Method of reducing plasma charge damage for plasma processes
    171.
    发明授权
    Method of reducing plasma charge damage for plasma processes 失效
    减少等离子体工艺的等离子体电荷损伤的方法

    公开(公告)号:US06660662B2

    公开(公告)日:2003-12-09

    申请号:US09771203

    申请日:2001-01-26

    IPC分类号: H01L2144

    CPC分类号: H01J37/3244 C23C16/455

    摘要: A method is provided for depositing a thin film on a substrate in a process chamber with reduced incidence of plasma charge damage. A process gas containing a precursor gases suitable for forming a plasma is flowed into a process chamber, and a plasma is generated from the process gas to deposit the thin film on the substrate. The precursor gases are flowed into the process chamber such that the thin film is deposited at the center of the substrate more rapidly than at an edge of the substrate.

    摘要翻译: 提供了一种用于在处理室中的衬底上沉积薄膜以降低等离子体电荷损伤的发生率的方法。 含有适于形成等离子体的前体气体的工艺气体流入处理室,并且从处理气体产生等离子体以将薄膜沉积在基板上。 前体气体流入处理室,使得薄膜比衬底的边缘更快地沉积在衬底的中心。

    Battery operation for extended cycle life
    174.
    发明授权
    Battery operation for extended cycle life 失效
    电池操作延长循环寿命

    公开(公告)号:US06392385B1

    公开(公告)日:2002-05-21

    申请号:US09452267

    申请日:1999-12-01

    IPC分类号: H01M1044

    摘要: The present invention provides a method for cycling a battery, containing lithium metal oxide, particularly lithium manganese oxide (LMO) active material, in a cell in a manner which reduces the extent to which loss of capacity occurs. The present method of operation extends the cycle life of such battery.

    摘要翻译: 本发明提供了一种在电池内循环包含锂金属氧化物,特别是锂锰氧化物(LMO)活性材料的电池的方法,其方法是减少发生容量损失的程度。 目前的操作方法延长了这种电池的循环寿命。

    Gas distribution system for a CVD processing chamber
    175.
    发明授权
    Gas distribution system for a CVD processing chamber 有权
    用于CVD处理室的气体分配系统

    公开(公告)号:US6143078A

    公开(公告)日:2000-11-07

    申请号:US191364

    申请日:1998-11-13

    CPC分类号: H01L21/67017

    摘要: The present invention provides an apparatus for depositing a film on a substrate comprising a processing chamber, a substrate support member disposed within the chamber, a first gas inlet, a second gas inlet, a plasma generator and a gas exhaust. The first gas inlet provides a first gas at a first distance from an interior surface of the chamber, and the second gas inlet provides a second gas at a second distance that is closer than the first distance from the interior surface of the chamber. Thus, the second gas creates a higher partial pressure adjacent the interior surface of the chamber to significantly reduce deposition from the first gas onto the interior surface. The present invention also provides a method for depositing a film on a substrate comprising: providing a chemical vapor deposition chamber, introducing first gas through a first gas inlet at a first distance from an interior surface of the chamber, introducing a second gas through a second gas inlet at a second distance from the interior surface of the chamber, wherein the second gas creates a higher partial pressure adjacent the interior surface of the chamber to prevent deposition from the first gas on the interior surface and generating a plasma of the processing gases. Alternatively, the first gas is introduced at a different angle from the second gas with respect to a substrate surface.

    摘要翻译: 本发明提供一种用于在基板上沉积膜的装置,包括处理室,设置在室内的基板支撑构件,第一气体入口,第二气体入口,等离子体发生器和排气。 第一气体入口从腔室的内表面提供第一距离的第一气体,并且第二气体入口提供第二距离离第二距离距离腔室内表面的第一距离。 因此,第二气体在室的内表面附近产生较高的分压,以显着地减少从第一气体到内表面的沉积。 本发明还提供了一种在衬底上沉积膜的方法,包括:提供化学气相沉积室,将第一气体通过第一距离腔室内表面的第一距离处的第一气体入口引入第二气体, 气体入口距离室的内表面第二距离,其中第二气体在室的内表面附近产生较高的分压,以防止从内表面上的第一气体沉积并产生处理气体的等离子体。 或者,第一气体相对于衬底表面以与第二气体不同的角度被引入。

    Chlorinated diethyl carbonate solvent for battery
    176.
    发明授权
    Chlorinated diethyl carbonate solvent for battery 失效
    氯化二乙基碳酸酯溶剂用于电池

    公开(公告)号:US5910381A

    公开(公告)日:1999-06-08

    申请号:US843910

    申请日:1997-04-17

    摘要: The subject invention discloses a novel electrolyte for a solid battery system. Specifically, an electrolyte solvent of chlorinated diethyl carbonates demonstrate good electrochemical stability in conjunction with specific anode and cathode materials. When used with a propylene carbonate co-solvent, it reduces or eliminates the decomposition of propylene carbonate during the first cycle. It is appropriate with a variety of electrolyte salts, and especially with LiBF.sub.4. Chloro-substituted diethyl carbonates also show good high and low temperature performance in electrochemical cells.

