公开(公告)号：US20070105355A1

公开(公告)日：2007-05-10

申请号：US11527594

申请日：2006-09-27

申请人： Adrian Murrell ,  Peter Banks ,  Matthew Dobson ,  Peter Kindersley ,  Takao Sakase ,  Marvin Farley ,  Shu Satoh ,  Geoffrey Ryding

发明人： Adrian Murrell ,  Peter Banks ,  Matthew Dobson ,  Peter Kindersley ,  Takao Sakase ,  Marvin Farley ,  Shu Satoh ,  Geoffrey Ryding

IPC分类号： H01L21/26

CPC分类号： H01J37/3171 ,  H01J37/3023 ,  H01J49/30 ,  H01J2237/20228 ,  H01J2237/20285 ,  H01J2237/2487 ,  H01J2237/30488 ,  H01J2237/31703 ,  H01J2237/31708 ,  H01L21/265 ,  H01L21/67005 ,  H01L21/68714 ,  H01L21/68764 ,  Y10S438/961

摘要： An implanter provides two-dimensional scanning of a substrate relative to an implant beam so that the beam draws a raster of scan lines on the substrate. The beam current is measured at turnaround points off the substrate and the current value is used to control the subsequent fast scan speed so as to compensate for the effect of any variation in beam current on dose uniformity in the slow scan direction. The scanning may produce a raster of non-intersecting uniformly spaced parallel scan lines and the spacing between the lines is selected to ensure appropriate dose uniformity.

公开(公告)号：US07611975B2

公开(公告)日：2009-11-03

申请号：US11527594

申请日：2006-09-27

申请人： Adrian Murrell ,  Peter Michael Banks ,  Matthew Peter Dobson ,  Peter Kindersley ,  Takao Sakase ,  Marvin Farley ,  Shu Satoh ,  Geoffrey Ryding

发明人： Adrian Murrell ,  Peter Michael Banks ,  Matthew Peter Dobson ,  Peter Kindersley ,  Takao Sakase ,  Marvin Farley ,  Shu Satoh ,  Geoffrey Ryding

IPC分类号： H01L21/12 ,  H01L21/20 ,  H01J37/304 ,  H01J37/317

CPC分类号： H01J37/3171 ,  H01J37/3023 ,  H01J49/30 ,  H01J2237/20228 ,  H01J2237/20285 ,  H01J2237/2487 ,  H01J2237/30488 ,  H01J2237/31703 ,  H01J2237/31708 ,  H01L21/265 ,  H01L21/67005 ,  H01L21/68714 ,  H01L21/68764 ,  Y10S438/961

摘要： An implanter provides two-dimensional scanning of a substrate relative to an implant beam so that the beam draws a raster of scan lines on the substrate. The beam current is measured at turnaround points off the substrate and the current value is used to control the subsequent fast scan speed so as to compensate for the effect of any variation in beam current on dose uniformity in the slow scan direction. The scanning may produce a raster of non-intersecting uniformly spaced parallel scan lines and the spacing between the lines is selected to ensure appropriate dose uniformity.

摘要翻译： 注入器提供相对于注入束的衬底的二维扫描，使得光束在衬底上绘制扫描线的光栅。 在离开衬底的周转点处测量束电流，并且使用电流值来控制随后的快速扫描速度，以补偿束电流中任何变化对慢扫描方向上的剂量均匀性的影响。 扫描可以产生不相交的均匀间隔的平行扫描线的光栅，并且选择线之间的间隔以确保适当的剂量均匀性。

公开(公告)号：US20050181584A1

公开(公告)日：2005-08-18

申请号：US11029646

申请日：2005-01-06

申请人： Majeed Foad ,  Bernard Harrison ,  Marvin Farley ,  Peter Kindersley ,  Stephen Wells ,  Geoffrey Ryding ,  Takao Sakase

发明人： Majeed Foad ,  Bernard Harrison ,  Marvin Farley ,  Peter Kindersley ,  Stephen Wells ,  Geoffrey Ryding ,  Takao Sakase

