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公开(公告)号:US20220020651A1
公开(公告)日:2022-01-20
申请号:US17449692
申请日:2021-10-01
Applicant: NGK Electronics Devices, Inc. , NGK Insulators, Ltd.
Inventor: Yuhji UMEDA , Yoshio TSUKIYAMA , Haruhiko ITO
IPC: H01L23/10 , H01L23/373 , H01L23/053 , H01L23/31 , H01L23/00
Abstract: A frame is made of a first material. An external terminal electrode is attached to the frame. A heat sink plate supports the frame and includes a mounting region in the frame. The heat sink plate is made of a non-composite material containing copper with purity of 95.0 weight percentage or more. A first adhesive layer bonds the frame and the heat sink plate to each other. The first adhesive layer is made of a second material different from the first material, and has a first composition. A power semiconductor element is mounted on the mounting region of the heat sink plate. A cover is attached to the frame to constitute a sealing space sealing the power semiconductor element without gross leak. A second adhesive layer bonds the frame and the cover to each other, and has a second composition different from the first composition of the first adhesive layer.
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公开(公告)号:US20210404066A1
公开(公告)日:2021-12-30
申请号:US17447322
申请日:2021-09-10
Applicant: NGK Electronics Devices, Inc. , NGK Insulators, Ltd.
Inventor: Shigeru YOSHIMURA
Abstract: A metal member includes a metal substrate, a first intermediate plating layer, a second intermediate plating layer, and a precious metal plating layer. The metal substrate includes a surface constituted of a plurality of crystal grains. The first intermediate plating layer is directly formed on the plurality of crystal grains of the metal substrate, contains a nickel element, and is non-oriented with respect to each crystal orientation of the plurality of crystal grains of the metal substrate. The second intermediate plating layer is directly formed on the first intermediate plating layer. The precious metal plating layer is formed on the second intermediate plating layer.
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公开(公告)号:US10937715B2
公开(公告)日:2021-03-02
申请号:US15821894
申请日:2017-11-24
Applicant: NGK ELECTRONICS DEVICES, INC. , NGK INSULATORS, LTD.
Inventor: Kiichiro Mori
IPC: H01L23/373 , B32B15/04 , B32B15/20 , B32B18/00 , B32B3/26 , B32B3/30 , B32B7/04 , H01L23/13 , H01L23/14 , B32B37/06 , H01L21/48
Abstract: A power module substrate allows prompt heat dissipation from a semiconductor device and avoids separation of a ceramic plate and a copper plate at their joint interface and cracks in the ceramic plate. A power module substrate for mounting a semiconductor device includes a ceramic plate, a copper circuit plate on a main surface of the ceramic plate, and a heat dissipation copper plate on a surface of the ceramic plate opposite to the main surface. The copper circuit plate includes at least one first copper circuit plate and at least one second copper circuit plate different from the first circuit board. The first copper circuit plate includes a first portion on which the semiconductor device is mountable, and a second portion outward from the first portion and surrounding the first portion and thinner than the first portion.
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公开(公告)号:US11978682B2
公开(公告)日:2024-05-07
申请号:US17455719
申请日:2021-11-19
Applicant: NGK Electronics Devices, Inc. , NGK Insulators, Ltd.
Inventor: Yoshio Tsukiyama , Akiyoshi Osakada , Teppei Yamaguchi
IPC: H01L23/047 , H01L21/52 , H01L23/36 , H01L23/495 , H01L23/00
CPC classification number: H01L23/047 , H01L21/52 , H01L23/36 , H01L23/49541 , H01L23/49579 , H01L24/73 , H01L2224/73265
Abstract: A first frame is supported by a heat sink plate, surrounds an unmounted region of the heat sink plate, contains a resin, and has a first surface. A second frame contains a resin, and has a second surface opposing the first surface. An external terminal electrode passes between the first surface and the second surface. An adhesive layer contains a resin, and includes a lower portion, an upper portion, and an intermediate portion. The lower portion connects the external terminal electrode and the first surface to each other. The upper portion connects the external terminal electrode and the second surface to each other. The intermediate portion is disposed within a through hole of the external terminal electrode, and connects the lower portion and the upper portion to each other.
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公开(公告)号:US20240107678A1
公开(公告)日:2024-03-28
申请号:US18524770
申请日:2023-11-30
Applicant: NGK ELECTRONICS DEVICES, INC. , NGK INSULATORS, LTD.
Inventor: Kota KITAJIMA , Takahiko HONDA , Kazutaka NAKAO , Masayuki UETANI , Izumi MASUDA , Akihiro URANO
CPC classification number: H05K3/002 , B23K1/19 , H01L23/3735 , H05K1/0209 , H05K1/0306 , H05K3/243 , H05K3/38
Abstract: A method of manufacturing a bonded substrate includes: preparing one or plurality of products to be bonded, each including a brazing material layer and a copper plate laminated on both main surfaces of a ceramic substrate, laminating, one or a plurality of products bonded and a pair of clamping members that clamp them while providing a mold releasing layer between each thereof, heating the one or the plurality of products while pressing the one or the plurality of products in the pair of clamping members to obtain the one or the plurality of bonded substrates in which the ceramic substrate and the copper plate are bonded with a bonding layer, and removing the mold releasing layer from the bonded substrate by dissolving a portion in contact with the mold releasing layer of the copper plate included in the bonded substrate by wet etching.
