-
公开(公告)号：US06180952B2
公开(公告)日：2001-01-30
申请号：US09055035
申请日：1998-04-03
IPC分类号： H05H134
CPC分类号： H05G2/003 , G03F7/70033 , H05G2/008
摘要： An emitted energy system for use in photolithography may include a holder assembly operable to precisely align a diffuser and a nozzle. In accordance with one embodiment of the present invention, a holder assembly (30) may comprise a nozzle mounting system (414) coupled to a housing assembly (400) to secure a nozzle (22). A diffuser mounting system (430) may be coupled to the housing assembly (400) to secure a diffuser (28). An alignment system (450) may operate to align the nozzle (22) and the diffuser (28) in a spatial relationship with each other to optimize operation of the diffuser (28) in relation to the nozzle (22).
-
公开(公告)号：US6105885A
公开(公告)日：2000-08-22
申请号：US54831
申请日：1998-04-03
CPC分类号： H05G2/003 , B05B1/005 , B82Y10/00 , G03F7/70033 , G03F7/70858 , H05G2/006
摘要： An emitted energy system for use in photolithography may include a fluid nozzle. A nozzle and its method of manufacture are provided. A nozzle (22) may include a nozzle cavity (110) disposed within a nozzle body (100) between an up-stream end (102) and a down-stream end (104). A nozzle passage (118) may be defined within the nozzle cavity (110) and extend a longitudinal length (120) from the down-stream end (104) of the nozzle body (100) into the nozzle cavity (110). A discharge orifice (124) may also be defined at the down-stream end (104) of the nozzle cavity (110) and have an associated width (126). The width (126) of the discharge orifice (124) may be substantially less than the longitudinal length (120) of the nozzle passage (118).
-
公开(公告)号：US5523893A
公开(公告)日：1996-06-04
申请号：US294038
申请日：1994-08-24
申请人： Edwin G. Haas
发明人： Edwin G. Haas
摘要： An optical mounting system is configured so as to locate a 360.degree. shoulder all around the optical element periphery in both the object and image sides of the optical element. The shoulder allows expansion or contraction of the optical element both in the thickness direction of the optical element and in the direction normal to the optical axis when installed in the mounting assembly. Three small metal clips are used to maintain centering of the optics, the thermal expansion and contraction of these clips being coordinated with the clip geometry so that the optical material remains centered without induced stress or free play at either room temperature or at the operating temperature.
摘要翻译： 光学安装系统被配置为在光学元件的物体和像侧中的光学元件周边周围定位360°的肩部。 当安装在安装组件中时，肩部允许光学元件的厚度方向和垂直于光轴的方向上的光学元件的膨胀或收缩。 使用三个小金属夹来保持光学元件的定心，这些夹子的热膨胀和收缩与夹子几何形状协调，使得光学材料在室温或在工作温度下保持居中而没有感应应力或自由游隙。
-
公开(公告)号：US08724776B2
公开(公告)日：2014-05-13
申请号：US13227517
申请日：2011-09-08
申请人： Edwin G. Haas , Christopher Stelmach , Zhong Zhong
发明人： Edwin G. Haas , Christopher Stelmach , Zhong Zhong
IPC分类号： G21K1/06
CPC分类号： G21K1/06 , G21K2201/062 , G21K2201/064
摘要： An x-ray focusing device and method for adjustably focusing x-rays in two orthogonal directions simultaneously. The device and method can be operated remotely using two pairs of orthogonal benders mounted on a rigid, open frame such that x-rays may pass through the opening in the frame. The added x-ray flux allows significantly higher brightness from the same x-ray source.
