公开(公告)号：US07580238B2

公开(公告)日：2009-08-25

申请号：US12122496

申请日：2008-05-16

Applicant: In Jun Kim

Inventor： In Jun Kim

IPC: H01T23/00

CPC classification number: H01L21/683 ,  Y10T279/23

Abstract: An electrostatic chuck structure according to example embodiments of the present invention may include at least one specific region of a conductor having a thickness relatively smaller than those of other regions, at least one specific region of a dielectric having a thickness relatively larger than those of other regions, or at least one specific region of a conductor having a thickness relatively smaller than those of other regions and at least one specific region of a dielectric having a thickness relatively larger than those of other regions. Therefore, etching rate and CD uniformity can be improved during a semiconductor manufacturing process.

Abstract translation: 根据本发明的示例性实施例的静电卡盘结构可以包括具有比其他区域的厚度相对更小的厚度的导体的至少一个特定区域，电介质的至少一个特定区域具有比其他区域的厚度更大的厚度 区域，或导体的至少一个特定区域，其厚度比其他区域的厚度相对更小，并且电介质的至少一个特定区域具有比其它区域的厚度更大的厚度。 因此，在半导体制造过程中可以提高蚀刻速率和CD均匀性。

公开(公告)号：US20080285204A1

公开(公告)日：2008-11-20

申请号：US12122496

申请日：2008-05-16

Applicant: In Jun KIM

Inventor： In Jun KIM

IPC: H01L21/687

CPC classification number: H01L21/683 ,  Y10T279/23

Abstract: An electrostatic chuck structure according to example embodiments of the present invention may include at least one specific region of a conductor having a thickness relatively smaller than those of other regions, at least one specific region of a dielectric having a thickness relatively larger than those of other regions, or at least one specific region of a conductor having a thickness relatively smaller than those of other regions and at least one specific region of a dielectric having a thickness relatively larger than those of other regions. Therefore, etching rate and CD uniformity can be improved during a semiconductor manufacturing process.

Abstract translation: 根据本发明的示例性实施例的静电卡盘结构可以包括具有比其他区域的厚度相对更小的厚度的导体的至少一个特定区域，电介质的至少一个特定区域具有比其他区域的厚度更大的厚度 区域，或导体的至少一个特定区域，其厚度比其他区域的厚度相对更小，并且电介质的至少一个特定区域具有比其它区域的厚度更大的厚度。 因此，在半导体制造过程中可以提高蚀刻速率和CD均匀性。

公开(公告)号：US20050143916A1

公开(公告)日：2005-06-30

申请号：US10858695

申请日：2004-06-01

Applicant: In-Jun Kim ,  Jae-Hoon Kim

Inventor： In-Jun Kim ,  Jae-Hoon Kim

IPC: H04B7/26 ,  G01C21/28 ,  G01S19/14 ,  G01S19/34 ,  G01C21/26

CPC classification number: G01C21/28

Abstract: Provided is an apparatus and method for positioning a mobile object by combining Radio Frequency Identification (RFID), Global Positioning System (GPS), and Inertial Navigation System (INS). The apparatus and method can acquire positioning information stably and continuously even when GPS signals are cut off by combining the RFID positioning information with INS positioning information. The positioning apparatus includes: a GPS signal receiving unit; an RFID reading unit; an INS sensing unit; a GPS/RFID selecting unit for generating selection information for a positioning algorithm based on whether GPS positioning information transmitted from the GPS signal receiving unit can be used or not and whether a tag ID is acquired in the RFID reading unit; and an integrated positioning unit for acquiring the positioning information of the mobile object by executing any one selected from a group of a GPS/INS positioning algorithm, an RFID/INS positioning algorithm, and an INS positioning algorithm based on the selection information of the GPS/RFID selecting unit.

Abstract translation: 提供了一种通过组合射频识别（RFID），全球定位系统（GPS）和惯性导航系统（INS）来定位移动对象的装置和方法。 即使通过将RFID定位信息与INS定位信息相结合来切断GPS信号，该装置和方法也可以稳定和连续地获取定位信息。 定位装置包括：GPS信号接收单元; RFID读取单元; INS感测单元; GPS / RFID选择单元，用于基于是否可以使用从GPS信号接收单元发送的GPS定位信息，以及是否在RFID读取单元中获取标签ID来生成用于定位算法的选择信息; 以及集成定位单元，用于通过基于GPS的选择信息执行从GPS / INS定位算法，RFID / INS定位算法和INS定位算法的组中选择的任何一个来获取移动对象的定位信息 / RFID选择单元。

