公开(公告)号：US07566116B2

公开(公告)日：2009-07-28

申请号：US11264160

申请日：2005-11-02

申请人： Ichiro Saito ,  Toshiyasu Sakai ,  Teruo Ozaki ,  Sakai Yokoyama ,  Kenji Ono ,  Satoshi Ibe ,  Kazuaki Shibata

发明人： Ichiro Saito ,  Toshiyasu Sakai ,  Teruo Ozaki ,  Sakai Yokoyama ,  Kenji Ono ,  Satoshi Ibe ,  Kazuaki Shibata

IPC分类号： B41J2/05

CPC分类号： B41J2/1603 ,  B41J2/14129 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2202/03 ,  H05K1/167

摘要： In an ink jet head circuit board including a heater for generating thermal energy used for ejecting ink in response to application of electricity, a drop in thermal energy efficiency is prevented while reducing an area of the heater to achieve higher-resolution and higher-image-quality printing, and damages on the heater attributable to a manufacturing process are avoided. To achieve this, a resistor layer is disposed on an electrode wire layer; and two protective layers are disposed thereon. Then the upper protective layer is removed in a site above the heater. Accordingly, it is possible to dispose the protective layers without causing a decrease in an effective bubble generating region, and to improve thermal energy efficiency by reducing the effective thickness of the protective layer above the heater. Moreover, the resistor layer is covered with the first protective layer and is thereby prevented from adverse effects in the manufacturing process such as etching processes.

摘要翻译： 在包括用于响应于施加电力而产生用于喷射墨水的热能的加热器的喷墨头电路板中，防止了热能效率的降低，同时减少了加热器的面积以实现更高分辨率和更高成像效果， 避免了由于制造过程而产生的高质量打印和加热器的损坏。 为了实现这一点，在电极线层上设置电阻层; 并且在其上设置两个保护层。 然后在加热器上方的位置移除上保护层。 因此，可以在不引起有效气泡生成区域的降低的情况下设置保护层，并且通过减小加热器上方的保护层的有效厚度来提高热能效率。 此外，电阻层被第一保护层覆盖，从而防止了诸如蚀刻工艺的制造过程中的不利影响。

公开(公告)号：US07533969B2

公开(公告)日：2009-05-19

申请号：US11407980

申请日：2006-04-21

申请人： Teruo Ozaki ,  Ichiro Saito ,  Sakai Yokoyama ,  Kenji Ono ,  Satoshi Ibe ,  Kazuaki Shibata ,  Toshiyasu Sakai

发明人： Teruo Ozaki ,  Ichiro Saito ,  Sakai Yokoyama ,  Kenji Ono ,  Satoshi Ibe ,  Kazuaki Shibata ,  Toshiyasu Sakai

IPC分类号： B41J2/05

CPC分类号： B41J2/14 ,  B41J2202/17 ,  Y10T29/49401

摘要： An ink jet print head substrate capable of precisely blowing fuse element to store data reliably is provided. An ink jet print head incorporating such a substrate and an ink jet printing apparatus are also provided. The interlayer insulating film formed over the fuse element is made of a material that has a lower melting point than the material of the fuse element and which forms a cavity therein by heat produced when the fuse elements is blown.

摘要翻译： 提供一种能够精确地熔断熔丝元件以可靠地存储数据的喷墨打印头基板。 还提供了一种并入这种基板的喷墨打印头和喷墨打印设备。 形成在保险丝元件上方的层间绝缘膜由具有比熔丝元件的材料低的熔点并且当熔丝元件被吹制时产生的热量在其中形成空腔的材料制成。

公开(公告)号：US07338150B2

公开(公告)日：2008-03-04

申请号：US11746251

申请日：2007-05-09

申请人： Satoshi Ibe ,  Teruo Ozaki ,  Yoshiyuki Imanaka ,  Takuya Hatsui ,  Kenji Ono ,  Ichiro Saito ,  Sakai Yokoyama ,  Toshiyasu Sakai ,  Kazuaki Shibata

发明人： Satoshi Ibe ,  Teruo Ozaki ,  Yoshiyuki Imanaka ,  Takuya Hatsui ,  Kenji Ono ,  Ichiro Saito ,  Sakai Yokoyama ,  Toshiyasu Sakai ,  Kazuaki Shibata

IPC分类号： B41J2/06 ,  B41J2/05

CPC分类号： B41J2/1643 ,  B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1645 ,  H05K3/244

摘要： A number of steps is reduced by manufacturing an electrode pad connecting a liquid discharge head to an external wiring by the same step of a common wiring for supplying an electric power to a discharge energy generating portion. A number of manufacturing steps of a head is reduced by forming a substrate for a liquid discharge head having an electrode pad and a common wiring for supplying an electric power to a discharge energy as a metal film made of the same material as the electrode pad in accordance with a plating in a step of forming the common wiring of the metal film in accordance with a plating.

