least 1,300.degree. C. The electroconductive zinc oxide sintered body is used as a sputtering target for the preparation of a low resistance, transparent electroconductive film.
摘要翻译:一种导电氧化锌烧结体,其由在其晶界熔合的烧结颗粒构成; 其烧结密度为5至5.5g / cm 3; 并且其基本上不包含在烧结体内部从外部隔离的闭孔。 导电性氧化锌烧结体是通过在至少1300℃的温度下在水存在下烧结具有至少3的正价的元素的氧化物和氧化锌的混合物来制备的。导电性氧化锌烧结体 用作制备低电阻,透明导电膜的溅射靶。
摘要:
An image reading method for an image recording system which reads an image with an image reader in the form of photoelectric signal conversion devices, converts the resulting analog data into digital data, and prints out the digital data with a printer. One line of image is read a plurality of times by the image reader and the resulting image data are sequentially stored. Even when the image data storing time and a fixed one-line scanning period are different from each other, the image can be read and outputted without changing the quantity of light to be applied to the image reader, i.e., simply by compensating for the difference between the storing time and the fixed scanning time. The compensation is implemented by multiplying one line of data stored by a time ratio of the fixed period to the difference, or adopting all the data inclusive of those associated with the difference, or discarding the data associated with the difference, or adopting only valid data, and then averaging the resulting data by division.
摘要:
A method for producing a metal salt by electrolysis in an electrolytic cell comprising an anode compartment and a cathode compartment partitioned by a diaphragm, characterized by supplying to the cathode compartment an aqueous solution of a water-soluble metal compound, and electrolytically reducing metal ions or metal complex ions to electroplate the metal on a cathode, wherein the diaphragm is a fluorinated anion exchange membrane made of a copolymer having repeating units of the formula: ##STR1## wherein X is F or CF.sub.3, l is an integer of from 0 to 5, m is 0, or 1, n is an integer of 1 to 5, each of p and q is a positive number and the ratio of p/q is from 2 to 16, and Y is a group involving a quaternary ammonium group.
摘要:
A microscope objective lens which, in spite of having a great numerical aperture and a high magnification, can always maintain an excellent imaging performance even if the thickness of a parallel flat plate such as a cover glass disposed between the object surface and the objective lens is greatly varied. The microscope objective lens has, in succession from the object side, a first lens group of positive refractive power for converting the light flux from an object into a convergent light flux, the first lens group having a positive meniscus lens component with its concave surface facing the object side and having a cemented lens component, a second lens group having a cemented lens component of negative refractive power disposed in the convergent light flux, and a third lens group of negative refractive power having a meniscus lens component with its convex surface facing the object side and having a succeeding negative lens component. The second lens group is movable on the optical axis relative to the first and third lens groups to correct deterioration of imaging performance due to variation in thickness of the parallel flat plate.
摘要:
Xanthone derivatives of the formula (I): ##STR1## (wherein W, X, Y and Z which may be the same or different represent a hydrogen atom, a halogen atom or a lower alkyl group having 1 to 4 carbon atoms; A is hydrogen atom or together with Z forms a --CH.sub.2 -- group which binds to a phenyl carbon adjacent the phenyl carbon to which the oxygen of the group ##STR2## is attached to form a cyclic methylene chain; B is a hydroxymethyl group, a lower alkoxycarbonyl group having 1 to 4 carbon atoms, or a carboxyl group, provided that W is neither a hydrogen atom nor a 7-position methyl group when X, Y and Z are each a hydrogen atom, and A is a hydrogen atom and B is a carboxyl group or a lower alkoxycarbonyl group), as well as non-toxic salts thereof when B is a carboxyl group, and a process for preparing the same are disclosed.The compounds of formula (I) in accordance with the present invention are useful as diuretics having uricosuric activity and can be used in the treatment of edema or hypertension.
摘要:
A polyester film roll free from wrinkles over a long period of storage consists of a polyester film having a thickness of 25 microns or less and a centerline average surface roughness of from 0.001 to 0.05 microns and is characterized in that the roll hardness (H) and the centerline average surface roughness (Ra) of the film roll satisfy the relationship (I):H.gtoreq.0.67x.sup.3 -10.61x.sup.2 +55.54x-1.16 (I)wherein x=ln (1/Ra), which film roll can be produced by means of a surface-center-winding method or a surface-winding method wherein the surface of the film roll is pressed with a touch roll.
摘要:
A terephthalic acid monoamide derivative of the formula: ##STR1## (wherein R is a straight- or branched-chain lower alkyl group; R' and R" may be the same or different, and represent a hydrogen atom, or a straight- or branched-chain lower alkyl group) or pharmaceutically acceptable salts thereof are disclosed. A process for preparing such terephthalic acid monoamide derivative or its salts, as well as an anti-allergic agent containing such derivative or its salts as an effective ingredient are also disclosed.
摘要:
A pharmaceutical composition for prevention and treatment of gastritis and peptic ulcer of mammals including human beings which contains a bis(benzamido)benzene derivative represented by the formula ##STR1## wherein X and Y are as defined hereinbelow, or an acid addition salt thereof, as an active ingredient, and a method of the use thereof are disclosed.
摘要:
A silicon-containing film-forming composition includes a polysiloxane and organic solvent. The polysiloxane includes a first structural unit, a second structural unit, and a third structural unit. The first structural unit is derived from a tetraalkoxysilane. The second structural unit is derived from a compound shown by a formula (1), wherein R1 represents a hydrogen atom or an electron-donating group, at least one R1 is an electron-donating group, R2 represents a monovalent organic group, and n represents 0 or 1. The third structural unit is derived from a compound shown by a formula (2), wherein R3 represents an alkyl group having 1 to 8 carbon atoms, and R4 represents a monovalent organic group.