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公开(公告)号：US07293950B2
公开(公告)日：2007-11-13
申请号：US10234640
申请日：2002-09-03
IPC分类号： B65G54/02
CPC分类号： H01L21/67778 , H01L21/67766 , H01L21/67775 , H01L21/68707 , Y10S414/139
摘要： The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolated from the atmospheric conditions of the surrounding wafer fabrication facility. Thus, an individual wafer may be transported throughout the wafer fabrication facility without having to maintain a clean room environment for the entire facility. The wafer shuttle may be propelled by various technologies, such as, but not limited to, magnetic levitation or air bearings. The wafer shuttle may also transport more than one wafer simultaneously. The interior of the transport enclosure may also be under vacuum, gas-filled, or subject to filtered air.
摘要翻译： 本发明是一种晶片传送系统，其在隔离环境中的室之间输送各个晶片。 在一个实施例中，晶片由在运输箱内传播的晶片梭运送。 运输箱的内部与周围的晶片制造设备的大气条件隔离。 因此，单个晶片可以在整个晶片制造设备中运输，而不必为整个设备保持洁净室环境。 晶片梭可以通过各种技术来推动，例如但不限于磁悬浮或空气轴承。 晶片梭可能同时传送多于一个晶片。 运输箱的内部也可以在真空下，充满气体，或经过过滤的空气。
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公开(公告)号：US06533101B2
公开(公告)日：2003-03-18
申请号：US10123850
申请日：2002-04-16
IPC分类号： B65G3700
CPC分类号： H01L21/67706 , B65G13/04 , B65G37/02 , H01L21/67727 , H01L21/6773 , Y10S414/14
摘要： A system for transporting articles. The transport system includes a conveyor system which includes a transport carrier for carrying one or more articles between workstations and a drive rail and a support rail for supporting the transport carrier. The drive rail includes a drive system for propelling the transport carrier between workstations. At least one shoe carried by the transport carrier rides on the support rail for movably supporting the transport carrier on the support rail. The transport system may also includes a protective container including a housing having an interior compartment for supporting one or more articles. The bottom surface of the housing is configured to engage the drive system such that actuation of the drive system propels the housing along the drive and support rails. At least one shoe carried by the housing is configured to ride on the support rail of the conveyor system to movably support the housing on the support rail. The transport system also includes the method of transporting articles including the steps of providing a transport carrier for holding at least one article and having at least one shoe, positioning the transport carrier with the base of the carrier supported on a drive rail and the shoe supported on a support rail, and actuating a drive system carried by the drive rail to propel the transport carrier along the drive rail and support rail.
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公开(公告)号：US06435330B1
公开(公告)日：2002-08-20
申请号：US09467103
申请日：1999-12-10
IPC分类号： B65G3700
CPC分类号： H01L21/67775 , H01L21/67706 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67763 , H01L21/67766 , H01L21/67769
摘要： A transfer system for moving one or more articles between a conveyor and a station. The system includes a transfer assembly having a lifting mechanism configured to engage the article as it is carried by the conveyor, lift the article to a raised position above the support and lower the article from the raised position to the conveyor. The assembly also includes a displacement device configured to move the article from the raised position to a station, position the article at the station, and return the article from the station to the raised position above the conveyor. The system also includes the method of transferring an article between a conveyor having a pair of spaced rails and a station positioned to one side of the conveyor. The method includes engaging the underside of the article between the rails and lifting the article to a raised position and moving the article in a direction perpendicular to the conveyor between the raised position and a position vicinal the station.
摘要翻译： 一种用于在输送机和工位之间移动一个或多个物品的转运系统。 该系统包括具有提升机构的传送组件，所述提升机构构造成当物品被输送机承载时接合物品，将物品提升到支撑件上方的升高位置，并将物品从升起位置降低到输送机。 该组件还包括移动装置，该移动装置构造成将制品从升高位置移动到工位，将制品定位在工位，并将制品从工位返回到输送机上方的升高位置。 该系统还包括在具有一对间隔开的轨道的输送机和定位在输送机一侧的工位之间输送物品的方法。 该方法包括将物品的下侧接合在轨道之间并将物品提升到升高位置，并且使物品沿垂直于输送机的方向在升高位置和位置之间移动。
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公开(公告)号：US07648327B2
公开(公告)日：2010-01-19
申请号：US11305256
申请日：2005-12-16
IPC分类号： B65G49/07
CPC分类号： H01L21/67778 , H01L21/67766 , H01L21/67775 , H01L21/68707 , Y10S414/137
摘要： The present invention is a wafer engine for transporting wafers. The wafer engine includes a linear drive for moving the wafer along an x axis, a rotational drive for rotating the wafer about a theta axis, a linear drive for moving the wafer along a z axis, and a linear drive for moving the wafer along a radial axis. The linear drive for moving the wafer along a z axis is offset from the rotational drive. When the rotational drive rotates about the theta axis, both the z axis and radial axis drives are also rotated about the theta axis. Preferably, the linear drive for moving the wafer along a radial axis is a dual or rapid swap slide body mechanism having an upper and lower end effector. The slide body mechanism preferably also has means to align the wafer and perform various inspection and marking procedures.
