公开(公告)号：US20080043919A1

公开(公告)日：2008-02-21

申请号：US11504609

申请日：2006-08-16

Applicant: Fletcher L. Chapin ,  Liza M. Hart ,  Allan O. Johnson

Inventor： Fletcher L. Chapin ,  Liza M. Hart ,  Allan O. Johnson

IPC: H05G2/00 ,  H01J35/12 ,  G21G4/00 ,  H01J35/10 ,  H01J35/00

CPC classification number: H05G1/04 ,  H05G1/025

Abstract: An x-ray source assembly capable of producing x-rays suitable for use in medical, explosive detection, and other areas. The assembly includes a housing having a two-part socket member (which holds the assembly's x-ray tube therein) positioned therein. The two-part housing defines an opening through with the tube's x-rays are emitted.

Abstract translation: 一种能够产生适合用于医疗，爆炸物检测和其他领域的x射线的x射线源组件。 组件包括具有位于其中的两部分插座构件（其将组件的x射线管保持在其中）的壳体。 两部分壳体限定了通过管的X射线的开口。

公开(公告)号：US20070242803A1

公开(公告)日：2007-10-18

申请号：US11812465

申请日：2007-06-19

Applicant: Tomohide Umemura ,  Yoshiaki Shiratori ,  Takayuki Kitami

Inventor： Tomohide Umemura ,  Yoshiaki Shiratori ,  Takayuki Kitami

IPC: H01J35/00 ,  H01J35/12

CPC classification number: A61B6/4488 ,  A61B6/035 ,  A61B6/40 ,  H05G1/02 ,  H05G1/025

Abstract: A cooler that circulates cooling fluid to cool an X-ray tube, and that comprises a circulation unit that has a first end unit and a second end unit, and an expansion mechanism that has a vessel and a bellows that divides the inside of the vessel into a first chamber and a second chamber, wherein the first end unit and the second end unit are detachably coupled to the X-ray tube and are closed when being uncoupled from the X-ray tube, and the expansion mechanism can be switched between a first state and a second state.

Abstract translation: 冷却器，其使冷却流体循环以冷却X射线管，并且包括具有第一端部单元和第二端部单元的循环单元的冷却器，以及具有容器和波纹管的膨胀机构，所述容器和波纹管分隔容器的内部 进入第一室和第二室，其中所述第一端单元和所述第二端单元可拆卸地联接到所述X射线管，并且在与所述X射线管分离时闭合，并且所述膨胀机构可以在 第一状态和第二状态。

公开(公告)号：US20070235666A1

公开(公告)日：2007-10-11

申请号：US11762011

申请日：2007-06-12

Applicant: David Ruzic ,  Robert Bristol ,  Bryan Rice

Inventor： David Ruzic ,  Robert Bristol ,  Bryan Rice

IPC: H01J35/00

CPC classification number: B82Y10/00 ,  G03F7/70033 ,  G03F7/70166 ,  G03F7/70916 ,  H01J37/321 ,  H01J2237/022 ,  H05G2/001

Abstract: A light source chamber in an Extreme Ultraviolet (EUV) lithography system may include a secondary plasma to ionize debris particles created by the light source and a foil trap to trap the ionize particles to avoid contamination of the collector optics in the chamber.

Abstract translation: 极紫外（EUV）光刻系统中的光源室可以包括用于离子化由光源产生的碎屑颗粒的二次等离子体和箔陷阱以捕获电离粒子，以避免腔室中的收集器光学元件的污染。

公开(公告)号：US20070177714A1

公开(公告)日：2007-08-02

申请号：US11697972

申请日：2007-04-09

Applicant: Mark Benz ,  Matthew Benz

Inventor： Mark Benz ,  Matthew Benz

IPC: H05G2/00 ,  G21G4/00 ,  H01J35/00

CPC classification number: A61B6/032 ,  A61B6/4042 ,  A61B6/542

Abstract: A system and method for imaging a volume having a detector including a first atomic species with an absorption edge at a first wavelength. The system also includes a source having a second atomic species for emitting an ionizing energy. The second atomic species has a characteristic emission peak that substantially matches the absorption edge of the detector. A filter may be provided for blocking ionizing energy from the source in regions other than a region proximate the characteristic emission peak. Effective imaging with a lower radiation dose may be achieved with the system and method.

