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公开(公告)号：US12183547B2
公开(公告)日：2024-12-31
申请号：US18005342
申请日：2021-07-06
Inventor： Jordi Everts , Noud Slaats
Abstract: A voltage waveform generator for a plasma assisted processing apparatus includes a common node, a voltage supply circuit operable to switch between at least two voltage levels at a first switch node, a first inductor connected between the first switch node and the common node, and a control unit configured to operate the voltage supply circuit.
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公开(公告)号：US11875972B2
公开(公告)日：2024-01-16
申请号：US17604897
申请日：2020-04-21
CPC classification number: H01J37/32174 , H01J37/321 , H03K3/02 , H01J2237/327 , H03K5/003 , H03K5/01
Abstract: Methods and devices for generating a voltage waveform at an output may include providing four DC voltages of different magnitudes. The first (V1) magnitude is higher than the third (V3) and fourth (V4) magnitude. The fourth DC voltage is coupled to the output followed by coupling the first DC voltage to the output, to bring an output voltage (VP) at the output to a high level. The first DC voltage is decoupled from the output, followed by coupling the third DC voltage to the output, to obtain a drop of the output voltage (VP). A ground potential (V0) is coupled to the output following coupling the third DC voltage and the second DC current (I2) is coupled to the output following coupling the ground potential, wherein the second DC current ramps down the output voltage (VP).
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公开(公告)号：US20230268844A1
公开(公告)日：2023-08-24
申请号：US18006450
申请日：2021-07-30
Inventor： David MENZI , Mafu ZHANG , Jon AZURZA , Johann Walter KOLAR
IPC: H02M7/483
CPC classification number: H02M7/4837 , H02M3/1582
Abstract: An electrical converter includes at least three AC terminals, a first and a second DC terminal and at least three converter modules. Each of the at least three converter modules has a first converter stage including a flying capacitor circuit coupled to a first switch node, a second converter stage including a flying capacitor circuit coupled to a second switch node, a first inductor, and a first capacitor. The first and second switch nodes are connected to opposite terminals of the first inductor. One of the at least three AC terminals and the second DC terminal are connected to opposite terminals of the first capacitor. The second DC terminal forms a star-point of the first capacitors. A flying capacitor voltage of the first converter stage is clamped to a first voltage across the first capacitor when the first voltage drops below the flying capacitor voltage.
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公开(公告)号：US20230155518A1
公开(公告)日：2023-05-18
申请号：US17995836
申请日：2021-04-12
Inventor： Jordi EVERTS
CPC classification number: H02M7/219 , H02M7/487 , H02M1/4216 , H02M1/4225 , H02M7/2173 , H02J7/04
Abstract: An electrical converter may include (i) m=3 phase input terminals, a neutral terminal and two output terminals, (ii) a first power stage comprising a bridge rectifier connected to each of the m phase input terminals and an output connected to an upper intermediate node and a lower intermediate node, (iii) a second power stage comprising an upper boost stage connected between the upper intermediate node and a common node, and a lower boost stage connected between the common node and the lower intermediate node, and (iv) a controller configured to operate according to a first mode of operation for converting the multi-phase AC input to the DC output or vice versa and according to a second mode of operation for converting a single phase AC input applied to at least one of the m phase input terminals and the neutral terminal to the DC output.
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公开(公告)号：US20220278607A1
公开(公告)日：2022-09-01
申请号：US17608009
申请日：2020-04-29
Inventor： Jordi EVERTS , Thomas Valentijn GERRITS
Abstract: A converter for conversion between three-phase AC and a DC signal may include three phase terminals, a first and second DC terminal, conversion circuitry for conversion between three phase voltages of the three-phase AC signal and a first and second intermediate voltage at first and second intermediate nodes, and first and second buck circuits. The buck circuits each have three devices that are actively switchable for connecting switch-node terminals to any one of the three phase terminals. The first buck circuit includes a second switching device connected between the first intermediate node and the first switch-node terminal, and a first filter inductor connected between the first switch-node terminal and the first DC terminal. The second buck circuit has another second switching device connected between the second intermediate node and the second switch-node terminal, and a second filter inductor connected between the second switch-node terminal and the second DC terminal.
