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    Mapping of a replacement parts storage container
    11.
    发明授权
    Mapping of a replacement parts storage container 有权

    公开(公告)号：US11469123B2

    公开(公告)日：2022-10-11

    申请号：US16994413

    申请日：2020-08-14

    Applicant: APPLIED MATERIALS, INC.

    Inventor： Nicholas Michael Bergantz ,  Jeffrey Hudgens ,  Doug McAllister ,  Helder Lee

    IPC: H01L21/67 ,  H01L21/673

    Abstract: A method for detecting positions of replacement parts, wafers, or empty carriers for a replacement part stored at a replacement parts storage container is provided. A container is received at a at a load port of a factory interface of an electronics processing system. The container is configured to store replacement parts for a process chamber of the electronics processing system. A robot arm is moved according to a first mapping pattern to identify, using a detection system at a distal end of an end effector of the robot arm, positions of one or more replacement parts in the container. Regions of the container that do not contain replacement parts are determined. The robot arm is moved according to a second mapping pattern to identify, within the regions of the container that do not contain replacement parts, using the detection system, a position in the container of at least one of a wafer or an empty carrier for a replacement part. A mapping of positions of the one or more replacement parts and of positions of at least one of the empty carrier or the wafer in the container is recorded in a storage medium.

    MAPPING OF A REPLACEMENT PARTS STORAGE CONTAINER
    14.
    发明申请
    MAPPING OF A REPLACEMENT PARTS STORAGE CONTAINER 有权

    公开(公告)号：US20230058606A1

    公开(公告)日：2023-02-23

    申请号：US18045119

    申请日：2022-10-07

    Applicant: APPLIED MATERIALS, INC.

    Inventor： Nicholas Michael Bergantz ,  Jeffrey Hudgens ,  Doug McAllister ,  Helder Lee

    IPC: H01L21/67 ,  H01L21/673

    Abstract: A system includes a factory interface, a load port connected to the factory interface, a container connected to the load port, and a controller connected to a robot arm of the factory interface. The controller determines that the container is configured to store replacement parts for a process chamber of the system and causes the robot arm to move according to a first mapping pattern to identify, using a detection system at a distal end of an end effector of the robot arm, positions in the container. Regions of the container that do not contain replacement parts are determined and the robot arm is moved according to a second mapping pattern to identify a position in the container of a wafer and/or an empty carrier for a replacement part. A mapping of positions of replacement parts and positions of the wafer and/or empty carrier is recorded in a storage medium.

    AUTOTEACH SYSTEM
    15.
    发明申请
    AUTOTEACH SYSTEM 有权

    公开(公告)号：US20220324100A1

    公开(公告)日：2022-10-13

    申请号：US17850296

    申请日：2022-06-27

    Applicant: Applied Materials, Inc.

    Inventor： Nicholas Michael Kopec ,  Lyle Kosinski ,  Matvey Farber ,  Jeffrey Hudgens

    IPC: B25J9/16 ,  H01L21/67 ,  H01L21/00 ,  H01L21/673 ,  B25J21/00

    Abstract: An autoteach system includes an autoteach pin that is a scannable feature having a fixed position within the autoteach system. The autoteach pin enables an autoteach operation of a robot arm of the wafer processing system. The autoteach operation is an operation to automatically teach the fixed position within the autoteach system to the robot arm of the wafer processing system. The autoteach pin includes a first portion including a cylindrical sidewall. The robot arm is to use the first portion to locate the fixed position within the autoteach system. The autoteach portion further includes a second portion including planar sidewalls that are configured to enable calibration of robot arm error.

    SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF
    16.
    发明公开
    SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF 审中-公开

    公开(公告)号：US20240071796A1

    公开(公告)日：2024-02-29

    申请号：US18243433

    申请日：2023-09-07

    Applicant: Applied Materials, Inc.

    Inventor： Alex Berger ,  Jeffrey Hudgens ,  Eric Englhardt

    IPC: H01L21/677 ,  B25J11/00 ,  B65G54/02

    CPC classification number: H01L21/67709 ,  B25J11/0095 ,  B65G54/02

    Abstract: Disclosed herein are systems and methods relating to a transfer chamber for an electronic device processing system. The transfer chamber can include a first magnetic levitation track having a face-up orientation and a second magnetic levitation track spaced from the first magnetic levitation track and having a face-down orientation. The system can include substrate carriers that move along the first and second magnetic levitation tracks where each substrate carrier includes a magnet on a bottom portion to interact with a first magnetic field and a second magnet on a top portion to interact with a second magnetic field. The system also can include at least one lift pin assembly to move the substrate carriers in a vertical direction between the first and second magnetic levitation tracks.

    SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF
    17.
    发明申请
    SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF 有权

    公开(公告)号：US20210358788A1

    公开(公告)日：2021-11-18

    申请号：US17370802

    申请日：2021-07-08

    Applicant: Applied Materials, Inc.

    Inventor： Alex Berger ,  Jeffrey Hudgens ,  Eric Englhardt

    IPC: H01L21/677 ,  B65G54/02 ,  B25J11/00

    Abstract: Disclosed herein are systems and methods relating to a transfer chamber for an electronic device processing system. The transfer chamber can include a first magnetic levitation track having a face-up orientation and a second magnetic levitation track spaced from the first magnetic levitation track and having a face-down orientation. The system can include substrate carriers that move along the first and second magnetic levitation tracks where each substrate carrier includes a magnet on a bottom portion to interact with a first magnetic field and a second magnet on a top portion to interact with a second magnetic field. The system also can include at least one lift pin assembly to move the substrate carriers in a vertical direction between the first and second magnetic levitation tracks.

    METHODS AND SYSTEMS FOR TEMPERATURE CONTROL FOR A SUBSTRATE
    19.
    发明公开
    METHODS AND SYSTEMS FOR TEMPERATURE CONTROL FOR A SUBSTRATE 审中-公开

    公开(公告)号：US20240304478A1

    公开(公告)日：2024-09-12

    申请号：US18666686

    申请日：2024-05-16

    Applicant: APPLIED MATERIALS, INC.

    Inventor： Nicholas Michael Bergantz ,  Jeffrey Hudgens ,  Doug McAllister ,  Helder Lee

    IPC: H01L21/67 ,  H01L21/673

    CPC classification number: H01L21/67265 ,  H01L21/67356

    Abstract: A system includes a factory interface, a load port connected to the factory interface, and a system controller. The system controller is to, responsive to detecting that a container is received at the load port, determine a type of parts for storage at the container. One or more mapping patterns associated with the determined type of parts is identified. A detection system of robot arm(s) of the factory interface is moved according to the identified mapping pattern(s) to detect one or more parts stored by the container. A mapping of the container is determined based on the movement of the robot arm(s). The mapping indicates regions of the container that stores detected parts and a position of each of the detected parts. Based on the mapping, the robot arm(s) either remove a detected part form the container or place an additional part in the container.

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