IPC分类号： H01L21/265 ,  G21K5/10 ,  H01J37/302 ,  H01J37/304 ,  H01J37/317 ,  H01L21/425 ,  H01L21/66

CPC分类号： H01J37/3171 ,  H01J37/08 ,  H01J37/3023 ,  H01J37/304 ,  H01J2237/082 ,  H01J2237/20228 ,  H01J2237/2485 ,  H01J2237/30455 ,  H01J2237/30488

摘要： This invention relates to a method of implanting ions in a substrate using an ion beam where instabilities in the ion beam may be present and to an ion implanter for use with such a method. This invention also relates to an ion source for generating an ion beam that can be switched off rapidly. In essence, the invention provides a method of implanting ions comprising switching off the ion beam when an instability has been detected whilst continuing motion of the substrate relative to the ion beam to leave an unimplanted portion of a scan line across the substrate, establishing a stable ion beam once more and finishing the scan line by implanting the unimplanted portion of the path.

摘要翻译： 本发明涉及一种使用其中离子束可能存在不稳定性的离子束和用于这种方法的离子注入机在衬底中注入离子的方法。 本发明还涉及用于产生能够快速切断的离子束的离子源。 实质上，本发明提供了一种注入离子的方法，包括在检测到不稳定性时切断离子束，同时衬底相对于离子束的持续运动，留下穿过衬底的扫描线的未被注入的部分，建立稳定的 离子束再次通过植入路径的未被注入的部分来完成扫描线。

公开(公告)号：US06525327B1

公开(公告)日：2003-02-25

申请号：US09686803

申请日：2000-10-12

申请人： Robert John Clifford Mitchell ,  Michael T. Wauk ,  John Ruffell ,  Hilton Glavish ,  Peter Kindersley

发明人： Robert John Clifford Mitchell ,  Michael T. Wauk ,  John Ruffell ,  Hilton Glavish ,  Peter Kindersley

IPC分类号： H01J37304

CPC分类号： H01J37/244 ,  H01J37/3171 ,  H01J2237/24405

摘要： A beam stop (23) has a charge collecting member (40) which extends in the direction of scanning of a scanned beam by less than the total distance scanned, so that variation in the charge signal derived from the collecting member can provide a timing signal for use in monitoring alignment of the scanned beam. In a preferred embodiment, the beam stop plate (42) has slits (65-69) leading to apertures (60-64) containing charge collecting rods (73-75) located within the thickness of the beam stop plate (42).

摘要翻译： 光束停止器（23）具有电荷收集构件（40），该电荷收集构件（40）沿着扫描的扫描方向延伸小于扫描的总距离，从而从收集构件得到的电荷信号的变化可以提供定时信号 用于监视扫描光束的对准。 在优选实施例中，光束挡板（42）具有通向位于光束挡板（42）的厚度内的电荷收集棒（73-75）的孔（60-64）的狭缝（65-69）。

公开(公告)号：US07607640B2

公开(公告)日：2009-10-27

申请号：US11260457

申请日：2005-10-28

申请人： Peter Kindersley

发明人： Peter Kindersley

IPC分类号： F16K31/44

CPC分类号： F16K31/465 ,  Y10T74/1884

摘要： A rotary valve actuator that effects rotary movement of a rotary valve includes a heavy plate member coupled with a linear motive source, which reciprocates the plate member between a first position and a second position. A first pair of flexible pull connectors, such as lengths of roller chain, are attached to the end of the plate member, and wrap around a wheel. At least one second flexible pull connector is disposed between said first flexible pull connectors and is attached to the other end of the plate member, and wraps around the wheel in the opposite direction of winding as for the first flexible connector.

