Post treatment of tungsten etching back
    12.
    发明授权
    Post treatment of tungsten etching back 失效
    后处理钨蚀回

    公开(公告)号:US5521119A

    公开(公告)日:1996-05-28

    申请号:US274417

    申请日:1994-07-13

    IPC分类号: H01L21/768 H01L21/44

    CPC分类号: H01L21/76877 H01L21/76838

    摘要: A new method of metallization without unwanted precipitates using a tungsten plug is achieved. Semiconductor device structures are formed in and on a semiconductor substrate. A contact hole is opened through an insulating layer to the semiconductor substrate. A glue layer is deposited conformally over the surface of the insulating layer and within the contact opening. A layer of tungsten is blanket deposited over the glue layer. The tungsten layer is etched back leaving the tungsten only within the contact opening to form a tungsten plug. The etching back leaves impurities on the surface of the glue layer. Those impurities will react with water or air to form precipitates. The precipitates are removed using a wet chemical etch. The substrate is post treated with argon ion sputtering to prevent future formation of precipitates. A second metal layer is deposited over the tungsten plug and the glue layer to complete the tungsten plug metallization without unwanted precipitates in the fabrication of an integrated circuit.

    摘要翻译: 实现了使用钨丝塞不需要沉淀的金属化的新方法。 在半导体衬底中形成半导体器件结构。 接触孔通过绝缘层向半导体衬底开口。 粘合剂层保形地沉积在绝缘层的表面上并且在接触开口内。 一层钨被覆盖在胶层上。 钨层被回蚀,仅在接触孔内留下钨以形成钨丝塞。 蚀刻后在胶层表面留下杂质。 这些杂质将与水或空气反应形成析出物。 使用湿法化学蚀刻除去沉淀物。 用氩离子溅射对衬底进行后处理,以防止未来形成析出物。 第二金属层沉积在钨插塞和胶层上,以在集成电路的制造中完成钨插塞金属化而不需要沉淀。

    Taxol derivatives
    13.
    发明授权
    Taxol derivatives 失效
    紫杉醇衍生物

    公开(公告)号:US5248796A

    公开(公告)日:1993-09-28

    申请号:US900365

    申请日:1992-06-18

    IPC分类号: C07D305/14

    CPC分类号: C07D305/14 C07C2103/80

    摘要: The present invention relates to 10-desacetoxy-11,12-dihydrotaxol-10,12(18)-diene derivatives which are useful as antitumor agents and as intermediates for the preparation of 10-desacetoxytaxol. Also disclosed is a novel process for the preparation of 10-desacetoxytaxol which comprises treating hydroxy protected 10-deacetyltaxol with 1,1,2-trifluoro-2-chlorotriethylamine followed by catalytic hydrogenation.

    摘要翻译: 本发明涉及可用作抗肿瘤剂的10-脱乙酰氧基-11,12-二氢塔考醇-10,12(18) - 二烯衍生物,作为制备10-脱乙酰氧基紫杉醇的中间体。 还公开了一种用于制备10-脱乙酰氧基紫杉醇的新方法,其包括用1,1,2-三氟-2-氯三乙胺处理羟基保护的10-脱乙酰紫杉醇,然后催化氢化。

    Fluoro taxols
    14.
    发明授权

    公开(公告)号:US5192796A

    公开(公告)日:1993-03-09

    申请号:US907261

    申请日:1992-07-01

    摘要: This invention relates to a fluorinated taxol of formula I ##STR1## in which R.sup.1 is benzoyl or t-butyloxycarbonyl; R.sup.2 is acetoxy, hydrogen or hydroxy; and the wavy line indicates either the .alpha.- or the .beta.-configuration.Further provided by this invention are pharmaceutical formulations and useful intermediates for the fluorinated taxols of formula I. A method of treating mammalian tumors using a compound of formula I is also provided.

    Wheel cylinder adjuster
    15.
    发明授权
    Wheel cylinder adjuster 有权
    轮缸调节器

    公开(公告)号:US09309937B2

    公开(公告)日:2016-04-12

    申请号:US14484288

    申请日:2014-09-12

    申请人: Shu-Hui Chen

    发明人: Shu-Hui Chen

    IPC分类号: B23P19/04 F16D65/00 B25B27/00

    摘要: A wheel cylinder adjuster includes a rotary unit and a driving unit connected with the rotary unit. The rotary unit includes a rotary disk, a fixing member, two positioning members, a resilient ring, a restriction member and a clip. The rotary disk has a guide groove designed in a shape containing two semi-ovals. Two stepped slots are defined through the fixing member and the positioning members extend through the two stepped slots. Each positioning member has a guide tip which is located in the guide groove. The resilient ring is mounted to the positioning members and the tubular portion. The rotary disk is rotated and the guide tips of the positioning members more in the stepped slots so as to adjust the distance between the positioning members so as to be operated to different sizes of the wheel cylinders.

    摘要翻译: 轮缸调节器包括旋转单元和与旋转单元连接的驱动单元。 旋转单元包括旋转盘,固定构件,两个定位构件,弹性环,限制构件和夹子。 旋转盘具有设计成包含两个半椭圆形状的引导槽。 通过固定构件限定两个台阶槽,并且定位构件延伸穿过两个阶梯槽。 每个定位构件具有位于引导槽中的引导尖端。 弹性环安装到定位构件和管状部分。 旋转盘旋转,并且定位构件的引导尖端更多地在台阶槽中,以便调整定位构件之间的距离,以便操作到不同尺寸的轮缸。

    Oil pipe stopper
    16.
    发明授权
    Oil pipe stopper 有权
    油管塞

    公开(公告)号:US08851124B2

    公开(公告)日:2014-10-07

    申请号:US13354342

    申请日:2012-01-20

    申请人: Shu-Hui Chen

    发明人: Shu-Hui Chen

    IPC分类号: F16L55/10

    摘要: An oil pipe stopper includes an upper clamping body, a lower clamping body, and an elastic member. The upper clamping body has a central portion with an upper post, two downwardly slanting portions, and two clamping portions. The clamping portions of the upper clamping body are provided with a first stopping member and an engagement groove. The lower clamping body has a central portion with a lower post, two upwardly slanting portions, and two clamping portions. The lower post is telescopically connected with the upper post. The clamping portions of the lower clamping body are provided with a second stopping member and a third stopping member. The downwardly and upwardly slanting portions are crossed such that the first stopping member faces the second stopping member while the engagement groove faces the third stopping member. The elastic member is mounted between the upper clamping body and the lower clamping body.

    摘要翻译: 油管止动器包括上夹紧体,下夹紧体和弹性构件。 上夹持体具有中部,其具有上柱,两个向下倾斜的部分和两个夹紧部分。 上夹紧体的夹紧部分设置有第一止动件和接合槽。 下夹具本体具有中心部分,其具有下柱,两个向上倾斜的部分和两个夹紧部分。 下柱与上柱可伸缩连接。 下夹持体的夹持部分设有第二止动件和第三止挡件。 向下和向上倾斜的部分交叉,使得第一止动构件面向第二止动构件,同时接合槽面向第三止动构件。 弹性构件安装在上夹紧体和下夹紧体之间。