TARGET ASSEMBLY
    14.
    发明申请
    TARGET ASSEMBLY 审中-公开
    目标集会

    公开(公告)号:US20120067721A1

    公开(公告)日:2012-03-22

    申请号:US13084646

    申请日:2011-04-12

    IPC分类号: C23C14/14 C23C14/34

    摘要: A target assembly includes a base comprising a first surface and a second surface opposite to the first surface. The base defining a threaded hole; a magnetron mounted on a first surface; a target movably mounted to the second surface, the target defining an opening corresponding to the threaded hole, the opening including a first end and a second end; and a screw. The screw can slide in the opening from the first end to the second end so the position between magnetron and the target is adjusted to adjust the bombarded area of the target.

    摘要翻译: 目标组件包括基部,其包括第一表面和与第一表面相对的第二表面。 基座限定螺纹孔; 安装在第一表面上的磁控管; 所述目标可移动地安装到所述第二表面,所述目标限定对应于所述螺纹孔的开口,所述开口包括第一端和第二端; 和螺丝。 螺杆可以从第一端到第二端在开口中滑动,从而调整磁控管与靶之间的位置,以调整目标的被轰击区域。