摘要翻译： 通过与向放电能量产生部分供电的公共布线相同的步骤制造将液体排出头连接到外部布线的电极焊盘来减少多个步骤。 通过形成用于具有电极焊盘的液体排出头的基板和用于向作为与电极焊盘相同材料制成的金属膜的放电能量提供电力的公共布线来减少头部的制造步骤 根据在电镀中形成金属膜的公共布线的步骤中的电镀。

公开(公告)号：US20060033778A1

公开(公告)日：2006-02-16

申请号：US11202078

申请日：2005-08-12

申请人： Kazuaki Shibata ,  Kenji Ono ,  Teruo Ozaki ,  Satoshi Ibe ,  Ichiro Saito ,  Sakai Yokoyama ,  Toshiyasu Sakai

发明人： Kazuaki Shibata ,  Kenji Ono ,  Teruo Ozaki ,  Satoshi Ibe ,  Ichiro Saito ,  Sakai Yokoyama ,  Toshiyasu Sakai

IPC分类号： B41J2/05

CPC分类号： B41J2/14129 ,  B41J2/14072 ,  B41J2/1603 ,  B41J2/1628 ,  H05K1/0212 ,  H05K1/167 ,  Y10T29/49083 ,  Y10T29/49155 ,  Y10T29/49401

摘要： An ink jet head circuit board is provided which has heaters to generate thermal energy for ink ejection as they are energized. This circuit board has the heaters formed with high precision to reduce their areas. It also has provisions to protect the electrode wires against corrosion and prevent a progress of corrosion. The substrate is deposited with the thin first electrodes made of a corrosion resistant metal. This is further deposited with the resistor layer. The second electrodes made of aluminum are deposited to overlap the first electrodes to form the heater without causing large dimensional variations among the heaters. With this construction, if a defect should occur in a protective layer on or near the heater, a progress of corrosion can effectively be prevented because the material of the resistor layer is more resistant to encroachment than aluminum and the first electrodes are corrosion resistant.

摘要翻译： 提供了一种喷墨头电路板，其具有加热器，以便在通电时产生用于喷墨的热能。 该电路板具有高精度地形成的加热器，以减少它们的面积。 它还具有保护电极丝免受腐蚀和防止腐蚀进行的规定。 用由抗腐蚀金属制成的薄的第一电极沉积衬底。 这进一步沉积在电阻层上。 由铝制成的第二电极被沉积以与第一电极重叠以形成加热器，而不会在加热器之间引起大的尺寸变化。 利用这种结构，如果在加热器上或附近的保护层中发生缺陷，则可以有效地防止腐蚀进行，因为电阻层的材料比铝更耐侵蚀性，并且第一电极是耐腐蚀的。

公开(公告)号：US07591071B2

公开(公告)日：2009-09-22

申请号：US11340467

申请日：2006-01-27

申请人： Satoshi Ibe ,  Teruo Ozaki ,  Ichiro Saito ,  Sakai Yokoyama ,  Kenji Ono ,  Kazuaki Shibata ,  Toshiyasu Sakai

发明人： Satoshi Ibe ,  Teruo Ozaki ,  Ichiro Saito ,  Sakai Yokoyama ,  Kenji Ono ,  Kazuaki Shibata ,  Toshiyasu Sakai

IPC分类号： B21D53/76 ,  H01L21/70

CPC分类号： B41J2/1603 ,  B41J2/14072 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1643 ,  B41J2/1646 ,  H01L24/03 ,  H01L24/05 ,  H01L24/81 ,  H01L2224/02371 ,  H01L2224/04042 ,  H01L2224/08137 ,  H01L2224/16137 ,  H01L2224/45124 ,  H01L2224/4847 ,  H01L2224/8592 ,  H01L2924/10253 ,  Y10T29/49155 ,  Y10T29/49401 ,  Y10T29/49798 ,  H01L2924/00

摘要： A semiconductor device includes a lateral end surface and a connection electrode for external electrical connection. The connection electrode is exposed at the side surface. A manufacturing method of the semiconductor device includes steps of forming a linear recess in a silicon substrate between adjacent semiconductor devices, forming, on an inner surface of the recess, the electrode for external electrical connection of one of the semiconductor devices, and a step of separating the one semiconductor device from another on the silicon substrate by cutting the silicon substrate along the linear recess. Forming the electrode includes steps of forming a metal thin film astride a cutting line at which the silicon substrate is to be cut, forming a resist layer and patterning the resist layer on the metal thin film, growing metal at a portion not having the patterned resist layer, and removing the patterned resist layer and the metal thin film below the patterned resist layer. The connection electrode is provided by the metal grown in the growing step.

