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公开(公告)号:US20050028616A1
公开(公告)日:2005-02-10
申请号:US10910999
申请日:2004-08-04
申请人: Virgil Marple , Benjamin Liu
发明人: Virgil Marple , Benjamin Liu
CPC分类号: G01N15/0255 , G01N1/2208 , G01N2015/0261
摘要: A cascade impactor apparatus has a series of vertically stacked impactor housing sections. Each of the impactor housing sections has an upper portion that supports a motor for driving an impactor plate that is positioned below a nozzle through which flow passes. Each housing section also has an outlet passageway leading to a lower impactor chamber for the next in a series of impactor chambers, except the last outlet passageway is coming through a filter to exhaust. The impactor chambers are defined by a skirt that seals on the neck of the next downstream housing section. The impactor plates are each driven by a separate motor, and held onto a hub on the motor output shaft with a magnetic coupling so the plates can be removed when the housings are separated.
摘要翻译: 级联冲击器装置具有一系列垂直堆叠的冲击器容纳部分。 每个冲击器容纳部分具有上部,该上部支撑用于驱动冲击器的马达,所述冲击器位于流经所述喷嘴的下方。 除了最后一个出口通道通过过滤器排气之外,每个壳体部分还具有通向一系列冲击器腔室中的下冲击器腔室的出口通道。 冲击器室由在下一个下游壳体部分的颈部上密封的裙部限定。 冲击器板分别由单独的马达驱动,并且通过磁耦合器保持在电动机输出轴上的轮毂上,以便当壳体分离时可以移除板。
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公开(公告)号:US5609798A
公开(公告)日:1997-03-11
申请号:US475351
申请日:1995-06-07
CPC分类号: B01F3/04021 , B05B7/0012 , G01N15/08
摘要: An atomizer includes a housing that has a plurality of atomizing nozzles which will atomize a solution containing small particles that are to be carried in an output aerosol. The atomizer nozzles are surrounded by a ring-like surface against which the atomized material impinges to collect large droplets and to cause secondary atomization of the liquid impinging on the ring-like surface. The ring-like surface can have many different cross-sectional configurations for obtaining different results in secondary atomization and droplet collection.
摘要翻译: 雾化器包括具有多个雾化喷嘴的壳体,雾化喷嘴将雾化含有在输出气溶胶中携带的小颗粒的溶液。 雾化器喷嘴被一个环状表面包围,雾化的材料撞击该环状表面以收集大的液滴并且引起液体撞击到环状表面上的二次雾化。 环形表面可以具有许多不同的横截面构造,以在二次雾化和液滴收集中获得不同的结果。
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公开(公告)号:US5534309A
公开(公告)日:1996-07-09
申请号:US263128
申请日:1994-06-21
申请人: Benjamin Y. H. Liu
发明人: Benjamin Y. H. Liu
CPC分类号: H01L21/6715 , B05B12/02 , B05D1/12
摘要: A method of providing particle deposition on a semiconductor wafer or other surface first provides a flow of clean gas into a deposition chamber that purges the chamber prior to introduction of the wafer, and after introduction, continues the flow of clean gas. An aerosol is mixed into the clean gas flow for a desired length of time, so that as the combined flow passes through the deposition chamber particles are deposited on the wafer supported in the chamber. After the deposition has continued for either a desired particle count or a length of time, the flow of aerosol is discontinued, and a clean gas flow sheath is provided over the wafer as it is removed from the chamber. The apparatus carries out this method by providing a source of a clean gas, valves for controlling aerosol introduction into the clean gas, and a support for the wafer in the path of gas introduced into the chamber.