摘要翻译： 实现旋转阀的旋转移动的旋转阀致动器包括与线性动力源联接的厚板构件，其使板构件在第一位置和第二位置之间往复运动。 第一对柔性牵引连接器（例如滚子链的长度）附接到板构件的端部并且缠绕在车轮上。 至少一个第二柔性拉动连接器设置在所述第一柔性拉动连接器之间并且附接到所述板构件的另一端，并且沿与所述第一柔性连接器相反的缠绕方向卷绕在所述轮上。

公开(公告)号：US5947157A

公开(公告)日：1999-09-07

申请号：US570631

申请日：1995-12-11

申请人： Peter Kindersley

发明人： Peter Kindersley

IPC分类号： F16K5/06 ,  F15D1/02

CPC分类号： F16K5/0605 ,  F16K5/0642

摘要： A throttling element, and throttling device utilizing the throttle element, provide absolute minimum possible resistance when in the fully opened position yet easily and effectively throttles the flow, so as to introduce a variable pressure drop, upon rotation utilizing conventional actuators. The device cannot be closed off completely, and it is possible to produce it in the same cost range as for butterfly valves yet having significant advantages thereover. The throttling element includes an annular metal substantially spherical segment having an exterior arcuate extent of about 80.degree. or less (e.g. about 60-70.degree.) with first and second elongated metal shaft stubs extending radially outwardly from the exterior of the annular substantially spherical segment, on opposite of the segment the dimension of elongation of the shaft stubs. The element may be mounted in a housing having an interior bore with a first diameter, the throttling element itself having an interior bore with a second diameter substantially the same as the first diameter so that minimum resistance to flow is provided in a fully open position. The width of the exterior extension of the throttling element is between about 50%-70% of the first diameter with the first width and second diameter mentioned so that the throttling element cannot preclude or substantially preclude fluid flow through the housing interior bore regardless of what position the throttling element is rotated to. The housing may be two piece only slightly wider than the throttling element.

摘要翻译： 使用节流元件的节流元件和节流装置在完全打开位置时提供绝对最小可能的阻力，同时容易且有效地节流流动，从而在利用常规致动器旋转时引入可变的压降。 该装置不能完全关闭，并且可以在与蝶阀相同的成本范围内生产，但在其上具有显着优点。 节流元件包括具有约80°或更小（例如约60-70°）的外部弧形范围的环形金属基本上球形的段，其中第一和第二细长金属轴短柱从环形大致球形段的外部径向向外延伸， 在分段的相反侧，轴桩的伸长尺寸。 元件可以安装在具有第一直径的内孔的壳体中，节流元件本身具有内孔，第二直径基本上与第一直径相同，使得在完全打开位置提供最小阻力。 节流元件的外部延伸部的宽度在第一直径的约50％-70％之间，其中提到第一宽度和第二直径，使得节流元件不能排除或基本上阻止流体流过壳体内部孔而不管什么 将节流元件旋转到位置。 壳体可以是比节流元件略宽的两个部件。

公开(公告)号：US5876568A

公开(公告)日：1999-03-02

申请号：US899609

申请日：1997-07-24

申请人： Peter Kindersley

发明人： Peter Kindersley

IPC分类号： C10B25/10 ,  C10B33/00 ,  C10B25/00 ,  B65B7/00

CPC分类号： C10B33/00 ,  C10B25/10 ,  Y10S220/916 ,  Y10T29/49822 ,  Y10T292/205

摘要： In a coke drum an outlet arrangement is provided which allows removal of the coke from the drum without endangering the health or safety of workers heading or unheading the coke drum. Instead of using a manually removable bottom flange for the drum, a semiautomatic bottom flange removal system is provided. A spool is attached to the conventional, pre-existing, about 6 feet in diameter drum stationary bottom flange. The spool includes a tapered clamping surface. A new style removable bottom flange also includes a tapered clamping surface. The tapered clamping surfaces cooperate with clamp ring sectors movable by externally mounted hydraulic cylinders into contact with the spool and the flange, and other hydraulic cylinders mounted directly on the ring sectors move male locking surfaces into locking engagement with cooperating female locking surfaces formed on adjacent clamp ring sectors.

