Method for analyzing an object
    12.
    发明授权

    公开(公告)号:US10415954B2

    公开(公告)日:2019-09-17

    申请号:US16037680

    申请日:2018-07-17

    Abstract: Apparatus and methods are described for determining tomographic and/or topographic data relating to an object. The object is illuminated with at least one wave packet from light generated by a multi-spectral light source. The wave packet is split into two split wave packets, and an optical path difference (OPD) is introduced between the two split wave packets, that is smaller than the coherence length of the wave packet. The two split wave packets are combined to generate a 2D image of the illuminated object, and the data relating to the object is determined by processing the 2D image using long coherence phase shift interferometry algorithms, by analyzing the 2D image as if the 2D image was generated using monochromatic light having a wavelength that is equal to a mean wavelength of the wave packet. Other applications are also described.

    SYSTEM FOR ANALYZING OPTICAL PROPERTIES OF AN OBJECT

    公开(公告)号:US20170241766A1

    公开(公告)日:2017-08-24

    申请号:US15502147

    申请日:2015-08-07

    Abstract: In a system for analyzing optical properties of an object (350) a point source of light (100) composed of multiple spectral bands each having a respective amplitude, phase and polarization is converted by first optics (120, 150) into a line light source to illuminate an object line on the object. A beam splitter (200) splits the light exiting the first optics and directs a first portion of light on to the object (350) as an illuminated line and a second portion of the light on to a reference mirror (450). Second optics (500) collects respective first and second lines of light reflected by the object and mirror of and collinearly images the reflected lines of light as an image line on to an imaging spectrometer (550) wherein mutual interference allows determination of the optical properties of the object at each point along the object line.

    Apparatus and methods for calibrating optical measurements

    公开(公告)号:US11965777B2

    公开(公告)日:2024-04-23

    申请号:US17276265

    申请日:2019-07-04

    CPC classification number: G01J3/0297 A61B3/0008 A61B3/107 G01J3/45

    Abstract: Apparatus and methods are described for calibrating an optical system that is used for measuring optical properties of a portion of a subjects body. During a calibration stage, a front surface of a calibration object (300) is illuminated, light reflected from a plurality of points on the calibration object (300) is detected, and intensities of the light reflected from the plurality of points on the calibration object (300) are measured. During a measurement stage, the portion of the subjects body is illuminated, and light reflected from the portion of the subjects body is detected. Measurements performed upon the light that was reflected from the portion of the subjects body are calibrated, using the measured intensities of the light reflected from the plurality of points on the calibration object (300). Other applications are also described.

    System for analyzing optical properties of an object

    公开(公告)号:US10330462B2

    公开(公告)日:2019-06-25

    申请号:US16013664

    申请日:2018-06-20

    Abstract: Apparatus and methods are described including a line spectrometer that receives a point of light. The line spectrometer includes a first optical element, and a second optical element configured to convert the point of light to a line of light and to direct the line of light toward the first optical element. The first optical element defines first and second surfaces, a distance between the first and second surface varying as a function of distance along the first optical element, the first optical element thereby being configured to generate first and second reflected lines of light that reflect respectively from the first and second surfaces. A detector array receives the first and second lines of light, and generates an interferogram in response thereto. A computer processor determines a spectrum of the point of light, by analyzing the interferogram. Other applications are also described.

    Apparatus and Methods for Performing Tomography and/or Topography Measurements on an Object

    公开(公告)号:US20180340770A1

    公开(公告)日:2018-11-29

    申请号:US16037738

    申请日:2018-07-17

    Abstract: Apparatus and methods are described for determining the tomography and/or topography of an object. A light source generates light, and an optical element generates a 2D pattern from the light and directs the 2D pattern toward the object. An objective lens focuses the 2D pattern at an image plane, and a 2D imager acquires at least one image of the 2D pattern. The image has variable image contrast that varies according to displacement of a surface of the object from the image plane, such that maximal image contrast of the 2D pattern is achieved when the surface of the object and the image plane are coincident. A processing unit, operatively coupled to the 2D imager, derives the object's tomography and/or topography at least partially responsively to the variable image contrast of the image. Other applications are also described.

    Interferometric ellipsometry and method using conical refraction

    公开(公告)号:US10119903B2

    公开(公告)日:2018-11-06

    申请号:US15991197

    申请日:2018-05-29

    Abstract: An apparatus and method for determining optical properties of an object includes a tunable monochromatic light source and an optical system for illuminating at least one point of the object with light from the light source, and collecting light reflected from the object. A biaxial birefringent crystal intercepts a beam of light reflected from the object and propagates the beam along an optical axis of the crystal and transforms the beam of reflected light to a ring of light having a periphery, each point of which has a different polarization plane. A detector array detects respective points along the periphery of the ring and a processing unit is coupled to the detector and is responsive to signals thereby for determining optical properties of the object.

    SYSTEM FOR ANALYZING OPTICAL PROPERTIES OF AN OBJECT

    公开(公告)号:US20180299252A1

    公开(公告)日:2018-10-18

    申请号:US16013664

    申请日:2018-06-20

    Abstract: Apparatus and methods are described including a line spectrometer that receives a point of light. The line spectrometer includes a first optical element, and a second optical element configured to convert the point of light to a line of light and to direct the line of light toward the first optical element. The first optical element defines first and second surfaces, a distance between the first and second surface varying as a function of distance along the first optical element, the first optical element thereby being configured to generate first and second reflected lines of light that reflect respectively from the first and second surfaces. A detector array receives the first and second lines of light, and generates an interferogram in response thereto. A computer processor determines a spectrum of the point of light, by analyzing the interferogram. Other applications are also described.

    Interferometric ellipsometry and method using conical refraction

    公开(公告)号:US10024783B2

    公开(公告)日:2018-07-17

    申请号:US15113161

    申请日:2015-01-22

    Abstract: An apparatus and method for determining optical properties of an object (50) includes a light source (10) and an optical system for illuminating at least one point of the object with light from the light source, and collecting light reflected from the object. A biaxial birefringent crystal (30) intercepts a beam of light reflected from the object and propagates the beam along an optical axis of the crystal and transforms the beam of reflected light to a ring of light having a periphery, each point of which has a different polarization plane. A detector array (40) detects respective points along the periphery of the ring and a processing unit (45) is coupled to the detector and is responsive to signals thereby for determining optical properties of the object.

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