Abstract translation: 一种用于对具有检测器的体积成像的系统和方法，所述检测器包括具有第一波长的吸收边缘的第一原子物种。 该系统还包括具有用于发射电离能的第二原子种的源。 第二原子物质具有基本上与检测器的吸收边缘匹配的特征发射峰。 可以提供一种滤波器，用于在除了特征发射峰附近的区域之外的区域中阻挡来自源极的电离能。 利用系统和方法可以实现较低辐射剂量的有效成像。

公开(公告)号：US20070153976A1

公开(公告)日：2007-07-05

申请号：US11685445

申请日：2007-03-13

Applicant: Akiyuki Yokoyama ,  Masahiro Kuroda ,  Tadahiro Nakayama ,  Shinichi Kominato ,  Tomokazu Harada ,  Yoshinori Saito

Inventor： Akiyuki Yokoyama ,  Masahiro Kuroda ,  Tadahiro Nakayama ,  Shinichi Kominato ,  Tomokazu Harada ,  Yoshinori Saito

IPC: H01J35/00

CPC classification number: H02K7/14 ,  A61B6/56

Abstract: A permanent magnet type motor comprising a rotor main body rotatably supported with respect to a stationary member, a rotor which is provided on an outer periphery face of the rotor main body and which is arranged such that S poles and N poles of a plurality of permanent magnets are provided alternately, a stator composed of a stator core arranged at the outer periphery side or inner periphery side of the rotor, the stator core having winding storage sections, and stator windings stored in the winding storage sections, a sensor fixed to the stationary member so as to be proximal to the permanent magnets, the sensor detecting a position of the permanent magnets, a detection target member having a detector for detecting a magnetic resistance change portion formed on the rotor main body, and a rotational position detecting magnetic sensor arranged at the stationary member.

公开(公告)号：US20070086572A1

公开(公告)日：2007-04-19

申请号：US11581954

申请日：2006-10-17

Applicant: Robert Dotten ,  Robert Taylor ,  Emilio Panarella ,  Meisheng Xu ,  Yuriy Antoshko ,  Ian Chapman ,  Philippe Gratton ,  David Johnson

Inventor： Robert Dotten ,  Robert Taylor ,  Emilio Panarella ,  Meisheng Xu ,  Yuriy Antoshko ,  Ian Chapman ,  Philippe Gratton ,  David Johnson

IPC: H01J35/00

CPC classification number: H05G2/003

Abstract: A soft x-ray generator includes a unique pulse trigger assembly which reliably and reproducibly provides a plasma to initiate the discharge between a cathode and an anode, and having a cone-shaped geometry. The soft x-ray generator of the present invention also includes a rotating anode which is generally disk-shaped with an outer circumferential edge which can be rotated with respect to the cathode to expose different sections of the anode to the plasma discharge, thereby reducing anode wear and providing longer term operation. Anode erosion is also reduced by the liquid cooling of the anode during use. The generator utilizes a relatively low capacitance for the cathode-to-anode discharge and a relatively high voltage and pulse repetition rate (frequency) to achieve continuous reproducible results.

Abstract translation: 软X射线发生器包括独特的脉冲触发器组件，其可靠地和可重复地提供等离子体以引发阴极和阳极之间的放电，并且具有锥形几何形状。 本发明的软X射线发生器还包括旋转阳极，该旋转阳极通常为圆盘状，具有能够相对于阴极旋转的外周边缘，以将阳极的不同部分暴露于等离子体放电，从而减少阳极 磨损和提供长期的操作。 在使用过程中阳极的液体冷却也减少了阳极侵蚀。 发生器利用相对低的电容用于阴极至阳极放电和相对较高的电压和脉冲重复率（频率），以实现连续可重复的结果。

公开(公告)号：US07203280B2

公开(公告)日：2007-04-10

申请号：US11404779

申请日：2006-04-17

Applicant: Hidero Anno ,  Koichi Kitade ,  Takayuki Kitami ,  Hironori Nakamuta ,  Manabu Sato

Inventor： Hidero Anno ,  Koichi Kitade ,  Takayuki Kitami ,  Hironori Nakamuta ,  Manabu Sato

IPC: H01J35/00

CPC classification number: H05G1/04 ,  H05G1/08

Abstract: The present invention relates to an X-ray apparatus comprising an electron radiation source which generates an electron to an anode, a shaft which rotatably supports the anode, a stator which generates a force to rotate a rotor shaft, an enclosure which maintains at least the anode, electron radiation source and rotor shaft in vacuum, and a housing which contains a cooling medium around the enclosure. The X-ray apparatus is characterized in that an electric wire material to supply power to the electron radiation source and stator, or a connector used for connection with the electric wire material is molded by a material having an electrical insulating property.