公开(公告)号：US08655870B2

公开(公告)日：2014-02-18

申请号：US13589332

申请日：2012-08-20

Applicant: In Jun Kim ,  Byoung Sun Lee ,  Jae Hoon Kim

Inventor： In Jun Kim ,  Byoung Sun Lee ,  Jae Hoon Kim

IPC: G06F17/30

CPC classification number: H04L67/06

Abstract: A telemetry data retrieval apparatus and method for post-processing are provided. The telemetry data retrieval apparatus may include a retrieval initiating unit to receive an input of a retrieval time, and to calculate a percentage of the retrieval time during an entire retrieval period, a start position calculating unit to calculate a retrieval start position in which data retrieval is started within a stored file, based on the calculated percentage, and a telemetry data retrieval unit to verify a start pattern and a time tag from the calculated retrieval start position, and to retrieve a position of telemetry data in the stored file.

Abstract translation: 提供了用于后处理的遥测数据检索装置和方法。 遥测数据检索装置可以包括：检索启动单元，用于接收检索时间的输入，并计算整个检索期间的检索时间的百分比;起始位置计算单元，用于计算数据检索的检索开始位置; 基于所计算的百分比在存储的文件内开始，以及遥测数据检索单元，用于从所计算的检索开始位置验证起始模式和时间标签，并且检索所存储的文件中的遥测数据的位置。

公开(公告)号：US20120158216A1

公开(公告)日：2012-06-21

申请号：US13307358

申请日：2011-11-30

Applicant: In-Jun KIM ,  Byoung-Sun LEE ,  Jae-Hoon KIM

Inventor： In-Jun KIM ,  Byoung-Sun LEE ,  Jae-Hoon KIM

IPC: H04B7/185

CPC classification number: H04B7/18519

Abstract: An apparatus for automatically generating satellite operation procedure (SOP) parameters is provided. The apparatus includes a parameter extraction unit configured to extract one or more SOP parameters corresponding to an SOP; a transformation formula extraction unit configured to extract a transformation formula corresponding to the extracted SOP parameters; and a calculation unit configured to calculate values of the extracted SOP parameters based on property information for performing a satellite task and the extracted transformation formula.

Abstract translation: 提供一种用于自动生成卫星操作程序（SOP）参数的装置。 该装置包括：参数提取单元，被配置为提取与SOP对应的一个或多个SOP参数; 变换公式提取单元，被配置为提取与所提取的SOP参数相对应的变换公式; 以及计算单元，被配置为基于用于执行卫星任务的属性信息和所提取的变换公式来计算所提取的SOP参数的值。

公开(公告)号：US07991518B2

公开(公告)日：2011-08-02

申请号：US11897492

申请日：2007-08-29

Applicant: In-Jun Kim ,  Won-Chan Jung ,  Jae-Hoon Kim

Inventor： In-Jun Kim ,  Won-Chan Jung ,  Jae-Hoon Kim

IPC: B64G1/36 ,  G06F7/70 ,  G01C21/00

CPC classification number: B64G1/24 ,  H04B7/18513

Abstract: Provided is a satellite control system based on integrated satellite operation data and a method thereof. The satellite control system includes: a satellite operation data schema editing means for creating a document type definition file and defining a schema; a mission planning means for creating a mission timeline and recording the mission timeline; a command planning means for converting a task into telecommands and recording the telecommand; a command preparing means for creating a telecommand procedure and recording the telecommand procedure; a command transmitting means for creating a telecommand code, transmitting the telecommand code to a satellite and recording the telecommand code; a command verifying means for receiving telemetry data and recording a telecommand verification result; and a performance result reporting means for creating a mission performance result and recording the mission performance result.

Abstract translation: 提供了一种基于综合卫星操作数据的卫星控制系统及其方法。 卫星控制系统包括：卫星操作数据模式编辑装置，用于创建文档类型定义文件并定义模式; 任务规划手段，用于创建任务时间表并记录任务时间表; 用于将任务转换成电话命令并记录遥控的命令规划装置; 命令准备装置，用于创建遥控程序并记录遥控程序; 命令发送装置，用于创建遥控代码，将遥控代码发送到卫星并记录遥控代码; 命令验证装置，用于接收遥测数据并记录遥控验证结果; 以及用于创建任务执行结果并记录任务执行结果的演奏结果报告装置。

