公开(公告)号：US08497759B2

公开(公告)日：2013-07-30

申请号：US12731427

申请日：2010-03-25

申请人： Alexander Ned ,  Vikram Patil ,  Joseph VanDeWeert ,  Nora Kurtz

发明人： Anthony D. Kurtz ,  Alexander Ned ,  Vikram Patil ,  Joseph VanDeWeert

IPC分类号： H01C3/04

CPC分类号： G01K7/183

摘要： The RTD device of the present invention is comprised of a semiconductor substrate and a substantially thin conductive metal layer disposed upon the semiconductor substrate, wherein the conductive metal has a substantially linear temperature-resistance relationship. The conductive layer is etched into a convoluted RTD pattern, which consequently increases the overall resistance and minimizes the overall mass of the RTD assembly. A contact glass cover and a conductive metal-glass frit are placed over the RTD assembly to hermetically seal the RTD. The resultant structure can be “upside-down” mounted onto a header or a flat shim so that the bottom surface of the semiconductor substrate is exposed to the external environment, thus shielding the RTD from external forces. The resultant structure is a low mass, highly conductive, leadless, and hermetically sealed RTD that accurately measures the temperature of liquids and gases and maintains fast response time in high temperatures and harsh environments.

摘要翻译： 本发明的RTD器件包括半导体衬底和设置在半导体衬底上的基本上薄的导电金属层，其中导电金属具有基本上线性的耐温性关系。 导电层被蚀刻成卷积的RTD图案，因此增加了整体电阻并使RTD组件的整体质量最小化。 将接触玻璃盖和导电金属玻璃料放置在RTD组件上以气密地密封RTD。 所得到的结构可以“倒置”安装在集管或平面垫片上，使得半导体衬底的底表面暴露于外部环境，从而屏蔽RTD免受外力的影响。 所得结构是低质量，高导电性，无引线和密封的RTD，可精确测量液体和气体的温度，并在高温和恶劣环境中保持快速响应时间。

公开(公告)号：US06210989B1

公开(公告)日：2001-04-03

申请号：US09398969

申请日：1999-09-17

申请人： Anthony D. Kurtz ,  Alexander Ned ,  Scott J. Goodman

发明人： Anthony D. Kurtz ,  Alexander Ned ,  Scott J. Goodman

IPC分类号： H01L2720

CPC分类号： G01L9/0055 ,  G01L19/0084

摘要： There is disclosed a semiconductor sensor device comprising a semiconductor diaphragm member having a top surface coated with an oxide layer; P+ sensor elements fusion bonded to the oxide layer at a relatively central area of the diaphragm; P+ finger elements fusion bonded to the oxide layer extending from the sensors to an outer contact location of the diaphragm for each finger; and an external rim of P+ material fusion bonded to the oxide layer and surrounding the sensors and fingers. A first glass wafer member is electrostatically bonded at a bottom surface to the fingers and rim to hermetically seal the sensors and fingers of the diaphragm member. The first glass wafer includes a depression above the sensors and has a plurality of apertures, where each aperture is associated with a separate finger at the contact location and each aperture being smaller than the associated finger lining up with the contact location wherein each contact location can be accessed via the associated aperture in the first glass wafer member. A second glass wafer member is sealingly coupled to a top surface of the first glass wafer and has a plurality of apertures aligned with the plurality of apertures of the first glass wafer member and containing a group of hermetically sealed pins for coupling to the contact locations.

摘要翻译： 公开了一种半导体传感器装置，其包括具有涂覆有氧化物层的顶表面的半导体隔膜部件; P +传感器元件在隔膜的相对中心区域处熔合到氧化物层; P +手指元件融合到从传感器延伸到每个手指的隔膜的外部接触位置的氧化物层; 并且P +材料的外缘融合到氧化物层并且围绕传感器和手指。 第一玻璃晶片构件在底面处与手指和边缘静电结合，以气密地密封隔膜构件的传感器和手指。 第一玻璃晶片包括在传感器上方的凹陷部，并且具有多个孔，其中每个孔与接触位置处的单独手指相关联，并且每个孔小于相关联的手指与接触位置对齐，其中每个接触位置可以 通过第一玻璃晶片构件中的相关孔径进入。 第二玻璃晶片构件密封地联接到第一玻璃晶片的顶表面，并且具有与第一玻璃晶片构件的多个孔对准的多个孔，并且包含一组用于联接到接触位置的密封销。

