MEMS DEVICE AND METHOD FOR FABRICATING THE SAME
    11.
    发明申请
    MEMS DEVICE AND METHOD FOR FABRICATING THE SAME 有权
    MEMS器件及其制造方法

    公开(公告)号:US20100162821A1

    公开(公告)日:2010-07-01

    申请号:US12621048

    申请日:2009-11-18

    Inventor: Yusuke TAKEUCHI

    CPC classification number: G01L9/0042 Y10T29/49005

    Abstract: A MEMS device includes: a substrate having a through hole; a first film provided on a top surface of the substrate with a bottom surface of the first film exposed in the through hole; a second film provided over the first film with an air gap interposed therebetween, and having a hole grouping including holes each in communication with the air gap; and a supporting layer interposed between the first and second films and having the air gap formed therein. Outermost holes of the hole grouping are located at regular intervals along a shape of an opening of the through hole at an upper open end.

    Abstract translation: MEMS器件包括:具有通孔的衬底; 第一膜,其设置在所述基板的顶表面上,所述第一膜的底表面暴露在所述通孔中; 设置在所述第一膜上的第二膜,其间插入气隙,并且具有包括与所述气隙连通的孔的孔组; 以及插入在第一和第二膜之间并且在其中形成气隙的支撑层。 孔分组的最外孔沿着上开口端的通孔的开口的形状规则间隔设置。

    Semiconductor integrated device
    13.
    发明授权
    Semiconductor integrated device 失效
    半导体集成器件

    公开(公告)号:US5305379A

    公开(公告)日:1994-04-19

    申请号:US885370

    申请日:1992-05-19

    CPC classification number: H04B3/23

    Abstract: A sending data buffer for holding sending data temporarily and transmitting the data to an echo canceler section is installed between a sending section and an echo canceler section of an echo canceler integrated circuit included in a subscriber line circuit of an integrated service digital network. The sending data buffer is operated in a shift register mode during a sending training mode, and operated in FIFO (first in-first out) mode during a sending/receiving training mode. Also, an adjustment function of the delay amount corresponding to the use setting is added.

    Abstract translation: 用于暂时保持发送数据并将数据发送到回波消除器部分的发送数据缓冲器被安装在综合业务数字网络的用户线路中包括的回波消除器集成电路的发送部分和回波消除器部分之间。 发送数据缓冲器在发送训练模式期间以移位寄存器模式操作,并且在发送/接收训练模式期间以FIFO(先进先出)模式操作。 此外,添加与使用设置相对应的延迟量的调整功能。

    Diaphragm structure and MEMS device
    14.
    发明授权
    Diaphragm structure and MEMS device 有权
    隔膜结构和MEMS器件

    公开(公告)号:US08146437B2

    公开(公告)日:2012-04-03

    申请号:US12630179

    申请日:2009-12-03

    CPC classification number: G01L9/0016 H04R19/005

    Abstract: A diaphragm structure for a MEMS device includes a through-hole formed so as to penetrate from an upper surface to a bottom surface of a substrate; and a vibrating electrode film formed on the upper surface of the substrate so as to cover the through-hole. An opening shape of the through-hole in the upper surface of the substrate is substantially hexagonal.

    Abstract translation: 用于MEMS器件的隔膜结构包括形成为从衬底的上表面到底表面穿透的通孔; 以及形成在基板的上表面上以覆盖通孔的振动电极膜。 基板的上表面中的通孔的开口形状基本上是六边形。

    CAPACITOR MICROPHONE CHIP, CAPACITOR MICROPHONE, AND MANUFACTURING METHOD THEREOF
    15.
    发明申请
    CAPACITOR MICROPHONE CHIP, CAPACITOR MICROPHONE, AND MANUFACTURING METHOD THEREOF 审中-公开
    电容麦克风芯片,电容麦克风及其制造方法

    公开(公告)号:US20100189289A1

    公开(公告)日:2010-07-29

    申请号:US12305775

    申请日:2007-06-27

    Inventor: Yusuke Takeuchi

    Abstract: An object of the invention is to design microminiaturization and higher sensitivity of a capacitor microphone chip formed by micromachining a silicon substrate and a wafer is diced so that a silicon substrate of a microphone chip is shaped almost like a hexagon, preferably a regular hexagon, and a back air chamber is shaped like a circle or a regular hexagon.

