公开(公告)号：US20180144960A1

公开(公告)日：2018-05-24

申请号：US15623503

申请日：2017-06-15

Applicant: APPLIED MATERIALS, INC.

Inventor： JUN-LIANG SU ,  KARTHIK ELUMALAI ,  ENG SHENG PEH ,  Sriskantharajah THIRUNAVUKARASU ,  DIMANTHA RAJAPAKSA

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/673 ,  G01B11/24

Abstract: Systems, apparatuses and methods for determining a surface profile of a substrate are provided. In one embodiment, a method includes projecting a signal having a vertical component/profile across the surface of the substrate from a plurality of locations along a first side of the substrate, capturing the projected signals at each of a plurality of respective locations across the surface of the substrate and determining a surface profile for the substrate using the captured signals. The process can be automated using a controller having predetermined projection and capture positions along respective sides of the substrate, where a surface profile of the substrate can be automatically determined by the controller using the captured signals.

公开(公告)号：US20160133490A1

公开(公告)日：2016-05-12

申请号：US14933628

申请日：2015-11-05

Applicant: APPLIED MATERIALS, INC.

Inventor： SRISKANTHARAJAH THIRUNAVUKARASU ,  ENG SHENG PEH ,  SRINIVAS D. NEMANI ,  ARVIND SUNDARRAJAN ,  AVINASH AVULA ,  ELLIE Y. YIEH

IPC: H01L21/673 ,  H01L21/677

CPC classification number: H01L21/67373 ,  H01L21/67201 ,  H01L21/67369 ,  H01L21/67376 ,  H01L21/67379

Abstract: Embodiments method and apparatus for transferring a substrate are provided herein. In some embodiments, a substrate cassette includes a body having an upper portion and a lower portion, the upper portion and the lower portion defining an interior volume when the upper portion is coupled to the lower portion; a locking mechanism moveable between a locked position, in which the upper and lower portions are coupled, and an unlocked position, in which the lower portion can be separated from the upper portion; and a load distribution plate coupled to an upper surface of the upper portion along an edge of the upper portion to distribute a load applied to the load distribution plate.

Abstract translation: 本发明提供了用于转移基板的实施例的方法和装置。 在一些实施例中，衬底盒包括具有上部和下部的主体，当上部联接到下部时，上部和下部限定内部容积; 锁定机构，其能够在上部和下部结合的锁定位置和解锁位置之间移动，其中下部可以与上部分离; 以及负载分配板，其沿着所述上部的边缘联接到所述上部的上表面，以分配施加到所述负载分配板的负载。