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Patent Agency Ranking
公开(公告)号：US12136534B2
公开(公告)日：2024-11-05
申请号：US18005326
申请日：2021-07-06
Inventor： Jordi Everts , Noud Slaats
IPC: H01J37/32
Abstract: A voltage waveform generator includes a common node, a voltage waveform generation circuit and a current source. The voltage waveform generation circuit is operably connected to the common node and is configured to apply a voltage signal at the common node. The current source is operably connected to the common node and configured to apply a DC current at the common node. The current source has a first switch node connected to the common node through a first inductor, and a first power supply connected to the first switch node. The power supply includes at least two first voltage nodes, and the current source is operable to switch between the at least two first voltage nodes at the first switch node.
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公开(公告)号：US11968771B2
公开(公告)日：2024-04-23
申请号：US17291976
申请日：2019-11-06
CPC classification number: H05H1/4652 , H01J37/32146 , H01J37/32183 , H01J2237/332 , H01J2237/334
Abstract: A plasma processing apparatus may include a mechanism for generating a plasma, a processing platform for supporting a substrate to be processed, and a voltage waveform generator having an output electrically coupled to the processing platform. The voltage waveform generator includes a plurality of first buck converters arranged in parallel and coupled to the output. The first buck converters include actively switchable semiconductor switches. A control unit is configured to operate the actively switchable semiconductor switches through pulse width modulation signals, and the control unit is configured to operate the plurality of first buck converters in an interleaved manner.
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公开(公告)号：US20230238876A1
公开(公告)日：2023-07-27
申请号：US17997166
申请日：2021-04-28
Inventor： Daifei ZHANG , Mattia GUACCI , Johann Walter KOLAR , Jordi EVERTS
Abstract: An AC-DC converter may include three phase terminals, two DC terminals, a first converter stage to convert between an AC current at the phase terminals and a first DC current at the first and second intermediate nodes, a second converter stage operable to convert between a first DC signal at third and fourth intermediate nodes and a second DC signal at the DC terminals, a first filter stage comprising a capacitor network having a star-point, a DC link connecting the first intermediate node to the third intermediate node and the second intermediate node to the fourth intermediate node. The second converter stage includes a middle voltage node between the DC terminals and a boost circuit having a midpoint node at the same electrical potential as the middle voltage node. The DC link includes a common mode filter having a common mode capacitor connecting the middle voltage node to the star-point.
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公开(公告)号：US20230179116A1
公开(公告)日：2023-06-08
申请号：US17997728
申请日：2021-05-03
Inventor： Jordi EVERTS , Noud SLAATS
Abstract: An electrical converter includes first and second converter stages, an output filter, and a controller having a first mode for converting a three-phase AC signal into a DC signal. The first converter stage has a three-phase bridge rectifier connecting three phase terminals to an upper intermediate node and a lower intermediate node, and a phase selector having first switches connecting the terminals to a middle intermediate node. The second converter stage includes a switch node connected to the middle intermediate node and a pair of second switches connecting the switch node to one of the DC terminals. In a second mode, the first switches are operated while keeping the upper or lower intermediate node disconnected from all the phase terminals to allow a current to flow between the middle intermediate node and the output filter, allowing for stepwise increasing a voltage across the DC terminals during start-up.
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公开(公告)号：US20230118022A1
公开(公告)日：2023-04-20
申请号：US17933768
申请日：2022-09-20
Inventor： Johann Walter KOLAR , Panteleimon PAPAMANOLIS , Florian KRISMER
Abstract: A multiphase converter topology is used for the transmission of electrical energy from an AC voltage input with m grid phase connections to a DC voltage output or vice versa. It has a power part with half-bridges for switching currents, an AC voltage filter between the power part and the AC voltage input, and DC voltage block(s) connected between the power part and the DC output. The AC voltage filter has alternating voltage filter stage(s) with m+1 input connections, m+1 output connections and a ground connection. The m grid phase connections are thereby connected in parallel to one another and form a first phase connection for the connection of a single-phase AC voltage. A neutral conductor connection of the AC voltage filter forms a neutral conductor connection of the AC voltage input and a second phase connection for the connection of the single-phase AC voltage.
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