METHOD OF PROCESSING SILICON SUBSTRATE AND METHOD OF MANUFACTURING LIQUID DISCHARGE HEAD
    11.
    发明申请
    METHOD OF PROCESSING SILICON SUBSTRATE AND METHOD OF MANUFACTURING LIQUID DISCHARGE HEAD 有权
    硅基板的加工方法及制造液体放电头的方法

    公开(公告)号:US20090065481A1

    公开(公告)日:2009-03-12

    申请号:US12203536

    申请日:2008-09-03

    IPC分类号: B44C1/22

    摘要: A method of manufacturing a substrate for a liquid discharge head having a silicon substrate in which a liquid supply port is provided includes providing the silicon substrate, an etching mask layer having an opening being formed on a one surface of the silicon substrate, forming a region comprising an amorphous silicon in the interior of the silicon substrate by irradiating the silicon substrate with laser light, forming a recess, which has an opening at a part of a portion exposed from said opening on said one surface, from said one surface of the silicon substrate toward the region, and forming the supply port by performing etching on the silicon substrate in which the recess and the region have been formed from said one surface through the opening of the etching mask layer.

    摘要翻译: 一种制造具有其中提供液体供给口的硅基板的液体排出头的基板的方法包括:提供硅基板,在硅基板的一个表面上形成有开口的蚀刻掩模层,形成区域 在所述硅衬底的内部通过用激光照射所述硅衬底而形成非晶硅,形成在所述一个表面的所述一个表面上从所述一个表面上的所述开口露出的部分具有开口的凹部 基板朝向该区域,并且通过在通过蚀刻掩模层的开口从所述一个表面形成凹部和区域的硅基板上进行蚀刻来形成供给口。

    METHOD FOR MANUFACTURING LIQUID DISCHARGE HEAD SUBSTRATE
    12.
    发明申请
    METHOD FOR MANUFACTURING LIQUID DISCHARGE HEAD SUBSTRATE 有权
    液体放电头基板的制造方法

    公开(公告)号:US20090065472A1

    公开(公告)日:2009-03-12

    申请号:US12203612

    申请日:2008-09-03

    IPC分类号: G11B5/127

    摘要: To provide a manufacturing method, for a liquid discharge head substrate that includes a silicon substrate in which a liquid supply port is formed, includes the steps of: preparing the silicon substrate, on one face of which a mask layer, in which an opening has been formed, is deposited; forming a first recessed portion in the silicon substrate, so that the recessed portion is extended through the opening from the one face of the silicon substrate to the other, reverse face of the silicon substrate; forming a second recessed portion by performing wet etching for the substrate, via the first recessed portion, using the mask layer; and performing dry etching for the silicon substrate in a direction from the second recessed portion to the other face.

    摘要翻译: 为了提供一种制造方法,对于包括其中形成有液体供给口的硅基板的液体排出头基板,包括以下步骤:制备硅基板,其一面上具有开口的掩模层 已经形成,被存放; 在所述硅衬底中形成第一凹部,使得所述凹部从所述硅衬底的一个面向所述开口延伸到所述硅衬底的另一面; 通过使用掩模层经由第一凹部对基板进行湿法蚀刻来形成第二凹部; 并且在从第二凹部到另一面的方向上对硅衬底进行干蚀刻。

    METHOD OF MANUFACTURING INK JET CIRCUIT BOARD WITH HEATERS AND ELECTRODES CONSTRUCTED TO REDUCE CORROSION
    13.
    发明申请
    METHOD OF MANUFACTURING INK JET CIRCUIT BOARD WITH HEATERS AND ELECTRODES CONSTRUCTED TO REDUCE CORROSION 有权
    制造喷墨电路板与制造减少腐蚀的加热器和电极的方法