摘要翻译： 本发明是用于输送晶片的晶片引擎。 晶片引擎包括用于沿x轴移动晶片的线性驱动器，用于使晶片围绕θ轴旋转的旋转驱动器，用于沿着z轴移动晶片的线性驱动器和用于沿着径向移动晶片的线性驱动器 轴。 用于沿着z轴移动晶片的线性驱动器偏离旋转驱动。 当旋转驱动器围绕θ轴旋转时，z轴和径向轴驱动器也绕θ轴旋转。 优选地，用于沿着径向轴线移动晶片的线性驱动器是具有上端和下端执行器的双重或快速互换滑动体机构。 滑动体机构优选地还具有对准晶片并执行各种检查和标记程序的装置。
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公开(公告)号：US07217076B2
公开(公告)日：2007-05-15
申请号：US10087092
申请日：2002-03-01
IPC分类号： B65G49/07
CPC分类号： H01L21/67775 , H01L21/67766 , H01L21/67778 , H01L21/68707 , Y10S414/139
摘要： The semiconductor material handling system is an EFEM that may either mount to the front end of a processing tool or be integrated into the processing tool. The EFEM is built from a unified frame that the EFEM components, such as a wafer engine and a SMIF pod advance plate, may mount to. The frame serves as a common mounting structure that the EFEM components may use as a reference for alignment purposes. Since the EFEM components do not have to align with respect to the position of each other, the calibration, if any is required, is greatly simplified. The EFEM also has a reduced footprint, allowing the EFEM to mount to the front end of a processing tool and not extend to the fab floor. Thus, space is freed up between the EFEM and the fab floor. By way of example only, this space may be used as a maintenance access area to the processing tool without having to first remove the EFEM.
摘要翻译： 半导体材料处理系统是可以安装到处理工具的前端或被集成到处理工具中的EFEM。 EFEM由统一的框架构成，EFEM组件（如晶片引擎和SMIF盒前进板）可以安装到。 该框架用作通用安装结构，EFEM组件可用作对准目的的参考。 由于EFEM组件不必相对于彼此的位置对准，所以校准（如果需要）被大大简化。 EFEM还具有减少的占地面积，允许EFEM安装到加工工具的前端，而不是延伸到fab楼层。 因此，在EFEM和fab楼之间释放空间。 仅作为示例，该空间可以用作处理工具的维护访问区域，而不必首先去除EFEM。
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公开(公告)号：US08851820B2
公开(公告)日：2014-10-07
申请号：US12780761
申请日：2010-05-14
IPC分类号： B65G1/12 , H01L21/677
CPC分类号： H01L21/6773 , H01L21/67769 , Y10S414/14
摘要： A storage system and methods for operating a storage system are disclosed. The storage system includes a storage system assembly positioned at a height that is greater than a height of a tool used for loading and unloading substrates to be processed. The storage system locally stores one or more containers of substrates. The storage system assembly includes a plurality of storage shelves, and each of the plurality of storage shelves have shelf plates with shelf features for supporting a container. Each of the plurality of storage shelves are coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain, such that each of the plurality of storage shelves move together along the rail to the one or more positions. The rail has at least some sections that are linear and some sections that are nonlinear and the sections are arranged in a loop.
摘要翻译： 公开了一种用于操作存储系统的存储系统和方法。 存储系统包括存储系统组件，该存储系统组件位于高于用于装载和卸载待处理衬底的工具的高度的高度。 存储系统本地存储一个或多个基板容器。 存储系统组件包括多个存放架，并且多个存放架中的每一个具有用于支撑容器的具有搁板特征的搁板。 多个存放架中的每一个都联接到链条以使得能够进行水平移动，并且每个存储架都进一步联接到轨道以使得能够引导到一个或多个位置。 电动机联接到用于移动链条的驱动链轮，使得多个存放架中的每一个沿着轨道一起移动到一个或多个位置。 轨道具有至少一些是线性的部分，并且一些部分是非线性的，并且这些部分被布置成循环。
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公开(公告)号：US08851817B2
公开(公告)日：2014-10-07
申请号：US12943198
申请日：2010-11-10
IPC分类号： H01L21/677 , H01L21/687
CPC分类号： H01L21/67778 , H01L21/67766 , H01L21/67775 , H01L21/68707 , Y10S414/139
摘要： The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolated from the atmospheric conditions of the surrounding wafer fabrication facility. Thus, an individual wafer may be transported throughout the wafer fabrication facility without having to maintain a clean room environment for the entire facility. The wafer shuttle may be propelled by various technologies, such as, but not limited to, magnetic levitation or air bearings. The wafer shuttle may also transport more than one wafer simultaneously. The interior of the transport enclosure may also be under vacuum, gas-filled, or subject to filtered air.