摘要翻译： 一种用于可同时在两个正交方向上可调整地聚焦X射线的X射线聚焦装置和方法。 该装置和方法可以使用安装在刚性开放框架上的两对正交弯曲器远程操作，使得X射线可以穿过框架中的开口。 添加的X射线通量允许来自相同x射线源的明显更高的亮度。
-
15.发明授权Fluid nozzle system and method in an emitted energy system for photolithography 失效用于光刻的发射能量系统中的流体喷嘴系统和方法公开(公告)号：US06437349B1
公开(公告)日：2002-08-20
申请号：US09598664
申请日：2000-06-20
IPC分类号： H05H134
CPC分类号： H05G2/003 , B05B1/005 , B82Y10/00 , G03F7/70033 , G03F7/70858 , H05G2/006
摘要： An emitted energy system for use in photolithography may include a fluid nozzle. A nozzle and its method of manufacture are provided. A nozzle (22) may include a nozzle cavity (110) disposed within a nozzle body (100) between an up-stream end (102) and a down-stream end (104). A nozzle passage (118) may be defined within the nozzle cavity (110) and extend a longitudinal length (120) from the down-stream end (104) of the nozzle body (100) into the nozzle cavity (110). A discharge orifice (124) may also be defined at the down-stream end (104) of the nozzle cavity (110) and have an associated width (126). The width (126) of the discharge orifice (124) may be substantially less than the longitudinal length (120) of the nozzle passage (118).
摘要翻译： 用于光刻的发射能量系统可以包括流体喷嘴。 提供喷嘴及其制造方法。 喷嘴（22）可以包括设置在上游端（102）和下游端（104）之间的喷嘴体（100）内的喷嘴腔（110）。 喷嘴通道（118）可以限定在喷嘴空腔（110）内并且将纵向长度（120）从喷嘴体（100）的下游端（104）延伸到喷嘴腔（110）中。 排出口（124）也可以限定在喷嘴腔（110）的下游端（104）处，并且具有相关联的宽度（126）。 排出孔（124）的宽度（126）可以基本上小于喷嘴通道（118）的纵向长度（120）。
-
公开(公告)号：US06241435B1
公开(公告)日：2001-06-05
申请号：US09048403
申请日：1998-03-25
IPC分类号： B23C900
CPC分类号： B23Q5/225 , B23Q17/0976 , B23Q17/12 , G05B19/404 , G05B2219/49048 , Y10T409/303752 , Y10T409/304312
摘要： A method for automatically minimizing an undesirable motion of a workpiece during a machining operation, and a universal adaptive machining chatter control fixture that operates in accordance with the method. The method comprises the steps of mounting the workpiece to an active, supporting structure, and then machining the workpiece. During the step of machining, an undesirable motion of the workpiece is sensed in the supporting structure. Thereafter, a compensating motion is applied to the supporting structure for minimizing the undesirable motion of the workpiece. The chatter control fixture can be attached to various types of machine tool devices, without requiring that the machine tool devices be retrofitted, and operates to minimize undesirable motions of the workpiece independently of the machine tool devices.
摘要翻译： 一种用于在加工操作期间自动最小化工件的不期望运动的方法，以及根据该方法操作的通用自适应加工颤振控制夹具。 该方法包括以下步骤：将工件安装到活动的支撑结构，然后加工工件。 在加工步骤期间，在支撑结构中感测到工件的不期望的运动。 此后，对支撑结构施加补偿运动，以最小化工件的不期望的运动。 颤振控制夹具可以附接到各种类型的机床装置，而不需要对机床装置进行改装，并且操作以最小化不依赖于机床装置的工件的不期望的运动。
-
公开(公告)号：US06227057B1
公开(公告)日：2001-05-08
申请号：US09093847
申请日：1998-05-18
IPC分类号： G01B716
摘要： A strain gage assembly 10 includes a mounting substrate 12 having an adhesive surface 14 and a gage surface 16. The adhesive surface 14 of the mounting substrate 12 includes an adhesive layer 18 disposed thereon operable to affix the mounting substrate 12 to a component. The adhesive layer 18 is further operable to allow ready detachment of the mounting substrate 12 from the component. The gage surface 16 of the mounting substrate 12 includes a strain gage 20 disposed thereon. The mounting substrate 12 may be formed from a material operable to reduce a strain level received by the strain gage 20.