    Abstract translation: 本发明的目的是设计通过微加工硅衬底形成的电容器麦克风芯片的微型化和更高的灵敏度,并且切割晶片,使得麦克风芯片的硅衬底被成形为几​​乎像六边形,优选为正六边形,以及 后气室形状为圆形或正六边形。

    MEMS device and method for fabricating the same
    18.
    发明授权
    MEMS device and method for fabricating the same 有权
    MEMS器件及其制造方法

    公开(公告)号:US08065919B2

    公开(公告)日:2011-11-29

    申请号:US12621048

    申请日:2009-11-18

    Inventor: Yusuke Takeuchi

    CPC classification number: G01L9/0042 Y10T29/49005

    Abstract: A MEMS device includes: a substrate having a through hole; a first film provided on a top surface of the substrate with a bottom surface of the first film exposed in the through hole; a second film provided over the first film with an air gap interposed therebetween, and having a hole grouping including holes each in communication with the air gap; and a supporting layer interposed between the first and second films and having the air gap formed therein. Outermost holes of the hole grouping are located at regular intervals along a shape of an opening of the through hole at an upper open end.

    Abstract translation: MEMS器件包括:具有通孔的衬底; 第一膜,其设置在所述基板的顶表面上,所述第一膜的底表面暴露在所述通孔中; 设置在所述第一膜上的第二膜,其间插入气隙,并且具有包括与所述气隙连通的孔的孔组; 以及插入在第一和第二膜之间并且在其中形成气隙的支撑层。 孔分组的最外孔沿着上开口端的通孔的开口的形状规则间隔设置。

    DIAPHRAGM STRUCTURE AND MEMS DEVICE
    19.
    发明申请
    DIAPHRAGM STRUCTURE AND MEMS DEVICE 有权
    膜片结构和MEMS器件

    公开(公告)号:US20100077863A1

    公开(公告)日:2010-04-01

    申请号:US12630179

    申请日:2009-12-03

    CPC classification number: G01L9/0016 H04R19/005

    Abstract: A diaphragm structure for a MEMS device includes a through-hole formed so as to penetrate from an upper surface to a bottom surface of a substrate; and a vibrating electrode film formed on the upper surface of the substrate so as to cover the through-hole. An opening shape of the through-hole in the upper surface of the substrate is substantially hexagonal.

    Abstract translation: 用于MEMS器件的隔膜结构包括形成为从衬底的上表面到底表面穿透的通孔; 以及形成在基板的上表面上以覆盖通孔的振动电极膜。 基板的上表面中的通孔的开口形状基本上是六边形。

    Piezoelectric actuator, imaging element moving device using the same, and imaging device using the same
    20.
    发明授权
    Piezoelectric actuator, imaging element moving device using the same, and imaging device using the same 有权
    压电致动器,使用其的成像元件移动装置和使用其的成像装置

    公开(公告)号:US07508117B2

    公开(公告)日:2009-03-24

    申请号:US11662916

    申请日:2005-10-18

    Inventor: Yusuke Takeuchi

    Abstract: To implement a piezoelectric actuator which can actuate a large object, such as an imaging element, in a predetermined direction at high power without involvement of rotational displacement; which can ensure a large amount of actuation; which is suitable for miniaturization and weight reduction; and which is advantageous in terms of mechanical durability and manufacturing cost.A piezoelectric actuator having a well-balanced mechanical structure is obtained by means of stacking a plurality of cross units, in each of which a pair of bimorph piezoelectric elements (21a and 21b, 21c and 21d) are crossed in the form of the letter X, into two layers (an even number of layers), and fixing the thus-stacked cross units. An imaging element 11 is stably supported by means of two movable ends (C-1, C-2) provided at the extremity of the piezoelectric actuator.

    Abstract translation: 实现能够以高功率在预定方向上致动诸如成像元件的大物体而不涉及旋转位移的压电致动器; 这可以确保大量的致动; 适合小型化,减轻重量; 并且在机械耐久性和制造成本方面是有利的。 通过堆叠多个交叉单元获得具有良好平衡的机械结构的压电致动器,其中每个横向单元中的一对双压电晶片压电元件(21a和21b,21c和21d)以字母X的形式交叉 ,分成两层(偶数层),并固定如此堆积的交叉单元。 成像元件11通过设置在压电致动器的末端的两个可动端(C-1,C-2)稳定地支撑。

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