摘要翻译： 半导体器件包括用于外部电连接的侧端面和连接电极。 连接电极在侧面露出。 半导体器件的制造方法包括以下步骤：在相邻的半导体器件之间的硅衬底中形成线性凹槽，在凹部的内表面上形成用于半导体器件之一的外部电连接的电极，以及 通过沿着线状凹部切割硅衬底，将硅衬底上的一个半导体器件与另一个半导体器件分离。 形成电极包括跨越切割线切割硅衬底的切割线形成金属薄膜的步骤，形成抗蚀剂层并在金属薄膜上图案化抗蚀剂层，在不具有图案化抗蚀剂的部分上生长金属 层，并且去除图案化的抗蚀剂层和在图案化的抗蚀剂层下方的金属薄膜。 连接电极由生长步骤中生长的金属提供。

公开(公告)号：US20070120902A1

公开(公告)日：2007-05-31

申请号：US11561058

申请日：2006-11-17

申请人： TERUO OZAKI ,  Ichiro Saito ,  Kenji Ono ,  Satoshi Ibe ,  Toshiyasu Sakai ,  Sakai Yokoyama ,  Kazuaki Shibata

发明人： TERUO OZAKI ,  Ichiro Saito ,  Kenji Ono ,  Satoshi Ibe ,  Toshiyasu Sakai ,  Sakai Yokoyama ,  Kazuaki Shibata

IPC分类号： B41J2/175

CPC分类号： B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1646 ,  Y10T29/49401

摘要： An ink jet recording head includes a substrate provided with an energy generating element to generate energy used for discharging ink, a discharge port through which the ink is discharged, a supply port for supplying the ink, and an ink path formed on the substrate for making the discharge port and the supply port communicate with each other, wherein wall members forming the ink path are made of an inorganic material, and a space between adjacent ink paths is filled up by a metal layer.

摘要翻译： 喷墨记录头包括具有能量产生元件以产生用于排出墨水的能量的基底，排出墨水的排出口，用于供应墨水的供给口以及形成在该基底上的油墨通路， 排出口和供给口彼此连通，其中形成墨水通道的壁构件由无机材料制成，并且相邻墨水路径之间的空间被金属层填充。

公开(公告)号：US20060033780A1

公开(公告)日：2006-02-16

申请号：US11203129

申请日：2005-08-15

申请人： Kenji Ono ,  Teruo Ozaki ,  Toshiyasu Sakai ,  Ichiro Saito ,  Satoshi Ibe ,  Sakai Yokoyama ,  Kazuaki Shibata

发明人： Kenji Ono ,  Teruo Ozaki ,  Toshiyasu Sakai ,  Ichiro Saito ,  Satoshi Ibe ,  Sakai Yokoyama ,  Kazuaki Shibata

IPC分类号： B41J2/05

CPC分类号： B41J2/1628 ,  B41J2/14072 ,  B41J2/14129 ,  B41J2/1603

摘要： An ink jet head circuit board is provided which has heaters to generate thermal energy for ejecting ink as they are energized. This circuit board is so constructed as to reduce wire resistances for the heaters while at the same time preventing an increase in the size of the board and realizing a high-density integration of the heaters required for high resolution printing. This construction is made possible by forming electrode wires of first and second electrode wire layers to reduce an area that the wire patterns for the heater occupy on the circuit board. In reducing the effective thickness of protective insulation layer formed on the heater to prevent a possible degradation of thermal efficiency, one of the protective insulation layers over the electrode wires is removed from the heater, depending on the thickness of the electrode wires.

摘要翻译： 提供了一种喷墨头电路板，其具有加热器以产生用于在通电时喷射墨水的热能。 该电路板被构造成降低加热器的导线电阻，同时防止板的尺寸增加，并实现高分辨率印刷所需的加热器的高密度集成。 通过形成第一电极线层和第二电极线层的电极线，能够减小加热器的电线图案在电路基板上的占有面积。 在减小加热器上形成的保护绝缘层的有效厚度以防止热效率可能降低的情况下，根据电极线的厚度，从加热器上除去电极线上的保护绝缘层之一。

公开(公告)号：US20080188018A1

公开(公告)日：2008-08-07

申请号：US12098886

申请日：2008-04-07

申请人： Kazuaki Shibata ,  Kenji Ono ,  Teruo Ozaki ,  Satoshi Ibe ,  Ichiro Saito ,  Sakai Yokoyama ,  Toshiyasu Sakai

发明人： Kazuaki Shibata ,  Kenji Ono ,  Teruo Ozaki ,  Satoshi Ibe ,  Ichiro Saito ,  Sakai Yokoyama ,  Toshiyasu Sakai

IPC分类号： H01L21/18 ,  B21D53/76

CPC分类号： B41J2/14129 ,  B41J2/14072 ,  B41J2/1603 ,  B41J2/1628 ,  H05K1/0212 ,  H05K1/167 ,  Y10T29/49083 ,  Y10T29/49155 ,  Y10T29/49401

