DETECTING DIE REPEATING PROGRAMMED DEFECTS LOCATED IN BACKGROUNDS WITH NON-REPEATING FEATURES

    公开(公告)号:US20190277776A1

    公开(公告)日:2019-09-12

    申请号:US16295999

    申请日:2019-03-07

    摘要: Systems and methods for detecting programmed defects on a water during inspection of the wafer are provided. One method includes selecting a mode of an inspection subsystem for detecting programmed defects on a wafer that generates output for the wafer having the lowest non-defect signal and at least a minimum signal for the programmed defects. The method also includes selecting a training care area that is mutually exclusive of care area(s) used for detecting the programmed defects during inspection of the wafer. The training care area generates less of the non-defect signal than the care area(s). The method further includes training a programmed defect detection method using the output generated with the selected mode in the training care area and detecting the programmed defects during the inspection of the wafer by applying the trained programmed defect detection method to the output generated in the care area(s) with the selected mode.

    Wireless probes
    180.
    发明授权

    公开(公告)号:US10018670B2

    公开(公告)日:2018-07-10

    申请号:US14963076

    申请日:2015-12-08

    发明人: Javier DeLaCruz

    IPC分类号: G01R31/302 G01R31/303

    CPC分类号: G01R31/303 G01R31/3025

    摘要: Disclosed is a probe card for testing a wireless module on an integrated circuit die contained on a wafer. The probe card includes a connector and a plurality of probes. The connector connects the probe card to test equipment. The plurality of probes connects the probe card to a wafer containing a plurality of integrated circuit dies. The probe card additionally includes an antenna configured to transmit a wireless test signal to be received by at least one of the integrated circuit dies, and/or to receive a wireless signal transmitted by at least one of the integrated circuit dies.