公开(公告)号：US08104742B2

公开(公告)日：2012-01-31

申请号：US12085179

申请日：2006-09-21

Applicant: Tetsuya Ishihara ,  Shigeru Osugi ,  Yukie Nakamura ,  Hiroto Yasue

Inventor： Tetsuya Ishihara ,  Shigeru Osugi ,  Yukie Nakamura ,  Hiroto Yasue

IPC: F16K31/50

CPC classification number: F16K31/50 ,  F16K35/027

Abstract: A flow control valve is provided in a manner to be capable of locking a position of a differential screw easily without displacing a position adjusted valve element body. The valve element body is brought into or out of contact with a valve seat provided between a first port and a second port, and is connected to an operation member. The operation member is movably inserted into a cover and urged to a direction toward the valve seat by an urging member. A position of the operation member is adjusted by a differential screw, and accordingly a position of the valve seat is adjusted. A rotation member for exerting a rotation force on the differential screw is slidably mounted in the cover along a moving direction of the operation member without rotating. A locking portion is provided in the rotation member to engage with the cover without rotating when the operation member is slid along its moving direction.

Abstract translation: 流量控制阀以能够容易地锁定差速螺杆的位置而不使位置调节阀体本体移位的方式设置。 阀芯体与设置在第一端口和第二端口之间的阀座接触或不接触，并且连接到操作构件。 操作构件可移动地插入盖中并且通过推动构件被推向朝向阀座的方向。 操作构件的位置通过差速螺旋调节，因此调整阀座的位置。 用于在差速螺钉上施加旋转力的旋转构件沿着操作构件的移动方向可滑动地安装在盖中而不旋转。 当操作构件沿其移动方向滑动时，锁定部分设置在旋转构件中以与盖接合而不旋转。

公开(公告)号：US08104516B2

公开(公告)日：2012-01-31

申请号：US12226416

申请日：2006-06-02

Applicant: Shuji Moriya ,  Hideki Nagaoka ,  Tsuneyuki Okabe ,  Hiroshi Itafuji ,  Hiroki Doi ,  Minoru Ito

Inventor： Shuji Moriya ,  Hideki Nagaoka ,  Tsuneyuki Okabe ,  Hiroshi Itafuji ,  Hiroki Doi ,  Minoru Ito

IPC: F16K11/10

CPC classification number: F17D1/04 ,  Y10T137/87177 ,  Y10T137/87885

Abstract: A gas supply unit and a gas supply system that are small-sized and inexpensive. The gas supply unit is installed on operation gas conveyance pipeline and has fluid control devices communicated via flow path blocks and controlling operation gas. The gas supply unit has the first flow path block, to one side of which an inlet open/close valve included in the fluid control devices is attached, and also has the second flow path block, to one side of which a purge valve included in the fluid control devices is attached. The first flow path block and the second flow path block are layered in the direction perpendicular to the conveyance direction of the operation gas. The inlet open/close valve and the purge valve are arranged between a mass flow controller installed on the operation gas conveyance pipeline and an installation surface where the unit is installed.

Abstract translation: 气体供给单元和气体供给系统，其尺寸小且便宜。 气体供应单元安装在操作气体输送管道上，并具有通过流路块连接并控制操作气体的流体控制装置。 气体供应单元具有第一流路块，其一侧包括在流体控制装置中的入口打开/关闭阀，并且还具有第二流路块，其一侧包括一个净化阀 流体控制装置被连接。 第一流路块和第二流路块在与操作气体的输送方向垂直的方向上分层。 入口打开/关闭阀和净化阀布置在安装在操作气体输送管线上的质量流量控制器和安装单元的安装表面之间。

公开(公告)号：US20110285125A1

公开(公告)日：2011-11-24

申请号：US13108909

申请日：2011-05-16

Applicant: Hiroshi Itafuji ,  Masayuki Kouketsu

Inventor： Hiroshi Itafuji ,  Masayuki Kouketsu

IPC: F16L55/00

CPC classification number: F16K27/003 ,  F16K27/0236 ,  Y10T137/4259 ,  Y10T137/8158 ,  Y10T137/87249 ,  Y10T137/87925

Abstract: This invention provides a chemical fluid flow channel coupling apparatus that couples and decouples chemical fluid flow channels. The coupling apparatus includes a first coupling unit; and a second coupling unit. The first coupling unit includes a first chemical fluid valve member chamber and a first valve member configured to open and close a first chemical fluid opening communicated with the first chemical fluid flow channel; and a purging fluid supply control valve configured to open and close the purging fluid supply flow channel. The second coupling unit includes a second chemical fluid valve member chamber, and a second valve member configured to open and close a second chemical fluid opening connected to the second chemical fluid flow channel; and a purging fluid discharge control valve.