公开(公告)号：US20060097212A1

公开(公告)日：2006-05-11

申请号：US11260457

申请日：2005-10-28

申请人： Peter Kindersley

发明人： Peter Kindersley

IPC分类号： F16K31/44

CPC分类号： F16K31/465 ,  Y10T74/1884

摘要： A rotary valve actuator that effects rotary movement of a rotary valve from 0 to 90°, or to 120°, or to 180°, or even more. The actuator includes a heavy plate member coupled with a linear motive source, which reciprocates the plate member between a first position and a second position. First and second coaxial wheels are fastened together on a single shaft and are rotatably supported tangent to one side of the plate member. A first flexible pull connector, such as a length of roller chain, is attached to the end of the plate member farthest from the linear motive source, and wraps around the first wheel. A second flexible pull connector is attached to the end of the plate member closest to the linear motive source, and wraps around the second wheel, in the opposite direction of winding as for the first flexible connector. When the linear motive source drives the plate member toward a second position, the first flexible pull connector unwraps from around the first wheel, driving the wheel in a first angular direction. When the linear motive force drives the plate member back towards the first position, the second flexible member unwraps from around the second wheel, driving the second wheel in an angular direction, opposite from the first direction. The shaft is rotated when the wheels rotate, and it may be connected to a rotary valve shaft. The actuator may be provided with a tensioning assembly secured to the plate member and cooperating with one of the pull connectors, thereby maintaining a tension force in all the pull connectors.

摘要翻译： 旋转阀致动器，其将旋转阀的旋转运动从0°旋转至90°，或120°，或180°，甚至更高。 致动器包括与线性动力源联接的厚板构件，其使板构件在第一位置和第二位置之间往复运动。 第一和第二同轴轮在单个轴上紧固在一起，并且可旋转地支撑在板构件的一侧上。 第一柔性拉动连接器，例如一长度的滚子链，连接到距离线性动力源最远的板构件的端部，并且围绕第一轮包裹。 第二柔性拉动连接器附接到最靠近线性动力源的板构件的端部，并且沿与第一柔性连接器相反的缠绕方向围绕第二轮包裹。 当线性动力源将板构件朝向第二位置驱动时，第一柔性拉动连接器从第一轮周围展开，在第一角度方向驱动车轮。 当线性动力将板状构件朝向第一位置驱动时，第二柔性构件从第二轮的周围展开，沿与第一方向相反的角度方向驱动第二轮。 当车轮旋转时，轴旋转，并且它可以连接到旋转阀轴。 致动器可以设置有固定到板构件的张紧组件并且与一个拉连接器配合，从而在所有拉连接器中保持张力。

公开(公告)号：US6066237A

公开(公告)日：2000-05-23

申请号：US195043

申请日：1998-11-19

申请人： Peter Kindersley

发明人： Peter Kindersley

IPC分类号： C10B25/10 ,  C10B33/00 ,  C10B1/00 ,  C10B1/06 ,  C10B25/00 ,  C10B25/06 ,  C10G9/04 ,  C10J3/00 ,  E06B3/32 ,  E06B7/16

CPC分类号： C10B33/00 ,  C10B25/10 ,  Y10S220/916 ,  Y10T29/49822

摘要： In a coke drum an outlet arrangement is provided which allows removal of the coke from the drum without endangering the health or safety of workers heading or unheading the coke drum. Instead of using a manually removable bottom flange for the drum, a semiautomatic bottom flange removal system is provided. A spool is attached to the conventional, pre-existing, about 6 feet in diameter drum stationary bottom flange. The spool includes a tapered clamping surface. A new style removable bottom flange also includes a tapered clamping surface. The tapered clamping surfaces cooperate with clamp ring sectors movable by externally mounted hydraulic cylinders into contact with the spool and the flange, and other hydraulic cylinders mounted directly on the ring sectors move male locking surfaces into locking engagement with cooperating female locking surfaces formed on adjacent clamp ring sectors.

摘要翻译： 在焦炭鼓中，提供出口装置，其允许将焦炭从滚筒中取出，而不危及作业人员朝向或不使焦炭焦炭滚筒的健康或安全。 代替使用用于滚筒的可手动移除的底部凸缘，提供半自动底部凸缘移除系统。 一个线轴连接到常规的，预先存在的，直径约6英尺的鼓固定底部法兰。 阀芯包括锥形夹紧表面。 新型可拆卸底部法兰还包括锥形夹紧表面。 锥形夹紧表面与由外部安装的液压缸可移动的夹紧环区段与阀芯和法兰接触，并且直接安装在环形部分上的其他液压缸将凸形锁定表面与形成在相邻夹具上的协作母锁定表面锁定接合 环行业。