公开(公告)号：US5891751A

公开(公告)日：1999-04-06

申请号：US711078

申请日：1996-09-09

申请人： Anthony D. Kurtz ,  Alexander Ned

发明人： Anthony D. Kurtz ,  Alexander Ned

IPC分类号： B81B7/00 ,  G01L9/00 ,  H01L21/465

CPC分类号： B81B7/0077 ,  G01L9/0055 ,  Y10S148/012 ,  Y10T29/42

摘要： A reduced size, hermetically sealed semiconductor transducer and methods for fabricating the same. In a preferred embodiment, the transducer comprises a transducer wafer including a diaphragm which deflects upon the application of a force thereto. At least one semiconductor transducer element and one electrical contact are disposed on a top surface of the transducer wafer, with the electrical contact coupled to the semiconductor element and extending to a peripheral portion of the wafer. A cover member is provided that is dimensioned to surround the semiconductor element. A peripheral glass frit bond is formed between the cover member and the transducer wafer, and between the cover member and at least a portion of the electrical contact. An aperture is formed in a top portion of the cover member, positioned above a region bounded by the peripheral glass bond. This aperture functions to prevent air gap formation in the peripheral glass frit bond. A sealing member hermetically seals the aperture, whereby a vacuum is maintained between the transducer element and the cover member, the transducer element thereby being hermetically sealed from the external environment, while at least a portion of the electrical contact remains exposed to enable subsequent wire bonding thereto.

摘要翻译： 尺寸减小，密封的半导体换能器及其制造方法。 在优选实施例中，换能器包括换能器晶片，其包括在施加力时偏转的隔膜。 至少一个半导体换能器元件和一个电触点设置在换能器晶片的顶表面上，其中电触点耦合到半导体元件并延伸到晶片的周边部分。 设置有围绕半导体元件的盖构件。 在盖构件和换能器晶片之间以及在盖构件和至少一部分电接触件之间形成周边玻璃料接合。 在盖构件的顶部形成有孔，位于由周边玻璃接合界定的区域的上方。 该孔用于防止外围玻璃料接合中的气隙形成。 密封构件气密地密封孔，由此在换能器元件和盖构件之间保持真空，因此换能器元件与外部环境气密密封，同时电触点的至少一部分保持暴露以使得能够接下来的引线键合 到此。

公开(公告)号：US08631707B2

公开(公告)日：2014-01-21

申请号：US12751482

申请日：2010-03-31

申请人： Anthony D. Kurtz ,  Alexander Ned ,  Sorin Stefanescu ,  Nora Kurtz

发明人： Anthony D. Kurtz ,  Alexander Ned ,  Sorin Stefanescu ,  Nora Kurtz

IPC分类号： G01L9/10 ,  G01L15/00 ,  G01L7/08

CPC分类号： G01L9/0055 ,  G01L13/025 ,  G01L15/00 ,  G01L19/04 ,  Y10T29/49002

摘要： A dual diaphragm pressure transducer, or sensor, with compensation for non-pressure effects is disclosed. The pressure sensor can include two pressure transducers located on separate portions of a chip. The first pressure transducer can be a differential pressure transducer, which produces a signal proportional to one or more applied pressures and includes other non-pressure effects. The second pressure transducer can be sealed in a hermetic chamber and thus can produce a signal proportional only to non-pressure effects. The signals can be combined to produce a signal proportional to the applied pressures with no non-pressure effects. The first and second pressure transducers can be physically and/or electrically isolated to improve sealing between the two pressure transducers and prevent pressure leaks therebetween.

