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16 条记录 (耗时 0.03 秒)

    Silicon-based dielectric tunneling emitter
    13.
    发明授权
    Silicon-based dielectric tunneling emitter 有权
    硅基电介质隧道发射极

    公开(公告)号：US06753544B2

    公开(公告)日：2004-06-22

    申请号：US09846047

    申请日：2001-04-30

    申请人： Zhizhang Chen ,  Michael David Bice ,  Ronald L. Enck ,  Michael J. Regan ,  Thomas Novet ,  Paul J. Benning

    发明人： Zhizhang Chen ,  Michael David Bice ,  Ronald L. Enck ,  Michael J. Regan ,  Thomas Novet ,  Paul J. Benning

    IPC分类号： H01L2906

    CPC分类号： B82Y10/00 ,  H01J1/312 ,  H01J9/022

    摘要： An emitter has an electron supply layer and a silicon-based dielectric layer formed on the electron supply layer. The silicon-based dielectric layer is preferably less than about 500 Angstroms. Optionally, an insulator layer is formed on the electron supply layer and has openings defined within which the silicon-based dielectric layer is formed. A cathode layer is formed on the silicon-based dielectric layer to provide a surface for energy emissions of electrons and/or photons. Preferably, the emitter is subjected to an annealing process thereby increasing the supply of electrons tunneled from the electron supply layer to the cathode layer.

    摘要翻译： 发射体具有形成在电子供给层上的电子供给层和硅基电介质层。 硅基电介质层优选小于约500埃。 可选地，在电子供给层上形成绝缘体层，并且限定了形成硅基电介质层的开口。 在硅基电介质层上形成阴极层，以提供电子和/或光子能量发射的表面。 优选地，对发射极进行退火处理，从而增加从电子供给层隧穿到阴极层的电子的供应。

    Focusing lens for electron emitter with shield layer
    14.
    发明授权
    Focusing lens for electron emitter with shield layer 有权
    用于具有屏蔽层的电子发射器的聚焦透镜

    公开(公告)号：US06741016B2

    公开(公告)日：2004-05-25

    申请号：US09882933

    申请日：2001-06-14

    申请人： Paul J. Benning ,  William R Knight ,  Michael J. Regan

    发明人： Paul J. Benning ,  William R Knight ,  Michael J. Regan

    IPC分类号： H01J146

    CPC分类号： B82Y10/00 ,  G11B9/10 ,  G11B9/14 ,  G11B9/1418 ,  G11C11/23 ,  H01J3/022

    摘要： An electron lens is used for focusing electrons from a cathode to an anode. The lens includes a first conductive layer with a first opening at a first distance from the cathode. The first conductive layer is held at a first voltage. The lens also includes a second conductive layer with a second opening at a second distance from the first conductive layer and a third distance from the anode. The second conductive layer is held at a second voltage substantially equal to the voltage of the anode. The first and second openings are chosen based on the first voltage, the second voltage, the first distance, the second distance and the third distance. The opening focuses the electrons emitted from the cathode onto the anode to a spot size preferably less than 40 nanometers. The force created between the cathode and anode is minimized by the structure of the lens.

    摘要翻译： 电子透镜用于将电子从阴极聚焦到阳极。 透镜包括第一导电层，其具有距离阴极第一距离的第一开口。 第一导电层保持在第一电压。 透镜还包括第二导电层，其具有距离第一导电层第二距离的第二开口和离阳极的第三距离。 第二导电层被保持在基本上等于阳极电压的第二电压上。 基于第一电压，第二电压，第一距离，第二距离和第三距离来选择第一和第二开口。 开口将从阴极发射的电子聚焦到阳极上至优选小于40纳米的光斑尺寸。 通过透镜的结构，在阴极和阳极之间产生的力最小化。