Abstract translation: 本发明提供一种化学流体流动通道联接装置，其耦合和分离化学流体流动通道。 联接装置包括：第一联接单元; 和第二耦合单元。 第一联接单元包括第一化学流体阀构件室和构造成打开和关闭与第一化学流体流动通道连通的第一化学流体开口的第一阀构件; 以及构造成打开和关闭清洗流体供给流动通道的清洗液供应控制阀。 第二联接单元包括第二化学流体阀构件室和构造成打开和关闭连接到第二化学流体流动通道的第二化学流体开口的第二阀构件; 和清洗液排出控制阀。

公开(公告)号：US20110233923A1

公开(公告)日：2011-09-29

申请号：US13073744

申请日：2011-03-28

Applicant: Masayuki KOUKETSU ,  Hiroshi ITAFUJI ,  Shinji HAYAKAWA ,  Yasushi KOHNO

Inventor： Masayuki KOUKETSU ,  Hiroshi ITAFUJI ,  Shinji HAYAKAWA ,  Yasushi KOHNO

IPC: F16L39/00 ,  F16L9/18

CPC classification number: F16L59/065 ,  F16L39/005 ,  F16L59/182 ,  H01L21/67017

Abstract: This invention provides a connected structure of vacuum double pipes. The connected structure comprises a plurality of vacuum double pipes and a joint configured to connect the plurality of vacuum double pipes. The vacuum passage is open at both end in an extension direction of the inner pipe and sealed between the both ends. The joint includes an inner pipe joint unit having inner pipe connectors and an outer pipe joint unit having outer pipe connectors. The evacuation passage is sealed between the outer pipe connectors that connect the vacuum passages of the outer pipes.

Abstract translation: 本发明提供真空双管的连接结构。 连接结构包括多个真空双管和连接多个真空双管的接头。 真空通道在内管的延伸方向的两端开口，并在两端之间密封。 接头包括具有内管连接器的内管接头单元和具有外管连接器的外管接头单元。 在连接外管的真空通道的外管连接器之间密封排气通道。

公开(公告)号：US20110174380A1

公开(公告)日：2011-07-21

申请号：US12986119

申请日：2011-01-06

Applicant: Hiroshi ITAFUJI ,  Masayuki KOUKETSU

Inventor： Hiroshi ITAFUJI ,  Masayuki KOUKETSU

IPC: F15D1/00 ,  F16K1/00 ,  F16K31/02

CPC classification number: H01L21/6719 ,  H01L21/67253 ,  Y10T137/0318 ,  Y10T137/2562 ,  Y10T137/2572 ,  Y10T137/7758 ,  Y10T137/7761 ,  Y10T137/777

Abstract: This invention provides a vacuum control system using a vacuum pump to control a vacuum pressure and a flow of a processing gas in a vacuum chamber. The vacuum control system includes: a plurality of vacuum control valves, each of the valves being connected between each of a plurality of gas discharge ports and the vacuum pump; a pressure measurement unit configured to measure the vacuum pressure of the processing gas supplied to the object; and a controller configured to manipulate respective openings of the valves in accordance with the measured vacuum pressure.

Abstract translation: 本发明提供了一种使用真空泵来控制真空室中的真空压力和处理气体流量的真空控制系统。 真空控制系统包括：多个真空控制阀，每个阀连接在多个排气口和真空泵中的每一个之间; 压力测量单元，被配置为测量供给到所述物体的处理气体的真空压力; 以及控制器，其被配置为根据所测量的真空压力来操纵所述阀的相应开口。

公开(公告)号：US07853416B2

公开(公告)日：2010-12-14

申请号：US12285771

申请日：2008-10-14

Applicant: Akiko Nakada ,  Keisuke Kato ,  Akihito Sugino ,  Hiroki Doi

Inventor： Akiko Nakada ,  Keisuke Kato ,  Akihito Sugino ,  Hiroki Doi

IPC: G01F1/34 ,  G01K13/00 ,  G21C17/00

CPC classification number: G01F25/0038 ,  G01F25/0053

Abstract: A flow rate verification failure diagnosis apparatus is applied to a gas supply pipe system including flow rate control devices and a flow rate verification unit for detecting flow rate abnormality by measuring flow rate of each of the flow rate control devices on the basis of pressure measured by a pressure measurement device. The flow rate verification failure diagnosis apparatus comprises a failure diagnosis device having a mode to diagnose a failure in the pressure measurement device at a time of the flow rate verification unit detecting the flow rate abnormality, thereby the reliability of flow rate verification can be enhanced.

