公开(公告)号：US20170213758A1

公开(公告)日：2017-07-27

申请号：US15399809

申请日：2017-01-06

Applicant: Applied Materials, Inc.

Inventor： Michael R. RICE ,  Yogananda SARODE VISHWANATH ,  Sunil SRINIVASAN ,  Rajinder DHINDSA ,  Steven E. BABAYAN ,  Olivier LUERE ,  Denis M. KOOSAU ,  Imad YOUSIF

IPC: H01L21/687 ,  H01J37/32 ,  H01L21/683

CPC classification number: H01L21/68735 ,  H01J37/32082 ,  H01J37/32091 ,  H01J37/32715 ,  H01J2237/334 ,  H01L21/67017 ,  H01L21/6719 ,  H01L21/6831 ,  H01L21/68742

Abstract: Apparatuses including a height-adjustable edge ring, and methods for use thereof are described herein. In one example, a substrate support assembly includes a height-adjustable edge ring, and the substrate support assembly is located within a process chamber. The substrate support assembly includes an electrostatic chuck, an edge ring positioned on a portion of the electrostatic chuck, and one or more actuators to adjust the height of the edge ring via one or more push pins. The height-adjustable edge ring can be used to compensate for erosion of the edge ring over time. In addition, the height-adjustable edge ring can be removed from the process chamber via a slit valve opening without venting and opening the process chamber. The height-adjustable edge ring can be tilted by the one or more actuators in order to improve azimuthal uniformity at the edge of the substrate.

公开(公告)号：US20170133244A1

公开(公告)日：2017-05-11

申请号：US15335059

申请日：2016-10-26

Applicant: Applied Materials, Inc.

Inventor： Vladimir KNYAZIK ,  Shahid RAUF ,  Stephen PROUTY ,  Roland SMITH ,  Denis M. KOOSAU

IPC: H01L21/67 ,  F28F13/06 ,  H01L21/683 ,  F28F3/12

CPC classification number: H01L21/67103 ,  F28D1/0473 ,  F28D7/04 ,  F28F3/12 ,  H01L21/67109

Abstract: Implementations described herein provide a cooling base and a substrate support assembly having the same. In one example, a cooling base is provided that includes a body coupled to a cap. A plurality cooling channels are disposed in the body and bounded on at least one side by the cap. The plurality cooling channels have a polar array of spirals.