摘要翻译： 本发明是一种晶片传送系统，其在隔离环境中的室之间输送各个晶片。 在一个实施例中，晶片由在运输箱内传播的晶片梭运送。 运输箱的内部与周围的晶片制造设备的大气条件隔离。 因此，单个晶片可以在整个晶片制造设备中运输，而不必为整个设备保持洁净室环境。 晶片梭可以通过各种技术来推动，例如但不限于磁悬浮或空气轴承。 晶片梭可能同时传送多于一个晶片。 运输箱的内部也可以在真空下，充满气体，或经过过滤的空气。
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公开(公告)号：US20100290872A1
公开(公告)日：2010-11-18
申请号：US12780761
申请日：2010-05-14
IPC分类号： B65G1/133 , B65G1/00 , B65G1/06 , H01L21/673 , H01L21/677
CPC分类号： H01L21/6773 , H01L21/67769 , Y10S414/14
摘要： A storage system and methods for operating a storage system are disclosed. The storage system includes a storage system assembly positioned at a height that is greater than a height of a tool used for loading and unloading substrates to be processed. The storage system locally stores one or more containers of substrates. The storage system assembly includes a plurality of storage shelves, and each of the plurality of storage shelves have shelf plates with shelf features for supporting a container. Each of the plurality of storage shelves are coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain, such that each of the plurality of storage shelves move together along the rail to the one or more positions. The rail has at least some sections that are linear and some sections that are nonlinear and the sections are arranged in a loop.
摘要翻译： 公开了一种用于操作存储系统的存储系统和方法。 存储系统包括存储系统组件，该存储系统组件位于高于用于装载和卸载待处理衬底的工具的高度的高度。 存储系统本地存储一个或多个基板容器。 存储系统组件包括多个存放架，并且多个存放架中的每一个具有用于支撑容器的具有搁板特征的搁板。 多个存放架中的每一个都联接到链条以实现水平移动，并且每个存储架都进一步联接到轨道以使得能够引导到一个或多个位置。 电动机联接到用于移动链条的驱动链轮，使得多个存放架中的每一个沿着轨道一起移动到一个或多个位置。 轨道具有至少一些是线性的部分，并且一些部分是非线性的，并且这些部分被布置成循环。
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公开(公告)号：US06308818B1
公开(公告)日：2001-10-30
申请号：US09365457
申请日：1999-08-02
IPC分类号： B65G3700
CPC分类号： H01L21/67706 , B65G19/02 , B65G35/06 , B65G37/02 , B65G2201/0297 , H01L21/67715 , H01L21/67727 , H01L21/6773
摘要： A director assembly for selectively directing a transport carrier from one conveyor path portion to another. The director assembly having a pair of spaced director rails positioned below and in between drive and support rails of the conveyor. The pair of spaced director rails can be selectively raised and rotated and then lowered to direct the carrier to the new path portion.
摘要翻译： 用于选择性地将运输工具从一个输送机路径部分引导到另一个的导向器组件。 导向器组件具有位于输送机的驱动和支撑轨道下方并位于输送机的支撑轨道之间的一对间隔的导轨。 一对间隔的导轨可以选择性地升高和旋转，然后降低以将载体引导到新的路径部分。
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公开(公告)号：US06223886B1
公开(公告)日：2001-05-01
申请号：US09103479
申请日：1998-06-24
IPC分类号： B65G2500
CPC分类号： H01L21/67706 , B65G13/04 , B65G37/02 , H01L21/67727 , H01L21/6773 , Y10S414/14
摘要： A system for transporting articles. The transport system includes a conveyor system which includes a transport device for carrying articles between workstations and a drive rail and a support rail for supporting the transport device. The drive rail includes a drive system for propelling the transport device between workstations. At least one shoe carried by the transport device rides on the support rail for movably supporting the transport device on the support rail. The transport system also includes a protective container including a housing having an interior compartment for supporting a plurality of articles. The bottom surface of the housing is configured to engage the drive system such that actuation of the drive system propels the housing along the drive and support rails. At least one shoe carried by the housing is configured to ride on the support rail of the conveyor system to movably support the housing on the support rail. The transport system also includes the method of transporting articles including the steps of providing a transport device for holding at least one article and having at least one shoe, positioning the transport device with the base of the device supported on a drive rail and the shoe supported on a support rail, and actuating a drive system carried by the drive rail to propel the transport device along the drive rail and support rail.
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