Method of repairing probe card and probe board using the same
    11.
    发明授权
    Method of repairing probe card and probe board using the same 有权
    使用相同的方法修复探针卡和探针板

    公开(公告)号:US08692136B2

    公开(公告)日:2014-04-08

    申请号:US12926802

    申请日:2010-12-09

    IPC分类号: H05K1/11

    摘要: There are provided a method of repairing a probe card and a repaired probe board. The method of repairing a probe card includes: in a board body composed of a sintered ceramic having first and second pillar surfaces disposed at a position opposed to each other, preparing the board body including a plurality of main channels for electrically connecting a first pad formed on the first pillar surface to a second pad formed on a second pillar surface and reserved channels disposed to be adjacent to the main channels to repair to damaged main channels; when the main channels are damaged; removing the first and second pads formed in the main channels and the reserved channels; forming cavities by partially removing the board between the damaged main channels and the reserved channels adjacent to the main channel; and forming repair connection parts in the cavities in order to electrically connect the damaged main channels to the reserved channels adjacent thereto.

    摘要翻译: 提供了一种修复探针卡和修理的探针板的方法。 修补探针卡的方法包括:在由具有设置在彼此相对的位置的第一和第二柱面的烧结陶瓷构成的板主体中,准备板主体,其包括多个主通道,用于电连接形成的第一焊盘 在第一柱面上,形成在第二柱面上的第二焊盘,以及设置成邻近主通道的保留通道,以修复损坏的主通道; 当主渠道受损时; 去除在主通道和预留通道中形成的第一和第二焊盘; 通过在损坏的主通道和与主通道相邻的预留通道之间部分地去除板来形成空腔; 以及在空腔中形成修复连接部分,以便将损坏的主通道电连接到与其相邻的预留通道。