VOLTAGE WAVEFORM GENERATOR FOR PLASMA PROCESSING APPARATUSES

    公开(公告)号:US20220223377A1

    公开(公告)日:2022-07-14

    申请号:US17604897

    申请日:2020-04-21

    Abstract: Methods and devices for generating a voltage waveform at an output may include providing four DC voltages of different magnitudes. The first (V1) magnitude is higher than the third (V3) and fourth (V4) magnitude. The fourth DC voltage is coupled to the output followed by coupling the first DC voltage to the output, to bring an output voltage (VP) at the output to a high level. The first DC voltage is decoupled from the output, followed by coupling the third DC voltage to the output, to obtain a drop of the output voltage (VP). A ground potential (V0) is coupled to the output following coupling the third DC voltage and the second DC current (I2) is coupled to the output following coupling the ground potential, wherein the second DC current ramps down the output voltage (VP).

    RF power amplifier with balun transformer

    公开(公告)号:US11909363B2

    公开(公告)日:2024-02-20

    申请号:US17276561

    申请日:2019-09-18

    Abstract: A radiofrequency power amplifier includes a balun transformer and a plurality of power transistor pairs arranged in a push-pull configuration. The balun transformer has an unbalanced coil extending between a first single-ended signal terminal and a first reference, and a balanced coil extending between a first balanced signal terminal and a second balanced signal terminal. The balun transformer also includes an auxiliary coil electrically isolated from the unbalanced coil and the balanced coil. The auxiliary coil is inductively coupled to the unbalanced coil and extends between a third balanced signal terminal and a fourth balanced signal terminal forming a balanced combiner-divider. An output of a first one of the power transistor pairs is coupled to the first and second balanced signal terminals and an output of a second one of the power transistor pairs is coupled to the third and fourth balanced signal terminals.

    Electrical converter
    16.
    发明授权

    公开(公告)号:US11881792B2

    公开(公告)日:2024-01-23

    申请号:US17603238

    申请日:2020-04-10

    CPC classification number: H02M7/797 B60L53/50 H02M1/4216 H02M3/158 H02M1/0058

    Abstract: An electrical converter for conversion between a three-phase AC signal and a DC signal may include a phase selector for connecting the three phase terminals to a first, a second, and a third intermediate node, a first buck circuit having a first switch-node terminal connected to the first DC terminal, and a second buck circuit having a second switch-node terminal connected to the second DC terminal. The first and second buck circuits convert a voltage at the first, second, and third intermediate node to a voltage between the first and second DC terminal. The first and second buck circuits are connected in series between the first and second intermediate node, and include at least one actively switchable device connected between the common node and the third intermediate node.

    VOLTAGE WAVEFORM GENERATOR FOR PLASMA ASSISTED PROCESSING APPARATUSES

    公开(公告)号:US20230260753A1

    公开(公告)日:2023-08-17

    申请号:US18005326

    申请日:2021-07-06

    CPC classification number: H01J37/32128 H01J37/32146 H01J37/32174 H01J37/321

    Abstract: A voltage waveform generator includes a common node, a voltage waveform generation circuit and a current source. The voltage waveform generation circuit is operably connected to the common node and is configured to apply a voltage signal at the common node. The current source is operably connected to the common node and configured to apply a DC current at the common node. The current source has a first switch node connected to the common node through a first inductor, and a first power supply connected to the first switch node. The power supply includes at least two first voltage nodes, and the current source is operable to switch between the at least two first voltage nodes at the first switch node.

    ELECTRICAL POWER CONVERTER
    19.
    发明公开

    公开(公告)号:US20230223841A1

    公开(公告)日:2023-07-13

    申请号:US17997803

    申请日:2021-05-03

    CPC classification number: H02M1/4233 H02M1/36 H02J7/007 H02J2207/20

    Abstract: An electrical three-phase AC-DC converter includes first and second converter stages and a controller. The first converter stage converts between three phase AC terminals and first and second intermediate nodes. The second converter stage has a boost circuit to convert between fourth and fifth intermediate nodes and first and second DC terminals. A link connects the first and second intermediate nodes to the fourth and fifth intermediate nodes. A phase selector selectively connects the three phase terminals to a third intermediate node and a current injection circuit connects the third intermediate node to the first and second DC terminals. In a mode, a current path through the third intermediate node is obtained acting parallel to a current path through the first intermediate node, through the second intermediate node, or through the first and the second intermediate nodes in alternation.

    Electrical power converter with pre-charge mode of operation

    公开(公告)号:US12184200B2

    公开(公告)日:2024-12-31

    申请号:US17997728

    申请日:2021-05-03

    Abstract: An electrical converter includes first and second converter stages, an output filter, and a controller having a first mode for converting a three-phase AC signal into a DC signal. The first converter stage has a three-phase bridge rectifier connecting three phase terminals to an upper intermediate node and a lower intermediate node, and a phase selector having first switches connecting the terminals to a middle intermediate node. The second converter stage includes a switch node connected to the middle intermediate node and a pair of second switches connecting the switch node to one of the DC terminals. In a second mode, the first switches are operated while keeping the upper or lower intermediate node disconnected from all the phase terminals to allow a current to flow between the middle intermediate node and the output filter, allowing for stepwise increasing a voltage across the DC terminals during start-up.

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