摘要： An ink jet head circuit board is provided which has heaters to generate thermal energy for ink ejection as they are energized. This circuit board has the heaters formed with high precision to reduce their areas. It also has provisions to protect the electrode wires against corrosion and prevent a progress of corrosion. The substrate is deposited with the thin first electrodes made of a corrosion resistant metal. This is further deposited with the resistor layer. The second electrodes made of aluminum are deposited to overlap the first electrodes to form the heater without causing large dimensional variations among the heaters. With this construction, if a defect should occur in a protective layer on or near the heater, a progress of corrosion can effectively be prevented because the material of the resistor layer is more resistant to encroachment than aluminum and the first electrodes are corrosion resistant.

摘要翻译： 提供了一种喷墨头电路板，其具有加热器，以便在通电时产生用于喷墨的热能。 该电路板具有高精度地形成的加热器，以减少它们的面积。 它还具有保护电极丝免受腐蚀和防止腐蚀进行的规定。 用由抗腐蚀金属制成的薄的第一电极沉积衬底。 这进一步沉积在电阻层上。 由铝制成的第二电极被沉积以与第一电极重叠以形成加热器，而不会在加热器之间引起大的尺寸变化。 利用这种结构，如果在加热器上或附近的保护层中发生缺陷，则可以有效地防止腐蚀进行，因为电阻层的材料比铝更耐侵蚀性，并且第一电极是耐腐蚀的。

公开(公告)号：US07374275B2

公开(公告)日：2008-05-20

申请号：US11202078

申请日：2005-08-12

申请人： Kazuaki Shibata ,  Kenji Ono ,  Teruo Ozaki ,  Satoshi Ibe ,  Ichiro Saito ,  Sakai Yokoyama ,  Toshiyasu Sakai

发明人： Kazuaki Shibata ,  Kenji Ono ,  Teruo Ozaki ,  Satoshi Ibe ,  Ichiro Saito ,  Sakai Yokoyama ,  Toshiyasu Sakai

IPC分类号： B41J2/05

CPC分类号： B41J2/14129 ,  B41J2/14072 ,  B41J2/1603 ,  B41J2/1628 ,  H05K1/0212 ,  H05K1/167 ,  Y10T29/49083 ,  Y10T29/49155 ,  Y10T29/49401

摘要： An ink jet head circuit board is provided which has heaters to generate thermal energy for ink ejection as they are energized. This circuit board has the heaters formed with high precision to reduce their areas. It also has provisions to protect the electrode wires against corrosion and prevent a progress of corrosion. The substrate is deposited with the thin first electrodes made of a corrosion resistant metal. This is further deposited with the resistor layer. The second electrodes made of aluminum are deposited to overlap the first electrodes to form the heater without causing large dimensional variations among the heaters. With this construction, if a defect should occur in a protective layer on or near the heater, a progress of corrosion can effectively be prevented because the material of the resistor layer is more resistant to encroachment than aluminum and the first electrodes are corrosion resistant.

摘要翻译： 提供了一种喷墨头电路板，其具有加热器，以便在通电时产生用于喷墨的热能。 该电路板具有高精度地形成的加热器，以减少它们的面积。 它还具有保护电极丝免受腐蚀和防止腐蚀进行的规定。 用由抗腐蚀金属制成的薄的第一电极沉积衬底。 这进一步沉积在电阻层上。 由铝制成的第二电极被沉积以与第一电极重叠以形成加热器，而不会在加热器之间引起大的尺寸变化。 利用这种结构，如果在加热器上或附近的保护层中发生缺陷，则可以有效地防止腐蚀进行，因为电阻层的材料比铝更耐侵蚀性，并且第一电极是耐腐蚀的。

公开(公告)号：US20060256160A1

公开(公告)日：2006-11-16

申请号：US11407980

申请日：2006-04-21

申请人： Teruo Ozaki ,  Ichiro Saito ,  Sakai Yokoyama ,  Kenji Ono ,  Satoshi Ibe ,  Kazuaki Shibata ,  Toshiyasu Sakai

发明人： Teruo Ozaki ,  Ichiro Saito ,  Sakai Yokoyama ,  Kenji Ono ,  Satoshi Ibe ,  Kazuaki Shibata ,  Toshiyasu Sakai

IPC分类号： B41J2/04

CPC分类号： B41J2/14 ,  B41J2202/17 ,  Y10T29/49401

摘要： An ink jet print head substrate capable of precisely blowing fuse element to store data reliably is provided. An ink jet print head incorporating such a substrate and an ink jet printing apparatus are also provided. The interlayer insulating film formed over the fuse element is made of a material that has a lower melting point than the material of the fuse element and which forms a cavity therein by heat produced when the fuse elements is blown.