公开(公告)号：US09024648B2

公开(公告)日：2015-05-05

申请号：US13669464

申请日：2012-11-06

Applicant: Advantest Corporation

Inventor： Hiromitsu Horino ,  Masataka Onozawa

IPC: G01R31/00 ,  G01R31/20 ,  G01R1/02 ,  G01R31/01 ,  G01R31/28

CPC classification number: G01R1/02 ,  G01R31/01 ,  G01R31/2867 ,  G01R31/2874 ,  G01R31/2891 ,  G01R31/2893

Abstract: A handler for conveying DUTs to a socket for a test that can reduce a test time includes: a test section including the socket; a heat applying section into which a tray having plural DUTs placed on its surface is conveyed and that controls the temperature of the DUTs to a predetermined test temperature and conveys the tray into the test section; and a device image capturing section that includes imaging elements arranged along a first direction the number of which is equal to DUTs arranged along the first direction and that in the heat applying section, captures images of the DUTs by moving the imaging elements relative to the surface of the tray in a second direction non-parallel with the first direction; and a position adjusting section that adjusts the positions of the DUTs relative to the socket based on their images captured by the device image capturing section.

Abstract translation: 用于将DUT传送到插座以用于可以减少测试时间的测试的处理器包括：包括插座的测试部分; 传送具有放置在其表面上的多个DUT的托盘的热施加部，并且将DUT的温度控制到预定的测试温度并将托盘输送到测试部分中; 以及装置图像拍摄部，其包括沿着第一方向布置的成像元件，所述成像元件的数量等于沿着所述第一方向布置的DUT，并且所述加热部中的成像元件通过相对于所述表面移动所述成像元件来捕获所述DUT的图像 的托盘在与第一方向不平行的第二方向上; 以及位置调整部，其基于由所述装置图像拍摄部拍摄的图像来调整所述DUT相对于所述插座的位置。