摘要翻译： 公开了一种具有非压力效应补偿的双隔膜压力传感器或传感器。 压力传感器可以包括位于芯片的分开部分上的两个压力传感器。 第一压力传感器可以是差压传感器，其产生与一个或多个施加压力成比例的信号，并且包括其它非压力效应。 第二压力传感器可以密封在密封室中，因此可以产生仅与非压力效应成比例的信号。 信号可以组合以产生与所施加的压力成比例的信号，而没有非压力效应。 第一和第二压力传感器可以物理和/或电隔离以改善两个压力传感器之间的密封并防止它们之间的压力泄漏。

公开(公告)号：US08497757B2

公开(公告)日：2013-07-30

申请号：US12686990

申请日：2010-01-13

申请人： Anthony D. Kurtz ,  Alexander Ned

发明人： Anthony D. Kurtz ,  Alexander Ned

IPC分类号： G01L1/22

CPC分类号： G01L1/18 ,  C03C27/044 ,  G01L1/2287 ,  G01L9/0042 ,  G01L9/0054 ,  G01L19/0069 ,  G01L19/0084 ,  Y10T156/10

摘要： A piezoresistive sensor device and a method for making a piezoresistive device are disclosed. The sensor device comprises a silicon wafer having piezoresistive elements and contacts in electrical communication with the elements. The sensor device further comprises a contact glass coupled to the silicon wafer and having apertures aligned with the contacts. The sensor device also comprises a non-conductive frit for mounting the contact glass to a header glass, and a conductive non-lead glass frit disposed in the apertures and in electrical communication with the contacts. The method for making a piezoresistive sensor device, comprises bonding a contact glass to a silicon wafer such that apertures in the glass line up with contacts on the wafer, and filling the apertures with a non-lead glass frit such that the frit is in electrical communication with the contacts. The use of a lead free glass frit prevents catastrophic failure of the piezoresistive sensor and associated transducer in ultra high temperature applications.

摘要翻译： 公开了压阻传感器装置和制造压阻器件的方法。 传感器装置包括具有压阻元件和与元件电连通的触点的硅晶片。 所述传感器装置还包括接触玻璃，所述接触玻璃联接到所述硅晶片并且具有与所述触点对准的孔。 传感器装置还包括用于将接触玻璃安装到集管玻璃的非导电玻璃料，以及设置在孔中并与触头电连通的导电非铅玻璃料。 用于制造压阻传感器装置的方法包括将接触玻璃接合到硅晶片，使得玻璃中的孔与晶片上的触点对齐，并用非铅玻璃料填充孔，使得玻璃料处于电 与联系人沟通。 使用无铅玻璃料防止压敏传感器和相关传感器在超高温应用中的灾难性故障。

公开(公告)号：US20090313797A1

公开(公告)日：2009-12-24

申请号：US12288363

申请日：2008-10-20

申请人： Anthony D. Kurtz ,  Alexander Ned ,  Scott Goodman

发明人： Anthony D. Kurtz ,  Alexander Ned ,  Scott Goodman

IPC分类号： H01L21/00

CPC分类号： G01L19/0084 ,  Y10T29/41

摘要： There is disclosed a method and apparatus for mounting a leadless semiconductor chip on a header. The semiconductor chip has contacts on a surface and the chip is of a specified geometric shape. The header has a contact surface for receiving the chip with the contact surface of the header containing header contact pins, which pins have to contact the contacts on the semiconductor chip. The header has a guide pin extending from the contact surface and there is a guide plate which has an aperture adapted to be placed over the guide pin, the guide plate further has a chip accommodating aperture of the same geometric shape as the chip. The guide plate, when placed over the guide pin enables the chip to be placed in the chip accommodating aperture so that the contacts of the header pin are properly and accurately aligned with respect to the contacts on the semiconductor chip.