摘要翻译: 在半导体晶片或其他表面上提供颗粒沉积的方法首先提供清洁气体流入沉积室,其在引入晶片之前净化室,并且在引入之后,继续清洁气体的流动。 将气雾剂混入清洁气体流中一段所需的时间,使得当组合流通过沉积室时,颗粒沉积在支撑在室中的晶片上。 在沉积继续进行所需的颗粒数或时间长度之后,气溶胶的流动被停止,并且当清洁气流从腔室中取出时,清洁的气体流动护套被提供在晶片上方。 该装置通过提供清洁气体源,用于控制气体引入清洁气体的阀和用于引入气室的气体路径中的晶片的支撑来执行该方法。
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公开(公告)号:US5006227A
公开(公告)日:1991-04-09
申请号:US371986
申请日:1989-06-26
CPC分类号: B07B7/00 , G01N1/2208 , G05D7/0658 , G01N2001/2223 , G01N2001/242
摘要: A volumetric flow controller is used in connection with a virtual impactor classifier to control two separate flows in separate lines from an air pump. Each line has a flow control valve controlled in response to flow signals that are obtained from a pressure transducer that provides an electrical signal proportional to pressure. Pressure changes are sensed and the provided electrical signal is compared with a reference and will actuate a damper motor and move a flow control butterfly valve in the flow line for adjusting the flow when the pressure signal is different from the reference. The circuitry used provides for a dead band, so that changes in the butterfly valve setting will not occur unless the flow varies a selected amount, and also a timer control is used so that the motor operating the damper will be operated only at selected time intervals to prevent "hunting" or continuous operation of the valves. Further, temperature compensation signals can be provided as desired. The ability to control the flow volume provides for more accurate aerosol sampling and cut off points for the size of particles being sampled.
摘要翻译: 体积流量控制器与虚拟冲击器分级器结合使用,以控制与气泵分离的两条独立流。 每条管线都具有响应于从提供与压力成正比的电信号的压力传感器获得的流量信号而控制的流量控制阀。 感测到压力变化,并且将所提供的电信号与参考值进行比较,并且将致动阻尼电机并且在流动管线中移动流量控制蝶阀,以在压力信号不同于参考值时调节流量。 所使用的电路提供死区,因此除非流量改变所选择的量,否则蝶阀设置的变化将不会发生,并且还使用定时器控制,以便仅在选定的时间间隔内操作阻尼器的电机 以防止“狩猎”或连续操作阀门。 此外,可以根据需要提供温度补偿信号。 控制流量的能力提供了更精确的气溶胶取样和切割点,以便取样颗粒的大小。
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公开(公告)号:US09797593B2
公开(公告)日:2017-10-24
申请号:US14709055
申请日:2015-05-11
申请人: MSP Corporation
发明人: Thuc M. Dinh , Yamin Ma , Benjamin Y. H. Liu
IPC分类号: F22B29/06 , F22B1/28 , C23C16/448 , F01K5/00
CPC分类号: F22B1/282 , C23C16/4486 , F01K5/00
摘要: An apparatus and method for generating a vapor with a compact vaporizer design and exposing the gas and liquid mixture for vaporization to a reduced maximum temperature. A gas and liquid droplet flow through a metal housing configured to heat the gas and liquid droplet mixture flow for vaporization includes directing the gas and liquid droplet mixture through an inlet of the metal housing and flowing the gas through a tortious flow path defined by a plurality of tubular flow passageways arranged around a central axis for vaporization. Residual liquid droplets may be further vaporized by flowing through a second metal housing configured to heat the gas and liquid droplet mixture for vaporization and having a similar construction to the first metal housing and providing a second tortious flow path.
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公开(公告)号:US09764333B2
公开(公告)日:2017-09-19
申请号:US12902871
申请日:2010-10-12
IPC分类号: B03C3/38
CPC分类号: B03C3/38
摘要: A method and apparatus are disclosed for exposing particles in a gas in order to cause the charge on the particles to change, the apparatus comprising a chamber having a conductive wall with a gas inlet and a gas outlet. An electrode with an exposed tip is in the chamber, the electrode being held at a different potential from the ground potential. The electrode is connected to a source of voltage sufficient to cause a corona discharge to occur forming ions in the chamber, and creating a region with a high electric field intensity and another region in which the electric field intensity is lower. The inlet and outlet define a gas flow path from the inlet to the outlet such that the gas flow path passes mainly through the region with the lower electric field intensity.