摘要翻译： 应变计组件10包括具有粘合表面14和表面16的安装基板12.安装基板12的粘合表面14包括布置在其上的粘合剂层18，可操作以将安装基板12固定到部件上。 粘合剂层18还可操作以允许安装基板12从组件准备好的脱离。 安装基板12的表面16包括设置在其上的应变计20。 安装基板12可以由可操作以减小应变计20所接收的应变水平的材料形成。
-
18.发明授权Interferometer comprising translation assemblies for moving a first optical member relative to a second optical member 失效干涉仪包括用于相对于第二光学构件移动第一光学构件的平移组件
公开(公告)号：US5825490A
公开(公告)日：1998-10-20
申请号：US473059
申请日：1995-06-07
CPC分类号： G01J3/26 , G01B9/02049 , G01B2290/35
摘要： An interferometer comprising a base forming an interior, and first and second optical members located in the interior of the base. The interferometer further comprises a first retainer assembly connecting the first optical member to the base, translation means for moving the second optical member relative the first optical member to vary the distance between the first and second optical members, and a second retainer assembly connecting the second optical member to the translation means. The preferred mechanical configuration and design features of the interferometer produce a very durable instrument that can rapidly scan and accurately filter light across a wide bandwidth. This uniquely designed instrument combines high speed switching, high resolution, wide bandwidth, and adjustable damping capabilities in a durable flight capable instrument.
摘要翻译： 一种干涉仪，包括形成内部的底座，以及位于所述底座内部的第一和第二光学构件。 所述干涉仪还包括将所述第一光学构件连接到所述基座的第一保持器组件，用于相对于所述第一光学构件移动所述第二光学构件以改变所述第一和第二光学构件之间的距离的平移装置，以及连接所述第二光学构件的第二保持器组件 光学构件到翻译装置。 干涉仪的优选机械配置和设计特征产生了非常耐用的仪器，可以在宽带宽内快速扫描和准确地过滤光。 这种独特设计的仪器结合了耐用飞行功能的仪器中的高速切换，高分辨率，宽带宽和可调阻尼功能。
-
公开(公告)号：US5822876A
公开(公告)日：1998-10-20
申请号：US637874
申请日：1996-04-25
申请人： Edwin G. Haas , James R. Kennedy , Alvin Levy , John M. Papazian
发明人： Edwin G. Haas , James R. Kennedy , Alvin Levy , John M. Papazian
CPC分类号： G01L5/0047 , G01B5/30 , Y10S33/13
摘要： A gauge for measuring an out-of-plane surface displacement profile around a cold-worked fastener hole in relation to the distribution of residual compressive stresses around the hole and related fatigue life. The gauge has a deformable strain sensor positionable to be deformed in accord with the out-of-plane surface of the structural material circumferentially surrounding the cold-worked hole. A measurement reporting readout device is in communication with the strain sensor and relates three-dimensional surface-profile measurement data in accord with strain sensor deformation to determine or verify the cold expansion magnitude, uniformity and consequent fatigue life through three-dimensional elastoplastic finite element comparative analyses and/or experimental measurements for a hole in any material of given thickness.
摘要翻译： 相对于围绕孔的残余压应力分布和相关的疲劳寿命来测量冷加工紧固件孔周围的平面外表面位移曲线的量规。 该测量仪具有可变形的应变传感器，其可定位成与周围围绕冷加工孔的结构材料的面外表面变形。 测量报告读出装置与应变传感器通信，并将三维表面轮廓测量数据与应变传感器变形相关联，以通过三维弹塑性有限元比较来确定或验证冷膨胀量值，均匀度和随之而来的疲劳寿命 在任何给定厚度的材料中的孔的分析和/或实验测量。
-
-
-
-
-
-
-
-
搜索结果
19 条记录 (耗时 0.017 秒)