摘要翻译： 公开了一种将无引线半导体芯片安装在集管上的方法和装置。 半导体芯片在表面上具有触点，并且芯片具有指定的几何形状。 集管具有用于接收芯片的接触表面，其中插头的接触表面包含插座接头引脚，该引脚必须与半导体芯片上的触点接触。 集管具有从接触表面延伸的引导销，并且存在具有适于放置在引导销上方的孔的引导板，引导板还具有与芯片相同的几何形状的芯片容纳孔。 引导板当放置在引导销上时，可以将芯片放置在芯片容纳孔中，使得插头引脚的触点相对于半导体芯片上的触点正确且精确地对准。

公开(公告)号：US5973590A

公开(公告)日：1999-10-26

申请号：US41228

申请日：1998-03-12

申请人： Anthony D. Kurtz ,  Alexander Ned ,  Scott J. Goodman

发明人： Anthony D. Kurtz ,  Alexander Ned ,  Scott J. Goodman

IPC分类号： H01C10/10 ,  H01L27/20

CPC分类号： G01L9/0055 ,  G01L19/0084

摘要： A semiconductor sensor device including a semiconductor diaphragm member having a top surface coated with an oxide layer; P+ sensor elements fusion bonded to the oxide layer at a relatively central area of the diaphragm; P+ finger elements fusion bonded to the oxide layer extending from the sensors to an outer contact location of the diaphragm for each finger; and an external rim of P+ material fusion bonded to the oxide layer and surrounding the sensors and fingers. A first glass wafer member is electrostatically bonded at a bottom surface to the fingers and rim to hermetically seal the sensors and fingers of the diaphragm member. The first glass wafer includes a depression above the sensors and has a plurality of apertures, where each aperture is associated with a separate finger at the contact location and each aperture being smaller than the associated finger lining up with the contact location wherein each contact location can be accessed via the associated aperture in the first glass wafer member. A second glass wafer member is sealingly coupled to a top surface of the first glass wafer and has a plurality of apertures aligned with the plurality of apertures of the first glass wafer member and containing a group of hermetically sealed pins for coupling to the contact locations.

摘要翻译： 一种半导体传感器装置，包括具有涂覆有氧化物层的顶表面的半导体隔膜部件; P +传感器元件在隔膜的相对中心区域处熔合到氧化物层; P +手指元件融合到从传感器延伸到每个手指的隔膜的外部接触位置的氧化物层; 并且P +材料的外缘融合到氧化物层并且围绕传感器和手指。 第一玻璃晶片构件在底面处与手指和边缘静电结合，以气密地密封隔膜构件的传感器和手指。 第一玻璃晶片包括在传感器上方的凹陷部，并且具有多个孔，其中每个孔与接触位置处的单独手指相关联，并且每个孔小于相关联的手指与接触位置对齐，其中每个接触位置可以 通过第一玻璃晶片构件中的相关孔径进入。 第二玻璃晶片构件密封地联接到第一玻璃晶片的顶表面，并且具有与第一玻璃晶片构件的多个孔对准的多个孔，并且包含一组用于联接到接触位置的密封销。

公开(公告)号：US08656784B2

公开(公告)日：2014-02-25

申请号：US13213448

申请日：2011-08-19

申请人： Alexander Ned ,  Leo Geras ,  Joseph Van de Weert

发明人： Alexander Ned ,  Leo Geras ,  Joseph Van de Weert

IPC分类号： G01L7/08 ,  H01L29/84

CPC分类号： G01L19/0681 ,  G01L9/0044 ,  G01L9/0047 ,  G01L9/0048 ,  G01L9/0054 ,  G01L19/0076 ,  G01L19/0627 ,  Y10T29/49826

摘要： An enclosed, flat covered leadless pressure sensor assembly suitable for extreme environment operation including dynamic, ultra-high temperature heating, light and heat flash, and high-speed, flow-related environments. The pressure sensor assembly comprises a substrate comprising a micromachined sensing diaphragm defined on a first side. A cover is attached to the first side of the substrate such that it covers at least the sensing diaphragm. The top surface of the cover is substantially flat, thereby promoting uniformity in the distribution of stress and thermal effects across a top surface of the cover.