    公开(公告)号:US20080188018A1

    公开(公告)日:2008-08-07

    申请号:US12098886

    申请日:2008-04-07

    IPC分类号: H01L21/18 B21D53/76

    摘要: An ink jet head circuit board is provided which has heaters to generate thermal energy for ink ejection as they are energized. This circuit board has the heaters formed with high precision to reduce their areas. It also has provisions to protect the electrode wires against corrosion and prevent a progress of corrosion. The substrate is deposited with the thin first electrodes made of a corrosion resistant metal. This is further deposited with the resistor layer. The second electrodes made of aluminum are deposited to overlap the first electrodes to form the heater without causing large dimensional variations among the heaters. With this construction, if a defect should occur in a protective layer on or near the heater, a progress of corrosion can effectively be prevented because the material of the resistor layer is more resistant to encroachment than aluminum and the first electrodes are corrosion resistant.

    摘要翻译: 提供了一种喷墨头电路板,其具有加热器,以便在通电时产生用于喷墨的热能。 该电路板具有高精度地形成的加热器,以减少它们的面积。 它还具有保护电极丝免受腐蚀和防止腐蚀进行的规定。 用由抗腐蚀金属制成的薄的第一电极沉积衬底。 这进一步沉积在电阻层上。 由铝制成的第二电极被沉积以与第一电极重叠以形成加热器,而不会在加热器之间引起大的尺寸变化。 利用这种结构,如果在加热器上或附近的保护层中发生缺陷,则可以有效地防止腐蚀进行,因为电阻层的材料比铝更耐侵蚀性,并且第一电极是耐腐蚀的。

    Ink jet head circuit board with heaters and electrodes constructed to reduce corrosion, method of manufacturing the same and ink jet head using the same
    14.
    发明授权
    Ink jet head circuit board with heaters and electrodes constructed to reduce corrosion, method of manufacturing the same and ink jet head using the same 有权
    具有加热器和电极的喷墨头电路板被构造成减少腐蚀,其制造方法和使用其的喷墨头

    公开(公告)号:US07374275B2

    公开(公告)日:2008-05-20

    申请号:US11202078

    申请日:2005-08-12

    IPC分类号: B41J2/05

    摘要: An ink jet head circuit board is provided which has heaters to generate thermal energy for ink ejection as they are energized. This circuit board has the heaters formed with high precision to reduce their areas. It also has provisions to protect the electrode wires against corrosion and prevent a progress of corrosion. The substrate is deposited with the thin first electrodes made of a corrosion resistant metal. This is further deposited with the resistor layer. The second electrodes made of aluminum are deposited to overlap the first electrodes to form the heater without causing large dimensional variations among the heaters. With this construction, if a defect should occur in a protective layer on or near the heater, a progress of corrosion can effectively be prevented because the material of the resistor layer is more resistant to encroachment than aluminum and the first electrodes are corrosion resistant.

    摘要翻译: 提供了一种喷墨头电路板,其具有加热器,以便在通电时产生用于喷墨的热能。 该电路板具有高精度地形成的加热器,以减少它们的面积。 它还具有保护电极丝免受腐蚀和防止腐蚀进行的规定。 用由抗腐蚀金属制成的薄的第一电极沉积衬底。 这进一步沉积在电阻层上。 由铝制成的第二电极被沉积以与第一电极重叠以形成加热器,而不会在加热器之间引起大的尺寸变化。 利用这种结构,如果在加热器上或附近的保护层中发生缺陷,则可以有效地防止腐蚀进行,因为电阻层的材料比铝更耐侵蚀性,并且第一电极是耐腐蚀的。

    INK JET RECORDING HEAD AND MANUFACTURING METHOD THEREFOR
    15.
    发明申请
    INK JET RECORDING HEAD AND MANUFACTURING METHOD THEREFOR 有权
    喷墨记录头及其制造方法