Abstract translation: 流量验证失败诊断装置应用于包括流量控制装置和流量验证部的气体供给管系统，该流量检测部通过基于由所述流量控制装置测定的压力， 压力测量装置。 流量验证失败诊断装置包括故障诊断装置，其具有在流量验证部检测流量异常时具有诊断压力测量装置的故障的模式的故障诊断装置，能够提高流量验证的可靠性。

公开(公告)号：US20100229984A1

公开(公告)日：2010-09-16

申请号：US12712609

申请日：2010-02-25

Applicant: Yukio OZAWA ,  Takashi YAJIMA ,  Tsuneyuki OKABE ,  Shigeyuki OKURA

Inventor： Yukio OZAWA ,  Takashi YAJIMA ,  Tsuneyuki OKABE ,  Shigeyuki OKURA

IPC: F16K11/085

CPC classification number: F16K11/0856 ,  Y10T137/4358 ,  Y10T137/85954 ,  Y10T137/86863 ,  Y10T137/86871

Abstract: A rotary valve (1) includes a valve body (2) formed with a chamber communication passage (24) for flowing a main fluid and a vent communication passage (25) for discharging the main fluid and a cylindrical valve member (3) rotatably held in the valve body (2) and formed with a main passage (31) for flowing the main fluid. The cylindrical valve member (3) is rotated to switch the connection of the main passage (31) between the chamber communication passage (24) and the vent communication passage (25). The rotary switching valve (1) further includes a purge gas passage for passing purge gas in a clearance (11) between the valve body (2) and the cylindrical valve member (3), the purge gas being supplied to the clearance (11) to prevent the main fluid from leaking out of the main passage (31).

Abstract translation: 旋转阀（1）包括形成有用于使主流体流动的室连通通道（24）和用于排出主流体的通气连通通道（25）的阀体（2）和可旋转地保持的圆柱形阀构件 在阀体（2）中形成有用于使主流体流动的主通道（31）。 旋转圆柱形阀构件（3）以便在室连通通道（24）和通气连通通道（25）之间切换主通道（31）的连接。 旋转切换阀（1）还包括净化气体通道，用于将净化气体通入阀体（2）和圆柱形阀构件（3）之间的间隙（11）中，净化气体供应到间隙（11） 以防止主流体从主通道（31）泄漏出来。

公开(公告)号：US07766341B2

公开(公告)日：2010-08-03

申请号：US11631156

申请日：2005-03-23

Applicant: Katsuya Okumura ,  Shoichi Kitagawa ,  Shigenobu Itoh ,  Kazuhiro Sugata ,  Kazuhiro Arakawa ,  Hiroshi Tomita

Inventor： Katsuya Okumura ,  Shoichi Kitagawa ,  Shigenobu Itoh ,  Kazuhiro Sugata ,  Kazuhiro Arakawa ,  Hiroshi Tomita

IPC: F16L17/00 ,  F16J15/02 ,  H02G3/22

CPC classification number: F16J15/106 ,  F16J15/104

Abstract: A seal structure in which a sealing member 510 fitted in the seal holding part 120 is elastically deformed to hermetically seal a flow passage joining portion. The seal holding part 120 opening on a flow passage side and including a first retaining surface 121, a second retaining surface 122, and a circumferential surface 123. The sealing member 510 includes a first surface 511 in contact with the first retaining surface 121, a second surface 512 in contact with the retaining surface 122, and an inner surface 513 located inside the seal holding part 510 and tapered to have a diameter becoming smaller from the first surface 511 side to the second surface 512 side. An engagement portion 515 engaged in the seal holding part 120 is formed protruding from an outer surface 514 located on the circumferential surface 123 side and on the first surface 511 side. When the sealing member 510 is fitted in the seal holding part 120 while the engagement portion 515 is pressed, the sealing member 510 is placed such that the inner surface 513 on the first surface 511 side protrudes inward and the outer surface 514 is in contact with the circumferential surface 123.