公开(公告)号：US20090015466A1

公开(公告)日：2009-01-15

申请号：US12114047

申请日：2008-05-02

Applicant: In Jun Kim ,  Won Chan Jung ,  Jae Hoon Kim

Inventor： In Jun Kim ,  Won Chan Jung ,  Jae Hoon Kim

IPC: H04B7/185

CPC classification number: H04B7/18597

Abstract: Provided are an apparatus and method for executing a telecommand on a geostationary satellite, and an apparatus and method for verifying a telecommand execution status on a geostationary satellite ground control system. When a telecommand on a satellite is executed, the satellite generates command execution verification words for the executed telecommand and adds the generated command execution verification words to a telemetry transfer frame, and thus a satellite ground control system can easily verify the telecommand execution. In addition, when telecommand execution result is verified by a satellite ground control system, since an execution result of a time-tag telecommand can be verified without a time delay through command execution verification words provided by a satellite, and a telecommand image DB, a telecommand verifier DB, and a telecommand verifier provided by the satellite ground control system, a series of processes from transmission to verification of a telecommand, in particular a time-tag telecommand, can be automatically processed in real-time without intervention of an operator.

Abstract translation: 提供了一种用于在对地静止卫星上执行遥控的装置和方法，以及用于验证地球静止卫星地面控制系统上的遥控执行状态的装置和方法。 当执行卫星上的遥控时，卫星产生用于所执行的遥控命令的命令执行验证字，并将生成的命令执行验证字添加到遥测传输帧，因此卫星地面控制系统可以容易地验证遥控执行。 此外，当遥控执行结果由卫星地面控制系统验证时，由于通过由卫星提供的命令执行验证字和遥控图像DB可以无时间地验证时间标签遥控的执行结果，因此， 遥控器验证器DB和由卫星地面控制系统提供的遥控器验证器，可以在无需操作人员干预的情况下实时自动处理从传输到电话命令验证的一系列处理过程，特别是时间标签遥控。

公开(公告)号：US20080249673A1

公开(公告)日：2008-10-09

申请号：US11897492

申请日：2007-08-29

Applicant: In-Jun KIM ,  Won-Chan JUNG ,  Jae-Hoon KIM

Inventor： In-Jun KIM ,  Won-Chan JUNG ,  Jae-Hoon KIM

IPC: B64G1/24

CPC classification number: B64G1/24 ,  H04B7/18513

Abstract: Provided is a satellite control system based on integrated satellite operation data and a method thereof. The satellite control system includes: a satellite operation data schema editing means for creating a document type definition file and defining a schema; a mission planning means for creating a mission timeline and recording the mission timeline; a command planning means for converting a task into telecommands and recording the telecommand; a command preparing means for creating a telecommand procedure and recording the telecommand procedure; a command transmitting means for creating a telecommand code, transmitting the telecommand code to a satellite and recording the telecommand code; a command verifying means for receiving telemetry data and recording a telecommand verification result; and a performance result reporting means for creating a mission performance result and recording the mission performance result.

Abstract translation: 提供了一种基于综合卫星操作数据的卫星控制系统及其方法。 卫星控制系统包括：卫星操作数据模式编辑装置，用于创建文档类型定义文件并定义模式; 任务规划手段，用于创建任务时间表并记录任务时间表; 用于将任务转换成电话命令并记录遥控的命令规划装置; 命令准备装置，用于创建遥控程序并记录遥控程序; 命令发送装置，用于创建遥控代码，将遥控代码发送到卫星并记录遥控代码; 命令验证装置，用于接收遥测数据并记录遥控验证结果; 以及用于创建任务执行结果并记录任务执行结果的演奏结果报告装置。

公开(公告)号：US20050247667A1

公开(公告)日：2005-11-10

申请号：US11084034

申请日：2005-03-21

Applicant: In-Jun Kim ,  Jung-Keun Cho ,  Jang-Seob Choi ,  Yong-Nam Choi ,  Jeong-Yong Bae

Inventor： In-Jun Kim ,  Jung-Keun Cho ,  Jang-Seob Choi ,  Yong-Nam Choi ,  Jeong-Yong Bae

IPC: H01L21/3065 ,  C23F1/00 ,  H01L21/00 ,  H01L21/304 ,  H01L21/306

CPC classification number: H01L21/67086 ,  H01L21/67051 ,  H01L21/67069

Abstract: The present is directed to an apparatus for etching the top edge and bottom of a wafer. The apparatus includes a substrate support part for supporting a wafer and a movable protect part for preventing fluid for an etch from flowing into a non-etch portion of the wafer. The top edge and bottom of the wafer is etched by a wet etch, and a boundary of the non-etch portion and the edge of the wafer is etched by a dry etch.

Abstract translation: 本发明涉及用于蚀刻晶片的顶部边缘和底部的装置。 该装置包括用于支撑晶片的基板支撑部分和用于防止蚀刻流体流入晶片的非蚀刻部分的可移动保护部分。 通过湿式蚀刻蚀刻晶片的顶部边缘和底部，通过干蚀刻蚀刻非蚀刻部分和晶片边缘的边界。