    摘要翻译: 本发明公开了一种用于固体电池系统的新型电解质。 具体来说,氯化二乙基碳酸酯的电解质溶剂与特定的阳极和阴极材料结合显示出良好的电化学稳定性。 当与碳酸丙烯酯共溶剂一起使用时,其可以在第一个循环中减少或消除碳酸亚丙酯的分解。 适用于各种电解质盐,尤其适用于LiBF4。 氯取代的碳酸二乙酯在电化学电池中也表现出良好的高低温性能。

    Additive to stabilize electrochemical cell
    177.
    发明授权
    Additive to stabilize electrochemical cell 失效
    添加剂稳定电化学电池

    公开(公告)号:US5846673A

    公开(公告)日:1998-12-08

    申请号:US762079

    申请日:1996-12-09

    摘要: The present invention provides a novel composition and method for preventing decomposition of one or more electrochemical cell components comprising an electrode having an active material, and an electrolyte. The method of the invention, for the first time, effectively overcomes problems which arise between the interaction of cell components and contaminate water retained in a cell. Such contaminate water reacts with the electrolyte which comprises a salt of lithium in a solvent. Solubilizing of the salt in solution with attendant interaction between the salt and water causes formation of hydrogen-containing acids. The method of the invention effectively blocks decomposition of a lithium metal oxide cathode active material, and particularly lithium manganese oxide (LMO, nominally LiMn.sub.2 O.sub.4). Such decomposition is prevented by including in the cell a basic compound which forms an electron donor species in the electrolyte solution; and by neutralizing at least a portion of the acid by reacting the donor species with the hydrogen-containing acids thereby preventing decomposition of the lithium manganese oxide by the acid. The preservation of the lithium manganese oxide prevents degradation of other cell components by other mechanism. The basic compound is desirably an organic base, preferably a butylamine.

    摘要翻译: 本发明提供一种用于防止一种或多种电化学电池元件分解的新型组合物和方法,所述电化学电池组件包括具有活性材料的电极和电解质。 本发明的方法第一次有效地克服了细胞成分的相互作用和污染细胞中残留的水之间产生的问题。 这种污染水与包含锂在溶剂中的盐的电解质反应。 溶解盐中的盐与盐和水之间伴随的相互作用引起含氢酸的形成。 本发明的方法有效地阻止锂金属氧化物正极活性物质,特别是锰酸锂(LMO,名义上是LiMn 2 O 4)的分解。 通过在电解液中包含在电解质溶液中形成电子供体物质的碱性化合物来防止这种分解; 并且通过使供体物质与含氢酸反应从而中和酸的至少一部分,从而防止酸分解锰酸锂。 锂锰氧化物的保存通过其他机理防止其他电池组分的降解。 碱性化合物优选为有机碱,优选为丁胺。

    Isolation and structure of Halistatin 2
    178.
    发明授权
    Isolation and structure of Halistatin 2 失效
    Halistatin 2的分离和结构

    公开(公告)号:US5352804A

    公开(公告)日:1994-10-04

    申请号:US4852

    申请日:1993-01-19

    摘要: An intensive long-term investigation of marine organisms as sources of new anticancer drugs has led to the isolation and structural elucidation (primarily by high field NMR and mass spectrometry) of halistatin 2, a new polyether macrolide of the halipyran-type, from the Western Indian Ocean sponge Axinella cf. carteri (Dendy). Halistatin 2 (1.4.times.10.sup.-6 % yield) caused the accumulation of cells arrested in mitosis, inhibited tubulin polymerization, and inhibited the binding of radiolabeled vinblastine and GTP to tubulino. Further, Halistatin 2 displayed significant activity against selected human tumor cell lines.

    摘要翻译: 对海洋生物进行深入的长期调查,作为新的抗癌药物的来源,导致了halistatin 2(Halipyran型新型聚醚大环内酯类)的隔离和结构阐释(主要是通过高场NMR和质谱),从西方 印度洋海绵Axinella参考 卡特里(Dendy)。 Halistatin 2(1.4×10-6%产率)引起细胞在有丝分裂中的积累,抑制微管蛋白聚合,并抑制放射性标记的长春碱和GTP与tubulin的结合。 此外,Halistatin 2对选定的人肿瘤细胞系显示出显着的活性。