Abstract translation: 其中装配在密封保持部分120中的密封构件510弹性变形以密封流路连接部分的密封结构。 密封保持部分120在流动通道侧开口并且包括第一保持表面121，第二保持表面122和周向表面123.密封构件510包括与第一保持表面121接触的第一表面511， 与保持表面122接触的第二表面512和位于密封保持部510内的内表面513，并且具有从第一表面511侧到第二表面512侧的直径变小的锥形。 接合在密封保持部120中的接合部515从位于圆周表面123侧和第一表面511侧的外表面514形成。 当密封构件510在接合部分515被按压时装配在密封保持部分120中时，密封构件510被放置成使得第一表面511侧的内表面513向内突出，并且外表面514与 圆周表面123。

公开(公告)号：US20100155641A1

公开(公告)日：2010-06-24

申请号：US12591304

申请日：2009-11-16

Applicant: Akinori Masamura

Inventor： Akinori Masamura

IPC: F16K31/50 ,  F16K31/60

CPC classification number: F16K35/027 ,  F16K35/04 ,  Y10T137/9247

Abstract: A cover-equipped manual valve having a ratchet mechanism for preventing rotation of a knob, comprising: a rod formed with an external thread portion on an outer periphery thereof, the rod being unconnected to the knob and held against rotation; a sliding nut of a cylindrical shape, the sliding nut being rotatably held by a body and internally formed with an internal thread portion threadedly engaged with the external thread portion of the rod; an engagement member fixed to the knob, the engagement member being elastically deformable to be engaged with the sliding nut and to be disengaged from the sliding nut when larger torque than a predetermined value is applied to the engagement member; and a knob cover of a hollow shape for covering the knob.

Abstract translation: 一种装有盖的手动阀，具有用于防止旋钮旋转的棘轮机构，包括：杆，其外周上形成有外螺纹部分，所述杆未连接到所述旋钮并保持不旋转; 一个圆柱形的滑动螺母，该滑动螺母由本体可旋转地保持，内部形成有一个与该杆的外螺纹部分螺纹接合的内螺纹部分; 固定在所述旋钮上的接合构件，所述接合构件可弹性变形以与所述滑动螺母接合，并且当比所述接合构件施加更大的扭矩时，与所述滑动螺母脱离啮合; 以及用于覆盖旋钮的中空形状的旋钮盖。

公开(公告)号：US07686588B2

公开(公告)日：2010-03-30

申请号：US11581464

申请日：2006-10-17

Applicant: Katsuya Okumura ,  Tetsuya Toyoda ,  Tomohiro Ito ,  Akira Murakumo ,  Atsuyuki Sakai

Inventor： Katsuya Okumura ,  Tetsuya Toyoda ,  Tomohiro Ito ,  Akira Murakumo ,  Atsuyuki Sakai

IPC: F04B49/22

CPC classification number: F04B49/08

Abstract: A liquid chemical supply system that performs accurate pressure feedback control and controls the discharge flow rate of liquid chemical with high precision, even when the pressure setting value of the operation pressure differs due to changes in the type of liquid chemical, includes a pump having a pump chamber and an operation chamber separated by a diaphragm comprised of a flexible membrane. The intake and discharge of liquid chemical is performed in accordance with the change in pressure inside the operation chamber. An electro-pneumatic regulator supplies operation gas pressure to the operation chamber. A plurality of pressure sensors having different pressure detection ranges is provided for detecting the operation gas pressure. A controller selectively employs any of the detection results of the plurality of sensors in accordance with the pressure setting value of the operation air that is set for each use, and performs pressure feedback control.

Abstract translation: 一种液体化学品供应系统，即使当由于液体化学品的类型的变化而导致的操作压力的压力设定值不同时，也能够精确地进行精确的压力反馈控制和控制液体化学品的排出流量，包括具有 泵室和由包括柔性膜的隔膜隔开的操作室。 根据操作室内的压力变化进行液体化学品的进出。 电动气动调节器将操作气体压力提供给操作室。 提供具有不同压力检测范围的多个压力传感器用于检测操作气体压力。 控制器根据为每次使用设定的操作空气的压力设定值选择性地使用多个传感器的检测结果，并进行压力反馈控制。