摘要翻译： 封闭式平面封装的无铅压力传感器组件，适用于极端环境操作，包括动态，超高温加热，光和闪光，以及高速，流量相关的环境。 压力传感器组件包括基板，该基板包括限定在第一侧上的微加工感测膜。 覆盖物附接到基板的第一侧，使得其至少覆盖感测膜片。 盖的顶表面基本上是平坦的，从而促进横跨顶盖表面的应力分布和热效应的均匀性。

公开(公告)号：US07874216B2

公开(公告)日：2011-01-25

申请号：US12288363

申请日：2008-10-20

申请人： Anthony D. Kurtz ,  Alexander Ned ,  Scott Goodman

发明人： Anthony D. Kurtz ,  Alexander Ned ,  Scott Goodman

IPC分类号： G01L13/02

CPC分类号： G01L19/0084 ,  Y10T29/41

摘要： There is disclosed a method and apparatus for mounting a leadless semiconductor chip on a header. The semiconductor chip has contacts on a surface and the chip is of a specified geometric shape. The header has a contact surface for receiving the chip with the contact surface of the header containing header contact pins, which pins have to contact the contacts on the semiconductor chip. The header has a guide pin extending from the contact surface and there is a guide plate which has an aperture adapted to be placed over the guide pin, the guide plate further has a chip accommodating aperture of the same geometric shape as the chip. The guide plate, when placed over the guide pin enables the chip to be placed in the chip accommodating aperture so that the contacts of the header pin are properly and accurately aligned with respect to the contacts on the semiconductor chip.

摘要翻译： 公开了一种将无引线半导体芯片安装在集管上的方法和装置。 半导体芯片在表面上具有触点，并且芯片具有指定的几何形状。 集管具有用于接收芯片的接触表面，其中插头的接触表面包含插座接头引脚，该引脚必须与半导体芯片上的触点接触。 集管具有从接触表面延伸的引导销，并且存在具有适于放置在引导销上方的孔的引导板，引导板还具有与芯片相同的几何形状的芯片容纳孔。 引导板当放置在引导销上时，可以将芯片放置在芯片容纳孔中，使得插头引脚的触点相对于半导体芯片上的触点正确且精确地对准。

公开(公告)号：US06326682B1

公开(公告)日：2001-12-04

申请号：US09217877

申请日：1998-12-21

申请人： Anthony D. Kurtz ,  Alexander Ned

发明人： Anthony D. Kurtz ,  Alexander Ned

IPC分类号： H01L2302

CPC分类号： B81B7/0077 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81C1/00269 ,  B81C2203/0181

摘要： A reduced size, hermetically sealed semiconductor transducer and methods for fabricating the same. In a preferred embodiment, the transducer comprises a transducer wafer including a diaphragm which deflects upon the application of a force thereto. At least one semiconductor transducer element and one electrical contact are disposed on a top surface of the transducer wafer, with the electrical contact coupled to the semiconductor element and extending to a peripheral portion of the wafer. A cover member is provided that is dimensioned to surround the semiconductor element. A peripheral glass frit bond is formed between the cover member and the transducer wafer, and between the cover member and at least a portion of the electrical contact. An aperture is formed in a top portion of the cover member, positioned above a region bounded by the peripheral glass bond. This aperture functions to prevent air gap formation in the peripheral glass frit bond. A sealing member hermetically seals the aperture, whereby a vacuum is maintained between the transducer element and the cover member, the transducer element thereby being hermetically sealed from the external environment, while at least a portion of the electrical contact remains exposed to enable subsequent wire bonding thereto.

摘要翻译： 尺寸减小，密封的半导体换能器及其制造方法。 在优选实施例中，换能器包括换能器晶片，其包括在施加力时偏转的隔膜。 至少一个半导体换能器元件和一个电触点设置在换能器晶片的顶表面上，其中电触点耦合到半导体元件并延伸到晶片的周边部分。 设置有围绕半导体元件的盖构件。 在盖构件和换能器晶片之间以及在盖构件和至少一部分电接触件之间形成周边玻璃料接合。 在盖构件的顶部形成有孔，位于由周边玻璃接合界定的区域的上方。 该孔用于防止外围玻璃料接合中的气隙形成。 密封构件气密地密封孔，由此在换能器元件和盖构件之间保持真空，因此换能器元件与外部环境气密密封，同时电触点的至少一部分保持暴露以使得能够接下来的引线键合 到此。