SURFACE TREATMENT METHOD FOR SEMICONDUCTOR SUBSTRATES AND SURFACE TREATMENT AGENT COMPOSITION

    公开(公告)号:US20230282473A1

    公开(公告)日:2023-09-07

    申请号:US17999361

    申请日:2021-05-19

    IPC分类号: H01L21/02 C09D183/08 C09D7/20

    摘要: A surface treatment method for a semiconductor substrate of the present invention is a treatment method of treating a main surface of a semiconductor substrate that has, on the main surface of the substrate, a pattern formation region in which a pattern having a concave-convex structure with a pattern dimension of 30 nm or less is formed and a pattern non-formation region in which no pattern is formed, the method including a surface treatment step of bringing a surface treatment agent composition including a silylating agent into contact with the pattern formation region and the pattern non-formation region on the main surface of the semiconductor substrate, in which, with respect to a surface of the pattern non-formation region after the surface treatment step, an IPA contact angle with 2-propanol is 2° or more at a room temperature of 25° C. and/or a water contact angle with pure water is 50° or more at the room temperature of 25° C.

    ALKYLAMINE COMPOSITION AND METHOD FOR STORING SAID ALKYLAMINE COMPOSITION

    公开(公告)号:US20230257339A1

    公开(公告)日:2023-08-17

    申请号:US18010559

    申请日:2021-06-23

    IPC分类号: C07C209/84 F17C6/00

    摘要: The alkylamine composition of the present disclosure contains: an alkylamine represented by the following formula (1) in an amount of 99.5% by volume or more; and water in an amount of 10 ppm by mass or more and 100 ppm by mass or less:




    wherein N is a nitrogen atom; R1 is a C1-C10 hydrocarbon group optionally having a ring, a heteroatom, or a halogen atom; R2 and R3 are each independently a hydrogen atom or a C1-C10 hydrocarbon group optionally having a ring, a heteroatom, or a halogen atom; provided that the hydrocarbon group, when it has a carbon number of 3 or more, may have a branched chain structure or a ring structure and that the heteroatom in the hydrocarbon group is a nitrogen atom, an oxygen atom, a sulfur atom, or a phosphorus atom; further, R1 and R2, when both of them are hydrocarbon groups having a carbon number of 1 or more, may be directly bonded to each other to form a ring structure; further, R1 or R2, which is directly bonded by a double bond to form a ring structure, may form an aromatic ring in the absence of R3; R1, R2, and R3 may be hydrocarbon groups which are the same as or different from one another; and R1 has at least one hydrogen atom at α carbon bonded to the nitrogen atom.

    Method for manufacturing filled container, and filled container

    公开(公告)号:US11519557B2

    公开(公告)日:2022-12-06

    申请号:US16625963

    申请日:2018-07-24

    摘要: The method for producing a filled container of the present invention includes: providing a metal storage container, at least an inner surface of which is formed of a manganese steel and in which the inner surface has a surface roughness Rmax of 10 μm or less; performing fluorination by bringing the inner surface of the storage container into contact with a gas containing at least one first fluorine-containing gas selected from the group consisting of ClF3, IF7, BrF5, F2, and WF6 at 50° C. or lower; purging the inside of the storage container with an inert gas; and filling the inside of the storage container with at least one second fluorine-containing gas selected from the group consisting of ClF3, IF7, BrF5, F2, and WF6.

    Silicon-Containing Layer-Forming Composition, and Method for Producing Pattern-Equipped Substrate Which Uses Same

    公开(公告)号:US20220384182A1

    公开(公告)日:2022-12-01

    申请号:US17873304

    申请日:2022-07-26

    摘要: Provided is a silicon-containing layer forming composition for forming a silicon-containing layer which exhibits an anti-reflective function during exposure in a multilayer resist process and, during dry etching, shows a high etching rate against a plasma of fluorine-based gas and a low etching rate against a plasma of oxygen-based gas. The silicon-containing layer forming composition includes a polysiloxane compound having a structural unit of the formula: [(R1)bR2mSiOn/2] and a solvent. In the formula, R1 is a group represented by the following formula: (where a is an integer of 1 to 5; and a wavy line means that a line which the wavy line intersects is a bond); R2 is each independently a hydrogen atom, a C1-C3 alkyl group, a phenyl group, a hydroxy group, a C1-C3 alkoxy group or a C1-C3 fluoroalkyl group; b is an integer of 1 to 3; m is an integer of 0 to 2; n is an integer of 1 to 3; and a relationship of b+m+n=4 is satisfied.

    THREE-DIMENSIONAL PICTOGRAPH
    17.
    发明申请

    公开(公告)号:US20220347973A1

    公开(公告)日:2022-11-03

    申请号:US17286624

    申请日:2019-10-23

    发明人: Michael Bard

    IPC分类号: B32B17/10 B32B7/023 G02B30/52

    摘要: The present disclosure relates to an automotive glass product comprising a glazing having at least one glass substrate, a first image, and a second image separated in space from the first image, wherein the first image and the second image are at least partially aligned at an angle through the glass product, and wherein the first image and the second image provide a three-dimensional pictograph from at least one viewing angle.

    VEHICLE REAR INFORMATION ACQUISITION SYSTEM

    公开(公告)号:US20220314753A1

    公开(公告)日:2022-10-06

    申请号:US17639026

    申请日:2020-09-01

    摘要: The vehicle rear information acquisition system of the disclosure includes: a back window at a rear of a vehicle; and an information acquisition device disposed inside the vehicle, opposing the back window, and configured to apply and/or receive light to acquire information from outside the vehicle, the back window including a glass plate and a coating film on at least a part of a surface of the glass plate, and having a privacy region for protecting privacy inside the vehicle and an information acquisition region opposing the information acquisition device and transmitting the light, the privacy region having the coating film on the surface of the glass plate, the privacy region having a visible light transmittance of 10% or less, the information acquisition region having a visible light transmittance of 25% or more.

    ANTI-FOGGING STRUCTURE FOR WINDOW GLASS

    公开(公告)号:US20220289001A1

    公开(公告)日:2022-09-15

    申请号:US17636240

    申请日:2020-08-24

    IPC分类号: B60J1/00 H05B3/84 B60S1/08

    摘要: A defogging structure of a windowpane of a movable body in which an information acquisition device configured to acquire information from an exterior of the movable body by at least one of emitting light or receiving light can be arranged in an interior of the movable body, the defogging structure including: a windowpane having an information acquisition area through which at least one of light emitted by the information acquisition device or light to be received by the information acquisition device passes; a defogging sheet including a resin film and a defogger, the defogging sheet being adhered to the information acquisition area of the windowpane; and a transparent resin adhesive layer that allows the resin film of the defogging sheet to be adhered to the windowpane, wherein a resin constituting the transparent resin adhesive layer has a Tg of −20° C. to −50° C., and a shear storage modulus of 0.5×105 Pa to 2.0×105 Pa.