Abstract translation: 本发明涉及一种X射线设备，其包括：向阳极产生电子的电子辐射源，可旋转地支撑阳极的轴，产生转动轴的力的定子，至少保持 阳极，电子辐射源和真空中的转子轴，以及在外壳周围包含冷却介质的壳体。 X射线装置的特征在于，用于向电子辐射源和定子供电的电线材料或用于与电线材料连接的连接器由具有电绝缘性的材料模制。

公开(公告)号：US20070041502A1

公开(公告)日：2007-02-22

申请号：US11504416

申请日：2006-08-14

Applicant: Eberhard Lenz

Inventor： Eberhard Lenz

IPC: H01J35/00

CPC classification number: H05G1/34 ,  H01J2235/088 ,  H05G1/56

Abstract: In an x-ray apparatus and a method for operation thereof, plastic deformations on the surface of the anode are achieved by applied current or the applied voltage being steadily increased up to an operating current strength or an operating voltage within a time segment following initial activation.

Abstract translation: 在x射线装置及其操作方法中，通过施加的电流或施加的电压在初始激活之后稳定地增加到操作电流强度或时间段内的工作电压来实现阳极表面上的塑性变形 。

公开(公告)号：US20060239408A1

公开(公告)日：2006-10-26

申请号：US11111497

申请日：2005-04-21

Applicant: Roger Durst ,  Bob He

Inventor： Roger Durst ,  Bob He

IPC: H01J35/00

CPC classification number: H01J35/08 ,  G01N2223/204 ,  H01J35/18 ,  H01J35/24 ,  H01J2235/081

Abstract: An x-ray source provides both a line focus output and a point focus output, and is mounted on a rotatable support to allow easy changing between the two. A housing has ports at different angular positions relative to an anode, and each port has an associated optic appropriate for an x-ray beam passing through that port. Three or four ports may also be used to allow for different types of beam conditioning. The different beam optics may also do conditioning based on wavelength, and the anode may be of a composite material to provide different wavelength ranges. The rotatable support may be manual or motorized, and a lockout mechanism may be used to ensure that only one port is active at a time. The support may also be located on a movable table that is movable in multiple perpendicular directions.

Abstract translation: X射线源提供线路对焦输出和点对焦输出，并且安装在可旋转的支撑件上以允许在两者之间容易地变化。 壳体具有相对于阳极的不同角度位置处的端口，并且每个端口具有适合于穿过该端口的x射线束的相关联的光学元件。 也可以使用三个或四个端口来允许不同类型的光束调节。 不同的光束光学器件还可以基于波长进行调节，并且阳极可以是复合材料以提供不同的波长范围。 可旋转支撑件可以是手动的或机动的，并且可以使用锁定机构来确保一次只有一个端口是活动的。 支撑件也可以位于可在多个垂直方向上移动的可动台上。

公开(公告)号：US20060216912A1

公开(公告)日：2006-09-28

申请号：US11092167

申请日：2005-03-28

Applicant: Robert Bristol ,  Bruce Billett

Inventor： Robert Bristol ,  Bruce Billett

IPC: H05H1/00 ,  H01J35/00 ,  H01L21/322

CPC classification number: G21K1/06 ,  G21K2201/067

Abstract: Methods to manufacture contaminant-gettering materials in the surface of EUV optics are described herein. An optical element is patterned and a contaminant-gettering material is formed on a surface of the optical element. In one embodiment, a photoresist is deposited on an optical coating on the optical element. Trenches are formed in the optical coating. The gettering agent is formed into the trenches over the photoresist. Next, the photoresist is removed from the optical coating to expose the gettering agent in the trenches. For another embodiment, patches of a nanotube forest having a gettering agent are formed in designated areas of an optical element. The gettering agent of the patches may be a plurality of carbon nanotubes. The optical coating is formed on a substrate between patches of the gettering agent.

Abstract translation: 本文描述了在EUV光学器件的表面中制造污染物吸收材料的方法。 对光学元件进行图案化，并且在光学元件的表面上形成污染物吸收材料。 在一个实施例中，光致抗蚀剂沉积在光学元件上的光学涂层上。 在光学涂层中形成沟槽。 吸光剂形成在光致抗蚀剂上的沟槽中。 接下来，从光学涂层去除光致抗蚀剂以暴露沟槽中的吸杂剂。 对于另一个实施例，在光学元件的指定区域中形成具有吸气剂的纳米管森林的贴片。 补片的吸气剂可以是多个碳纳米管。 该光学涂层形成在吸气剂的贴片之间的衬底上。