    公开(公告)号:US20080094454A1

    公开(公告)日:2008-04-24

    申请号:US11872383

    申请日:2007-10-15

    IPC分类号: B41J2/05 B21D53/76

    摘要: A manufacturing method for an ink jet recording head including an energy generating element for generating energy for ejecting ink, wiring and electrode pad for supplying electric power to the energy generating element, and a flow path formation member in which an ink flow path is formed in fluid communication with an ink ejection outlet, the manufacturing method includes a step of preparing a substrate on which the energy generating element, the wiring and the electrode pad have been formed; a step of forming a protection layer covering edges of and around generating element and the electrode pad; a step of forming, with patterning, an adhesion layer for adhering the flow path formation member to a surface of the substrate through the protection layer, on a portion of the protection layer where the flow path formation member is formed and a portion surrounding the electrode pad; a step forming through an electroless plating, a nickel layer covering the electrode pad and a gold layer covering the nickel layer to provide a bump.

    摘要翻译: 一种喷墨记录头的制造方法,包括:用于产生用于喷射油墨的能量的能量产生元件,用于向能量产生元件供应电力的布线和电极焊盘;以及流路形成部件,其中形成有墨水流路 与喷墨口流体连通,该制造方法包括制备其上形成有能量产生元件,布线和电极垫的基板的步骤; 形成覆盖发电元件和电极焊盘周围的周围的保护层的工序; 通过图案化形成用于通过保护层将流路形成部件粘附到基板的表面的粘合层的步骤,在形成有流路形成部件的保护层的一部分和围绕电极的部分 垫; 通过无电解电镀形成步骤,覆盖电极焊盘的镍层和覆盖镍层的金层以提供凸块。

    Method for controlling temperature of water to be fed into water cooling
tower
    18.
    发明授权
    Method for controlling temperature of water to be fed into water cooling tower 失效
    用于控制进入水冷却塔的水温的方法

    公开(公告)号:US4554964A

    公开(公告)日:1985-11-26

    申请号:US579018

    申请日:1984-02-10

    IPC分类号: G05B11/18 F28F27/00 F25B39/04

    摘要: A method for controlling the temperature of water to be fed into a water cooling tower in which when the driving power required to drive motors to be controlled is in excess of the power which can be derived from a frequency converter, some of the motors are driven by a constant-frequency power supply while the remaining motors are driven by the frequency converter. Therefore, the temperature of water to be fed into the water cooling tower can be continuously controlled without increasing the capacity of the frequency converter.

    摘要翻译: 一种用于控制供给到水冷却塔中的水的温度的方法,其中当驱动要控制的电动机所需的驱动功率超过可从变频器导出的功率时,一些电动机被驱动 通过恒定频率电源,而剩余的电动机由变频器驱动。 因此,不会增加变频器的容量,能够连续地控制供给水冷却塔的水的温度。

    Liquid ejection head and manufacturing method thereof
    20.
    发明授权
    Liquid ejection head and manufacturing method thereof 有权
    液体喷射头及其制造方法

    公开(公告)号:US08544997B2

    公开(公告)日:2013-10-01

    申请号:US13420834

    申请日:2012-03-15

    IPC分类号: B41J2/17

    摘要: Provided is a liquid ejection head, including: an ejection orifice forming member having an ejection orifice for ejecting liquid; a substrate having a supply port for supplying the liquid to the ejection orifice; and a filter disposed at a position upstream of the ejection orifice when the liquid is supplied to the ejection orifice, in which the filter includes an opening having a diameter smaller than or equal to a diameter of the ejection orifice, and a tapered shape structure disposed at a position upstream of the opening when the liquid is supplied to the ejection orifice, the tapered shape structure having a distal end directed toward an upstream side.

    摘要翻译: 提供一种液体喷射头,包括:具有用于喷射液体的喷射孔的喷射口形成部件; 具有用于将液体供给到喷射口的供给口的基板; 以及当所述液体被供应到所述喷射孔时,所述过滤器设置在所述喷射口的上游位置处,所述过滤器包括具有小于或等于所述喷射孔的直径的直径的开口,并且设置有锥形形状结构 当液体被供应到喷射口时在开口上游的位置处,锥形形状结构具有朝向上游侧的远端。