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公开(公告)号:US08986784B2
公开(公告)日:2015-03-24
申请号:US13937996
申请日:2013-07-09
申请人: MSP Corporation
发明人: Benjamin Y. H. Liu , Thuc M. Dinh , Yamin Ma
IPC分类号: B05B17/04 , B05B1/08 , B01F3/04 , C23C16/448
CPC分类号: B05B17/04 , C23C16/4486
摘要: A method for forming a droplet aerosol for vaporization and subsequent thin film deposition on a substrate. The method includes drawing a gas from a compressed gas source and drawing a liquid from a liquid source. The liquid and gas are conjoined in either a coaxial flow relationship or a radial flow relationship or an angular relationship between radial and coaxial flow wherein the gas engages the liquid to form droplets suitable for vaporization and subsequent thin film deposition on a substrate.
摘要翻译: 一种用于形成用于汽化和随后的薄膜沉积在基底上的液滴气溶胶的方法。 该方法包括从压缩气体源抽取气体并从液体源抽取液体。 液体和气体以同轴流动关系或径向流动关系或径向和同轴流动之间的角度关系结合,其中气体与液体接合以形成适于蒸发的液滴和随后的薄膜沉积在基底上。
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公开(公告)号:US08945281B1
公开(公告)日:2015-02-03
申请号:US14168692
申请日:2014-01-30
申请人: MSP Corporation
发明人: Thuc M. Dinh , Yamin Ma , Benjamin Y. H. Liu
CPC分类号: H01L21/67109 , H01L21/02052 , H01L21/67051
摘要: The present disclosure describes an apparatus and a method for generating IPA vapor for condensation on a substrate in order to provide a vapor that is substantially free of particulate and molecular contaminants. The apparatus includes an inlet for liquid to enter, and a plurality of heated sloped surfaces to create thin sheets of flowing liquid on the surfaces from which the liquid can vaporize to form vapor. The liquid flows from one surface to another, vaporizing the liquid.
摘要翻译: 本公开描述了一种用于在基底上产生用于冷凝的IPA蒸气以提供基本上不含颗粒和分子污染物的蒸气的装置和方法。 该装置包括用于进入液体的入口和多个加热的倾斜表面,以在表面上产生薄的流动液体,液体可从该表面蒸发以形成蒸气。 液体从一个表面流到另一个表面,使液体蒸发。
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公开(公告)号:US20130036973A1
公开(公告)日:2013-02-14
申请号:US13603693
申请日:2012-09-05
IPC分类号: C23C16/52 , C23C16/455
CPC分类号: B05C11/00 , G01N15/065
摘要: The present disclosure describes a method and apparatus for detecting particles in a gas by saturating the gas with vapor and causing the gas to flow through a chamber with walls that are at a temperature different than the temperature of the entering gas creating a gas turbulence within the chamber resulting in the gas becoming super-saturated with vapor and causing said super-saturated vapor to condense on said particles and form droplets, which are then detected and counted by an optical light-scattering detector.
摘要翻译: 本公开内容描述了一种用于通过用气体使气体饱和来检测气体中的颗粒并使气体流过室的方法和装置,其中壁的温度不同于进入气体的温度,该温度在内部产生气体湍流 导致气体被蒸汽过饱和,并使所述超饱和蒸汽冷凝在所述颗粒上并形成液滴,然后通过光学散射检测器检测和计数。
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公开(公告)号:US20120315768A1
公开(公告)日:2012-12-13
申请号:US13590512
申请日:2012-08-21
申请人: William Dick , Benjamin Y.H. Liu
发明人: William Dick , Benjamin Y.H. Liu
IPC分类号: H01L21/30
CPC分类号: H01L21/67028 , B05D1/06
摘要: A method for establishing a calibrating standard for wafer inspection includes depositing solid ionized particles of a known size range with an aerosol onto a wafer. The method also includes depositing particles onto a wafer in a deposition chamber by using an aerosol stream and the solid particles suspended in a gas; ionizing the aerosol stream with a negative or positive charge polarity or both by passing the aerosol stream through a non-radioactive ionizer to produce charged particles and supplying such aerosol stream to the deposition chamber.
摘要翻译: 用于建立晶片检查的校准标准的方法包括将已知尺寸范围的固体离子化颗粒与气溶胶沉积在晶片上。 该方法还包括通过使用气溶胶流和悬浮在气体中的固体颗粒将颗粒沉积在沉积室中的晶片上; 通过使气溶胶流通过非放射性离子发生器以产生带电粒子并将这种气溶胶流供应到沉积室,使负极或正电荷极性或二者电离气溶胶流。
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