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公开(公告)号:US20230335568A1
公开(公告)日:2023-10-19
申请号:US18334594
申请日:2023-06-14
Applicant: NGK ELECTRONICS DEVICES, INC. , NGK INSULATORS, LTD.
Inventor: Atsushi MASE
IPC: H01L27/146
CPC classification number: H01L27/14618 , H01L27/14636
Abstract: A package includes a mounting surface on which an electronic component is to be mounted, a cavity, and an attachment surface to which a lid is to be attached through an adhesive layer. The package includes: a bottom containing ceramics and having the mounting surface; and a frame containing ceramics and having the attachment surface. The attachment surface of the frame includes an inner end adjacent to the cavity and an outer end opposite to the inner end in at least one cross-sectional view spanning an inside and an outside of the cavity, the attachment surface having a protruding shape protruding in a thickness direction. At least one of the inner end or the outer end is made lower than a most protruding portion of the protruding shape by 10 μm or more.
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公开(公告)号:US20220344241A1
公开(公告)日:2022-10-27
申请号:US17700720
申请日:2022-03-22
Applicant: NGK ELECTRONICS DEVICES, INC. , NGK INSULATORS, LTD.
Inventor: Noriyasu YAMAMOTO , Yoshikazu MIHARA , Naoya SHIRAI
IPC: H01L23/373 , H01L23/367
Abstract: A heat sink includes first to fifth layers. The first layer supports a frame made of ceramics, is made of copper, and has a thickness t1. The second layer is laminated to the first layer, is made of molybdenum, and has a thickness t2. The third layer is laminated to the second layer, is made of copper, and has a thickness t3. The fourth layer is laminated to the third layer, is made of molybdenum, and has a thickness t4. The fifth layer is laminated to the fourth layer, is made of copper, and has a thickness t5. A formula 3≤t1/t5≤5 is satisfied. A formula 3≤t3/t5≤5 is satisfied.
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公开(公告)号:US20220077033A1
公开(公告)日:2022-03-10
申请号:US17455709
申请日:2021-11-19
Applicant: NGK Electronics Devices, Inc. , NGK Insulators, Ltd.
Inventor: Yoshio TSUKIYAMA , Teppei YAMAGUCHI
IPC: H01L23/495 , H01L21/48
Abstract: An external terminal electrode is attached to a frame, and the frame contains a first resin, and has a first adhered surface. A heat sink plate supports the frame, has an unmounted region where a power semiconductor element is to be mounted within the frame in plan view, is made of metal, and has a second adhered surface. An adhesive layer contains a second resin different from the first resin, and adheres the first adhered surface of the frame and the second adhered surface of the heat sink plate to each other. One of the first and second adhered surfaces includes a flat portion and a protruding portion. The protruding portion protrudes from the flat portion and opposes the other one of the first adhered surface and the second adhered surface with the adhesive layer therebetween.
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公开(公告)号:US20210261473A1
公开(公告)日:2021-08-26
申请号:US17317986
申请日:2021-05-12
Applicant: NGK INSULATORS, LTD. , NGK ELECTRONICS DEVICES, INC.
Inventor: Yuji UMEDA , Jyunji OOGAMI
IPC: C04B37/02 , C04B35/119 , H01L23/373
Abstract: In a ceramic sintered body, the Zr content is 17.5 mass %-23.5 mass % in terms of ZrO2, the Hf content is 0.3 mass %-0.5 mass % in terms of HfO2, the Al content is 74.3 mass %-80.9 mass % in terms of Al2O3, the Y content is 0.8 mass %-1.9 mass % in terms of Y2O3, the Mg content is 0.1 mass %-0.8 mass % in terms of MgO, the Si content is 0.1 mass %- and 1.5 mass % in terms of SiO2, and the Ca content is 0.03 mass %-0.35 mass % in terms of CaO. The total content of Na and K is 0.01 mass %-0.10 mass %, when the K content is converted to K2O and the Na content is converted to Na2O. The balance content is 0.05 mass % or less in terms of oxide.
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公开(公告)号:US20210246072A1
公开(公告)日:2021-08-12
申请号:US17242645
申请日:2021-04-28
Applicant: NGK INSULATORS, LTD. , NGK ELECTRONICS DEVICES, INC.
Inventor: Yuji UMEDA , Hiroshi KOUNO
IPC: C04B35/119 , C04B35/03 , C04B37/02 , H01L23/15
Abstract: The ceramic sintered body contains Zr, Al, Y, and Mg. A Zr content is 7.5 mass % or more and 23.5 mass % or less in terms of ZrO2. An Al content is 74.9 mass % or more and 91.8 mass % or less in terms of Al2O3. A Y content is 0.41 mass % or more and 1.58 mass % or less in terms of Y2O3. A Mg content is 0.10 mass % or more and 0.80 mass % or less in terms of MgO. A ZrO2 crystal phase as a crystal phase has a monoclinic phase and a tetragonal phase as crystal structures. When a thermal aging treatment is performed for 100 hours in an environment of 180 degrees C., a ratio of a peak intensity of the monoclinic phase to a sum of peak intensities of the monoclinic phase and the tetragonal phase is 15% or less in the X-ray diffraction pattern.
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